Probe module and probe card test equipment thereof

Abstract

The utility model discloses a probe module and a probe card testing device thereof, and relates to the technical field of semiconductor testing, the probe module comprises an adjusting assembly, a cushion block assembly and a connecting piece, the adjusting assembly comprises a first ceramic sheet, an adjusting sheet and a second ceramic sheet which are sequentially stacked from top to bottom, the adjusting assembly is located at the top of the cushion block assembly, and the adjusting sheet is located at the bottom of the cushion block assembly. The adjusting assembly is slidably connected with the cushion block assembly, the cushion block assembly comprises a cushion block and a third ceramic piece which are arranged in a stacked mode, the connecting piece comprises a connecting assembly and a limiting assembly, and the connecting assembly sequentially penetrates through the third ceramic piece and the cushion block so as to fixedly connect the third ceramic piece and the cushion block; the limiting assembly detachably limits the first ceramic piece, the adjusting piece, the second ceramic piece and the cushion block at set positions, the adjusting assembly slides on the cushion block assembly, so that the probe parts located in the cavity are bent in the same preset direction, and the adjacent probes located in the cavity are not in contact connection due to the design. And the test stability of the probe card is ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor test, especially to a probe module and probe card test equipment thereof. BACKGROUND

[0002] With the rapid development of electronic components and semiconductor devices towards miniaturization and high density, the precision and reliability of the probe test probe module, as the core tool in wafer testing, chip packaging detection and other links, are facing increasingly stringent technical challenges. Traditional probe test probe modules mostly use multi-layer rigid substrate stacking structure, and realize electrical connection between test points and devices to be tested through metal probes. However, the existing technology has a significant defect in actual application: high risk of short circuit between probes: in high-density testing scenarios, the distance between probes is constantly reduced.

[0003] Traditional straight cylinder type probes are prone to shift or bend under external force, and the adjustment sections of adjacent probes are prone to contact due to disordered deformation, resulting in electrical short circuit and seriously affecting the stability of the test. Especially in high-frequency testing, the capacitive coupling effect between probes aggravates signal crosstalk.

[0004] In view of the above problems, the industry has tried to use elastic coating, split probe seat and other improvement schemes, but the problem of coordinated optimization of probe deformation control, accurate leveling and convenient maintenance has not been effectively solved. Therefore, it is urgent to develop a new type of probe test probe module with self-adaptive deformation guidance and high-reliability contact to meet the stringent requirements of advanced semiconductor manufacturing on testing accuracy and efficiency. UTILITY MODEL CONTENTS

[0005] The main purpose of the utility model is to provide a probe module and probe card test equipment, which aims to solve the problem of unstable probe card test, contact between probes and easy short circuit.

[0006] To achieve the above purpose, the utility model provides a probe module, which comprises a plurality of probes, and the probe module comprises:

[0007] An adjusting assembly comprising a first ceramic sheet, an adjusting sheet and a second ceramic sheet arranged in sequence from top to bottom;

[0008] A cushion block assembly, wherein the adjusting assembly is located on the top of the cushion block assembly, and the adjusting assembly is in sliding connection with the cushion block assembly, and the cushion block assembly comprises a cushion block and a third ceramic sheet arranged in sequence;

[0009] A connecting piece comprising a connecting assembly and a limiting assembly, wherein the connecting assembly penetrates the third ceramic sheet and the cushion block in sequence to fixedly connect the third ceramic sheet and the cushion block, and the limiting assembly limits the first ceramic sheet, the adjusting sheet, the second ceramic sheet and the cushion block in a predetermined position in a detachable manner;

[0010] The adjusting piece is provided with a through slot;

[0011] The cushion block is internally provided with a cavity;

[0012] The first ceramic piece is provided with a first plug hole corresponding to the number of probes;

[0013] The second ceramic piece is provided with a second plug hole corresponding to the first plug hole;

[0014] The third ceramic piece is provided with a third plug hole corresponding to the second plug hole;

[0015] When the limiting assembly is in the state of being located in the adjusting assembly and the cushion block, the probes pass through the corresponding first plug hole, through slot, second plug hole, cavity and third plug hole in the vertical direction in sequence;

[0016] When the limiting assembly is in the state of being separated from the adjusting assembly and the cushion block, the adjusting assembly slides on the cushion block assembly, so that the probe parts located in the cavity are bent in the same preset direction.

