Track mechanism and evaporation coating equipment

Abstract

The utility model discloses a track mechanism and evaporation coating equipment. The rail mechanism comprises a first supporting piece. The second supporting piece is adjustably arranged on the first supporting piece; the guide rail body is arranged at the end, away from the first supporting piece, of the second supporting piece, and the position of the second supporting piece can be adjusted in the first direction and / or the second direction so as to drive the guide rail body to adjust the position. The second supporting piece is used for supporting the guide rail body and can adjust the position relative to the first supporting piece in the first direction and / or the second direction to drive the guide rail body to adjust the position, so that the height, the position and the like of the guide rail body can be adjusted, and the installation precision of the guide rail body is improved.

Description

Technical Field

[0001] This utility model relates to the field of evaporation coating equipment technology, and more specifically, to a track mechanism and evaporation coating equipment. Background Technology

[0002] In related technologies, the winding device of evaporation coating equipment is generally supported on a track and can move along the track. In order to reduce the overall height of the device, the track is usually buried underground, with only a portion of the guide rail exposed above ground for the wheels to contact and move. Due to the poor precision of ground construction, especially in cast-in-place concrete formwork, the dimensions are often calculated in centimeters, resulting in low installation precision of the track.

[0003] Therefore, a new technical solution is needed to solve the above-mentioned technical problems. Utility Model Content

[0004] One objective of this invention is to provide a new technical solution for a track mechanism.

[0005] According to a first aspect of the present invention, a track mechanism is provided. The track mechanism includes:

[0006] First support component;

[0007] The second support member is adjustablely disposed on the first support member;

[0008] The guide rail body is disposed at the end of the second support member opposite to the first support member. The second support member can be adjusted in position along the first direction and / or the second direction to drive the guide rail body to adjust its position.

[0009] Optionally, it further includes a first adjusting member, which is connected to the second support member and is capable of driving the second support member to move along the first direction.

[0010] Optionally, multiple first adjusting members are provided, and the multiple first adjusting members are respectively located on both sides of the guide rail body along the width direction. Each first adjusting member can adjust the second support member independently.

[0011] Optionally, the first adjusting member includes a first bolt, which is connected to the second support member and the first support member respectively.

[0012] Optionally, it further includes a second adjusting member, which is mounted on the first support member and can drive the second support member to move along a second direction.

[0013] Optionally, the second support member is provided with a guide hole along the second direction, and the first support member is provided with a guide rod that cooperates with the guide hole.

[0014] Optionally, the guide rod includes a second bolt, one end of which passes through the guide hole and is screwed to the first support member.

[0015] Optionally, it further includes a third adjusting member, which is disposed on the first support member and is capable of driving the first support member to move along the first direction.

[0016] Optionally, it also includes a base and a connector, the connector being capable of securing the first support member to the base.

[0017] Optionally, the system further includes a pad, which is disposed on the base. The third adjusting member includes a third bolt, which is screwed to the first supporting member. One end of the third bolt passes through the first supporting member and abuts against the pad.

[0018] Optionally, the first support member extends along the length of the guide rail body, and multiple second support members are provided, with the multiple second support members spaced apart along the length of the guide rail body.

[0019] Optionally, a first positioning groove is provided at one end of the guide rail body.

[0020] According to a second aspect of the present invention, an evaporation coating apparatus is provided. This evaporation coating apparatus includes the track mechanism described in the above embodiments.

[0021] One technical advantage of this application is that the second support member is used to support the guide rail body. The second support member can adjust its position relative to the first support member along the first direction and / or the second direction to drive the guide rail body to adjust its position, thereby adjusting the height and spacing of the guide rail body, etc., to improve the installation accuracy of the guide rail body.

[0022] Other features and advantages of the present invention will become clear from the following detailed description of exemplary embodiments of the present invention with reference to the accompanying drawings. Attached Figure Description

[0023] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments of the present invention and, together with their description, serve to explain the principles of the present invention.

[0024] Figure 1 This is a schematic diagram of the track mechanism according to an embodiment of this application.

[0025] Figure 2 yes Figure 1 The enlarged view of point A is shown.

[0026] Figure 3This is a side view of a track mechanism according to an embodiment of this application.

[0027] Figure 4 This is a bottom view of the track mechanism according to an embodiment of this application.

[0028] Figure 5 yes Figure 4 The enlarged view at point B is shown.

