Probe card replacing device

Abstract

The utility model provides a probe card replacement device, which comprises a support frame, a probe card, a probe card, and a probe card, the probe station is rotatably mounted on the support frame and is used for mounting a probe card; one end of the supporting assembly is rotationally connected with the probe station, the other end of the supporting assembly is rotationally connected with the supporting frame and can move in the vertical direction relative to the supporting frame, and the supporting assembly supports the probe station when the probe station is overturned to a preset position; and the clamping assembly is arranged at the other end of the supporting assembly, and when the probe station is overturned to the preset position, the clamping assembly is clamped with the supporting frame, so that the probe station is fixed at the preset position. According to the probe card replacement device provided by the invention, the fixation of the probe station at the preset position is realized, the support assembly is prevented from falling off due to accidental touch, and the safety in the probe card replacement process is improved.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of semiconductor testing, and more particularly to a probe card replacement device. BACKGROUND

[0002] The probe card is an important component of semiconductor testing. The probe card is usually installed on the back of the probe table of the probe card replacement device. When the probe card needs to be replaced, the probe table needs to be flipped. In the related art, after the probe table is flipped, the support rod is usually manually supported on the probe table, so that the probe table is fixed at a preset angle, and then the replacement operation of the probe card is performed. However, in this way, the support rod is easy to be accidentally knocked off, and the safety is poor. CONTENT OF THE UTILITY MODEL

[0003] The application embodiment provides a probe card replacement device, which improves the safety in the probe card replacement process.

[0004] The technical scheme adopted by the application embodiment is to provide a probe card replacement device, which comprises:

[0005] A support frame;

[0006] A probe table rotatably installed on the support frame and used for installing a probe card;

[0007] A support assembly having one end rotatably connected to the probe table and the other end rotatably connected to the support frame and movable along a vertical direction relative to the support frame, the support assembly supporting the probe table when the probe table is flipped to a preset position; and

[0008] A clamping assembly arranged at the other end of the support assembly and clamped with the support frame when the probe table is flipped to the preset position to fix the probe table at the preset position.

[0009] Further, the clamping assembly comprises:

[0010] A mounting seat arranged at the other end of the support assembly;

[0011] A clamping tongue arranged on the mounting seat; and

[0012] A driving member driving the clamping tongue to move relative to the mounting seat so that one end of the clamping tongue extends out of the mounting seat and abuts against the support frame.

[0013] Further, the driving member is an elastic member, which elastically abuts against the clamping tongue to provide an elastic pushing force so that one end of the clamping tongue extends out of the mounting seat and abuts against the support frame.

[0014] Further, the support assembly comprises:

[0015] a telescopic support rod, one end of the telescopic support rod is rotatably connected with the probe table, and the other end of the telescopic support rod is rotatably connected with the support frame, and when the probe table is located at the preset position, the telescopic support rod is extended to support the probe table; and

[0016] a sliding rod, one end of the sliding rod is rotatably connected with the probe table, and the other end of the sliding rod is rotatably connected with the support frame, and the other end of the sliding rod is movable along a vertical direction relative to the support frame;

[0017] the clamping assembly is arranged at the other end of the sliding rod.

[0018] Further, the probe card replacing device further comprises:

[0019] a guide rail, which is arranged on one side of the support frame and extends along the vertical direction; and

[0020] a sliding seat, which is slidably mounted on the guide rail, the other end of the sliding rod is rotatably connected with the sliding seat, and the clamping assembly is arranged on the sliding seat.

[0021] Further, the telescopic support rod is a nitrogen spring support rod.

[0022] Further, the probe card replacing device further comprises a limiting block, the limiting block is arranged on the support frame, and a limiting groove is arranged on the limiting block.

[0023] The support assembly further comprises a manual support rod, the manual support rod comprises a rotating end and a free end, the rotating end is rotatably connected with the probe table, and when the probe table is located at the preset position, the free end is accommodated in the limiting groove to support the probe table.

