Surface profile detection system
By using a surface contour detection system that arranges the detection and reflected light paths in reverse coaxial direction, the problem of blind spots in optical non-contact measurement is solved, achieving more efficient and accurate object surface contour detection.
Patent Information
- Application Number
- CN202520744105.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-18
- Publication Date
- 2026-02-27
- Estimated Expiration
- 2035-04-18
AI Technical Summary
Existing optical non-contact measurement methods create blind spots at sharp protrusions or large holes and deep depressions on the object's surface, affecting the detection of the object's surface contour.
Broadband incident light is used, and the transmission paths of the detection light and the reflected light are arranged in reverse coaxially through the beam splitting module and the adjustment module. The reflected light is dispersed and focused by the spectral analysis module to obtain the surface contour image information of the object and reduce the blind spot.
It improves the efficiency and accuracy of object surface contour detection, reduces the impact of occlusion blind spots, and enhances detection precision.
Smart Images
Figure CN223954878U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the field of optical non-contact detection technology, and particularly relates to a surface profile detection system. BACKGROUND
[0002] When detecting the surface profile of an object, the contact measurement method often causes slight damage to the surface of the measured object, and the optical non-contact measurement method can avoid causing damage to the surface of the measured object in the measurement process because it does not need to be in contact with the surface of the measured object.
[0003] In the existing optical non-contact measurement method, an emission lens focuses incident light onto a measured object, the incident light is reflected by the measured object to form reflected light, the reflected light is received by a receiving lens, and the wavelength of the light with the highest intensity in the received reflected light is used to measure the position or height of the surface of the object. Because the incident light and the reflected light have a non-zero included angle, when the surface of the object has a sharp protrusion or a deep concave with a large ratio, a blind area is formed on the surface of the object, which affects the detection of the surface profile of the measured object. CONTENT OF THE UTILITY MODEL
[0004] The present application provides a surface profile detection system to solve the technical problem that the blind area on the surface of an object affects the detection of the surface profile of the object.
[0005] According to an aspect of the present application, a surface profile detection system is provided in an embodiment, comprising:
[0006] An illumination module for generating incident light with a wide spectrum;
[0007] A light splitting module arranged on the transmission path of the incident light for guiding the incident light to a measured object;
[0008] A first adjusting module located on the side of the light splitting module away from the illumination module on the transmission path of the incident light, the first adjusting module being configured to disperse the incident light to form detection light with different wavelengths and focus the detection light to different height positions of the measured object; the first adjusting module is also configured to receive reflected light formed by the detection light reflected by the measured object and focus the reflected light to form first signal light guided to the light splitting module; the transmission path of the detection light is coaxial with the transmission path of the reflected light in reverse direction;
[0009] A spectrum analysis module located on the side of the light splitting module away from the first adjusting module on the transmission path of the first signal light, the spectrum analysis module comprising a second adjusting module and a receiver, the second adjusting module being configured to disperse and focus the first signal light emitted by the light splitting module to form second signal light with different wavelengths, and the receiver being configured to collect the second signal light and obtain image information reflecting the surface profile of the measured object.
[0010] In an alternative embodiment, the illumination module comprises a linear wide spectrum emitter and a first slit diaphragm, the linear wide spectrum emitter comprises a light source for generating a wide spectrum of illumination light, the first slit diaphragm is for integrating the illumination light into a linear incident light.
[0011] In an alternative embodiment, the first slit diaphragm has a width of 1 μm to 1 mm.
[0012] In an alternative embodiment, the illumination module comprises a homogenization device, the homogenization device is located between the light source and the first slit diaphragm in the transmission path of the illumination light.
[0013] In an alternative embodiment, the included angle between the splitting surface of the splitting module and the transmission direction of the incident light is 45°, the splitting module is for reflecting the incident light to the first adjustment module, and the splitting module is also for the first signal light to pass through.
[0014] In an alternative embodiment, the first adjustment module comprises at least one of a transmissive diffraction grating, a reflective diffraction grating, a spherical mirror, an aspherical mirror and a Fresnel lens.
[0015] In an alternative embodiment, the spectral analysis module further comprises a second slit diaphragm, the second slit diaphragm is located between the second adjustment module and the splitting module in the transmission path of the first signal light, and the second slit diaphragm is for filtering out the focused first signal light.
[0016] In an alternative embodiment, the second slit diaphragm has a width of 1 μm to 1 mm.
