Illumination adjusting device and optical detection equipment

Abstract

The utility model relates to the technical field of optical detection, in particular to an illumination adjusting device and optical detection equipment, the illumination adjusting device comprises an illumination guide piece and an adjusting assembly, the illumination guide piece uses a light path to guide an illumination light beam to be emitted to a to-be-detected object at an inclination angle, and the adjusting assembly is connected between an equipment body and the illumination guide piece. The first adjusting path and the second adjusting path intersect in the first reference plane, and in the moving process of the illumination guiding piece, the included angle between the light passing path and the first reference plane is not changed; the position of the illumination guide piece can be adjusted in two non-vertical directions under the condition that the angle of emergent light is not changed, so that the position of an illumination light spot in a detection view field can be adjusted, and the adjustment precision of the position of the illumination light spot can be improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of optical detection, in particular to an illumination adjusting device and an optical detection equipment. BACKGROUND

[0002] In a semiconductor optical detection equipment, it is usually necessary to set up a dark field illumination to realize detection of partial defects on a semiconductor.

[0003] The incident angle of the dark field illumination light, the focused brightness of the illumination light spot in the main lens field of view and the position precision of the illumination light spot relative to the optical axis are very important for the detection precision and sensitivity of defects. In order to adapt to different detection requirements and optimize the imaging quality, when the dark field light source is fixedly installed, the adjustment of the position of the dark field illumination light spot in the detection field of view often needs to be considered, but the position adjustment precision of the dark field illumination light spot is poor at present. CONTENT OF THE UTILITY MODEL

[0004] The present application provides an illumination adjusting device and an optical detection equipment to solve the technical problem of poor position adjustment precision of the dark field illumination light spot.

[0005] According to a first aspect, an embodiment provides an illumination adjusting device for connecting between an equipment main body and a light source, the illumination adjusting device comprising:

[0006] An illumination guide having a light transmission path for obtaining an illumination light beam from the light source, and guiding the illumination light beam to exit to an object to be detected at an oblique angle by using the light transmission path;

[0007] An adjusting assembly assembled on the equipment main body and detachably connected with the illumination guide, the adjusting assembly being used to drive the illumination guide to move on a first adjusting path and a second adjusting path, the first adjusting path and the second adjusting path intersecting in a first reference plane;

[0008] During the movement of the illumination guide, the included angle between the light transmission path and the first reference plane is unchanged.

[0009] In an optional embodiment, the included angle between the first adjusting path and the second adjusting path in the first reference plane is less than 90°, the light transmission path and the second adjusting path are coplanar in a second reference plane, and the second reference plane is perpendicular to the first reference plane.

[0010] In an optional embodiment, the illumination guide is arranged on the side of the adjusting assembly facing the object to be detected and is hoisted on the adjusting assembly.

[0011] In an alternative embodiment, the lighting guide has a mounting surface which is flat and which is attached to the adjusting assembly.

[0012] In an alternative embodiment, the adjusting assembly comprises a first translation adjusting assembly and a second translation adjusting assembly, the first translation adjusting assembly comprises a first fixed member and a first moving member which reciprocates along the first adjusting path relative to the first fixed member, the second translation adjusting assembly comprises a second fixed member and a second moving member which reciprocates along the second adjusting path relative to the second fixed member, the first fixed member is configured to be attached to the device body, the first moving member is fixedly connected to the second fixed member, and the second moving member is detachably connected to the lighting guide.

[0013] In an alternative embodiment, the first translation adjusting assembly further comprises a first adjusting screw and a first elastic member, the first adjusting screw is connected to the first fixed member and abuts against the first moving member along the first adjusting path, and the first elastic member is connected between the first fixed member and the first moving member to apply a pulling force to the first moving member to move it along the first adjusting path towards the first fixed member.

[0014] In an alternative embodiment, the second translation adjusting assembly further comprises a second adjusting screw and a second elastic member, the second adjusting screw is connected to the second fixed member and abuts against the second moving member along the second adjusting path, and the second elastic member is connected between the second fixed member and the second moving member to apply a pulling force to the second moving member to move it along the second adjusting path towards the second fixed member.

[0015] In an alternative embodiment, the first translation adjusting assembly further comprises at least two guide members which are arranged along the first adjusting path at intervals, one of the first fixed member and the first moving member is connected to the guide members, and the guide members abut against the other of the first fixed member and the first moving member in a direction perpendicular to the first adjusting path.

[0016] In an alternative embodiment, the guide members have abutting surfaces which point-contact the other of the first fixed member and the first moving member.

[0017] In an alternative embodiment, the lighting adjusting device further comprises a locking assembly, the locking assembly comprises a first locking member and a second locking member, the first locking member is configured to fix the first moving member relative to the first fixed member after the first moving member is moved into position, and the second locking member is configured to fix the second moving member relative to the second fixed member after the second moving member is moved into position.

[0018] In an alternative embodiment, the adjusting assembly further comprises a third translational adjusting assembly, the third translational adjusting assembly comprising a third fixed member and a third moving member reciprocally moving along a third adjusting path relative to the third fixed member, the third adjusting path being perpendicular to the first reference plane;

[0019] The third fixed member is fixedly connected with the second moving member, and the third moving member is fixedly connected with the illumination guide member.