[0029] Figure 6 This is a partial structural schematic diagram of an evaporation coating apparatus according to an embodiment of this application.

[0030] Figure 7 This is a partial structural schematic diagram of an evaporation coating apparatus according to another embodiment of this application.

[0031] Figure 8 This is a cross-sectional view of a partial structure of an evaporation coating apparatus according to an embodiment of this application.

[0032] Figure 9 yes Figure 8 The enlarged view at point C is shown.

[0033] Figure label:

[0034] 100. Track mechanism; 1. First support member; 11. Guide rod; 2. Second support member; 21. Guide hole; 3. Guide rail body; 31. First positioning groove; 4. First adjusting member; 5. Second adjusting member; 7. Third adjusting member; 8. Base; 9. Connecting member; 10. Pad; 101. Clearance groove; 20. Limiting member; 30. Mounting member; 40. Second positioning member; 200. Cavity; 210. First positioning member. Detailed Implementation

[0035] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the present invention.

[0036] The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the invention or its application or use.

[0037] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and equipment should be considered part of the specification.

[0038] In all the examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values.

[0039] It should be noted that similar labels and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0040] According to one embodiment of this application, a track mechanism is provided. For example... Figures 1 to 9 As shown, the track mechanism 100 includes a first support member 1, a second support member 2, and a guide rail body 3. The second support member 2 is adjustablely disposed on the first support member 1. The guide rail body 3 is disposed at the end of the second support member 2 opposite to the first support member 1. The second support member 2 can be adjusted in position along a first direction and / or a second direction to drive the guide rail body 3 to adjust its position.

[0041] In this example, the second support 2 is used to support the guide rail body 3. The second support 2 can adjust its position relative to the first support 1 along the first direction and / or the second direction to drive the guide rail body 3 to adjust its position, thereby adjusting the height and spacing of the guide rail body 3 to improve the installation accuracy of the guide rail body 3.

[0042] In this design, the first direction can be vertical, with the second support member 2 positioned above the first support member 1, and the guide rail body 3 positioned above the second support member 2. By adjusting the movement of the second support member 2 along the first direction, the height of the guide rail body 3 can be adjusted. The second direction can be the width direction of the guide rail body 3; by adjusting the movement of the second support member 2 along the second direction, the position of the guide rail body 3 in the second direction can be adjusted. That is, the track mechanism 100 can be configured in two sets, with the second support member 2 in each set driving the corresponding guide rail body 3 to move along the second direction, thereby adjusting the distance between the two guide rail bodies 3.

[0043] Alternatively, the track mechanism 100 can be set in two sets. In one set, the guide rail body 3 of the track mechanism 100 is fixed, and in the other set, the second support member 2 can be supported on one end of the corresponding guide rail body 3. The second support member 2 can drive one end of the guide rail body 3 to shift, thereby adjusting the two guide rail bodies 3 to be parallel to each other.

[0044] When assembling the guide rail body 3, tools such as a square and a level can be used to adjust the accuracy of the guide rail body 3.

[0045] like Figure 2 and Figure 3As shown, in this example, the track mechanism 100 also includes a limiting member 20, which is used to fix the guide rail body 3 to the second support member 2. For example, the guide rail body 3 can be in the shape of an "I" shape, and the limiting member 20 can be a limiting plate structure. The limiting member 20 is fixed to the second support member 2 by fasteners such as screws or bolts, and the limiting member 20 can press down on the lower side of the guide rail body 3 to fix the guide rail body 3. Two limiting members 20 can be provided, located on both sides of the guide rail body 3 along the width direction, to further improve the stability and reliability of fixing the guide rail body 3. Of course, the limiting member 20 can also be other structures, for example, the guide rail body 3 can be directly fastened to the second support member 2 by fasteners such as screws or bolts. Those skilled in the art can determine the appropriate method according to the actual situation, and no specific limitation is made here.

[0046] In this example, the first support member 1 and the second support member 2 can be support plate structures. For example, the first support member 1 and the second support member 2 can be rectangular plates or other structures. Those skilled in the art can determine the structure according to the actual situation, and no specific limitation is made here.