[0017] In an alternative embodiment, the second adjustment module comprises a first optical element, a dispersion component and a second optical element, the dispersion component is located between the first optical element and the second optical element in the transmission path of the first signal light, the first optical element is for integrating the first signal light into parallel light, the dispersion component is for dispersing the parallel light into the second signal light of different wavelengths, and the second optical element is for focusing the second signal light to the receiver; or,
[0018] The second adjustment module comprises a curved grating, the curved grating is for dispersing the first signal light into the second signal light of different wavelengths and focusing to the receiver.
[0019] In an alternative embodiment, the first optical element, the dispersion component and the second optical element are coaxial.
[0020] According to the surface profile detection system of the above embodiment, the illumination module generates incident light of a wide spectrum, after passing through the light splitting module, the first adjusting module disperses the incident light to form detection light of different wavelengths, the detection light of different wavelengths is focused by the first adjusting module to different height positions of the measured object, and after being reflected by the measured object, the reflected light is formed, the reflected light is focused by the first adjusting module to form first signal light, the first signal light passes through the light splitting module and is received by the spectral analysis module, the second adjusting module in the spectral analysis module disperses and focuses the first signal light to form second signal light of different wavelengths, and the receiver in the spectral analysis module collects the second signal light and obtains image information reflecting the surface profile of the measured object; by setting the transmission path of the detection light and the transmission path of the reflected light to be coaxial in reverse direction, the shielding of the detection light or the reflected light by the sharp protrusions or recesses on the surface of the measured object is reduced or even avoided, the probability of forming a shielding blind area on the surface of the measured object is reduced, and the detection efficiency and detection accuracy of the surface profile of the measured object are improved. BRIEF DESCRIPTION OF DRAWINGS
[0021] Figure 1 It is a structural schematic diagram of an embodiment of a surface profile detection system.
[0022] Figure 2 It is a structural schematic diagram of another embodiment of a surface profile detection system.
[0023] Figure 3 It is a structural schematic diagram of an embodiment of an illumination module.
[0024] Figure 4 It is a structural schematic diagram of an embodiment of a spectral analysis module.
[0025] Figure 5 It is the image information of the second signal light of different wavelengths received by one row or one column of the area array receiver in an embodiment.
[0026] Figure 6 It is a flow chart of a detection method of the surface profile detection system for the height of the surface profile of the measured object.
[0027] Figure 7 It is a flow chart of a detection method of the surface profile detection system for the thickness of the profile of the light-transmitting measured object.
[0028] Figure 8 It is a flow chart of a detection method of the surface profile detection system for the thickness of the profile of the non-light-transmitting measured object.
[0029] Figure 9 It is a flow chart of a detection method of the surface profile detection system for the thickness of the profile of the measured object with different light-transmitting media.
[0030] In the figure: 100, illumination module; 101, wide spectrum emitter; 111, light source; 112, homogenizing device; 102, first slit diaphragm; 201, light splitting module; 301, first adjusting module; 310, measured object; 400, spectral analysis module; 401, second slit diaphragm; 402, first optical element; 403, dispersive component; 404, second optical element; 405, area array receiver; 500, signal processing module.
[0031] Explanation of bracketed reference numerals in the drawings: In the bracketed reference numerals in the drawings, the feature referred to by the reference numeral in the bracket is both the feature represented by the numeral in the bracket and the feature represented by the numeral outside the bracket. DETAILED DESCRIPTION
[0032] The application will be further described below in conjunction with the drawings by specific embodiments. In different embodiments, similar elements are associated with similar element reference numbers. In the following embodiments, many details are described in order to make the application better understood. However, those skilled in the art can easily recognize that some features can be omitted in different cases, or can be replaced by other elements, materials, methods. In some cases, some operations related to the application are not shown or described in the specification, in order to avoid the core part of the application being overwhelmed by too much description, and it is not necessary to describe these related operations in detail for those skilled in the art according to the description in the specification and general technical knowledge in the art.
[0033] In addition, the features, operations or characteristics described in the specification can be combined in any appropriate manner to form various embodiments, and the operation steps involved in each embodiment can also be sequentially adjusted or adjusted in a manner that is obvious to those skilled in the art. Therefore, the specification and drawings are only for the purpose of clearly describing one embodiment, and do not mean that the composition and / or order is necessary.