[0020] In an alternative embodiment, the third translational adjusting assembly comprises a third adjusting screw, a head of the third adjusting screw abutting against the third fixed member along the third adjusting path, and a screw rod of the third adjusting screw being threadedly connected with the third moving member, and screwing the third adjusting screw can drive the third moving member to reciprocally move along the third adjusting path relative to the third fixed member.

[0021] In an alternative embodiment, the illumination adjusting device further comprises a locking assembly, the locking assembly comprising a third locking member, the third locking member being used to relatively fix the third moving member with the third fixed member after the third moving member is moved into position.

[0022] According to the second aspect, in an embodiment, there is provided an optical detection device, comprising a device main body, a light source and the illumination adjusting device according to any one of the above-mentioned embodiments, the illumination adjusting device being mounted on the device main body, the light source being used to generate an illumination light beam, the light source being connected with the illumination guide member through an optical fiber, and the illumination light beam emitted by the illumination guide member being used to dark-field illuminate a to-be-detected object.

[0023] The illumination adjusting device and the optical detection device according to the above-mentioned embodiments, the illumination adjusting device being used to connect between the device main body and the light source, the illumination adjusting device comprising an illumination guide member and an adjusting assembly, the illumination guide member having a light transmission path, the illumination guide member being used to acquire an illumination light beam from the light source and guide the illumination light beam to be emitted to a to-be-detected object at an oblique angle through the light transmission path, the adjusting assembly being mounted on the device main body and detachably connected with the illumination guide member, the adjusting assembly being used to drive the illumination guide member to move along a first adjusting path and a second adjusting path, the first adjusting path and the second adjusting path intersecting in a first reference plane, and an included angle between the light transmission path and the first reference plane being unchanged in the process of the movement of the illumination guide member, so that the position adjustment of the illumination guide member in two directions which are not perpendicular can be realized to adjust the position of the illumination light spot on the surface of the to-be-detected object under the condition that the emission angle of the illumination light beam is unchanged, and the adjustment precision of the position of the dark-field illumination light spot can be improved in the application of the dark-field illumination light spot adjustment. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 Fig. 1 is a perspective view of a lighting adjustment device according to an embodiment;

[0025] Figure 2 Fig. 2 is a top view of the lighting adjustment device according to an embodiment;

[0026] Figure 3 Fig. 3 is a perspective view of the lighting adjustment device according to an embodiment from another angle;

[0027] Figure 4 Fig. 4 is a perspective view of the lighting adjustment device according to an embodiment from another angle.

[0028] In the figures: 1, lighting guide; 11, mounting surface; 12, outer surface; 2, adjustment assembly; 3, first translational adjustment assembly; 31, first fixing member; 32, first moving member; 33, first adjustment screw; 331, first adjustment portion; 332, first abutting portion; 34, first elastic member; 35, guide member; 4, second translational adjustment assembly; 41, second fixing member; 42, second moving member; 43, second adjustment screw; 431, second adjustment portion; 432, second abutting portion; 44, second elastic member; 5, third translational adjustment assembly; 51, third fixing member; 52, third moving member; 521, mounting slot; 53, third adjustment screw; 531, head portion; 532, screw portion; 61, first long hole; 62, second long hole; 63, third long hole. DETAILED DESCRIPTION

[0029] The application will be described in further detail below with reference to the drawings. Like elements in different embodiments are denoted by like reference numerals. In the following description, numerous specific details are described to provide a thorough understanding of the application. However, those of skill in the art will recognize that the application can be practiced without these specific details. In other instances, well-known structures have not been described in detail to avoid unnecessarily obscuring the application. In addition, it is to be understood that the drawings are not to scale.

[0030] In addition, the features, operations or characteristics described in the specification can be combined in any appropriate manner in various embodiments, and the steps involved in the operations of various embodiments can be sequentially adjusted or changed in a manner that is apparent to those skilled in the art. Therefore, the specification and drawings are only intended to clearly describe one embodiment, and do not mean that the components and / or order are necessary.

[0031] The serial numbers of components in this document, such as "first", "second", etc., are only used to distinguish the described objects, and do not have any sequential or technical meanings. Unless otherwise specified, "connection" and "coupling" in this application include direct and indirect connections (couplings).

[0032] The embodiment of the present application provides a lighting adjustment device which can be applied to an optical detection equipment and is used for realizing position adjustment of a dark field illumination spot so as to improve the position adjustment precision of the dark field illumination spot.

[0033] The lighting adjustment device of the embodiment of the present application is used for being connected between an equipment main body (not shown in the figure) and a light source (not shown in the figure) in the optical detection equipment. The lighting adjustment device comprises a lighting guide 1 and an adjustment assembly 2. The lighting guide 1 has a light transmission path. The lighting guide 1 is used for obtaining an illumination light beam from the light source and guiding the illumination light beam to be emitted to a to-be-detected object at an oblique angle by using the light transmission path. The illumination light beam emitted to the to-be-detected object at the oblique angle can be understood as that the included angle between the optical axis of the illumination light beam and the measured surface on the to-be-detected object is an acute angle less than 90°. In general, the measured surface on the to-be-detected object is a horizontal plane. Therefore, the illumination light beam emitted to the to-be-detected object at the oblique angle means that the illumination light beam is emitted to the to-be-detected object from top to bottom at an attitude with an included angle less than 90° with the horizontal plane.

