Storage tank for electronic bulk gas storage

Abstract

The utility model discloses a storage tank for electronic bulk gas storage, which relates to the technical field of gas storage tanks and comprises a storage tank body, a valve body and a sealing ring, a protective water cover is mounted on the outer side of the storage tank body, the valve body is mounted on the outer wall of one end of a liquid outlet pipe, and a valve plate is mounted on the outer wall of a valve rod on the inner side of the liquid outlet pipe. A sealing ring is mounted on the outer wall of a valve rod, a sealing air bag is mounted on the inner wall of a liquid outlet pipe on the outer side of a valve plate, a mounting block is mounted on the inner side of the upper portion of the liquid outlet pipe, a first driving motor is mounted in the lower portion of the storage tank body, and second stirring blades are evenly mounted on the outer wall of the lower portion of a rotating rod. The air pump is used for working, air enters the sealing air bag through the connecting pipe, the sealing performance is better by increasing the expansion degree of the sealing air bag, meanwhile, the elastic sealing plug enters the liquid outlet pipe for sealing, and meanwhile, the mounting block enters the liquid outlet pipe for fixed mounting through thread fit, so that the sealing performance is improved, and the problem of poor sealing performance is solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to gas storage tank technical field, concretely is a kind of electronic bulk gas storage is stored in tank. BACKGROUND

[0002] In the semiconductor manufacturing process, electronic bulk gas plays a key role, for example, nitrogen, hydrogen and argon are often used for protective atmosphere, to prevent semiconductor materials from being oxidized or contaminated in the processing process, liquid bulk gas refers to the gas that is used in large quantities in the industrial field and stored and transported in liquid form, such as oxygen, nitrogen, argon and the like, which is compressed, cooled and liquefied, and stored in a specially designed container, some existing storage tanks have poor sealing performance, resulting in leakage, and crystallization and precipitation are prone to occur in the storage tank, in the process of bulk liquid gas storage in the electronic industry, crystallization and precipitation are key problems affecting gas purity, equipment safety and process stability, in view of this, in view of the above problems, in-depth research is conducted, and the case is generated. SUMMARY

[0003] The utility model aims at providing a kind of electronic bulk gas storage is stored in tank to solve the problem that the existing electronic bulk gas storage is stored in tank does not have good sealing performance, anti-crystallization and precipitation in the above background art.

[0004] To achieve the above object, the utility model provides the following technical scheme: a kind of electronic bulk gas storage is stored in tank, including storage tank body, valve body and sealing ring, the outside of the storage tank body is installed with protective water shield, and the outer wall of the side of protective water shield is installed with control panel, the side of the top of the storage tank body is connected with liquid outlet pipe, the outer wall of the one end of liquid outlet pipe is installed with valve body, the inner wall of liquid outlet pipe is installed with valve rod, the outer wall of the valve rod of liquid outlet pipe inner side is installed with valve plate, one end of the valve rod extends to the inner side of valve body, the outer wall of the valve rod is installed with sealing ring, the inner wall of the valve plate outer side liquid outlet pipe is installed with sealing air bag, the inner side of the upper of liquid outlet pipe is installed with mounting block, and the top of mounting block is connected with mounting cover, the inside below the storage tank body is installed with first driving motor, and the output end of first driving motor is connected with rotating rod through drive shaft, the outer wall of the lower of rotating rod is evenly installed with second stirring blade.

[0005] Preferably, the outer wall of the valve body is installed with an air pump, and the output end of the air pump is connected with a connecting pipe, one end of the connecting pipe is fixedly connected with the sealing air bag.

[0006] Preferably, the inner wall of the valve body is installed with a servo motor, and the output end of the servo motor is connected with a second bevel gear through a drive shaft, the outer wall above the valve rod is installed with a first bevel gear, and the first bevel gear and the second bevel gear form a meshing transmission structure.

[0007] Preferably, the outer wall of the mounting block is provided with external threads, the inner wall above the liquid outlet pipe is provided with internal threads, and the mounting block and the liquid outlet pipe are connected through a threaded connection structure.

[0008] Preferably, the bottom end of the mounting block is movably connected with a connecting rod through a bearing, and the bottom end of the connecting rod is connected with an elastic sealing plug.

[0009] Preferably, the outer walls on both sides of the rotating rod are connected with mounting racks, and the outer walls of the mounting racks are connected with scrapers.

[0010] Preferably, the inner sides of the second stirring blades are connected with second driving motors, and the output ends of the second driving motors are connected with rotating rods through driving shafts.

[0011] Compared with the prior art, the utility model has the advantages that:

[0012] (1) The utility model provides a gas pump, a sealed air bag and a mounting block, utilizes the gas pump to work, gas enters the sealed air bag through the connecting pipe, the expansion degree of the sealed air bag is increased, the sealing performance is better, the elastic sealing plug is simultaneously sealed in the liquid outlet pipe, the mounting block is fixedly installed in the liquid outlet pipe through the threaded cooperation, the sealing performance is improved, and the problem of poor sealing performance is solved.