[0034] In this paper, the serial numbers of components, such as "first", "second", etc., are only used to distinguish the described objects, and do not have any order or technical meaning. Unless otherwise specified, "connection" and "coupling" in this application include direct and indirect connections (couplings).
[0035] The surface profile detection system of the embodiment of the application, please refer to Figures 1 to 4, including the illumination module 100, the light splitting module 201, the first adjustment module 301 and the spectrum analysis module 400, wherein the illumination module 100 is configured to generate incident light with a wide spectrum, the light splitting module 201 is arranged on the transmission path of the incident light and configured to guide the incident light towards the measured object 310; the first adjustment module 301 is arranged on the transmission path of the incident light and located on the side of the light splitting module 201 away from the illumination module 100, the first adjustment module 301 is configured to disperse the incident light to form detection light with different wavelengths and focus the detection light with different wavelengths to different height positions of the measured object 310, and the first adjustment module 301 is further configured to receive reflected light with different wavelengths formed by the detection light with different wavelengths reflected by the measured object 310 and focus the reflected light with different wavelengths to form first signal light and guide the first signal light to the light splitting module 201.
[0036] The spectrum analysis module 400 is arranged on the transmission path of the first signal light and located on the side of the light splitting module 201 away from the first adjustment module 301, the spectrum analysis module 400 includes a second adjustment module and a receiver, the second adjustment module is configured to disperse and focus the first signal light out of the light splitting module 201 to form second signal light with different wavelengths, and the receiver is configured to collect the second signal light and obtain image information reflecting the surface profile of the measured object 310.
[0037] The transmission path of the detection light and the transmission path of the reflected light are coaxial in opposite directions, which means that the detection light with different wavelengths is incident on the measured object 310 in the normal direction of the upper surface of the measured object 310, i.e. in the normal direction of the surface of the measured object 310 facing the first adjustment module 301, or it can be understood that the detection light is incident on the measured object 310 in a vertical attitude with respect to the upper surface of the measured object 310, so that the incident angle of the detection light is zero, the reflected light reflected by the measured object 310 is perpendicular to the upper surface of the measured object 310, and the reflection angle of the reflected light is also zero. The optical axis of the detection light and the optical axis of the reflected light are coaxially arranged, which can reduce or even avoid the shielding of the detection light or the reflected light by the sharp protrusions or recesses on the surface of the measured object 310, reduce the probability of forming shielding blind area on the surface of the measured object 310, and help to improve the detection efficiency and accuracy of the surface profile of the measured object 310.
[0038] Please continue to refer to Figures 1 to 4 For the illumination module 100, the illumination module 100 includes a linear wide spectrum emitter 101 and a first slit diaphragm 102, the linear wide spectrum emitter 101 includes a light source 111, the light source 111 is configured to generate illumination light with a wide spectrum, and the light source 111 can include any one or a combination of more than one of a light-emitting diode, a laser, an incandescent lamp, a gas discharge lamp, a halogen lamp, a fiber optic light source and other objects for generating light. The first slit diaphragm 102 is arranged on the transmission path of the illumination light between the light source 111 and the light splitting module 201, and the first slit diaphragm 102 is configured to integrate the illumination light to form linear incident light.
[0039] In an embodiment, the width of the first slit diaphragm 102 can be 1 μm to 1 mm, such as 1 mm, or 1 μm when the machining precision is high, and of course can be 0.5 mm, etc. When the accuracy and precision of the detection result is not high, the width of the first slit diaphragm 102 can be greater than 1 mm, such as 1.5 mm.
[0040] In some embodiments, referring to Figure 3 The wide spectrum emitter 101 in the illumination module 100 can further include a light homogenizing device 112, which is located between the light source 111 and the first slit diaphragm 102 in the transmission path of the illumination light. The light homogenizing device 112 is configured to receive the illumination light generated by the light source 111 and make it form relatively uniform or gently varying light to achieve the light homogenizing effect. The light homogenizing device 112 includes frosted glass, translucent glass, or transparent glass, etc.
[0041] In other embodiments, when the illumination light generated by the light source 111 is gently varying and is a linear light source, the illumination light can directly form the incident light, and the light homogenizing device 112 and the first slit diaphragm 102 can not be provided in the illumination module 100.