[0034] Specifically, the light source can be mounted on the equipment main body. The light source is used for generating the illumination light beam. The light source can be connected with the lighting guide 1 through an optical fiber. The light transmission path is used for realizing shaping of the illumination light beam. The illumination light beam passes through the light transmission path and is irradiated to a detection field of view at the oblique angle.

[0035] The lighting adjustment device further comprises the adjustment assembly 2. The adjustment assembly 2 is assembled in the equipment main body and is detachably connected with the lighting guide 1. The adjustment assembly 2 can drive the lighting guide 1 to reciprocally move on a first adjustment path and a second adjustment path respectively. The adjustment assembly 2 is used for realizing mounting of the lighting guide 1 in the equipment main body and is also capable of adjusting the specific position of the lighting guide 1.

[0036] In some embodiments, referring to Figures 1 to 4 The lighting guide 1 is generally in a cylindrical structure. The light transmission path is located in the central passage of the cylindrical structure. The light transmission path can be arranged in a straight line direction. The extension direction of the light transmission path is the same as the extension direction of the cylindrical structure. The lighting guide 1 has a mounting surface 11 which is attached to the adjustment assembly 2. The mounting surface 11 is a plane. In this way, the mounting and fixing of the lighting guide 1 on the adjustment assembly 2 are facilitated. When the lighting guide 1 is mounted and fixed, the position of the optical axis of the illumination light beam in the lighting guide 1 can be ensured. The deviation angle of the optical axis of the illumination light beam is reduced. Even the deviation of the optical axis of the illumination light beam can be avoided.

[0037] In an embodiment, please continue to refer to Figures 1 to 4 The outer profile shape of the cylindrical structure of the illumination guide 1 in the cross section perpendicular to the light path extension direction is square, the mounting surface 11 of the illumination guide 1 faces the adjustment assembly 2, the illumination guide 1 has two outer side surfaces 12 adjacent to the mounting surface 11, and the arrangement direction of the two outer side surfaces 12 is perpendicular to the light path extension direction. The adjustment assembly 2 has a mounting groove 521, the groove bottom wall surface of the mounting groove 521 is attached to the mounting surface 11 on the illumination guide 1, and the groove side wall surface of the mounting groove 521 abuts against the two outer side surfaces 12 of the illumination guide 1 in the perpendicular light path extension direction, so as to realize the positioning of the illumination guide 1 and the adjustment assembly 2 in the plane perpendicular to the light path extension direction, facilitate the fixed connection of the illumination guide 1 and the adjustment assembly 2, and also can avoid the angle of the illumination beam optical axis from being deviated during the process of realizing the fixed connection of the illumination guide 1 and the adjustment assembly 2.

[0038] In an embodiment, the outer profile shape of the cylindrical structure of the illumination guide 1 in the cross section perpendicular to the light path extension direction can also be triangular, pentagonal or other special-shaped structures with straight sides, as long as the illumination guide 1 has a planar mounting surface 11 that can be attached to the adjustment assembly 2, so as to reduce the deviation angle of the illumination beam optical axis during the fixed connection of the illumination guide 1 and the adjustment assembly 2; even in the structure that the adjustment assembly 2 and the illumination guide 1 abut against each other in the perpendicular light path extension direction and perpendicular to the arrangement direction of the illumination guide 1 and the adjustment assembly 2, the angle of the optical axis of the illumination beam can be avoided from being deviated.

[0039] The adjusting assembly 2 can also drive the illumination guide 1 to move on a first adjusting path and a second adjusting path, both of which are straight paths, the first adjusting path extends in a first direction, the second adjusting path extends in a second direction, the first adjusting path and the second adjusting path are spatially non-intersecting and non-coplanar, the first adjusting path and the second adjusting path can intersect in a first reference plane, and the included angle between the first adjusting path and the second adjusting path in the first reference plane is less than 90°. The first reference plane is an imaginary plane, the first adjusting path can be located in the first reference plane, the projection of the second adjusting path in the first reference plane intersects the first adjusting path, and the included angle between the projection of the second adjusting path in the first reference plane and the first adjusting path is less than 90°. In this way, when the position of the illumination guide 1 is adjusted on the first adjusting path and the second adjusting path, the deviation between the actual position and the ideal position of the illumination guide 1 can be reduced, and the adjustment accuracy of the illumination spot can be improved. Of course, in another case, the first adjusting path and the second adjusting path can be spatially intersecting and coplanar, and the included angle between them is 90 degrees, that is, in a two-dimensional plane, the respective movement in two perpendicular directions is realized. It can be understood that when the included angle between the second adjusting path and the first adjusting path is less than 90°, a non-perpendicular intersection adjustment relationship is formed between the two paths, so that the position of the illumination guide 1 can be adjusted along a non-perpendicular path. Compared with a perpendicular path, the illumination guide 1 has a shorter movement distance and a faster adjustment speed when reaching the same target position.

