Adhesive discharging and loading device for electrostatic chuck ceramic plate

Abstract

The utility model discloses a glue discharging and loading device for an electrostatic chuck ceramic plate, which belongs to the technical field of loading devices and comprises at least two metal plates arranged in the vertical direction. The porous ceramic setter plate is placed on the metal plate; and the supporting mechanism comprises at least three supporting rods and is used for connecting different metal plates. The metal plate with holes and the porous ceramic load bearing plate are arranged, and the ceramic to be subjected to glue discharging is placed on the porous ceramic load bearing plate, so that the uniformity of the whole glue discharging process is ensured; by arranging the at least two metal plates and the corresponding porous ceramic setter plates, a plurality of ceramics to be subjected to glue removal can be placed; by arranging the supporting mechanism, different metal plates can be supported, it is guaranteed that a certain distance exists between the different metal plates, ceramic to be subjected to glue discharging can be placed, a channel allowing other materials to flow is provided, the glue discharging efficiency is higher, and the yield is better.

Description

Technical Field

[0001] This utility model relates to the field of loading device technology, and in particular to a glue-removing loading device for an electrostatic chuck ceramic disc. Background Technology

[0002] The ceramic blanks used to prepare electrostatic chuck ceramic discs contain a large amount of organic binders and plasticizers during forming. During debinding and firing, the decomposition and volatilization of these organic compounds can lead to deformation and cracking of the ceramic blanks. Furthermore, the high carbon content of these organic compounds can negatively impact sintering quality when insufficient oxygen is present to create a reducing atmosphere. The loading method in the debinding furnace also directly affects product quality, significantly influencing equipment capacity, tooling utilization, and tooling costs. Therefore, a debinding loading device for electrostatic chuck ceramic discs is needed. Utility Model Content

[0003] The technical problem to be solved by this utility model is to provide a glue removal and loading device for electrostatic chuck ceramic discs, which has low manufacturing cost, high durability, improves glue removal rate, and improves product yield.

[0004] To solve the above-mentioned technical problems, the technical solution of this utility model is as follows:

[0005] A glue-removing loading device for an electrostatic chuck ceramic disk, comprising:

[0006] At least two metal plates arranged vertically;

[0007] A porous ceramic firing plate is placed on the metal plate;

[0008] The support mechanism includes at least three support rods for connecting the different metal plates.

[0009] Preferably, the metal plate includes a mesh plate and a connecting portion disposed on the edge of the mesh plate. The mesh plate includes a plurality of horizontal plates arranged side by side and a plurality of connecting plates for connecting different horizontal plates.

[0010] Preferably, the support rod includes a first support member and at least one second support member, wherein the second support member is connected to the first support member.

[0011] Preferably, the first support member includes a first support body, the upper and lower ends of which are respectively provided with a first upper connecting protrusion and a lower connecting protrusion. The second support member includes a second support body, one end of which is provided with a second upper connecting protrusion and the other end is provided with a connecting groove, the connecting groove cooperating with the first upper connecting protrusion or the lower connecting protrusion.

[0012] Preferably, the lower side of the connecting portion is provided with a plurality of first grooves that cooperate with the second upper connecting protrusion, and the upper side of the connecting portion is provided with a plurality of second grooves that cooperate with the first upper connecting protrusion or the lower connecting protrusion, wherein the first grooves and the second grooves are aligned.

[0013] Preferably, the metal plate and the support mechanism are both made of tungsten or molybdenum.

[0014] Preferably, the porosity of the porous ceramic support plate is 10% to 30%.

[0015] The above technical solution has the following beneficial effects:

[0016] By setting up a perforated metal plate and a porous ceramic firing plate, and placing the ceramic to be degummed on the porous ceramic firing plate, the uniformity of the entire degumming process is ensured.

[0017] By setting at least two metal plates and corresponding porous ceramic firing plates, multiple ceramics to be discharged can be placed.

[0018] By setting up a support mechanism, different metal plates can be supported, ensuring a certain distance between them. This allows for the placement of ceramics to be de-adhesiveed and provides channels for other flow, resulting in higher de-adhesive efficiency and a better yield rate. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of the glue discharge loading device of this utility model;

[0020] Figure 2 This is a bottom view of the metal plate structure of this utility model;

[0021] Figure 3 This is a top view of the metal plate structure of this utility model;

[0022] Figure 4 This is an enlarged structural schematic diagram of the first support member of this utility model;

[0023] Figure 5 This is an enlarged cross-sectional view of the second support member of this utility model. Detailed Implementation

[0024] The specific embodiments of this utility model will be further described below with reference to the accompanying drawings. It should be noted that these descriptions are for the purpose of aiding understanding of this utility model, but do not constitute a limitation thereof. Furthermore, the technical features involved in the various embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0025] refer to Figures 1-5A glue-removing loading device for an electrostatic chuck ceramic disc, comprising:

[0026] At least two metal plates 1 arranged vertically;

[0027] A porous ceramic firing plate 2 is placed on a metal plate 1;

[0028] The support mechanism includes at least three support rods 3 for connecting different metal plates 1.