[0042] In some embodiments, referring to Figure 1 and Figure 2 The light splitting module 201 can include a half-mirror, a glass coated with a reflective film, a flat glass, or other components with light splitting functions. The angle between the light splitting surface of the light splitting module 201 and the transmission direction of the incident light is 45°, so as to satisfy the perpendicular arrangement of the arrangement direction of the illumination module 100 and the light splitting module 201 and the arrangement direction of the light splitting module 201 and the spectral analysis module 400, and facilitate the arrangement of the light splitting module 201, the illumination module 100, the first adjusting module 301, and the spectral analysis module 400.
[0043] In some embodiments, referring to Figure 1 The light splitting module 201 is configured to reflect the incident light to the first adjusting module 301, and is further configured to make the first signal light pass through in a straight line direction. In this way, the first adjusting module 301, the light splitting module 201, and the spectral analysis module 400 are arranged on the same straight line, and the illumination module 100 is located on one side of the straight line, and the line connecting the illumination module 100 and the light splitting module 201 is perpendicular to the straight line on which the first adjusting module 301, the light splitting module 201, and the spectral analysis module 400 are located. This helps to satisfy the coaxial transmission of the reflected light reflected by the measured object 310, the first signal light, and the second signal light, and helps to reduce the influence on the surface profile position detection precision due to the different transmission directions or different optical axes of the first signal light, the second signal light, and the reflected light.
[0044] In some embodiments, referring toFigure 2 The light splitting module 201 is configured to allow the incident light to pass through in a straight line and to reflect the first signal light. Thus, the first adjusting module 301, the light splitting module 201 and the illumination module 100 are arranged in a straight line, and the spectral analysis module 400 is located on one side of the straight line.
[0045] Of course, in other embodiments, the included angle between the light splitting surface of the light splitting module 201 and the transmission direction of the incident light can be greater than or less than 45°, as long as the first signal light or the incident light can pass through the light splitting module 201 in a straight line.
[0046] In some embodiments, please continue to refer to Figure 1 and Figure 2 For the first adjusting module 301, the first adjusting module 301 has dispersion and focusing functions, and can disperse the linear incident light passing through the light splitting module 201 into detection light with different wavelengths, and can also focus the detection light with different wavelengths to different positions in the normal direction of the upper surface of the measured object 310. Thus, it can be satisfied that the distance between the surface on which the detection light with shorter wavelength is focused and the first adjusting module 301 is closer, that is, the wavelength of the detection light focused on the upper surface of the measured object 310 closest to the first adjusting module 301 is the shortest, and the wavelength of the detection light focused on the lower surface of the measured object 310 farthest from the first adjusting module 301 is the longest.
[0047] Specifically, the first adjusting module 301 can be composed of one or more aspheric lenses, spherical lenses or Fresnel lenses. For example, the first adjusting module 301 includes one or more of a transmission diffraction grating, a reflection diffraction grating, a spherical mirror, an aspherical mirror, a Fresnel lens or other components with dispersion and focusing functions, or the first adjusting module 301 can also include a dispersion prism.
[0048] In some embodiments, please continue to refer to Figure 1 , Figure 2 and Figure 4For the spectral analysis module 400, the spectral analysis module 400 comprises a second slit diaphragm 401, which is located between the second adjustment module and the light splitting module 201 in the transmission path of the first signal light, and the second slit diaphragm 401 can be located at the focal position of the first signal light passing through the light splitting module 201. The reflected light reflected by the measured object 310 and the first signal light formed by the first adjustment module 301 have focused and unfocused, wherein the light formed by the detection light with different height positions of the focal point in the normal direction of the surface of the measured object 310 is the focused first signal light. The function of the first slit diaphragm 102 is to filter out the unfocused first signal light on the surface and inside of the measured object 310, and only the focused first signal light is allowed to pass through, so as to improve the signal-to-noise ratio of the surface profile detection.
[0049] In other embodiments with lower requirements for detection accuracy, the second slit diaphragm 401 can also not be provided.
[0050] In some embodiments, the width of the second slit diaphragm 401 can be 1 μm to 1 mm, such as 1 mm, or 1 μm when the machining precision is high, and of course can also be 0.5 mm, etc. In the case of low accuracy and precision requirements for the detection result, the width of the second slit diaphragm 401 can also be greater than 1 mm, such as 1.5 mm.
[0051] In some embodiments, please continue to refer to Figure 1 , Figure 2 and Figure 4 The second adjustment module in the spectral analysis module 400 comprises a first optical element 402, a dispersion component 403, and a second optical element 404. The dispersion component 403 is located between the first optical element 402 and the second optical element 404 in the transmission path of the first signal light. The first optical element 402 is used to integrate the first signal light into parallel light. The dispersion component 403 is used to disperse the parallel light to form second signal light of different wavelengths. The second optical element 404 is used to focus the second signal light to a receiver, so as to present image information reflecting the surface profile of the measured object 310 in the receiver.