[0047] like Figure 6 and Figure 7 As shown, in this example, the track mechanism 100 can be used in an evaporation coating apparatus, which also includes a cavity 200 and a cover plate. An evaporation boat is disposed inside the cavity 200, and a winding mechanism is disposed on the cover plate. The guide rail body 3 is located on one side of the open end of the cavity 200. The upper end face of the guide rail body 3 can support the cover plate, and the cover plate can slide on the guide rail body 3 to move toward the cavity 200, thereby feeding the winding mechanism into the cavity 200. The cover plate can seal the open end of the cavity 200, and the cover plate can also slide along the guide rail body 3 and disengage from the cavity 200.

[0048] Of course, the track mechanism 100 of this application can also be used in other equipment, as can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0049] In one example, such as Figure 2 and Figure 3 As shown, the track mechanism 100 also includes a first adjusting member 4, which is connected to the second support member 2. The first adjusting member 4 can drive the second support member 2 to move along the first direction.

[0050] like Figure 2 and Figure 3 As shown, in this example, the first adjusting member 4 acts on the second supporting member 2 to drive the second supporting member 2 to move along the first direction, thereby adjusting the position of the guide rail body 3 in the first direction.

[0051] like Figure 2 and Figure 3 As shown, in this example, the first adjusting member 4 includes a first bolt, which is connected to the second supporting member 2 and the first supporting member 1 respectively.

[0052] In this configuration, the first bolt can be screwed onto the second support member 2, with one end of the first bolt passing through the second support member 2 and abutting against the first support member 1. The first support member 1 is fixed, and the first bolt is positioned along a first direction. By rotating the first bolt, the second support member 2 can be moved relative to the first support member 1 along the first direction. Alternatively, the first bolt can also be screwed onto the first support member 1, with one end of the first bolt passing through the first support member 1 and abutting against the second support member 2. By rotating the first bolt, the movement of the second support member 2 relative to the first support member 1 along the first direction can also be adjusted. Of course, the first adjusting member 4 can also be other types of fasteners, such as screws or studs, or it can be a driving member that moves the second support member 2.

[0053] In one example, such as Figure 2 and Figure 3 As shown, there are multiple first adjustment members 4, which are located on both sides of the guide rail body 3 along the width direction. Each first adjustment member 4 can adjust the second support member 2 independently.

[0054] like Figure 2 and Figure 3 As shown, the guide rail body 3 is supported on the second support member 2, and the upper end surface of the guide rail body 3 is the support surface used to support the sliding of the cover plate. First adjusting members 4 are provided on both sides of the guide rail body 3 along its width direction, and the first adjusting members 4 on both sides can independently adjust the second support member 2. That is, the first adjusting members 4 on both sides can be adjusted to different height values, thereby adjusting the support surface of the guide rail body 3 to maintain a horizontal position. For example, the first adjusting member 4 is a first bolt; by turning the first bolt a different number of times, different heights of the second support member 2 can be adjusted.

[0055] In this example, the guide rail body 3 is provided with two, three or four first adjustment members 4 on both sides along the width direction. Those skilled in the art can decide according to the actual situation, and no specific limitation is made here.

[0056] In one example, such as Figure 2 and Figure 3 As shown, the track mechanism 100 also includes a second adjusting member 5, which is installed on the first support member 1. The second adjusting member 5 can drive the second support member 2 to move along the second direction.

[0057] like Figure 2 and Figure 3As shown, the second adjusting member 5 is installed on the first supporting member 1 and can act on the second supporting member 2 to drive the second supporting member 2 to move along the second direction, thereby adjusting the position of the guide rail body 3 in the second direction.

[0058] In this example, the second adjusting member 5 can be a bolt, and the first support member 1 is provided with a mounting member 30. The second adjusting member 5 is screwed to the mounting member 30. The second adjusting member 5 can be located on one side of the second support member 2 along the second direction. One end of the second adjusting member 5 passes through the mounting member 30 and abuts against the second support member 2. By rotating the second adjusting member 5, the second support member 2 can be moved.

[0059] In this example, multiple second adjusting members 5 are provided, respectively located on opposite sides of the second support member 2 along the second direction. The second adjusting members 5 on both sides can cooperate with each other to push the second support member 2 to move. Alternatively, multiple second adjusting members 5 can be provided on each side of the second support member 2; for example, two, three, or four second adjusting members 5 can be provided on each side of the second support member 2. Those skilled in the art can determine this according to the actual situation, and no specific limitation is made here.

[0060] like Figure 2 As shown, in this example, the mounting member 30 can be an "L"-shaped mounting plate. One side of the mounting member 30 is fixedly screwed to the first support member 1 by fasteners such as bolts or screws, and the other side is opposite to the second support member 2 and is used to screw the second adjusting member 5. Alternatively, the second adjusting member 5 can also be a driving member, which drives the second support member 2 to move.