[0013] (2) The utility model provides a first driving motor, a mounting rack and a rotating rod, utilizes the first driving motor to work and makes the rotating rod rotate, drives the mounting rack to rotate through the rotating rod, drives the scraper to move through the mounting rack, scrapes the crystallization in the inner wall of the storage tank body, drives the multiple second stirring blades below to rotate through the rotating rod, stirs the sediment below, drives the first stirring blade to rotate and stir through the rotating rod driven by the second driving motor, the stirring below is more efficient, the crystallization and sediment in the tank are solved. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is a sectional view structure schematic view of the utility model storage tank body.

[0015] Figure 2 It is a valve body sectional view structure schematic view of the utility model.

[0016] Figure 3 It is a mounting block structure schematic view of the utility model.

[0017] Figure 4 It is a second stirring blade overhead structure schematic view of the utility model.

[0018] Figure 5 It is a second stirring blade sectional view structure schematic view of the utility model.

[0019] Fig. 1, the first stirring blade; 2, the second stirring blade; 3, the rotating rod; 4, the storage tank body; 5, the valve plate; 6, the valve rod; 7, the liquid outlet pipe; 8, the protective water cover; 9, the mounting frame; 10, the control panel; 11, the scraper; 12, the first drive motor; 13, the sealing air bag; 14, the connecting pipe; 15, the air pump; 16, the valve body; 17, the first bevel gear; 18, the second bevel gear; 19, the servo motor; 20, the sealing ring; 21, the mounting cover; 22, the mounting block; 23, the connecting rod; 24, the elastic sealing plug; 25, the second drive motor; 26, the rotating rod. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0021] Embodiment 1: please refer to Figures 1-5 A kind of electronic bulk gas storage storage tank, including storage tank body 4, valve body 16 and sealing ring 20, the outer side of storage tank body 4 is equipped with protective water cover 8, and the outer wall of one side of protective water cover 8 is equipped with control panel 10, the top of one side of storage tank body 4 is connected with liquid outlet pipe 7, the outer wall of one end of liquid outlet pipe 7 is equipped with valve body 16, the inner wall of liquid outlet pipe 7 is equipped with valve rod 6, the outer wall of valve rod 6 in the inner side of liquid outlet pipe 7 is equipped with valve plate 5, one end of valve rod 6 extends to the inner side of valve body 16, the outer wall of valve rod 6 is equipped with sealing ring 20, the inner wall of liquid outlet pipe 7 outside valve plate 5 is equipped with sealing air bag 13, the inner side of the upper of liquid outlet pipe 7 is equipped with mounting block 22, and the top of mounting block 22 is connected with mounting cover 21, the inside below storage tank body 4 is equipped with first drive motor 12, and the output end of first drive motor 12 is connected with rotating rod 3 by drive shaft, the outer wall below rotating rod 3 is evenly equipped with second stirring blade 2;

[0022] The outer wall of valve body 16 is equipped with air pump 15, and the output end of air pump 15 is connected with connecting pipe 14, one end of connecting pipe 14 is fixedly connected with sealing air bag 13;

[0023] The inner wall of valve body 16 is equipped with servo motor 19, and the output end of servo motor 19 is connected with second bevel gear 18 by drive shaft, the outer wall above valve rod 6 is equipped with first bevel gear 17, and meshing transmission structure is formed between first bevel gear 17 and second bevel gear 18;

[0024] The outer wall of the mounting block 22 is provided with external threads, and the inner wall above the liquid outlet pipe 7 is provided with internal threads, and the mounting block 22 and the liquid outlet pipe 7 form a threaded connection structure;

[0025] The bottom end of the mounting block 22 is movably connected with a connecting rod 23 through a bearing, and the bottom end of the connecting rod 23 is connected with an elastic sealing plug 24;

[0026] Specifically, as shown in Figure 1 , Figure 2 and Figure 3 , when using this structure, the gas pump 15 is operated, the gas enters the sealing air bag 13 through the connecting pipe 14, the expansion degree of the sealing air bag 13 is increased, the sealing performance is better, at the same time, the elastic sealing plug 24 enters the liquid outlet pipe 7 to seal, and the mounting block 22 is fixedly installed in the liquid outlet pipe 7 through threaded cooperation, and the sealing performance is improved.

[0027] In the embodiment 2, the outer walls on both sides below the rotating rod 3 are connected with mounting racks 9, and the outer walls of the mounting racks 9 are connected with scrapers 11, and the front view of the mounting rack 9 and the scraper 11 is in the shape of “L”;

[0028] The inner sides of the second stirring blades 2 are each provided with a second driving motor 25, the output ends of the second driving motors 25 are each connected with a rotating rod 26 through a driving shaft, and the outer walls on both sides of the rotating rod 26 are each connected with a first stirring blade 1;

[0029] Specifically, as shown in Figure 1 , Figure 4 and Figure 5 , when using this structure, the first driving motor 12 is operated to rotate the rotating rod 3, the mounting rack 9 is rotated by the rotating rod 3, the scraper 11 is moved by the mounting rack 9 to scrape off the crystalline substances on the inner wall of the storage tank body 4, at the same time, the lower multiple second stirring blades 2 are rotated by the rotating rod 3, the lower sediment is stirred, the first stirring blade 1 is rotated and stirred by the rotating rod 26 driven by the second driving motor 25, and the lower stirring is more efficient.