[0052] In some embodiments, the first optical element 402 and the second optical element 404 each comprise one or more aspherical lenses, spherical lenses, or Fresnel lenses. The dispersion component 403 comprises a dispersion prism, a transmission diffraction grating, a reflection diffraction grating, or other components with dispersion function.
[0053] In some embodiments, the first optical element 402, the dispersion component 403 and the second optical element 404 can be coaxially arranged, i.e. the optical axis of the first optical element 402, the optical axis of the dispersion component 403 and the optical axis of the second optical element 404 are coaxially arranged, so as to avoid the change of the light path direction and affect the detection of the profile surface position of the measured object 310, and help to improve the detection accuracy; of course, the first optical element 402, the dispersion component 403 and the second optical element 404 can also be arranged in a non-coaxial manner in some embodiments. Figure 4
[0054] In some embodiments, the second adjusting assembly in the spectrum analysis module 400 can further include a curved grating, such as a concave grating or a spherical grating, which has a dispersion and focusing effect on the first signal light, so as to disperse the first signal light to form second signal light of different wavelengths and focus the second signal light to the receiver.
[0055] In some embodiments, for the receiver, the receiver can be a surface array receiver 405, which can cooperate with the linear light source in the illumination module 100 to realize the position detection of the entire surface profile of the measured object 310; of course, when the light source 111 in the illumination module 100 is a point light source, the receiver can also be a linear array receiver, which can cooperate with the point light source to realize the position detection of any linear profile of the measured object 310. The surface array receiver 405 can include a CCD (Charge-Coupled Device), a CMOS (Complementary Metal-Oxide-Semiconductor) device, a PSD (Position Sensitive Detector) device, an APD (Avalanche Photodiode) device or other devices for receiving optical radiation.
[0056] For the surface array receiver 405, the surface array receiver 405 can obtain image information reflecting the profile of the measured object 310 after collecting the second signal light, please refer to Figure 5 The image information includes wavelength-signal intensity distribution curves corresponding to different wavelengths of light received on a row or a column of the area array receiver 405, where the abscissa represents wavelength λ and the ordinate represents signal intensity I of the corresponding light. When detecting the surface profile of the measured object 310, due to reflection of light on the surface and inside the measured object 310, different wavelengths of light reflected from different focal point positions on the surface and inside the measured object 310 form different wavelength signals on the area array receiver 405, which include internal stray light of the system and background noise b caused by noise in the area array receiver 405; a threshold TH higher than the background noise signal b can be set, and each independent signal on each row or each column of the area array receiver 405 higher than the threshold is identified as a wavelength signal, and each wavelength signal includes a small range of continuous wavelengths; since air has little reflection on light, the wavelength of light reflected from the surface focal point position of the measured object 310 is shorter than the wavelength of light reflected from the focal point position inside the measured object 310; for a transparent or semi-transparent measured object 310, the wavelength of light reflected from the surface focal point position of the measured object 310 is the shortest, and the wavelength of light reflected from the lower surface focal point position of the measured object 310 is the longest. For each row or each column of different wavelengths of light received in the area array receiver 405, the user or the signal processing module 500 described below can perform corresponding profile height and thickness detection.
[0057] In some embodiments, the user can obtain corresponding wavelength values by analyzing the corresponding image information displayed in the area array receiver 405, and obtain the height positions of different surface profiles on the measured object 310 by looking up a table.
[0058] In some embodiments, the surface profile detection system further includes a signal processing module 500, which is electrically connected to the spectral analysis module 400, specifically to the receiver. The signal processing module 500 can set a threshold TH higher than the background noise signal b, and identify each independent signal on each row or each column of the area array receiver 405 higher than the threshold as a wavelength signal. The signal processing module 500 can perform corresponding profile height position detection according to the corresponding wavelength signal.
[0059] The signal processing module 500 can include a CPU (Central Processing Unit), an MCU (Microcontroller Unit), an FPGA (Field Programmable Gate Array), a DSP (Digital Signal Process), a GPU (Graphics Processing Unit), or other devices with data operation capability.