[0061] In one example, such as Figure 1 and Figure 2 As shown, the first support member 1 extends along the length direction of the guide rail body 3, and multiple second support members 2 are provided, with the multiple second support members 2 spaced apart along the length of the guide rail body 3.

[0062] like Figure 1 and Figure 2 As shown, the length of the first support member 1 corresponds to the length of the guide rail body 3, that is, the length of the first support member 1 is the same as the length of the guide rail body 3, or the length of the first support member 1 is slightly longer or slightly shorter than the guide rail body 3. Multiple second support members 2 are spaced apart from the first support member 1 along its length direction. The guide rail body 3 is simultaneously placed on multiple second support members 2, thereby improving the load-bearing capacity of the guide rail body 3.

[0063] In this example, each second support member 2 is provided with a first adjustment member 4 and a second adjustment member 5 to adjust the second support member 2 at the corresponding position along the first direction or the second direction, thereby further adjusting the levelness of the guide rail body 3 and the perpendicularity to the cavity 200, so as to improve the assembly accuracy of the guide rail body 3.

[0064] In one example, such as Figure 2 As shown, the second support member 2 is provided with a guide hole 21 along the second direction, and the first support member 1 is provided with a guide rod 11 that cooperates with the guide hole 21.

[0065] like Figure 2 As shown, the second support member 2 has a through hole along its thickness direction. The through hole is a strip-shaped hole and is arranged along the second direction to form a guide hole 21. The first support member 1 is provided with a guide rod 11, which can be inserted into the guide hole 21. When the second support member 2 moves relative to the first support member 1 along the second direction, the guide rod 11 can play a guiding role to prevent the second support member 2 from deflecting.

[0066] In this example, the second support member 2 may be provided with multiple guide holes 21 at intervals, and the first support member 1 is provided with multiple guide rods 11. For example, the second support member 2 is a rectangular plate, and guide holes 21 are provided at the four corners of the second support member 2.

[0067] In one example, the guide rod 11 includes a second bolt, one end of which passes through the guide hole 21 and is screwed to the first support member 1. When the second support member 2 is adjusted to a preset position along the second direction, the second bolt can be tightened, that is, the head of the second bolt can abut against the end of the second support member 2 away from the first support member 1, thereby providing a certain degree of fixation for the second support member 2.

[0068] In one example, such as Figure 2 and Figure 3 As shown, the track mechanism 100 also includes a third adjusting member 7, which is disposed on the first support member 1 and can drive the first support member 1 to move along the first direction.

[0069] like Figure 2 and Figure 3 As shown, in this example, the third adjusting member 7 can drive the first supporting member 1 to move along the first direction, thereby also adjusting the guide rail body 3. That is, during assembly, the first supporting member 1 is first assembled to the base 8, and then the height and level of the first supporting member 1 are adjusted by the third adjusting member 7. Then, the second supporting member 2 is assembled on the first supporting member 1, which helps to reduce the adjustment range of the second supporting member 2.

[0070] In this example, the track mechanism 100 also includes a base 8 and a connector 9, which can fix the first support member 1 to the base 8. The connector 9 can be a fastener such as a bolt or expansion screw. After the first support member 1 is adjusted to a preset position, the connector 9 can fix the first support member 1 to the base 8 to prevent the first support member 1 from tilting again when assembling other components later.

[0071] In this example, the base 8 can be a cement floor, and the connector 9 can fix the first support 1 in the cement floor. The cement floor is provided with a mounting groove, and the track mechanism 100 can be partially embedded in the mounting groove. Only part of the guide rail body 3 is exposed on the ground for the wheels of the cover plate to contact and move, thereby reducing the overall height of the equipment.

[0072] Of course, the base 8 can also be of other structures, such as a metal base 8 made of stainless steel or aluminum alloy. Those skilled in the art can decide according to the actual situation, and no specific limitation is made here.

[0073] In one example, such as Figures 2 to 4 As shown, the track mechanism 100 also includes a pad 10, which is disposed on the base 8. The third adjusting member 7 includes a third bolt, which is screwed to the first supporting member 1. One end of the third bolt passes through the first supporting member 1 and abuts against the pad 10. For example, when the base 8 is a cement floor, the pad is directly supported on the cement floor, and the third bolt abuts against the pad, thereby preventing the third bolt from directly hitting the cement floor and crushing it.