[0024] Further, the probe card replacing device further comprises a receiving seat, which is arranged on the probe table, and the receiving seat is provided with a receiving groove, when the free end is separated from the limiting groove, the manual support rod is partially accommodated in the receiving groove.

[0025] Further, the probe card replacing device further comprises a fixing member, the fixing member is detachably connected with the receiving seat, when the manual support rod is partially accommodated in the receiving groove, the fixing member is connected with the receiving seat to cover the receiving groove.

[0026] Further, the manual support rod comprises two groups, the limiting block comprises two groups, and one manual support rod is matched with the limiting groove of one limiting block.

[0027] The probe card replacement device provided by the embodiment of the present application has the beneficial effects that: the probe card replacement device of the embodiment of the present application, by rotatably mounting the probe table on the support frame, cooperating with the support assembly, one end of the support assembly is rotatably connected with the probe table, the other end is rotatably connected with the support frame and can move along the vertical direction relative to the support frame, and the clamping assembly is arranged at the other end of the support assembly, when the probe card needs to be replaced, the probe table is flipped to the preset position relative to the support frame, the other end of the support assembly is raised to the specified position along the vertical direction with the flipping of the probe table, and the clamping assembly is clamped with the support frame, so that the support assembly can be fixed at the specified position, at this time, the support assembly can support the probe table, the fixation of the probe table at the preset position is realized, the support assembly is prevented from being accidentally touched and falling, and the safety in the probe card replacement process is improved. BRIEF DESCRIPTION OF DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0029] Figure 1 The three-dimensional structure schematic diagram of the probe card replacement device provided by the embodiment of the present application is shown in the figure.

[0030] Figure 2 The three-dimensional structure schematic diagram of the probe card replacement device provided by the embodiment of the present application is shown in the figure. Figure 1 The local enlarged schematic diagram at A is shown in the figure.

[0031] Figure 3 The local enlarged schematic diagram of the support frame and the clamping assembly is shown in the figure.

[0032] Figure 4 The three-dimensional structure schematic diagram of the probe card replacement device provided by the embodiment of the present application is shown in the figure. Figure 1 The local enlarged schematic diagram at A is shown in the figure.

[0033] Figure 5 The three-dimensional structure schematic diagram of the probe table used by the embodiment of the present application is shown in the figure.

[0034] In the figure, various reference signs are as follows:

[0035] 10, support frame; 20, probe table; 30, support assembly; 31, telescopic support rod; 32, sliding rod; 33, manual support rod; 331, rotating end; 332, free end; 40, clamping assembly; 41, mounting seat; 42, clamping tongue; 50, guide rail; 60, sliding seat; 70, limiting block; 71, limiting groove; 80, storage seat; 90, fixing piece; 100, probe card. DETAILED DESCRIPTION

[0036] In order to make the technical problems, technical solutions and beneficial effects of the present application clearer, further detailed description will be made to the present application in combination with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and not used to limit the present application.

[0037] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0038] It should be understood that the terms "length", "width", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only used to facilitate the description of the present application and simplify the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0039] In addition, the terms "first", "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0040] Please refer to Figure 1 and Figure 2 , the probe card 100 replacement device provided by the embodiments of the present application will be described. The probe card 100 replacement device provided by the embodiments of the present application comprises a support frame 10, a probe table 20, a support assembly 30 and a clamping assembly 40.

[0041] The probe table 20 is rotatably mounted on the support frame 10 and is used to mount the probe card 100. When the probe table 20 is turned to a preset position, the probe card 100 can be replaced at this time.

[0042] One end of the support assembly 30 is rotatably connected with the probe table 20, and the other end is rotatably connected with the support frame 10 and can move along the vertical direction relative to the support frame 10. The support assembly 30 supports the probe table 20 when the probe table 20 is turned to the preset position.

[0043] The clamping assembly 40 is arranged at the other end of the support assembly 30, and the clamping assembly 40 is clamped with the support frame 10 when the probe table 20 is turned to the preset position, so as to fix the probe table 20 at the preset position.