[0040] During the position adjustment of the illumination guide 1, the included angle between the light transmission path on the illumination guide 1 and the first reference plane is unchanged. According to different detection requirements, the included angle between the light transmission path and the object to be detected in the detection field of view is fixed. In order to facilitate the adjustment of the specific position of the illumination spot in the field of view by the adjusting assembly 2, the included angle between the light transmission path and the first reference plane is fixed during the position adjustment of the illumination guide 1, which is more helpful to improve the adjustment accuracy of the specific position of the illumination spot in the detection field of view.

[0041] In some embodiments, the light transmission path and the second adjusting path are coplanar in a second reference plane, which is a plane determined by the second adjusting path and the light transmission path, and the second adjusting path and the light transmission path are located in the second reference plane, and the second reference plane is perpendicular to the first reference plane. In this way, when the position of the illumination guide 1 is adjusted on the second adjusting path, the included angle between the light transmission path and the first reference plane is unchanged, and the adjustment can be performed with a smaller change in the position of the spot in the detection field of view.

[0042] The first reference plane can be parallel to the placement surface of the object to be detected, for example, the first reference plane can be a horizontal plane. The specific position of the illumination guide 1 is adjusted only on the first adjustment path, mainly to achieve adjustment of the position of the illumination spot in the detection field of view. The position of the illumination guide 1 is adjusted on the second adjustment path, mainly to achieve adjustment of the position of the illumination spot in the detection field of view from another direction. In this way, the adjustment of the specific position of the illumination spot in the field of view is facilitated, and the adjustment accuracy of the illumination spot in the detection field of view is improved.

[0043] The light transmission path intersects the second adjustment path in the second reference plane. The included angle between the light transmission path and the second adjustment path can be 35°, and of course can also be other acute angles, to ensure that the light source is tilted to shine downward in the detection field of view.

[0044] In other embodiments, a second reference plane perpendicular to the first reference plane can also be provided through the second adjustment path, and the light transmission path has a small included angle with the second reference plane. In this way, when the position of the illumination guide 1 is reciprocally adjusted on the second adjustment path, the adjustment of the position of the light spot in the detection field of view is reduced, and the adjustment accuracy of the illumination spot in the detection field of view is improved.

[0045] In some embodiments, please refer to Figures 1 to 4 The illumination guide 1 is arranged in the up-down direction of the device body, located on the side of the adjustment assembly 2 facing the object to be detected, and is suspended on the adjustment assembly 2. In this way, when the specific position of the illumination guide 1 is adjusted on the first adjustment path and the second adjustment path by the adjustment assembly 2, the illumination guide 1 does not interfere with the moving parts in the adjustment assembly 2, which helps to increase the adjustment range of the adjustment assembly 2 on the first adjustment path and the second adjustment path. Of course, in the case of ensuring that the illumination guide 1 does not interfere with the moving parts in the adjustment assembly 2 during the movement of the adjustment assembly 2 driving the illumination guide 1, the illumination guide 1 can also be arranged on the side of the adjustment assembly 2 away from the object to be detected in the up-down direction.

[0046] In some embodiments, in order to realize the reciprocating movement of the adjustment assembly 2 driving the illumination guide 1 on the first adjustment path and the second adjustment path, please continue to refer to Figures 1 to 4The adjusting assembly 2 comprises a first translation adjusting assembly 3 and a second translation adjusting assembly 4. The first translation adjusting assembly 3 comprises a first fixed part 31 and a first moving part 32 reciprocally moving on a first adjusting path relative to the first fixed part 31. The second translation adjusting assembly 4 comprises a second fixed part 41 and a second moving part 42 reciprocally moving on a second adjusting path relative to the second fixed part 41. The first fixed part 31 is connected to the device body. The first moving part 32 is connected to the second fixed part 41. The second moving part 42 is detachably connected to the lighting guide 1. The first translation adjusting assembly 3 can drive the entire second translation adjusting assembly 4 and the lighting guide 1 to reciprocally move on the first adjusting path. The second translation adjusting assembly 4 can only drive the lighting guide 1 to reciprocally move on the second adjusting path. This helps the adjusting assembly 2 to separately adjust the specific position of the lighting spot in the detection field of view, and helps to improve the adjusting precision of the position of the lighting spot.

[0047] Of course, in other embodiments, the second translation adjusting assembly 4 can be connected between the device body and the first translation adjusting assembly 3. The first translation adjusting assembly 3 is detachably connected to the lighting guide 1. The second translation adjusting assembly 4 drives the entire first translation adjusting assembly 3 and the lighting guide 1 to reciprocally move on the second adjusting path. The first translation adjusting assembly 3 drives the lighting guide 1 to reciprocally move on the first adjusting path. This also helps the adjusting assembly 2 to separately adjust the specific position of the lighting spot in the detection field of view, and helps to improve the adjusting precision of the position of the lighting spot.

[0048] In some embodiments, please refer to Figures 1 to 4 For the first translation adjusting assembly 3, the first translation adjusting assembly 3 further comprises a first adjusting screw 33 and a first elastic part 34. The first adjusting screw 33 is connected to the first fixed part 31. The first adjusting screw 33 abuts against the first moving part 32 on the first adjusting path. The first elastic part 34 is connected between the first fixed part 31 and the first moving part 32 to apply a pulling force to the first moving part 32 to move the first moving part 32 towards the first fixed part 31 on the first adjusting path.

