Laboratory ultrapure water machine with function of preparing different water quality

Abstract

The utility model relates to the technical field of ultrapure water machines, and discloses a laboratory ultrapure water machine with a function of preparing different water qualities, which comprises a water purifier body and a sterile water tank, and a PP cotton filter, an activated carbon filter, a composite filter and an ultrafiltration membrane filter are arranged at the rear position in the water purifier body. The bottom end of the PP cotton filter is connected with a water outlet valve pipe of the sterile water tank through a water conveying pipe; the interior of the water purifier body is divided into a plurality of treatment cavities; through the ultra-purification treatment system, the microfiltration sterilization module, the ultra-purification treatment system, the reverse osmosis drainage pump, the circulating pump and the circulating pipe, water can be treated in sequence according to needs, so that water with different water qualities can be taken, and water flow in the water storage pipeline can be pumped and retreated; the water flow which does not pass the detection can be circulated to the water inlet for secondary or multiple times of treatment, and can be discharged until the water quality reaches the standard, so that the water treatment effect is ensured.

Description

Technical Field

[0001] This utility model relates to the field of ultrapure water machine technology, specifically a laboratory ultrapure water machine with the function of producing water of different qualities. Background Technology

[0002] Ultrapure water is one of the most important basic raw materials in modern industry. It has a wide range of applications in electronics, power, chemistry, medicine, biology, information and other fields. In particular, laboratories in various fields have high requirements for the quality of ultrapure water. An ultrapure water machine is a laboratory water purification device that removes all solid impurities, salts, bacteria and other impurities from water through filtration, reverse osmosis and sterilization.

[0003] Chinese patent provides a laboratory ultrapure water system with the function of producing different water qualities, publication number CN213506369U, which includes a shell and a water purification device installed inside the shell. The water purification device includes a pretreatment unit, a reverse osmosis membrane treatment unit and a post-ultrapurification unit. The water inlet on the shell is connected to the water inlet of the pretreatment unit through a pipeline.

[0004] The device divides the process of tap water entering the ultrapure water machine into different stages, and produces five different types of water based on the different water quality at each stage, including first-stage reverse osmosis pure water, second-stage reverse osmosis pure water, EDI deionized water, ultrapure water, and sterile ultrapure water. It basically covers all the water use situations in the laboratory from cleaning to high-end experiments. Users can take water of different qualities according to different water needs.

[0005] However, its water output structure is relatively simple. When the treated water is not used for a long time, the water produced in the equipment pipeline is in a stagnant state, which can easily cause the water quality in the pipeline to decline and make it difficult to meet the experimental requirements. In addition, water is discharged directly in each step. When the permeation membrane needs to be replaced or the dosage is too small, resulting in the water quality not meeting the standards, the water flow cannot be used. After adjustment, it can only be used after the water quality indicator shows that it meets the requirements. The water that has already been discharged is directly discharged, which is quite wasteful. Utility Model Content

[0006] The purpose of this invention is to provide a laboratory ultrapure water system with the function of producing water of different qualities, which can effectively solve the problems in the background art.

[0007] To achieve the above objectives, this utility model provides the following technical solution:

[0008] A laboratory ultrapure water system capable of producing water of different qualities includes a pure water system body and a sterile water tank. The pure water system body has a PP cotton filter, an activated carbon filter, a composite filter, and an ultrafiltration membrane filter installed at the rear of its interior. The bottom end of the PP cotton filter is connected to the outlet valve of the sterile water tank via a water supply pipe. The interior of the pure water system body is divided into multiple processing chambers, and each processing chamber is installed sequentially from back to front with a reverse osmosis membrane module, an EDI deionization treatment module, an ultrapure water treatment system, and a microfiltration sterilization module.