[0060] In some embodiments, the surface profile detection system disclosed in the present application can be used to detect the surface profile position of a specular object, a diffuse reflection object, a transparent object, a translucent object or any other object with arbitrary material or medium. The shortest wavelength light in each row or each column of the area array receiver 405 can be used to detect the height of the upper surface of the measured object 310, eliminating the influence of internal reflection light on the surface profile height measurement. Two surface profile detection systems can be used to detect the profile of the measured object 310 from the upper surface and the lower surface of the measured object 310, respectively, so as to accurately measure the profile thickness of the measured object 310. In addition, for a transparent or translucent measured object 310, a surface profile detection system can be used to measure the wavelength difference between any two medium surfaces of the measured object 310 to detect the profile of the measured object 310, so as to obtain the thickness between the two medium surfaces of the measured object 310.
[0061] Specifically, in the step of detecting the surface profile height of the measured object 310 by the surface profile detection system in any of the above embodiments, please refer to Figure 6 , which comprises:
[0062] S11, generating wide spectrum incident light by the illumination module 100;
[0063] S12, splitting the incident light by the light splitting module 201 to guide the incident light to the first adjusting module 301;
[0064] S13, dispersing and focusing the incident light by the first adjusting module 301 to focus the obtained detection light with different wavelengths to different height positions of the measured object 310;
[0065] S14, receiving the first signal light with different wavelengths obtained after the measured object 310 reflects the detection light with different wavelengths by the first adjusting module 301, and focusing the first signal light with different wavelengths to the light splitting module 201;
[0066] S15, dispersing and focusing the focused first signal light guided by the light splitting module 201 by the spectrum analysis module 400 to obtain second signal light with different wavelengths;
[0067] S16, detecting the surface profile of the measured object 310 based on the wavelength of the target light by the signal processing module 500 to obtain the surface profile height of the measured object 310.
[0068] The measured object 310 for surface profile height detection is a light-transmitting or light-blocking object. In step S16, the target light is the light with the shortest wavelength corresponding to each row or each column of the area array receiver 405 of the second signal light with different wavelengths.
[0069] In step S16, the surface profile of the measured object 310 is detected by the signal processing module 500 based on the wavelength of the target light, and the surface profile height of the measured object 310 is obtained. The formula can be used The calculation is obtained, where dx represents the surface profile height of the measured object 310, λ min represents the shortest wavelength in each row or each column of the area array receiver 405; or the surface profile height of the measured object 310 can also be determined by looking up the table. Since different wavelength values correspond to different height values, the height value corresponding to the shortest wavelength in each row or each column of the area array receiver 405 is the height of the surface profile of the measured object 310, that is, the height of the upper surface; the selection of the row or column of the area array receiver 405 depends on the specific position or attitude of the area array receiver 405 in the surface profile detection system.
[0070] The profile thickness of the light-transmitting measured object 310 can also be detected by the surface profile detection system in any of the above embodiments. For specific detection steps, please refer to Figure 7 , including:
[0071] S21, generating a wide-spectrum incident light by the illumination module 100;
[0072] S22, splitting the incident light by the light splitting module 201 to guide the incident light to the first adjusting module 301;
[0073] S23, dispersing and focusing the incident light by the first adjusting module 301 to focus the obtained detection light of different wavelengths to different height positions of the measured object 310;
[0074] S24, receiving the first signal light of different wavelengths obtained after the measured object 310 reflects the detection light of different wavelengths by the first adjusting module 301, and focusing the first signal light of different wavelengths to the light splitting module 201;
[0075] S25, dispersing and focusing the focused first signal light guided by the light splitting module 201 by the spectral analysis module 400 to obtain the second signal light of different wavelengths;
[0076] S26, detecting the profile of the measured object 310 based on the wavelength difference by the signal processing module 500 to obtain the profile thickness of the measured object 310.
[0077] In step S26, the wavelength difference is the difference between the longest wavelength and the shortest wavelength in each row or each column of the area array receiver 405 corresponding to the second signal light of different wavelengths. The above wavelength difference is the difference between the wavelengths of the light reflected by the upper surface or the lower surface of the measured object 310 in each row or each column of the area array receiver 405.
[0078] In step S26, the signal processing module 500 can calculate the wavelength difference Δλ = λ max -λ min of each row or each column of the area array receiver 405, and then determine the profile thickness corresponding to the wavelength difference through a table lookup or the like, i.e., the profile thickness of the measured object 310.
