Butterfly type vertical probe clamping device

Abstract

The utility model relates to the technical field of probe clamping, in particular to a butterfly-shaped vertical probe clamping device, which is used for clamping a probe and is matched with a probe station for use, and comprises a clamping piece and a supporting mechanism, the whole clamping piece is of an isosceles trapezoid platy structure, the clamping piece is composed of two wing plates, the side walls of the two wing plates are mutually attached and fixed, and the supporting mechanism is arranged on the clamping piece. Probe grooves are symmetrically formed in the two wing plates, the probe grooves penetrate through the front ends and the rear ends of the wing plates and are obliquely formed in the direction of the central axis of the clamping piece, the width of the probe grooves is larger than that of probes, the probe grooves are used for containing the probes, and clamping piece fastening holes are further formed in the two wing plates; according to the utility model, the probe is limited in the probe groove through the arrangement of the probe groove, and the probe is fixed through the cooperation of the probe fastening hole and the fastening screw, so that the probe can be stably clamped, and the probing operation of a wafer can be carried out.

Description

TECHNICAL FIELD

[0001] The utility model relates to probe clamping technical field, concretely is a butterfly type vertical probe clamping device. BACKGROUND

[0002] When the semiconductor wafer is processed to the last step, the wafer is tested by needle to reduce the packaging cost, in the process of needle testing, the tester transmits the electric signal to the wafer core particle through the connection and test probe, then the signal fed back by the wafer core particle is transmitted back to the tester for judgment and processing, and the required core particle is screened, because different test signals need to be collected in the test process, therefore, multiple test lines and multiple test probes need to be used to test the different test hole positions on the surface of the wafer core particle at the same time;

[0003] In the prior art, independent probes are generally used to increase test signals one by one, but multiple independent probes are not convenient for handheld testing, and the test angle of the probe is not convenient for adjustment during needle testing;

[0004] The Chinese patent document with publication number CN211867563U discloses a clamping device for nondestructive testing, which is convenient to operate and facilitates replacement of the clamping mechanism part of the device, thereby facilitating detection of components of different shapes, but does not disclose how to enable the clamping device to clamp the probe for needle testing and facilitate adjustment of the test angle;

[0005] In summary, how to design a butterfly type vertical probe clamping device that can stably clamp the probe for needle testing and facilitate adjustment of the test angle has become a problem to be solved. UTILITY MODEL CONTENTS

[0006] The utility model aims at providing a butterfly type vertical probe clamping device to solve the above problems.

[0007] To achieve the above purpose, the following technical solutions are provided:

[0008] A butterfly type vertical probe clamping device is used to clamp the probe and is used in cooperation with a probe table, comprising: a clamping piece and a supporting mechanism, the clamping piece is overall in the shape of an isosceles trapezoidal plate, the clamping piece is composed of two wing plates with their side walls fixed to each other, two symmetrically arranged probe grooves are formed on the two wing plates, the probe grooves penetrate through the front and rear ends of the wing plates and are inclined towards the central axis of the clamping piece, the width of the probe groove is greater than the width of the probe for accommodating the probe, clamping piece fastening holes are also formed on the two wing plates, the supporting mechanism comprises a fixed plate and a fixed seat, the fixed plate is fixedly connected to the fixed seat, and the left and right ends of the clamping piece are positioned in the fixed plate.

[0009] Preferably, a probe fastening hole is further formed through the probe groove, the probe fastening hole is provided with an internal thread, and the clamping device further comprises a fastening screw which is threadedly connected with the probe fastening hole and used for fixing the probe.

[0010] Preferably, the probe fastening hole is formed at one side of the probe groove, the bottom surface of the screw head of the fastening screw abuts against the top surface of the probe, and the screw rod of the fastening screw does not contact the probe.

[0011] Preferably, the support mechanism further comprises a rotating shaft, a rotating sleeve and a probe holder, the fixing seat is fixedly connected with the rotating shaft, the probe holder is fixedly connected with the rotating sleeve, and the rotating shaft is limitingly arranged in the rotating sleeve, so that the fixing seat is pivotally connected with the probe holder.

[0012] Preferably, a probe holder fastening hole is formed in the probe holder and used for fixing the probe holder and the probe table.

[0013] The probe holder fastening hole is formed in the probe holder and used for fixing the probe holder and the probe table.

[0014] 1. The probe groove is arranged, the probe is limited in the probe groove, the probe fastening hole and the fastening screw are matched, the probe is fixed, the probe can be stably clamped, and the needle measurement operation of the wafer is performed.