[0017] Preferably, the connecting piece further comprises a fastening nut cooperating with the number of connecting assemblies;

[0018] The connecting assembly comprises a connecting bolt, and the adjusting assembly is provided with a mounting hole;

[0019] After the adjusting assembly slides on the cushion block assembly, the mounting hole and the end of the connecting bolt away from the third ceramic piece are oppositely arranged, and the fastening nut is located in the mounting hole and is threadedly connected with the connecting bolt to fix the adjusting assembly and the cushion block assembly.

[0020] Preferably, the inner diameter of the third plug hole is smaller than the inner diameter of the probe part located in the cavity.

[0021] Preferably, the probe part located in the cavity and the adjusting assembly is externally provided with an insulating assembly;

[0022] The insulating assembly comprises a poly-p-xylylene coating.

[0023] Preferably, the limiting assembly comprises a plurality of limiting bolts;

[0024] Before the probes are inserted into the adjusting assembly and the cushion block assembly, a plurality of limiting bolts are movably inserted into the adjusting assembly and the cushion block.

[0025] Preferably, the two sides of the cushion block oppositely arranged are provided with windows communicating with the outside.

[0026] Preferably, the window is provided with a dustproof cover light-transmitting plate made of transparent material.

[0027] Preferably, the first ceramic sheet is provided with a first viewing channel located at the outermost probe side;

[0028] The second ceramic sheet is provided with a second viewing channel located directly below the first viewing channel, wherein the first viewing channel, the through slot, the second viewing channel and the cavity are in communication with each other.

[0029] A probe card testing device, comprising the probe module, the cover plate, the support plate, the pcb plate and the fixing piece described above;

[0030] The cover plate, the support plate, the pcb plate and the probe module are sequentially stacked from top to bottom, and the fixing piece detachably fixes the cover plate, the support plate, the pcb plate and the probe module in the corresponding position;

[0031] Wherein, the probe top is in contact with the pcb plate.

[0032] Preferably, the fixing piece comprises a plurality of fixing bolts and a plurality of fixing nuts corresponding to the number of fixing bolts, and a plurality of fixing bolts are sequentially threaded through the cover plate, the support plate, the pcb plate and the probe module and are threadedly connected with the corresponding fixing nuts.

[0033] The beneficial effects of the utility model lie in that: through the state of the limiting assembly in the adjusting assembly and the cushion block, the probe can pass through the corresponding first plug-in hole, the through slot, the second plug-in hole, the cavity and the third plug-in hole in turn in the vertical direction, and then through the state of the limiting assembly out of the adjusting assembly and the cushion block, the adjusting assembly slides on the cushion block assembly, so that the probe parts in the cavity are all curved in the same preset direction, the above design limits the bending direction of the probe parts in the cavity after stress, so that the adjacent probes in the cavity will not be in contact under the elastic action of the probe regardless of the stress on the probe end, and the interval distance is always maintained, so that the probe card testing is stable, short circuit phenomenon does not occur, high-speed high-frequency testing is realized, and the testing efficiency of the corresponding testing product is improved. BRIEF DESCRIPTION OF DRAWINGS

[0034] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the drawings needed to be used in the embodiment or the prior art description will be briefly introduced below, and obviously, the drawings in the following description are only some embodiments of the utility model, and those skilled in the art can obtain other drawings from the structures shown in the drawings without creating creative labor.