[0049] The first fixed part 31 has a screw hole, the first adjusting screw 33 passes through the screw hole and is threadedly connected with the first fixed part 31, the first adjusting screw 33 has a first adjusting part 331 and a first abutting part 332 located on both sides of the screw hole, the first abutting part 332 abuts against the first moving part 32 on the first adjusting path, the first moving part 32 can be driven to move away from the first fixed part 31 on the first adjusting path by the abutting of the first abutting part 332 against the first moving part 32 through forward rotation of the first adjusting part 331, and the first moving part 32 can also be driven to move close to the first fixed part 31 on the first adjusting path by the elastic pulling force of the first elastic part 34 applied to the first moving part 32 through reverse rotation of the first adjusting part 331, so as to realize the reciprocating movement of the first moving part 32 relative to the first fixed part 31 on the first adjusting path.

[0050] In some embodiments, referring to Figures 1 to 4 For the second translation adjusting assembly 4, the second translation adjusting assembly 4 further comprises a second adjusting screw 43 and a second elastic part 44, the second adjusting screw 43 is connected with the second fixed part 41, the second adjusting screw 43 also abuts against the second moving part 42 on the second adjusting path, and the second elastic part 44 is connected between the second fixed part 41 and the second moving part 42 to apply a pulling force to the second moving part 42 to move the second moving part 42 towards the second fixed part 41 on the second adjusting path.

[0051] The second fixed part 41 has a screw hole, the second adjusting screw 43 passes through the screw hole and is threadedly connected with the second fixed part 41, the second adjusting screw 43 has a second adjusting part 431 and a second abutting part 432 located on both sides of the screw hole, the second abutting part 432 abuts against the second moving part 42 on the second adjusting path, the second moving part 42 can be driven to move away from the second fixed part 41 on the second adjusting path by the abutting of the second abutting part 432 against the second moving part 42 through forward rotation of the second adjusting part 431, and the second moving part 42 can also be driven to move close to the second fixed part 41 on the second adjusting path by the elastic pulling force of the second elastic part 44 applied to the second moving part 42, so as to realize the reciprocating movement of the second moving part 42 relative to the second fixed part 41 on the second adjusting path.

[0052] In the above embodiments, the first elastic part 34 and the second elastic part 44 can be helical springs in a stretched state, or can also be rubber springs in a stretched state, under the action of the first elastic part 34 and the second elastic part 44, the first moving part 32 in the first translation adjusting assembly 3 can move towards the first fixed part 31, and the second moving part 42 in the second translation adjusting assembly 4 can move towards the second fixed part 41.

[0053] In some embodiments, two first elastic members 34 are arranged on both sides of the first adjusting screw 33 in the direction perpendicular to the first adjusting path, and two second elastic members 44 are arranged on both sides of the second adjusting screw 43 in the direction perpendicular to the second adjusting path. The two first elastic members 34 and the two second elastic members 44 can be used to synchronize the displacement of the first moving member 32 on both sides of the first adjusting screw 33 and the displacement of the second moving member 42 on both sides of the second adjusting screw 43, thereby ensuring the structural stability of the entire lighting adjusting device during the position adjustment of the lighting guide 1.

[0054] In other embodiments, the first elastic member 34 is not arranged in the first translation adjusting assembly 3, the second elastic member 44 is not arranged in the second translation adjusting assembly 4, the first fixed member 31 has a through hole, the first adjusting screw 33 is connected with the first moving member 32 through the through hole by screwing, the first adjusting screw 33 has first stop portions on both sides of the first fixed member 31 in the first adjusting path, and the first adjusting screw 33 is rotatably assembled in the through hole of the first fixed member 31 without being separated from the first fixed member 31 under the action of the first stop portions on both sides. The first moving member 32 can be moved towards and away from the first fixed member 31 in the first adjusting path by forward and reverse screwing of the first adjusting screw 33.

[0055] Of course, in other embodiments, the second elastic member 44 is not arranged in the second translation adjusting assembly 4, the second fixed member 41 has a through hole, the second adjusting screw 43 is connected with the second moving member 42 through the through hole by screwing, the second adjusting screw 43 has second stop portions on both sides of the second fixed member 41 in the second adjusting path, and the second adjusting screw 43 is rotatably assembled in the through hole of the second fixed member 41 without being separated from the second fixed member 41 under the action of the second stop portions on both sides. The second moving member 42 can be moved towards and away from the second fixed member 41 in the second adjusting path by forward and reverse screwing of the second adjusting screw 43.

[0056] In some embodiments, please refer to Figure 1 and Figure 2 For the first translation adjusting assembly 3, the first translation adjusting assembly 3 further includes at least two guide members 35 arranged at intervals in the first adjusting path, the first moving member 32 is in contact with the guide members 35, and the guide members 35 are in contact with the first moving member 32 in the direction perpendicular to the first adjusting path. In this way, during the reciprocating movement of the first moving member 32 relative to the first fixed member 31, the guide movement of the first moving member 32 in the first adjusting path is realized through the contact between the at least two guide members 35 and the first moving member 32, which helps to improve the stable change of the position of the lighting spot during the adjustment of the lighting guide 1 and improve the structural stability of the lighting adjusting device during the adjustment of the lighting guide 1.