[0079] The surface profile detection system in any of the above embodiments can also be used to detect the profile thickness of an opaque measured object 310. The specific detection steps are described below with reference to Figure 8 , including:
[0080] S31, generating wide-spectrum incident light by the illumination module 100;
[0081] S32, splitting the incident light by the light splitting module 201 to guide the incident light to the first adjusting module 301;
[0082] S33, dispersing and focusing the incident light by the first adjusting module 301 to focus the obtained detection light of different wavelengths to different height positions of the measured object 310;
[0083] S34, receiving the first signal light of different wavelengths obtained after the measured object 310 reflects the detection light of different wavelengths by the first adjusting module 301, and focusing the first signal light of different wavelengths to the light splitting module 201;
[0084] S35, dispersing and focusing the focused first signal light guided by the light splitting module 201 by the spectrum analysis module 400 to obtain second signal light of different wavelengths;
[0085] S36, detecting the surface profile of the measured object 310 based on the wavelength of the target light by the signal processing module 500 to obtain the upper surface profile height and the lower surface profile height of the measured object 310, and calculating the profile thickness of the measured object 310 based on the upper surface profile height of the measured object 310 and the lower surface profile height of the measured object 310.
[0086] In the process of detecting the profile thickness of the non-light-transmitting measured object 310, two surface profile detection systems are needed to select the same reference surface and detect the height of the upper surface and the lower surface of the measured object 310 respectively. In step S36, the target light includes the light of the shortest wavelength corresponding to the second signal light of different wavelengths reflected by the upper surface of the measured object 310 in each row or each column of the area array receiver 405, and the light of the shortest wavelength corresponding to the second signal light of different wavelengths reflected by the lower surface of the measured object 310 in each row or each column of the area array receiver 405; based on the upper surface profile height and the lower surface profile height, the profile thickness of the measured object 310 can be calculated.
[0087] In the process of detecting the profile thickness of the non-light-transmitting measured object 310, two surface profile detection systems are needed to select the same reference surface and detect the height of the upper surface and the lower surface of the measured object 310 respectively. In step S36, the target light includes the light of the shortest wavelength corresponding to the second signal light of different wavelengths reflected by the upper surface of the measured object 310 in each row or each column of the area array receiver 405, and the light of the shortest wavelength corresponding to the second signal light of different wavelengths reflected by the lower surface of the measured object 310 in each row or each column of the area array receiver 405; based on the upper surface profile height and the lower surface profile height, the profile thickness of the measured object 310 can be calculated.
[0088] In the process of detecting the profile thickness of the non-light-transmitting measured object 310, two surface profile detection systems are needed to select the same reference surface and detect the height of the upper surface and the lower surface of the measured object 310 respectively. In step S36, the target light includes the light of the shortest wavelength corresponding to the second signal light of different wavelengths reflected by the upper surface of the measured object 310 in each row or each column of the area array receiver 405, and the light of the shortest wavelength corresponding to the second signal light of different wavelengths reflected by the lower surface of the measured object 310 in each row or each column of the area array receiver 405; based on the upper surface profile height and the lower surface profile height, the profile thickness of the measured object 310 can be calculated. Figure 9 , including:
[0089] S41, generating wide-spectrum incident light by the illumination module 100;
[0090] S42, splitting the incident light by the light splitting module 201 to guide the incident light to the first adjusting module 301;
[0091] S43, dispersing and focusing the incident light by the first adjusting module 301 to focus the obtained detection light of different wavelengths to different height positions of the measured object 310;
[0092] S44, receiving the first signal light of different wavelengths obtained after the measured object 310 reflects the detection light of different wavelengths by the first adjusting module 301, and focusing the first signal light of different wavelengths to the light splitting module 201;
[0093] S45, dispersing and focusing the focused first signal light guided by the light splitting module 201 by the spectrum analysis module 400 to obtain the second signal light of different wavelengths;
[0094] S46, the signal processing module 500 is based on the first medium surface and the second medium surface respectively corresponding to the wavelength of light, respectively on the measured object 310 profile height detection, the first medium surface profile height and the second medium surface profile height of the measured object 310 are calculated, and the thickness between the first medium surface and the second medium surface of the measured object 310 is obtained.