[0044] When the probe card 100 needs to be replaced, first, the probe table 20 is pulled up so that the probe table 20 is flipped relative to the support frame 10. Since one end of the support assembly 30 is rotationally connected with the probe table 20 and the other end is rotationally connected with the support frame 10, at this time, the other end of the support assembly 30 is raised along the vertical direction with the flipping of the probe table 20. When the probe table 20 is flipped to the preset position, the clamping assembly 40 is clamped with the support frame 10, so that the support assembly 30 can be fixed at the specified position, thereby achieving the fixation of the probe table 20 at the preset position and avoiding the support assembly 30 from being accidentally knocked and falling, thereby improving the safety during the replacement of the probe card 100.

[0045] When the replacement of the probe card 100 is completed, only the clamping assembly 40 needs to be separated from the support frame 10. At this time, the probe table 20 is reset under the action of gravity, and at this time, the other end of the support assembly 30 is lowered and reset relative to the support frame 10 along the vertical direction, which is very simple and convenient to operate.

[0046] Please refer to Figure 2 and Figure 3 The clamping assembly 40 can include a mounting seat 41, a clamping tongue 42, and a driving member (not shown in the figure). The mounting seat 41 is arranged at the other end of the support assembly 30. The clamping tongue 42 is arranged on the mounting seat 41. The driving member is used to drive the clamping tongue 42 to move relative to the mounting seat 41 so that one end of the clamping tongue 42 extends out of the mounting seat 41 and abuts against the support frame 10. When the support assembly 30 is raised to the specified position along the vertical direction, at this time, the clamping tongue 42 can be driven by the driving member to extend out so that the clamping tongue 42 abuts against the top end of the support frame 10, thereby achieving the fixation of the support assembly 30 and avoiding the support assembly 30 from being accidentally knocked and falling.

[0047] The driving member can be an elastic member that elastically abuts against the clamping tongue 42 and is used to provide an elastic pushing force to make one end of the clamping tongue 42 extend out of the mounting seat 41 and abut against the support frame 10. Through the elastic force of the elastic member, when the support assembly 30 is raised to the specified position along the vertical direction, the clamping tongue 42 extends out and abuts against the top end of the support frame 10 under the action of the elastic force of the elastic member, thereby preventing the support assembly 30 from falling. When the support assembly 30 needs to be lowered, the clamping tongue 42 can be reset by manual pushing. The driving member can also be a linear motor or an air cylinder, thereby achieving automatic operation.

[0048] It can be understood that the arrangement of the clamping assembly 40 is not limited to this, for example, the clamping assembly 40 can also be a positioning member. A through hole is arranged at the other end of the support assembly 30, and a positioning hole is arranged on the support frame 10. The positioning member passes through the through hole and cooperates with the positioning hole, thereby achieving the locking and fixation of the support assembly 30.

[0049] Please refer to Figure 1The support assembly 30 can include a telescopic support rod 31 and a sliding rod 32. One end of the telescopic support rod 31 is rotationally connected with the probe table 20, and the other end is rotationally connected with the support frame 10. When the probe table 20 is located at a preset position, the telescopic support rod 31 is extended to support the probe table 20. One end of the sliding rod 32 is rotationally connected with the probe table 20, and the other end is rotationally connected with the support frame 10. The other end of the sliding rod 32 is movable along a vertical direction relative to the support frame 10, and the clamping assembly 40 is arranged at the other end of the sliding rod 32. The probe table 20 is supported by the telescopic support rod 31, and is assisted by the sliding rod 32, so that the overall support stability is improved.

[0050] Referring to Figure 3 , the probe card 100 replacement device can further include a guide rail 50 and a sliding seat 60. The guide rail 50 is arranged on one side of the support frame 10 and extends in a vertical direction. The sliding seat 60 is slidably installed on the guide rail 50. The other end of the sliding rod 32 is rotationally connected with the sliding seat 60, and the clamping assembly 40 is arranged on the sliding seat 60. Through the cooperation of the guide rail 50 and the sliding seat 60, the movement accuracy of the sliding rod 32 is improved.