[0057] The first adjusting screw 33 is provided with a guide 35 on both sides of the first adjusting path, and the guide 35 on one side is provided with at least two, for example, the guide 35 on one side of the first adjusting screw 33 is provided with two, and there are four guides 35 in the first translation adjusting assembly 3, two guides 35 form a group, and the first adjusting screw 33 is provided with a group of guides on both sides of the first adjusting path.

[0058] In some embodiments, the guide 35 is a guide screw fixed on the first fixing member 31, the extension direction of the guide screw is perpendicular to the first adjusting path, the guide screw has an abutting end facing the first moving member 32 and abutting against the first moving member 32, the abutting end has an abutting surface in point contact with the first moving member 32, the abutting surface can be an arc surface or a curved surface, and the guide 35 abuts against the first moving member 32 through the abutting surface, which helps to reduce the contact area between the first moving member 32 and the guide 35, so as to make the first moving member 32 move more smoothly while being guided to move by the guide 35.

[0059] In other embodiments, the guide 35 can also be fixed on the first moving member 32, and the abutting surface on the guide 35 is in point contact with the first fixing member 31, so as to make the first moving member 32 move more smoothly while being guided to move.

[0060] In other embodiments, a guide groove can be arranged on one of the first moving member 32 and the first fixing member 31, and a guide block can be arranged on the other, the guide groove extends along the first adjusting path, the guide block is located in the guide groove and can only reciprocate along the guide groove along the first adjusting path, and the guide block and the guide groove are matched to realize the guided reciprocating movement of the first moving member 32 relative to the first fixing member 31 along the first adjusting path.

[0061] In an embodiment, a similar guide structure can also be arranged in the second translation adjusting assembly 4 to realize the reciprocating guided movement of the second moving member 42 relative to the second fixing member 41 along the second adjusting path. In this embodiment, the guide can be connected to the second fixing member 41, and the guide can abut against the second moving member 42 in point contact along the second adjusting path through the abutting surface, or the guide 35 can also be connected to the second moving member 42, and the guide can abut against the second fixing member 41 in point contact along the second adjusting path through the abutting surface.

[0062] In some embodiments, in order to avoid the position of the lighting guide 1 and the light source from changing after the position of the lighting guide 1 is adjusted to the right position, the lighting adjusting device further comprises a locking assembly, which (not shown in the figure) comprises a first locking member and a second locking member. The first locking member is used to realize the relative fixation of the first moving member 32 and the first fixed member 31 after the first moving member 32 is moved to the right position. The second locking member is used to realize the relative fixation of the second moving member 42 and the second fixed member 41 after the second moving member 42 is moved to the right position.

[0063] In an embodiment, the first locking member comprises a first locking screw. The first locking screw can realize the fixation of the first moving member 32 and the first fixed member 31, or the fixation of the first moving member 32 and the device body after the first moving member 32 is moved to the right position. The first moving member 32 is provided with a first long hole 61 arranged to extend along the first adjusting path. The locking end of the first locking screw is fixedly connected with the first fixed member 31 or the device body after passing through the first long hole 61.

[0064] The second locking member comprises a second locking screw. The second locking screw can realize the fixation of the second moving member 42 and the second fixed member 41, or the fixation of the second moving member 42 and the first moving member 32 after the second moving member 42 is moved to the right position. The second moving member 42 is provided with a second long hole 62 arranged to extend along the second adjusting path. The locking end of the second locking screw is fixedly connected with the second fixed member 41 or the first moving member 32 after passing through the second long hole 62.

[0065] Before adjusting the lighting guide 1, the first locking screw and the second locking screw are loosened. During the position adjustment of the lighting guide 1, the first locking screw is located in the first long hole 61, and the second locking screw is located in the second long hole 62. The first long hole 61 moves relative to the first locking screw, and the second long hole 62 moves relative to the second locking screw. After the position of the lighting guide 1 is adjusted to the right position, the first locking screw and the second locking screw are locked, thereby realizing the fixation of the position of the lighting guide 1, and realizing the determination of the size of the lighting spot in the detection field of view.

[0066] In some embodiments, in order to improve the adjusting range of the position of the lighting spot, please refer to Figures 1 to 4 The adjusting assembly 2 further comprises a third translational adjusting assembly 5. The third translational adjusting assembly 5 comprises a third fixed member 51 and a third moving member 52 reciprocally moving relative to the third fixed member 51 along a third adjusting path. The third adjusting path extends in a third direction, and the third adjusting path is perpendicular to the first reference plane.