[0030] Working principle: when using the device, the storage tank body 4 is protected and heat-insulated by the protective water cover 8, and the liquid bulk gas is stored by the storage tank body 4;

[0031] First innovation implementation steps:

[0032] First step: the first driving motor 12 is operated to rotate the rotating rod 3, the mounting rack 9 is rotated by the rotating rod 3, and the scraper 11 is moved by the mounting rack 9 to scrape off the crystalline substances on the inner wall of the storage tank body 4;

[0033] Second step: at the same time, the lower plurality of second stirring blades 2 are driven to rotate by rotating the rod 3, the lower sediment is stirred, and the first stirring blade 1 is driven to rotate by the second driving motor 25 and the rotating rod 26, so that the lower stirring is more efficient.

[0034] Second innovative point implementation steps:

[0035] First step: the air pump 15 works, the gas enters the sealed air bag 13 through the connecting pipe 14, the inflation degree of the sealed air bag 13 is increased, and the sealing performance is better;

[0036] Second step: at the same time, the elastic sealing plug 24 enters the liquid outlet pipe 7 to seal, and the mounting block 22 is fixedly installed in the liquid outlet pipe 7 through threaded cooperation, so that the sealing performance is improved and leakage is prevented.

[0037] It should be noted that, in this text, relational terms such as first and second are used merely to distinguish one entity or action from another, without necessarily requiring or implying any such actual relationship or order between such entities or actions. Moreover, the terms "comprising", "including" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or equipment including a series of elements includes not only those elements, but also other elements not explicitly listed, or inherent to such a process, method, article or equipment.

[0038] Although the embodiments of the utility model have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to the embodiments without departing from the principles and spirits of the utility model, and the scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A storage tank for electronic bulk gas storage comprising a tank body (4), a valve body (16) and a seal ring (20), characterized in that: The outer side of the storage tank body (4) is provided with a protective water cover (8), and the outer wall of one side of the protective water cover (8) is provided with a control panel (10); one side of the top end of the storage tank body (4) is connected with a liquid outlet pipe (7); the outer wall of one end of the liquid outlet pipe (7) is provided with a valve body (16); the inner wall of the liquid outlet pipe (7) is provided with a valve rod (6); the outer wall of the valve rod (6) on the inner side of the liquid outlet pipe (7) is provided with a valve plate (5); one end of the valve rod (6) extends to the inner side of the valve body (16); the outer wall of the valve rod (6) is provided with a sealing ring (20); the inner wall of the liquid outlet pipe (7) on the outer side of the valve plate (5) is provided with a sealing air bag (13); the inner side of the liquid outlet pipe (7) above is provided with a mounting block (22), and the top end of the mounting block (22) is connected with a mounting cover (21); the inner side of the storage tank body (4) below is provided with a first driving motor (12), and the output end of the first driving motor (12) is connected with a rotating rod (3) through a driving shaft; the outer wall of the rotating rod (3) below is uniformly provided with a second stirring blade (2).

2. The electronic bulk gas storage tank according to claim 1, characterized by: The outer wall of the valve body (16) is provided with an air pump (15), and the output end of the air pump (15) is connected with a connecting pipe (14); one end of the connecting pipe (14) is fixedly connected with the sealing air bag (13).

3. The electronic bulk gas storage tank of claim 1, wherein: The inner wall of the valve body (16) is provided with a servo motor (19), and the output end of the servo motor (19) is connected with a second bevel gear (18) through a driving shaft; the outer wall of the valve rod (6) above is provided with a first bevel gear (17), and the first bevel gear (17) and the second bevel gear (18) form a meshing transmission structure.

4. The electronic bulk gas storage tank of claim 1, wherein: The outer wall of the mounting block (22) is provided with external threads, and the inner wall of the liquid outlet pipe (7) above is provided with internal threads; the mounting block (22) and the liquid outlet pipe (7) form a threaded connection structure.

5. The electronic bulk gas storage tank of claim 1, wherein: The bottom end of the mounting block (22) is movably connected with a connecting rod (23) through a bearing, and the bottom end of the connecting rod (23) is connected with an elastic sealing plug (24).

6. The electronic bulk gas storage tank of claim 1, wherein: The outer walls of the two sides of the rotating rod (3) below are connected with mounting racks (9), and the outer walls of the mounting racks (9) are connected with scrapers (11); the front view of the mounting rack (9) and the scraper (11) is "L"-shaped.

7. The electronic bulk gas storage tank of claim 1, wherein: The inner side of the second stirring blade (2) is provided with a second driving motor (25), and the output end of the second driving motor (25) is connected with a rotating rod (26) through a driving shaft; the outer walls of the two sides of the rotating rod (26) are connected with first stirring blades (1).

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