[0035] Figure 1 It is the exploded view of the probe module that the probe is just inserted into the probe module in the utility model;

[0036] Figure 2 It is the exploded view of the probe module that the adjusting assembly is moved in the utility model;

[0037] Figure 3 It is the perspective structural schematic diagram of the probe module that the adjusting assembly is moved in the utility model;

[0038] Figure 4 It is the sectional view of the probe module in the utility model;

[0039] Figure 5 It is the structural schematic diagram of the probe card testing equipment in the utility model;

[0040] Figure 6 It is the exploded view of the probe card testing equipment in the utility model.

[0041] Label explanation:

[0042] 100, probe module;

[0043] 1, first ceramic sheet; 11, first plug hole; 12, first inspection channel;

[0044] 2, adjusting sheet; 21, through slot;

[0045] 3, second ceramic sheet; 31, second plug hole; 32, second inspection channel;

[0046] 4, cushion block; 41, cavity; 42, second limiting hole; 43, window;

[0047] 5, third ceramic sheet; 51, third plug hole;

[0048] 6, probe;

[0049] 7, first limiting hole;

[0050] 8, positioning hole;

[0051] 9, connecting piece; 91, connecting bolt; 92, fastening nut;

[0052] 10, cover plate;

[0053] 20, support plate;

[0054] 30, pcb board.

[0055] The utility model realizes the purpose, functional characteristics and advantages, which will be further explained in combination with embodiments and with reference to the drawings. DETAILED DESCRIPTION

[0056] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of the present application.

[0057] It should be noted that if the embodiments of the present application involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative positional relationship, movement condition, etc. between components in a certain specific posture (as shown in the drawings), and if the specific posture changes, the directional indications also change accordingly.

[0058] In addition, if the embodiments of the present application involve descriptions of "first", "second", etc., the descriptions of "first", "second", etc. are only for description purposes, and cannot be understood as indicating or implying the relative importance of the indicated technical features or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first" and "second" can explicitly or implicitly include at least one of the features. In addition, the meaning of "and / or" appearing throughout the text is that it includes three parallel schemes. Taking "A and / or B" as an example, it includes A scheme, or B scheme, or A and B schemes. In addition, the technical solutions of each embodiment can be combined with each other, but it must be based on the realization of those of ordinary skill in the art. When the combination of technical solutions appears contradictory or unachievable, it should be considered that the combination of technical solutions does not exist and is not within the protection scope required by the present application.

[0059] The present application provides a probe module, please refer to Figures 1-6, including a plurality of probes 6, the probe module 100 includes an adjusting assembly, a cushion block assembly and a connecting piece 9, the adjusting assembly includes a first ceramic sheet 1, an adjusting sheet 2 and a second ceramic sheet 3 which are sequentially stacked from top to bottom, the adjusting assembly is located on top of the cushion block assembly, and the adjusting assembly is in sliding connection with the cushion block assembly, the cushion block assembly includes a cushion block 4 and a third ceramic sheet 5 which are stacked, the connecting piece 9 includes a connecting assembly and a limiting assembly (not shown), the connecting assembly penetrates through the third ceramic sheet 5 and the cushion block 4 in sequence to fixedly connect the third ceramic sheet 5 and the cushion block 4, and the limiting assembly limits the first ceramic sheet 1, the adjusting sheet 2, the second ceramic sheet 3 and the cushion block 4 at a predetermined position in a detachable manner, wherein the adjusting sheet 2 is provided with a through slot 21, the cushion block 4 is provided with a cavity 41 in the inside, the first ceramic sheet 1 is provided with a plurality of first plug-in holes 11 corresponding to the number of the plurality of probes 6, the second ceramic sheet 3 is provided with a plurality of second plug-in holes 31 corresponding to the first plug-in holes 11, and the third ceramic sheet 5 is provided with a plurality of third plug-in holes 51 corresponding to the second plug-in holes 31, in a state that the limiting assembly is located in the adjusting assembly and the cushion block 4, the probes 6 are plugged in a vertical direction through the corresponding first plug-in holes 11, the through slot 21, the second plug-in holes 31, the cavity 41 and the third plug-in holes 51 in sequence, in a state that the limiting assembly is separated from the adjusting assembly and the cushion block 4, the probes 6 in the cavity 41 are partially bent in the same preset direction by sliding the adjusting assembly on the cushion block assembly, the above design limits the bending direction of the probes 6 in the cavity 41 after being stressed, so that the adjacent probes 6 in the cavity 41 will not contact under the elasticity of the probes 6, regardless of the stress on the end of the probes 6, and the interval distance is always maintained, thereby ensuring the stability of the probe card test, avoiding the short circuit phenomenon, realizing the high-speed and high-frequency test, and improving the test efficiency of the corresponding test product.