[0074] like Figures 2 to 4 As shown, in this example, the third adjusting member 7 is screwed to the first supporting member 1, and one end of the third adjusting member 7 passes through the first supporting member 1 and abuts against the upper surface of the pad 10. The pad 10 is fixedly mounted on the base 8, and the third bolt is arranged along the first direction. By rotating the third bolt, the first supporting member 1 can be moved relative to the pad 10 support member along the first direction. Alternatively, the third bolt can also be screwed to the pad 10, and one end of the third bolt passes through the pad 10 and abuts against the first supporting member 1. By rotating the third bolt, the first supporting member 1 can also be adjusted to move relative to the pad 10 support member along the first direction. Of course, the third adjusting member 7 can also be other types of fasteners, such as screws or studs, or the third adjusting member 7 can also be a driving member, which drives the first supporting member 1 to move.

[0075] In this example, the first support member 1 is provided with third adjusting members 7 on both sides along the second direction, and the third adjusting members 7 on both sides can adjust the first support member 1 independently. That is, the third adjusting members 7 on both sides can adjust different height values, thereby adjusting the first support member 1 to keep it horizontal. For example, the third adjusting member 7 is a third bolt. By turning the third bolt a different number of turns, different heights of the first support member 1 can be adjusted. Multiple third adjusting members 7 can be provided on each side of the first support member 1. For example, two, three, or four third adjusting members 7 can be provided on each side. Those skilled in the art can determine this according to the actual situation, and no specific limitation is made here.

[0076] In this example, multiple second support members 2 are provided along the first support member 1, and the multiple second support members 2 are spaced apart along the length of the guide rail body 3. Each second support member 2 is provided with a first adjusting member 4 and a second adjusting member 5 to adjust the second support member 2 at the corresponding position along a first direction or a second direction, respectively. Each position of the second support member 2 is also provided with a third adjusting member 7 and a pad 10.

[0077] like Figure 2 and Figure 5 As shown, in this example, the pad 10 is provided with a relief groove 101, and the connector 9 can be a stud. The connector 9 can be sequentially inserted into the first support member 1 and the relief groove 101, thereby connecting to the base 8. The inner diameter of the relief groove 101 is larger than the outer diameter of the connector 9. By providing the relief groove 101, the position of the pad 10 can be adjusted, which helps the pad 10 to avoid uneven positions on the base 8.

[0078] like Figure 2 As shown, the mounting part 30 is disposed on the first support part 1, and the connecting part 9 can be a stud. The connecting part 9 can be inserted through the mounting part 30, and a nut is also sleeved on the connecting part 9. The lower end of the nut can abut against the mounting part 30, thereby fixing the mounting part 30 on the first support part 1.

[0079] In one example, such as Figure 8 and Figure 9 As shown, a first positioning groove 31 is provided at one end of the guide rail body 3.

[0080] In this example, a first positioning groove 31 is provided at one end of the guide rail body 3 along its length. The first positioning groove 31 can cooperate with the first positioning member 210 to position the guide rail body 3. For example, when the guide rail mechanism is used in an evaporation coating equipment, the opening end of the cavity 200 of the evaporation coating equipment is provided with a first positioning member 210. The first positioning member 210 can be a positioning bolt, which is partially screwed into the side wall of the cavity 200. When the guide rail body 3 is assembled, the positioning bolt can extend into the first positioning groove 31, thereby positioning the guide rail body and improving the assembly accuracy of the guide rail body 3.

[0081] like Figure 3 As shown, in this example, the track mechanism 100 further includes a second positioning member 40, which can be connected to the first support 1. The guide rail body 3 is provided with a second positioning groove, and the second positioning member 40 can be inserted into the second positioning groove so that the second positioning member 40 can position the guide rail body 3 in the length direction. The second positioning groove can be a strip-shaped groove, and the second positioning groove is provided along the width direction of the guide rail body 3. For example, the second positioning member 40 can be a fastener such as a bolt. One end of the second positioning member 40 is sequentially threaded through and screwed to the pad 10 and the first support 1. The second support 2 is provided with a clearance opening to allow the second positioning member 40 to pass through the second support 2 and thus be inserted into the second positioning groove.