[0067] The third translation adjustment assembly 5 can be connected between the device main body and the first translation adjustment assembly 3, the third fixed part 51 is used for fixed connection with the device main body, and the third movable part 52 is fixedly connected with the first fixed part 31; or the third translation adjustment assembly 5 can be connected between the first translation adjustment assembly 3 and the second translation adjustment assembly 4, the third fixed part 51 is fixedly connected with the first movable part 32, and the third movable part 52 is fixedly connected with the second fixed part 41; or the third translation adjustment assembly 5 can be connected between the second translation adjustment assembly 4 and the lighting guide 1, the third fixed part 51 is fixedly connected with the second movable part 42, and the third movable part 52 is detachably connected with the lighting guide 1, an installation groove 521 for installing and fixing the lighting guide 1 is arranged on the third movable part 52, so that the lighting guide 1 is driven to reciprocate on the third adjustment path only through the third translation adjustment assembly 5, without affecting the positions of the first translation adjustment assembly 3 and the second translation adjustment assembly 4.

[0068] In an embodiment, the third adjustment path can be arranged to extend in the up-down direction, and the reciprocating movement of the lighting guide 1 in the up-down direction can be realized through the third adjustment assembly 5. The third adjustment path is preferably arranged to be perpendicular to the first reference plane, and of course, the third adjustment path can also be arranged to have an angle smaller than 90° with the first reference plane, or even other angles.

[0069] In some embodiments, referring to Figure 4 , the third translation adjustment assembly 5 includes a third adjustment screw 53, the third adjustment screw 53 includes a head part 531 and a screw rod part 532, the third fixed part 51 has a third through hole, the screw rod part 532 of the third adjustment screw 53 passes through the third through hole from top to bottom, and the head part 531 and the screw rod part 532 of the third adjustment screw 53 are arranged on both sides of the third through hole of the third fixed part 51 in the third direction, the head part 531 of the third adjustment screw 53 abuts against the third fixed part 51 on the third adjustment path, and the screw rod part 532 of the third adjustment screw 53 is threadedly connected with the third movable part 52, so that the third movable part 52 is driven to reciprocate on the third adjustment path relative to the third fixed part 51 by forward and reverse screwing of the third adjustment screw 53.

[0070] In other embodiments, the screw rod part 532 of the third adjustment screw 53 can also abut against the third movable part 52 on the third adjustment path, and the third translation adjustment assembly 5 further includes a third elastic part connected between the third fixed part 51 and the third movable part 52, the third elastic part can exert an elastic force on the third movable part 52 to drive the third movable part 52 to move away from the third fixed part 51, and the third elastic part can be a helical spring in a stretched state or a rubber spring in a stretched state.

[0071] In some embodiments, in order to fix the position of the lighting guide 1 on the third adjustment path after the third moving part 52 is adjusted in place in the third translational adjustment assembly 5, please refer to Figure 4 The locking assembly of the light source adjustment assembly 2 further comprises a third locking part, which is used to fix the relative position of the third moving part 52 and the third fixed part 51 after the third moving part 52 is moved in place.

[0072] In an embodiment, the third locking part comprises a third locking screw, which can fix the third moving part 52 and the third fixed part 51, or fix the third moving part 52 and the second moving part 42 after the third moving part 52 is moved in place relative to the third fixed part 51. One of the third moving part 52 and the third fixed part 51 is provided with a third long hole 63 arranged to extend on the third adjustment path, and the locking end of the third locking screw is fixedly connected with the other one of the third moving part 52 and the third fixed part 51 after passing through the third long hole 63.

[0073] In another embodiment, please refer to Figure 4 The third long hole 63 on the third moving part 52 is replaced by a screw hole in this embodiment, and the third locking screw is screwed in the screw hole of the third moving part 52 after the third moving part 52 is adjusted in place. The end of the third locking screw is jammed on the third fixed part 51 to fix the relative position of the third moving part 52 and the third fixed part 51.

[0074] In some embodiments, the position of the lighting guide 1 on the third adjustment path, i.e. in the up-down direction, can be coarsely adjusted by the third translational adjustment assembly 5, and the specific position of the lighting guide 1 in the first reference plane, i.e. in the horizontal plane, can be adjusted by the first translational adjustment assembly 3 and the second translational adjustment assembly 4. When adjusting the position of the lighting guide 1 in the horizontal plane, the adjustment of the lighting spot in the specific position in the detection field of view can be realized by adjusting the position of the lighting guide 1 on the first adjustment path by the first translational adjustment assembly 3. After the position of the lighting guide 1 on the first adjustment path is roughly adjusted in place, the adjustment of the size of the lighting spot in the detection field of view can be realized by adjusting the position of the lighting guide 1 on the third adjustment path by the second translational adjustment assembly 4. In this way, the position adjustment of the lighting guide 1 is completed, and the adjustment of the specific position and size of the lighting spot in the detection field of view is completed. Finally, the relative fixation of the first moving part 32, the second moving part 42 and the third moving part 52 to the device body is realized by the locking assembly to avoid the change of the position of the lighting spot and improve the structural stability of the lighting adjustment device.

[0075] The embodiment of the application further provides an optical detection device, which comprises a device main body, a light source and the illumination adjusting device in any one of the above embodiments, the illumination adjusting device is installed on the device main body, the light source is used for generating an illumination light beam, the light source is connected with the illumination guide 1 through an optical fiber, the illumination light beam emitted by the illumination guide 1 is used for dark field illumination of a to-be-detected object, and the illumination guide 1 can shape the illumination light beam through the light transmission path so that the illumination light beam passing through the light transmission path is irradiated on the to-be-detected object at an inclined angle. Through the optical detection device of the embodiment of the application, the specific position of the illumination light spot in the detection field of view can be adjusted, the adjustment process of the operator is facilitated, and the adjustment precision of the dark field illumination light spot in the detection field of view is improved.