[0060] It should be noted that in the embodiment, the corresponding test product is a chip (not shown).

[0061] In the embodiment, please refer to Figures 1-4 , the preset direction is the opposite direction of the sliding of the adjusting assembly on the cushion block 4, the shape of the probe 6 in the above design is compared with that of the vertical probe 6, the deformation direction of the probe 6 due to the elastic force can be determined, so that after the end of the probe 6 is stressed, it will only be further bent in the preset direction, and will not deform in other directions, thereby improving the chip test efficiency.

[0062] In the embodiment, please refer to Figures 1-4The adjusting assembly is placed on the cushion block assembly, wherein the first ceramic sheet 1, the adjusting sheet 2 and the second ceramic sheet 3 of the adjusting assembly are provided with a plurality of first limiting holes 7, the first limiting holes 7 of the above structures are oppositely arranged and communicated with each other, and the cushion block 4 is provided with second limiting holes 42 matched with the first limiting holes 7 on the second ceramic sheet 3. The limiting assembly is movably inserted into the first limiting holes 7 and the second limiting holes 42, and the adjusting assembly is temporarily stabilized on the top of the cushion block 4, so that the first inserting hole 11 on the first ceramic sheet 1, the through slot 21 on the adjusting sheet 2, the second inserting hole 31 on the second ceramic sheet 3, the cavity 41 on the cushion block 4 and the third inserting hole 51 on the third ceramic sheet 5 are correspondingly arranged to ensure that the probe 6 can be normally inserted into the probe module 100.

[0063] In the embodiment, the limiting assembly includes a plurality of limiting bolts, and before the probe 6 is inserted into the adjusting assembly and the cushion block assembly, the plurality of limiting bolts are movably inserted into the adjusting assembly and the cushion block 4. In other words, the plurality of limiting bolts are movably inserted into the first limiting holes 7 and the second limiting holes 42. Of course, in other embodiments, the limiting assembly can also be other structures, such as a connecting shaft, as long as the limiting assembly can ensure that the probe 6 can be quickly inserted into the probe module 100 along the vertical direction.

[0064] Specifically, please refer to Figure 1 and Figure 2 The first ceramic sheet 1, the adjusting sheet 2 and the second ceramic sheet 3 of the adjusting assembly are also provided with a plurality of positioning holes 8, the positioning holes 8 of the above structures are oppositely arranged and communicated with each other, wherein the positioning holes 8 along the vertical direction form mounting holes, that is, the adjusting assembly is provided with the aforementioned mounting holes. When the probe 6 is inserted into the probe module 100, the user disengages the limiting assembly from the first limiting holes 7 and the second limiting holes 42, that is, the user pulls out the limiting bolts, and then the user pushes the adjusting assembly. The adjusting assembly moves on the surface of the cushion block 4 under the force, so that each mounting hole is oppositely arranged with each connecting assembly end located on the cushion block 4.