[0051] Referring to Figure 1 , the telescopic support rod 31 can be a nitrogen spring support rod. The nitrogen spring support rod plays a supporting role, and its elastic force is more uniform and stable. When the nitrogen spring support rod is extended to the maximum stretching length, it can support the probe table 20 at this time. Of course, the telescopic support rod 31 can also be arranged as other spring structures, or the telescopic support rod 31 can also be a support rod driven by an air cylinder.

[0052] Referring to Figure 2 and Figure 3 , the probe card 100 replacement device can further include a limiting block 70. The limiting block 70 is arranged on the support frame 10, and a limiting groove 71 is formed in the limiting block 70. Figure 4 to Figure 5 As shown in , the support assembly 30 can further include a manual support rod 33. The manual support rod 33 includes a rotating end 331 and a free end 332. The rotating end 331 is rotationally connected with the probe table 20. When the probe table 20 is located at a preset position, the free end 332 is accommodated in the limiting groove 71 to support the probe table 20. When it is necessary to support the probe table 20, since the rotating end 331 of the manual support rod 33 is rotationally connected with the probe table 20, the manual support rod 33 can rotate around the rotating end 331, so that the free end 332 is accommodated in the limiting groove 71. Through the cooperation of the manual support rod 33 and the limiting groove 71, the free end 332 of the manual support rod 33 cannot easily come out of the limiting groove 71, so that the support stability of the support assembly 30 is further improved, the support assembly 30 is prevented from being accidentally knocked and falling, and the safety during the replacement of the probe card 100 is improved.

[0053] Referring to Figure 4 andFigure 5 The probe card 100 replacement device can further comprise a receiving seat 80 arranged on the probe table 20, the receiving seat 80 is provided with a receiving groove (not shown in the figure), when the free end 332 is separated from the limiting groove 71, the manual support rod 33 can be partially received in the receiving groove. Through the arrangement of the receiving seat 80, when the manual support rod 33 is not needed, the free end 332 can be separated from the limiting groove 71, and the manual support rod 33 can be partially received in the receiving groove, so that the manual support rod 33 can be directly received on the probe table 20 when not in use; when needed, only the manual support rod 33 needs to be separated from the receiving groove, and the free end 332 of the manual support rod 33 is pushed into the limiting groove 71, which is very convenient to use.

[0054] Please refer to Figure 4 and Figure 5 The probe card 100 replacement device can further comprise a receiving seat 80 arranged on the probe table 20, the receiving seat 80 is provided with a receiving groove (not shown in the figure), when the free end 332 is separated from the limiting groove 71, the manual support rod 33 can be partially received in the receiving groove. Through the arrangement of the receiving seat 80, when the manual support rod 33 is not needed, the free end 332 can be separated from the limiting groove 71, and the manual support rod 33 can be partially received in the receiving groove, so that the manual support rod 33 can be directly received on the probe table 20 when not in use; when needed, only the manual support rod 33 needs to be separated from the receiving groove, and the free end 332 of the manual support rod 33 is pushed into the limiting groove 71, which is very convenient to use.

[0055] Please refer to Figure 1 and Figure 4 The manual support rod 33 can comprise two groups, the limiting block 70 can comprise two groups, and one manual support rod 33 cooperates with the limiting groove 71 of one limiting block 70. Through the cooperation between the two groups of manual support rods 33 and the two groups of limiting blocks 70, the stability of the whole is further improved.

[0056] Please refer to Figure 1 The support frame 10 can comprise a plurality of support members arranged corresponding to the positions of the four corners of the probe table 20, which can improve the support strength of the probe table 20 and has higher stability.