[0009] A reverse osmosis drainage pump is installed at the top of the reverse osmosis membrane module, and the pump's suction pipe is connected to the outlet of the reverse osmosis membrane module. A reverse osmosis booster pump is installed on one side of the rear end of the water purifier body. The inlet of the reverse osmosis membrane module is connected to the outlet of the booster pump via a reverse osmosis inlet pipe. The outlet of the reverse osmosis drainage pump is connected to a reverse osmosis drainage pipe and an EDI inlet pipe via a double-connector. A reverse osmosis drainage solenoid valve is installed at the connection between the reverse osmosis drainage pipe and the reverse osmosis drainage pump. An EDI inlet solenoid valve is installed at the connection between the inlet pipe and the reverse osmosis drainage pump. A reverse osmosis circulation pump is installed inside the installation cavity where the reverse osmosis membrane module is installed. The pump inlet of the reverse osmosis circulation pump is connected to the reverse osmosis drainage pipe through circulation pipe one, and circulation solenoid valve one is installed at the connection between circulation pipe one and the reverse osmosis drainage pipe. The outlet of the reverse osmosis circulation pump is connected to the inlet of the reverse osmosis membrane module through return pipe one. The end of the EDI inlet pipe away from the reverse osmosis drainage pump is connected to the inlet of the EDI deionization treatment module.

[0010] Preferably, a deionization drain pump is installed at the top of the EDI deionization treatment module, and the drain outlet of the deionization drain pump is connected to a deionization drain pipe and an ultrapure water inlet pipe through a double-port connector.

[0011] Preferably, a deionized drain valve is provided at the connection between the deionized drain pipe and the deionized drain pump, the end of the ultrapure water inlet pipe away from the deionized drain pump is connected to the inlet of the ultrapure water purification system, and an ultrapure water inlet solenoid valve is provided at the connection between the ultrapure water inlet pipe and the deionized drain pump.

[0012] Preferably, the top of the ultrapure water treatment system is equipped with an ultrapure water drain pump, and the drain outlet of the ultrapure water drain pump is connected to an ultrapure water drain pipe and a microfiltration sterilization inlet pipe through a double-port connector.

[0013] Preferably, an ultrapure water drain valve is provided at the connection between the ultrapure water drain pipe and the ultrapure water drain pump, the end of the ultrapure water inlet pipe away from the ultrapure water drain pump is connected to the inlet of the ultrapure water purification system, and a microfiltration sterilization inlet solenoid valve is provided at the connection between the microfiltration sterilization inlet pipe and the ultrapure water drain pump.

[0014] Preferably, a drainage module is provided at the front of the interior of the pure water machine body. The distribution port of the drainage module is connected to the end of the reverse osmosis drainage pipe, the ultrapure water drainage pipe, and the deionization drainage pipe. A water quality sensor is provided on the outer ring of the reverse osmosis drainage pipe, the ultrapure water drainage pipe, and the deionization drainage pipe.

[0015] Preferably, a deionization circulation pump is installed on one side of the installation cavity where the EDI deionization treatment module is installed. The pump's inlet is connected to the deionization drain pipe via circulation pipe two, and a circulation solenoid valve two is installed at the connection between circulation pipe two and the deionization drain pipe. Similarly, an ultrapure water circulation pump is installed on one side of the installation cavity where the ultrapure water treatment system is installed. The pump's inlet is connected to the ultrapure water drain pipe via circulation pipe three, and a circulation solenoid valve three is installed at the connection between circulation pipe three and the ultrapure water drain pipe.

[0016] Compared with the prior art, the beneficial effects of this utility model are:

[0017] This invention, through the coordinated operation of an ultrapure water treatment system, a microfiltration sterilization module, and a reverse osmosis drainage pump, can sequentially treat water as needed to obtain water of different qualities. Furthermore, through the coordinated operation of a circulation solenoid valve, a water quality sensor, a reverse osmosis circulation pump, and a circulation pipe, the water in the storage pipe can be extracted and reprocessed to prevent the water quality from deteriorating when the water is not used for a long time, thus preventing substandard water quality from affecting experiments.

[0018] By setting up a reverse osmosis circulation pump, a reverse osmosis drain pipe, a water quality sensor, an EDI circulation pump, and an ultrapure water circulation pump, which work together, the water quality sensor can detect the water flow in the reverse osmosis drain pipe, ultrapure water drain pipe, and deionized water drain pipe during drainage. Water that fails the test will be circulated to the inlet of the device for secondary or multiple treatments until the water quality meets the standards before it can be released, reducing water waste and ensuring the water treatment effect. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of a laboratory ultrapure water machine with the function of producing different water qualities, as described in this utility model embodiment.

[0020] Figure 2 This is a schematic diagram of the structure of the activated carbon filter and the ultrafiltration membrane filter in the embodiments of this utility model.

[0021] Figure 3 This is a cross-sectional view of the internal structure of the pure water machine body in an embodiment of this utility model.