[0076] The above application of specific examples is used to describe the utility model, which is only used to help understand the utility model and does not limit the utility model. According to the idea of the utility model, the skilled person in the art to which the utility model belongs can make several simple deductions, deformations or substitutions.

Claims

1. An illumination adjustment device, characterized in that, The illumination adjusting device is used for connecting between a device body and a light source, and comprises: an illumination guide having a light transmission path for obtaining an illumination light beam from the light source and guiding the illumination light beam to be emitted to an object to be measured at an inclined angle by using the light transmission path; an adjusting assembly assembled on the device body and detachably connected with the illumination guide, the adjusting assembly being used for driving the illumination guide to move on a first adjusting path and a second adjusting path, the first adjusting path and the second adjusting path intersecting in a first reference plane; during the movement of the illumination guide, an included angle between the light transmission path and the first reference plane is constant.

2. The lighting adjustment apparatus of claim 1, wherein The first adjusting path and the second adjusting path have an included angle less than 90° in the first reference plane, the light transmission path and the second adjusting path are coplanar in a second reference plane, and the second reference plane is perpendicular to the first reference plane.

3. The lighting adjustment apparatus of claim 1, wherein The illumination guide is arranged on a side of the adjusting assembly facing the object to be measured and is suspended on the adjusting assembly.

4. The lighting adjustment apparatus of claim 3, wherein The illumination guide has a mounting surface attached to the adjusting assembly, and the mounting surface is a plane.

5. The lighting adjustment apparatus according to any one of claims 1 to 4, wherein The adjusting assembly comprises a first translation adjusting assembly and a second translation adjusting assembly, the first translation adjusting assembly comprises a first fixed member and a first moving member reciprocally moving on the first adjusting path relative to the first fixed member, the second translation adjusting assembly comprises a second fixed member and a second moving member reciprocally moving on the second adjusting path relative to the second fixed member, the first fixed member is used for being connected with the device body, the first moving member is fixedly connected with the second fixed member, and the second moving member is detachably connected with the illumination guide.

6. The lighting adjustment apparatus of claim 5, wherein The first translation adjusting assembly further comprises a first adjusting screw and a first elastic member, the first adjusting screw is connected with the first fixed member and abuts against the first moving member on the first adjusting path, and the first elastic member is connected between the first fixed member and the first moving member to apply a pulling force to the first moving member to move the first moving member on the first adjusting path towards the first fixed member; and / or, the second translation adjusting assembly further comprises a second adjusting screw and a second elastic member, the second adjusting screw is connected with the second fixed member and abuts against the second moving member on the second adjusting path, and the second elastic member is connected between the second fixed member and the second moving member to apply a pulling force to the second moving member to move the second moving member on the second adjusting path towards the second fixed member.

7. The lighting adjustment apparatus of claim 5, wherein The first translation adjusting assembly further comprises at least two guide members arranged at intervals on the first adjusting path, and the at least two guide members and the first moving member abut against each other in a direction perpendicular to the first adjusting path.

8. The lighting adjustment apparatus of claim 7, wherein The guide member has an abutting surface, and the abutting surface and the first moving member are in point contact.

9. The lighting adjustment apparatus of claim 5, wherein, The lighting adjusting device further comprises a locking assembly, the locking assembly comprises a first locking member and a second locking member, the first locking member is used to realize relative fixation of the first moving member and the first fixed member after the first moving member is moved into position, and the second locking member is used to realize relative fixation of the second moving member and the second fixed member after the second moving member is moved into position.

10. The lighting adjustment apparatus of claim 5, wherein, The adjusting assembly further comprises a third translational adjusting assembly, the third translational adjusting assembly comprises a third fixed member and a third moving member reciprocally moving on a third adjusting path relative to the third fixed member, and the third adjusting path is perpendicular to the first reference plane. The third fixed member is fixedly connected with the second moving member, and the third moving member is fixedly connected with the lighting guide.

11. The lighting adjustment apparatus of claim 10, wherein, The third translational adjusting assembly comprises a third adjusting screw, a head of the third adjusting screw abuts against the third fixed member on the third adjusting path, and a screw rod of the third adjusting screw is threadedly connected with the third moving member, and screwing the third adjusting screw can drive the third moving member to reciprocally move on the third adjusting path relative to the third fixed member.

12. The lighting adjustment apparatus of claim 10, wherein, The lighting adjusting device further comprises a locking assembly, the locking assembly comprises a third locking member, and the third locking member is used to realize relative fixation of the third moving member and the third fixed member after the third moving member is moved into position.

13. An optical detection device, characterized by The lighting adjusting device comprises a device body, a light source and the lighting adjusting device according to any one of claims 1 to 12, the lighting adjusting device is installed on the device body, the light source is used to generate a lighting beam, the light source is connected with the lighting guide through an optical fiber, and the lighting beam emitted by the lighting guide is used to perform dark-field illumination on a to-be-tested object.

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