[0082] According to another embodiment of the present invention, an evaporation coating apparatus is provided. This evaporation coating apparatus includes the track mechanism 100 described in the above embodiment. The track mechanism 100 includes a first support member 1, a second support member 2, and a guide rail body 3. The second support member 2 is adjustablely disposed on the first support member 1. The guide rail body 3 is disposed at the end of the second support member 2 opposite to the first support member 1. The second support member 2 can be adjusted in position along a first direction and / or a second direction to drive the guide rail body 3 to adjust its position. That is, the second support member 2 is used to support the guide rail body 3, and the second support member 2 can be adjusted in position relative to the first support member 1 along the first direction and / or the second direction to drive the guide rail body 3 to adjust its position, thereby adjusting the height and spacing of the guide rail body 3, etc., to improve the installation accuracy of the guide rail body 3.

[0083] like Figures 6 to 9As shown, in this example, the evaporation coating equipment also includes a cavity 200 and a cover plate. An evaporation boat is disposed within the cavity 200, and a winding mechanism is disposed on the cover plate. A guide rail body 3 is located on one side of the open end of the cavity 200. The upper surface of the guide rail body 3 supports the cover plate, and the cover plate can slide on the guide rail body 3 to move towards the cavity 200, thereby feeding the winding mechanism into the cavity 200. The cover plate can seal the open end of the cavity 200, and it can also slide along the guide rail body 3 and detach from the cavity 200. By improving the installation accuracy of the guide rail body 3, the accuracy of the cover plate assembly in the cavity 200 can be improved, thus ensuring the effectiveness of the evaporation coating.

[0084] like Figure 8 and Figure 9 As shown, a first positioning element 210 is provided at the open end of the cavity 200, and a first positioning groove 31 is provided at one end of the guide rail body 3. When the guide rail body 3 is assembled, the first positioning element 210 can extend into the first positioning groove 31, thereby positioning the guide rail body and improving the assembly accuracy of the guide rail body 3.

[0085] The above embodiments mainly describe the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. For the sake of brevity, they will not be elaborated here.

[0086] Although specific embodiments of the present invention have been described in detail by way of examples, those skilled in the art should understand that the above examples are for illustrative purposes only and are not intended to limit the scope of the present invention. Those skilled in the art should understand that modifications can be made to the above embodiments without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. A track mechanism, characterized in that, include: First support component; The second support member is adjustablely disposed on the first support member; The guide rail body is disposed at the end of the second support member opposite to the first support member. The second support member can be adjusted in position along the first direction and / or the second direction to drive the guide rail body to adjust its position.

2. The track mechanism according to claim 1, characterized in that, It also includes a first adjusting member, which is connected to the second supporting member, and the first adjusting member can drive the second supporting member to move along the first direction.

3. The track mechanism according to claim 2, characterized in that, The first adjusting member is provided in multiple ways, and the multiple first adjusting members are respectively located on both sides of the guide rail body along the width direction. Each first adjusting member can adjust the second supporting member independently.

4. The track mechanism according to claim 2, characterized in that, The first adjusting member includes a first bolt, which is connected to the second support member and the first support member respectively.

5. The track mechanism according to claim 1, characterized in that, It also includes a second adjusting member, which is installed on the first support member and can drive the second support member to move along a second direction.

6. The track mechanism according to claim 5, characterized in that, The second support member has a guide hole along the second direction, and the first support member has a guide rod that cooperates with the guide hole.

7. The track mechanism according to claim 6, characterized in that, The guide rod includes a second bolt, one end of which passes through the guide hole and is screwed to the first support member.

8. The track mechanism according to claim 1, characterized in that, It also includes a third adjusting member, which is disposed on the first support member and can drive the first support member to move along the first direction.

9. The track mechanism according to claim 8, characterized in that, It also includes a base and a connector, the connector being capable of fixing the first support member to the base.

10. The track mechanism according to claim 9, characterized in that, It also includes a pad, which is disposed on the base. The third adjusting member includes a third bolt, which is screwed to the first supporting member. One end of the third bolt passes through the first supporting member and abuts against the pad.

11. The track mechanism according to claim 1, characterized in that, The first support member extends along the length of the guide rail body, and multiple second support members are provided, with the multiple second support members spaced apart along the length of the guide rail body.

12. The track mechanism according to claim 1, characterized in that, One end of the guide rail body is provided with a first positioning groove.

13. An evaporation coating apparatus, characterized in that, Includes the track mechanism as described in any one of claims 1 to 12.

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