[0022] Figure 4 This is a schematic diagram of the reverse osmosis membrane module in an embodiment of the present invention.

[0023] In the diagram: 1. Pure water machine body; 2. Sterile water tank; 3. PP cotton filter; 4. Water supply pipe; 5. Activated carbon filter; 6. Composite filter; 7. Ultrafiltration membrane filter; 8. Reverse osmosis booster pump; 9. Reverse osmosis membrane module; 10. Reverse osmosis drain pump; 11. Reverse osmosis drain pipe; 12. Reverse osmosis drain solenoid valve; 13. Water quality sensor; 14. Reverse osmosis circulation pump; 15. Circulation pipe one; 16. Circulation solenoid valve one; 17. EDI inlet solenoid valve; 18. EDI inlet pipe; 19. Reverse osmosis inlet pipe; 20. Drainage module; 21. EDI deionization treatment module; 22. Ultrafiltration treatment system; 23. Microfiltration sterilization module. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model. Example 1

[0025] Combination Figures 1-4 A laboratory ultrapure water system capable of producing water of different qualities includes a water system body 1 and a sterile water tank 2. The water system body 1 has a PP cotton filter 3, an activated carbon filter 5, a composite filter 6, and an ultrafiltration membrane filter 7 installed at the rear of its interior. The bottom end of the PP cotton filter 3 is connected to the outlet valve of the sterile water tank 2 via a water supply pipe 4. The interior of the water system body 1 is divided into multiple processing chambers, and each processing chamber is installed sequentially from back to front with a reverse osmosis membrane module 9, an EDI deionization treatment module 21, an ultrapure water treatment system 22, and a microfiltration sterilization module 23.

[0026] See Figure 3 and Figure 4Furthermore, a reverse osmosis drainage pump 10 is installed at the top of the reverse osmosis membrane module 9, and the pumping pipe of the reverse osmosis drainage pump 10 is connected to the outlet of the reverse osmosis membrane module 9. A reverse osmosis booster pump 8 is installed at one side of the rear end of the pure water machine body 1. The inlet of the reverse osmosis membrane module 9 is connected to the outlet of the reverse osmosis booster pump 8 through a reverse osmosis inlet pipe 19. The outlet of the reverse osmosis drainage pump 10 is connected to a reverse osmosis drainage pipe 11 and an EDI inlet pipe 18 through a double-connector. A reverse osmosis drainage solenoid valve 12 is installed at the connection between the reverse osmosis drainage pipe 11 and the reverse osmosis drainage pump 10. An EDI inlet solenoid valve 17 is installed at the connection between the EDI inlet pipe 18 and the reverse osmosis drainage pump 10. A reverse osmosis circulation pump 14 is installed inside the installation cavity where the reverse osmosis membrane module 9 is installed. The pumping port of the reverse osmosis circulation pump 14 is connected to the reverse osmosis drainage pipe 11 through a circulation pipe 15, and the circulation pipe 15 is connected to the reverse osmosis drainage... A circulation solenoid valve 16 is installed at the connection of water pipe 11. The outlet of reverse osmosis circulation pump 14 is connected to the inlet of reverse osmosis membrane module 9 through return pipe 1. The end of EDI inlet pipe 18 away from reverse osmosis drain pump 10 is connected to the inlet of EDI deionization module 21. A deionization drain pump is installed at the top of EDI deionization module 21. The drain outlet of the deionization drain pump is connected to a deionization drain pipe and an ultrapure water inlet pipe through a double-port connector. A deionization drain valve is installed at the connection between the deionization drain pipe and the deionization drain pump. The end of ultrapure water inlet pipe away from the deionization drain pump is connected to the inlet of ultrapure water purification system 22. An ultrapure water inlet solenoid valve is installed at the connection between the ultrapure water inlet pipe and the deionization drain pump. An ultrapure water drain pump is installed at the top of ultrapure water purification system 22. The drain outlet of the ultrapure water drain pump is connected to an ultrapure water drain pipe and a microfiltration sterilization inlet pipe through a double-port connector.