[0057] The working process of the probe card 100 replacement device of one specific embodiment of the present application is as follows:

[0058] When the probe card 100 needs to be replaced, first, the probe table 20 is pulled up to make the probe table 20 flip relative to the support frame 10, since one end of the support assembly 30 is rotationally connected with the probe table 20 and the other end is rotationally connected with the support frame 10 and can move along the vertical direction relative to the support frame 10, at this time, the other end of the support assembly 30 rises along the vertical direction with the flipping of the probe table 20;

[0059] When the probe table 20 is flipped to the preset position, the clamping assembly 40 is clamped with the support frame 10, and the manual support rod 33 is pushed to separate the manual support rod 33 from the receiving seat 80, rotate around the rotating end 331, and contain the free end 332 of the manual support rod 33 in the limiting slot 71 to fix the probe table 20.

[0060] When the replacement is completed, the clamping assembly 40 is separated from the support frame 10, and the manual support rod 33 is pushed to separate the manual support rod 33 from the limiting slot 71, so that the probe table 20 can rotate around the support frame to reset the probe table 20. In order to facilitate the storage of the manual support rod 33, the manual support rod 33 can be partially stored in the receiving seat 80, and then fixed by the fixing part 90 to achieve the storage and fixation of the manual support rod 33.

[0061] The above is only a preferred embodiment of the present application, and is not used to limit the present application. Any modification, equivalent replacement and improvement within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A probe card replacement device, characterized by, The probe card replacement device comprises a support frame, a probe table rotatably mounted on the support frame and used for mounting a probe card, a support assembly having one end rotatably connected with the probe table and the other end rotatably connected with the support frame and vertically movable relative to the support frame, the support assembly supporting the probe table when the probe table is turned to a preset position, and a clamping assembly arranged at the other end of the support assembly and clamped with the support frame to fix the probe table at the preset position when the probe table is turned to the preset position. The clamping assembly comprises a mounting seat arranged at the other end of the support assembly, a clamping tongue arranged on the mounting seat, and a driving member driving the clamping tongue to move relative to the mounting seat so that one end of the clamping tongue extends out of the mounting seat and abuts against the support frame. The driving member is an elastic member which elastically abuts against the clamping tongue to provide an elastic pushing force so that one end of the clamping tongue extends out of the mounting seat and abuts against the support frame. The support assembly comprises a telescopic support rod having one end rotatably connected with the probe table and the other end rotatably connected with the support frame, the telescopic support rod extending out to support the probe table when the probe table is at the preset position, and a sliding rod having one end rotatably connected with the probe table and the other end rotatably connected with the support frame, the other end of the sliding rod being vertically movable relative to the support frame. The clamping assembly is arranged at the other end of the sliding rod. The probe card replacement device further comprises a guide rail arranged on one side of the support frame and extending along the vertical direction, and a sliding seat slidably mounted on the guide rail, the other end of the sliding rod being rotatably connected with the sliding seat, and the clamping assembly being arranged on the sliding seat.

2. The probe card replacement device of claim 1, wherein, The telescopic support rod is a nitrogen spring support rod. The probe card replacement device further comprises a limiting block arranged on the support frame, a limiting groove being formed in the limiting block. The support assembly further comprises a manual support rod having a rotating end rotatably connected with the probe table and a free end, the free end being accommodated in the limiting groove to support the probe table when the probe table is at the preset position. The probe card replacement device further comprises a receiving seat arranged on the probe table, the receiving seat having a receiving groove, the manual support rod being partially accommodated in the receiving groove when the free end is separated from the limiting groove.

3. The probe card replacement device of claim 2, wherein, The probe card replacement device further comprises a fixing member detachably connected with the receiving seat, the fixing member being connected with the receiving seat to cover the receiving groove when the manual support rod is partially accommodated in the receiving groove.

4. The probe card replacement apparatus according to claim 1, wherein The manual support rod comprises two groups, and the limiting block comprises two groups, one manual support rod being matched with the limiting groove of one limiting block. ​ ​ ​ 5. The probe card replacement device of claim 4, wherein, ​ ​ ​ 6. The probe card replacement apparatus according to claim 4, wherein ​ 7. The probe card replacement device according to any one of claims 1 to 6, wherein, ​ ​ 8. The probe card replacement device of claim 7, wherein, ​ 9. The probe card replacement device of claim 8, wherein, ​ 10. The probe card replacement device of claim 7, wherein, ​

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