[0065] In the embodiment, please refer to Figure 2 and Figure 4 The connecting piece 9 further includes a fastening nut 92 matched with the number of connecting assemblies, and the connecting assembly includes a connecting bolt 91, that is, each mounting hole is oppositely arranged with the end of the connecting bolt 91 away from the third ceramic sheet 5. The fastening nut 92 is located in the mounting hole and is threadedly connected with the connecting bolt 91 to fix the adjusting assembly and the cushion block assembly. The above design makes the part of the probe 6 located in the cavity 41 always maintain a bent state.

[0066] In other embodiments, the connecting assembly can be other connecting mechanisms, such as a long bolt and a short bolt, the screw rod of the long bolt is hollow inside, and the inner wall of the screw rod is threaded, the long bolt fixes the third ceramic sheet 5 and the cushion block 4, and the short bolt is connected with the screw rod through the mounting hole, the above design can also fix the entire probe module 100, and the part of the probe 6 located in the cavity 41 is always maintained in a bent state.

[0067] Further, the inner diameter of the third plug-in hole 51 on the third ceramic sheet 5 is smaller than the inner diameter of the part of the probe 6 located in the cavity 41, which is mainly used for limiting, avoiding the probe 6 from excessively contacting the wafer on the chip, and affecting the chip test.

[0068] In the embodiment, the part of the probe 6 located in the cavity 41 and the adjusting assembly is provided with an insulating assembly outside, wherein the insulating assembly comprises a poly-p-xylylene coating, and the design is also to ensure that the adjacent probes 6 will not be contacted and powered on, and affect the test effect.

[0069] In the embodiment, please refer to Figure 2 and Figure 3 The cushion block 4 is provided with a window 43 in communication with the outside at the two opposite side portions, which facilitates heat dissipation and facilitates users to view the state of the part of the probe 6 in the cavity 41.

[0070] In the embodiment, the window 43 is provided with a dustproof light-transmitting plate (not shown) made of transparent material, which is mainly used for avoiding dust from entering the cavity 41 and affecting the test effect.

[0071] In fact, the first ceramic sheet 1 is provided with a first viewing channel 12 located at the side portion of the outermost probe 6, and the second ceramic sheet 3 is provided with a second viewing channel 32 located directly below the first viewing channel 12, wherein the first viewing channel 12, the through slot 21, the second viewing channel 32 and the cavity 41 are in communication with each other, the above design is used for users to view the vertical state of the probe 6 from the top of the first ceramic sheet 1, and whether the probe 6 is inserted incorrectly can be checked, so that timely adjustment can be obtained, and the design also has a heat dissipation effect.

[0072] The utility model also provides a probe card test equipment, please refer to Figure 5 and Figure 6The probe card test device comprises the aforementioned probe module 100, the cover plate 10, the support plate 20, the pcb plate 30 and a fixing member (not shown), wherein the cover plate 10, the support plate 20, the pcb plate and the probe module 100 are sequentially stacked from top to bottom, the fixing member detachably fixes the cover plate 10, the support plate 20, the pcb plate 30 and the probe module 100 at corresponding positions, and the top of the probe 6 is in contact with the pcb plate 30. The device can test the chip. Specifically, the bottom of the probe 6 is in contact with the wafer on the chip, and the test of the chip is transmitted to other structures such as a tester through the probe 6, so as to screen qualified chips.

[0073] In the embodiment, the fixing member (not shown) comprises a plurality of fixing bolts (not shown) and a plurality of fixing nuts (not shown) corresponding to the number of the fixing bolts. The plurality of fixing bolts are sequentially penetrated through the cover plate 10, the support plate 20, the pcb plate 30 and the probe module 100 and are in threaded connection with the corresponding fixing nuts. The plurality of fixing bolts are uniformly distributed on the side of the probe card test device to assemble the probe card test device.

[0074] The above is only an optional embodiment of the utility model, and does not limit the patent range of the utility model. Any equivalent structural transformation, direct / indirect application in other related technical fields under the utility model concept of the utility model, and the contents of the utility model specification and drawings are included in the patent protection range of the utility model.