[0015] 2. The rotating shaft and the rotating sleeve are arranged, the fixing seat can relatively rotate around the probe holder, the probe is driven to rotate, the needle measurement test angle is adjusted, the probe holder is fixedly connected with the probe table, and the rotation stability is improved. BRIEF DESCRIPTION OF DRAWINGS

[0016] Fig. 1 It is a connection diagram of the clamping piece and the probe;

[0017] Fig. 2 It is a connection diagram of the support mechanism and the probe table.

[0018] In the drawings:

[0019] 101 - wing plate, 102 - probe groove, 103 - clamping piece fastening hole, 104 - probe fastening hole;

[0020] 201 - fixed plate, 202 - fixing seat, 203 - rotating shaft, 204 - rotating sleeve, 205 - probe holder, 206 - probe holder fastening hole;

[0021] 3 - probe;

[0022] 4 - probe table. DETAILED DESCRIPTION

[0023] The technical solutions illustrated in the schematic diagrams of the present utility model will be clearly and completely described below with reference to the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] like Figs. 1-2 As shown, a butterfly-shaped vertical probe clamping device is used to clamp a probe 3 and is used in conjunction with a probe stage 4. It includes a clamping plate and a support mechanism. The clamping plate is an isosceles trapezoidal plate structure, consisting of two wing plates 101 whose sidewalls are abutted and fixed together. Probe grooves 102 are symmetrically formed on the two wing plates 101, penetrating both ends of the wing plates 101 and inclined towards the central axis of the clamping plate. The width of the probe grooves 102 is greater than the width of the probe 3, used to accommodate... The nanoprobe 3 has clamping holes 103 on both wing plates 101. The support mechanism includes a fixing plate 201 and a fixing base 202. The fixing plate 201 is fixedly connected to the fixing base 202. The left and right ends of the clamping piece are limited in the fixing plate 201. The probe 3 is limited in the probe groove 102 by the setting of the probe groove 102, and the probe 3 is fixed by the cooperation of the probe clamping hole 104 and the fastening screw. Thus, the probe 3 can be firmly clamped to perform wafer probe testing.

[0025] In some embodiments, a probe fastening hole 104 is further provided through the probe groove 102. The probe fastening hole 104 is provided with internal threads. The clamping device also includes a fastening screw, which is threadedly connected to the probe fastening hole 104 to fix the probe 3.

[0026] In some embodiments, the probe fastening hole 104 is formed on one side of the probe groove 102, the bottom surface of the screw head of the fastening screw abuts against the top surface of the probe 3, and the screw shank of the fastening screw does not contact the probe 3.

[0027] In some embodiments, the support mechanism further includes a rotating shaft 203, a rotating sleeve 204, and a probe holder 205. The fixed base 202 is fixedly connected to the rotating shaft 203, and the probe holder 205 is fixedly connected to the rotating sleeve 204. The rotating shaft 203 is limited within the rotating sleeve 204, thereby pivotally connecting the fixed base 202 and the probe holder 205. The rotating shaft 203 and the rotating sleeve 204 allow the fixed base 202 to rotate relative to the probe holder 205, thereby driving the probe 3 to rotate. This facilitates the adjustment of the probe testing angle, and the fixed connection between the probe holder 205 and the probe station 4 improves rotational stability.

[0028] In some embodiments, the probe holder 205 is provided with a probe holder fastening hole 206 for fixing the probe holder 205 to the probe station 4.

Claims

1. A butterfly-type vertical probe holding device for holding a probe (3) in cooperation with a probe table (4), characterized in that, The utility model relates to a probe clamping device, including: The utility model relates to a probe clamping device, including:

2. The butterfly type vertical probe card holding device according to claim 1, wherein The probe recess (102) is provided with a probe fastening hole (104) through the inside, and the probe fastening hole (104) is provided with internal thread, the probe clamping device further includes fastening screw, the fastening screw is connected with probe fastening hole (104) threadedly, is used for fixing probe (3).

3. The butterfly-type vertical probe card holding device according to claim 2, wherein The probe fastening hole (104) is provided on one side of probe recess (102), the bottom surface of the screw head of fastening screw is in contact with the top surface of probe (3), and the screw rod of fastening screw does not contact probe (3).

4. The butterfly-type vertical probe card holding device according to claim 3, wherein The support mechanism further includes pivot (203), rotating sleeve (204) and probe frame (205), the fixed base (202) is fixedly connected with the pivot (203), the probe frame (205) is fixedly connected with the rotating sleeve (204), the pivot (203) is limit setting in rotating sleeve (204), and then the fixed base (202) is pivotally connected with probe frame (205).

5. The butterfly-type vertical probe card holding device according to claim 4, wherein Probe frame (205) is provided with probe frame fastening hole (206) and is used for fixing probe frame (205) and probe platform (4).

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