[0029] Specifically, the glue-discharging loading device includes at least two metal plates 1, and a porous ceramic firing plate 2 is placed on each metal plate 1. The porous ceramic firing plate 2 is used to place the ceramic to be discharged. At least three support rods 3 of the support mechanism are used to support the metal plates 1 arranged in the vertical direction. The number of metal plates 1 is set according to specific requirements and is arranged sequentially in the vertical direction. Correspondingly, the number of porous ceramic firing plates 2 is the same as the number of metal plates 1. Multiple support rods 3 can be set, such as three or four. The three or four support rods 3 are evenly distributed in the circumferential direction to better support the metal plates 1.

[0030] In other embodiments of this example, a number of support members 8 may be provided on the lower edge of the bottom metal plate 1 to support it. Specifically, these support members may be metal blocks, which are used to raise the bottom metal plate 1 so that the adhesive to be removed from the bottom metal plate 1 can be removed fully and evenly.

[0031] In some embodiments, the metal plate 1 includes a mesh plate and a connecting portion 4 disposed on the edge of the mesh plate. The mesh plate includes a plurality of horizontal plates 5 arranged side by side and a plurality of connecting plates 6 for connecting different horizontal plates 5.

[0032] Specifically, the mesh plate includes several horizontal plates 5 arranged side by side, and connecting plates 6 for connecting different horizontal plates 5, so that the mesh plate forms a structure with multiple square holes. The distance between any two adjacent horizontal plates 5 arranged side by side is equal, and the distance between any two adjacent connecting plates 6 is also equal. The mesh plate, together with the porous ceramic firing plate 2, improves the efficiency of glue removal and makes the glue removal more uniform, thereby improving the yield of glue removal products. The connecting part 4 is used to connect with the support rod 3, that is, the support rod 3 is connected to the edge of the metal plate 1. Setting the connection position of the support rod 3 at the edge of the metal plate 1 will not affect the placement of the porous ceramic firing plate 2, that is, it will not affect the placement of the ceramic to be glued.

[0033] In other embodiments of this example, the transverse plate 5 can be a transverse rod, and the connecting plate 6 can be a connecting rod. Whether it is set as a plate or a rod is selected and set according to specific needs and conditions.

[0034] In some embodiments, the support rod 3 includes a first support member and at least one second support member, wherein the second support member is connected to the first support member.

[0035] Specifically, support is provided by setting a first support member and at least one second support member. The lower end of the first support member is connected to the upper end of the metal plate 1, the upper end of the first support member is connected to the second support member, and the upper end of the second support member is connected to the lower end of another metal plate 1. If there are multiple second support members, they are connected in a coordinated manner. The number of second support members is determined by the distance between two adjacent metal plates 1. That is, the more second support members there are, the greater the distance between two adjacent metal plates 1.

[0036] In some embodiments, the first support member includes a first support body 10, the upper and lower ends of the first support body 10 are respectively provided with a first upper connecting protrusion 11 and a lower connecting protrusion 12, and the second support member includes a second support body 13, one end of the second support body 13 is provided with a second upper connecting protrusion 15, and the other end is provided with a connecting groove 14, the connecting groove 14 cooperating with the first upper connecting protrusion 11 or the lower connecting protrusion 12.

[0037] Specifically, the first support body 10 and the second support body 13 are both cylindrical. The first upper connecting protrusion 11, the second upper connecting protrusion 15, and the lower connecting protrusion 12 have the same structure, which can be a semi-circular structure. The corresponding connecting groove 14 is also a semi-circular groove. The semi-circular structure facilitates installation during connection. During connection, the lower connecting protrusion 12 is first engaged with the upper side of the lower metal plate 1. Then, the second support member is connected to the upper end of the first support body 10. The upper end of the second support member is then connected to another metal plate 1. That is, the first upper connecting protrusion 11 engages with the connecting groove 14, and the second upper connecting protrusion 15 is connected to the upper metal plate 1.