Claims

1. A probe module comprising a plurality of probes, characterized in that, The probe module comprises: The adjusting assembly comprises a first ceramic sheet, an adjusting sheet and a second ceramic sheet arranged in sequence from top to bottom; The adjusting assembly is located on the top of the cushion block assembly and is in sliding connection with the cushion block assembly, and the cushion block assembly comprises a cushion block and a third ceramic sheet arranged in sequence; The connecting member comprises a connecting assembly and a limiting assembly, the connecting assembly penetrates the third ceramic sheet and the cushion block in sequence to fixedly connect the third ceramic sheet and the cushion block, and the limiting assembly limits the first ceramic sheet, the adjusting sheet, the second ceramic sheet and the cushion block at a predetermined position in a detachable manner; The adjusting sheet is provided with a through slot; The cushion block is internally provided with a cavity; The first ceramic sheet is provided with a plurality of first plug-in holes corresponding to the number of probes; The second ceramic sheet is provided with second plug-in holes corresponding to the first plug-in holes; The third ceramic sheet is provided with third plug-in holes corresponding to the second plug-in holes; When the limiting assembly is in the state of being located in the adjusting assembly and the cushion block, the probes are plugged in the first plug-in holes, the through slot, the second plug-in holes, the cavity and the third plug-in holes in sequence in the vertical direction; When the limiting assembly is separated from the state of being located in the adjusting assembly and the cushion block, the adjusting assembly slides on the cushion block assembly, so that the probe parts located in the cavity are all bent in the same predetermined direction.

2. The probe module of claim 1, wherein The connecting member further comprises a fastening nut matched with the number of connecting assemblies; The connecting assembly comprises a connecting bolt, and the adjusting assembly is provided with a mounting hole; After the adjusting assembly slides on the cushion block assembly, the mounting hole is in opposite arrangement with the end of the connecting bolt away from the third ceramic sheet, and the fastening nut is located in the mounting hole and is in threaded connection with the connecting bolt to fix the adjusting assembly and the cushion block assembly.

3. The probe module of claim 2, wherein The inner diameter of the third plug-in hole is smaller than the inner diameter of the probe part located in the cavity.

4. The probe module of claim 3, wherein, The probe part located in the cavity and the adjusting assembly is externally provided with an insulating assembly; The insulating assembly comprises a poly-p-xylylene coating.

5. The probe module of claim 1, wherein, The limiting assembly comprises a plurality of limiting bolts; Before the probes are inserted into the adjusting assembly and the cushion block assembly, the plurality of limiting bolts are movably plugged into the adjusting assembly and the cushion block.

6. The probe module of claim 1, wherein The cushion block is provided with windows in communication with the outside on the two opposite sides.

7. The probe module of claim 6, wherein, The window is provided with a dustproof light-transmitting plate made of transparent material.

8. The probe module according to any one of claims 1 to 7, wherein The first ceramic sheet is provided with a first inspection channel located on the side of the outermost probe; The second ceramic sheet is provided with a second inspection channel located directly below the first inspection channel, and the first inspection channel, the through slot, the second inspection channel and the cavity are in communication with each other.

9. A probe card test apparatus characterized by, The probe card testing device comprises the probe module, the cover plate, the support plate, the pcb plate and the fixing member of any one of claims 1-8. The cover plate, the support plate, the PCB plate and the probe module are sequentially stacked from top to bottom, and the fixing member detachably fixes the cover plate, the support plate, the PCB plate and the probe module in the corresponding positions. The probe top is in contact with the PCB plate.

10. The probe card testing apparatus of claim 9, wherein The fixing member includes a plurality of fixing bolts and a plurality of fixing nuts corresponding in number to the fixing bolts, and the plurality of fixing bolts are sequentially threaded through the cover plate, the support plate, the PCB plate and the probe module and are in threaded connection with the corresponding fixing nuts.

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