[0095] In step S46, the first medium surface corresponds to the light reflected by the first medium surface of the measured object 310 in each row or each column of the surface array receiver 405, and the second medium surface corresponds to the light reflected by the second medium surface of the measured object 310 in each row or each column of the surface array receiver 405. The wavelength of the second signal light is different, and the height of the medium surface is obtained according to the wavelength of the light corresponding to each medium surface. The higher the first medium surface, the shorter the wavelength of the reflected light; based on the first medium surface profile height and the second medium surface profile height of the measured object 310, the difference is calculated to obtain the profile thickness between the first medium surface and the second medium surface of the measured object 310.
[0096] It should be noted that when there are multiple different refractive index media in the above measured object 310, the influence of all different refractive index media in the measured object 310 when the light reaches the first medium surface or the second medium surface needs to be considered when the corresponding medium surface profile height is calculated; the refractive index of different media is corrected according to the first medium surface and the second medium surface profile height corresponding to the medium surface, and then the difference is calculated based on the corrected first medium surface profile height and the corrected second medium surface profile height, to obtain the profile thickness between the first medium surface and the second medium surface.
[0097] The above application of specific examples is used to illustrate the present application, which is only used to help understand the present application, and does not limit the present application. For those skilled in the art to which the present application belongs, according to the idea of the present application, a number of simple deductions, deformations or substitutions can be made.
Claims
1. A surface profile detection system characterized by, The application relates to a light spectrum analysis device, comprising: a lighting module for generating incident light of a wide spectrum; a light splitting module arranged in a transmission path of the incident light for guiding the incident light to a measured object; a first adjusting module arranged on a side of the light splitting module, away from the lighting module, in the transmission path of the incident light, the first adjusting module being used for dispersing the incident light to form detection light of different wavelengths and focusing the detection light to different height positions of the measured object; the first adjusting module is also used for receiving reflected light formed by the detection light after being reflected by the measured object and focusing the reflected light to form first signal light and guiding the first signal light to the light splitting module; the transmission path of the detection light and the transmission path of the reflected light are coaxial in reverse direction; a spectrum analysis module arranged on a side of the light splitting module, away from the first adjusting module, in the transmission path of the first signal light, the spectrum analysis module comprising a second adjusting module and a receiver, the second adjusting module being used for dispersing and focusing the first signal light out of the light splitting module to form second signal light of different wavelengths, and the receiver being used for collecting the second signal light and obtaining image information reflecting the surface profile of the measured object.
2. The surface profile detection system of claim 1, wherein, The lighting module comprises a linear wide spectrum emitter and a first slit diaphragm, the linear wide spectrum emitter comprises a light source, the light source is used for generating lighting light of a wide spectrum, and the first slit diaphragm is used for integrating the lighting light to form linear incident light.
3. The surface profile detection system of claim 2, wherein, The width of the first slit diaphragm is 1 micrometer to 1 millimeter.
4. The surface profile detection system of claim 2, wherein, The lighting module comprises uniform light device, the uniform light device is arranged between the light source and the first slit diaphragm in the transmission path of the lighting light.
5. The surface profile detection system of claim 1, wherein, The included angle between the light splitting surface of the light splitting module and the transmission direction of the incident light is 45 degrees, the light splitting module is used for reflecting the incident light to the first adjusting module, and the light splitting module is also used for allowing the first signal light to pass through.
6. The surface profile detection system of claim 1, wherein, The first adjusting module comprises at least one of a transmission diffraction grating, a reflection diffraction grating, a spherical mirror, an aspherical mirror and a Fresnel lens.
7. The surface profile detection system of claim 1, wherein, The spectrum analysis module further comprises a second slit diaphragm, the second slit diaphragm is arranged between the second adjusting module and the light splitting module in the transmission path of the first signal light, and the second slit diaphragm is used for filtering the focused first signal light.
8. The surface profile detection system of claim 7, wherein, The width of the second slit diaphragm is 1 micrometer to 1 millimeter.
9. The surface profile detection system of claim 1, wherein, The second adjusting module comprises a first optical element, a dispersion component and a second optical element, the dispersion component is arranged between the first optical element and the second optical element in the transmission path of the first signal light, the first optical element is used for integrating the first signal light into parallel light, the dispersion component is used for dispersing the parallel light to form second signal light of different wavelengths, and the second optical element is used for focusing the second signal light to the receiver; or The second adjusting module comprises a curved grating, the curved grating is used for dispersing the first signal light to form second signal light of different wavelengths and focusing to the receiver.
10. The surface profile detection system of claim 9, wherein, The first optical element, the dispersion component and the second optical element are coaxial.