[0038] In some embodiments, the lower side of the connecting portion 4 is provided with a plurality of first grooves 7 that cooperate with the second upper connecting protrusion 15, and the upper side of the connecting portion 4 is provided with a plurality of second grooves 9 that cooperate with the first upper connecting protrusion 11 or the lower connecting protrusion 12. The first grooves 7 and the second grooves 9 are aligned.

[0039] Specifically, the structure of the first groove 7 and the second groove 9 can be the same as that of the connecting groove 14, which facilitates manufacturing and connection. The number of the first groove 7 and the second groove 9 is the same, and multiple sets can be set and then evenly distributed along the circumference. The specific number is the same as the number of support rods 3, that is, three or four sets are evenly distributed along the circumference for better support. The first groove 7 and the second groove 9 are aligned to facilitate the connection of the support rods 3. Several metal plates 1 are set in the vertical direction. A porous ceramic firing plate 2 is placed on the metal plate 1, and ceramics to be discharged are placed on the porous ceramic firing plate 2. Due to gravity, the first groove 7 and the second groove 9 are set in a form that cooperates with the second upper connecting protrusion 15 and the first upper connecting protrusion 11 to meet the support requirements.

[0040] In some embodiments, the metal plate 1 and the support mechanism are both made of tungsten or molybdenum.

[0041] Specifically, tungsten or molybdenum have high melting points, allowing them to be used at temperatures suitable for debinding without damage.

[0042] In some embodiments, the porosity of the porous ceramic support plate 2 is 10% to 30%.

[0043] Specifically, the porosity of the porous ceramic firing plate 2 is 10% or 30%, or even 20%. The porous ceramic firing plate 2 has pores, which can make the glue discharge efficiency higher and more uniform. The material of the porous ceramic firing plate 2 can be alumina ceramic, zirconium oxide ceramic, nitride ceramic or silicide ceramic, depending on the needs or actual conditions.

[0044] By setting a perforated metal plate 1 and a porous ceramic firing plate 2, and placing the ceramic to be degummed on the porous ceramic firing plate 2, the uniformity of the entire degumming process is ensured.

[0045] By setting at least two metal plates 1 and corresponding porous ceramic firing plates 2, multiple ceramics to be discharged can be placed.

[0046] By setting up a support mechanism, different metal plates 1 can be supported, ensuring that there is a certain distance between different metal plates 1, allowing the ceramic to be drained to be placed, and providing a channel for other flow, thus making the draining efficiency higher and the yield better.

[0047] The embodiments of this utility model have been described in detail above with reference to the accompanying drawings, but this utility model is not limited to the described embodiments. For those skilled in the art, various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of this utility model, and these variations still fall within the protection scope of this utility model.

Claims

1. A stripper loading device for electrostatic chuck ceramic disks, characterized by, The application relates to a supporting mechanism for a porous ceramic supporting plate. The supporting mechanism comprises at least three supporting rods. The metal plate comprises a mesh plate and a connecting part arranged at the edge of the mesh plate. The mesh plate comprises a plurality of transverse plates arranged side by side and a plurality of connecting plates used for connecting the transverse plates.

2. A resist unloading and loading apparatus for an electrostatic chuck ceramic disk according to claim 1, wherein The supporting rod comprises a first supporting part and at least one second supporting part.

3. A de-gassing loading device for an electrostatic chuck ceramic disc according to claim 2, wherein, The first supporting part comprises a first supporting body, and the upper and lower ends of the first supporting body are respectively provided with a first upper connecting protrusion and a lower connecting protrusion.

4. A resist unloading and loading device for an electrostatic chuck ceramic disc according to claim 3, wherein The second supporting part comprises a second supporting body, and one end of the second supporting body is provided with a second upper connecting protrusion, and the other end is provided with a connecting groove matched with the first upper connecting protrusion or the lower connecting protrusion.

5. A de-gassing loading device for an electrostatic chuck ceramic disc according to claim 4, wherein, The lower side of the connecting part is provided with a plurality of first grooves matched with the second upper connecting protrusion, and the upper side of the connecting part is provided with a plurality of second grooves matched with the first upper connecting protrusion or the lower connecting protrusion.

6. A resist unloading and loading apparatus for an electrostatic chuck ceramic disk according to claim 1, wherein The first grooves and the second grooves are arranged in alignment.

7. A resist unloading and loading apparatus for an electrostatic chuck ceramic disk according to claim 1, wherein The material of the metal plate and the supporting mechanism is tungsten or molybdenum. The porosity of the porous ceramic supporting plate is 10%-30%.

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