[0027] Specifically, by controlling the start of the reverse osmosis drainage pump 10 and opening the reverse osmosis drainage solenoid valve 12 at the drainage module 20, the water treated by reverse osmosis can be transported to the reverse osmosis drainage pipe 11. After being detected by the water quality sensor 13, it is discharged. By closing the reverse osmosis drainage solenoid valve 12 and opening the EDI inlet solenoid valve 17, the water treated by reverse osmosis can be transported to the EDI inlet pipe 18. After entering the EDI deionization treatment module 21 through the EDI inlet pipe 18, it can be deionized. Then, the EDI drainage pump and the EDI drainage solenoid valve can be opened to discharge the deionized water into the deionization drainage pipe. At the same time, by closing the EDI drainage solenoid valve and opening the EDI inlet solenoid valve 17, the deionized water can be transported to the ultrapure water treatment system 22 for ultrapure water treatment. After that, the ultrapure water drainage pump and the ultrapure water drainage valve can be opened to transport the ultrapure water into the ultrapure water drainage pipe.

[0028] Simultaneously, the ultrapure water drain valve can be closed and the ultrapure water inlet valve can be opened to transport the treated water to the microfiltration sterilization module 23 for sterilization. Afterward, the microfiltration sterilization drain valve can be opened to discharge the sterilized ultrapure water. Through the above steps, water of different qualities can be used. When draining, since water quality sensors 13 are installed on the reverse osmosis drain pipe 11, ultrapure water drain pipe, and deionization drain pipe, when the water in the pipe has not been discharged for a long time, the water stored in it can be detected as needed. When the water quality does not meet the standards, the reverse osmosis circulation pump 14 can be started and the circulation solenoid valve 16 can be opened to pump the water stored in it back for treatment to prevent the waste caused by the direct discharge of substandard water. Example 2

[0029] See Figure 2 and Figure 3 Furthermore, based on Example 1, an ultrapure water drain valve is installed at the connection between the ultrapure water drain pipe and the ultrapure water drain pump. The end of the ultrapure water inlet pipe furthest from the ultrapure water drain pump is connected to the inlet of the ultrapure water purification system 22. A microfiltration sterilization inlet solenoid valve is installed at the connection between the microfiltration sterilization inlet pipe and the ultrapure water drain pump. A drain module 20 is installed at the front of the interior of the pure water machine body 1. The distribution port of the drain module 20 is connected to the ends of the reverse osmosis drain pipe 11, the ultrapure water drain pipe, and the deionization drain pipe. A water quality sensor 13 is installed on the outer ring of the tube. Inside the mounting cavity where the EDI deionization treatment module 21 is installed, a deionization circulation pump is installed on one side. The water inlet of the deionization circulation pump is connected to the deionization drain pipe through circulation pipe two. A circulation solenoid valve two is installed at the connection between circulation pipe two and the deionization drain pipe. Inside the mounting cavity where the ultrapure water treatment system 22 is installed, an ultrapure water circulation pump is installed on one side. The water inlet of the ultrapure water circulation pump is connected to the ultrapure water drain pipe through circulation pipe three. A circulation solenoid valve three is installed at the connection between circulation pipe three and the ultrapure water drain pipe.

[0030] Specifically, the water in the sterile water tank 2 undergoes preliminary treatment through layers of filtration, including a PP cotton filter 3, a composite filter 6, an activated carbon filter 5, and an ultrafiltration membrane filter 7, to eliminate most of the impurities present. During drainage, a water quality sensor 13 monitors the water quality in the reverse osmosis drain pipe 11, the ultrapure water drain pipe, and the deionization drain pipe. If the water quality is substandard due to membrane replacement or insufficient additive dosage, the water quality sensor 13 detects that the water is unusable. In this case, the reverse osmosis circulation pump 14, the ultrapure water circulation pump, and the deionization circulation pump are started, and the corresponding circulation solenoid valves 16, 2, and 3 are opened to draw the water back. Additives can be added or a new membrane replaced as needed, and the water is then treated again, cyclically three to five times. Only after the water quality sensor 13 detects that the water quality is acceptable can the treated water be discharged through the drain module 20 to prevent substandard water from significantly interfering with the experiment.

[0031] In actual operation, the reverse osmosis drainage pump 10 is started by controlling the drainage module 20 and the reverse osmosis drainage solenoid valve 12 to deliver the reverse osmosis treated water to the reverse osmosis drainage pipe 11. After being detected by the water quality sensor 13, the water is discharged. The reverse osmosis treated water is delivered to the EDI inlet pipe 18 by closing the reverse osmosis drainage solenoid valve 12 and opening the EDI inlet solenoid valve 17. The water then enters the EDI deionization treatment module 21 for deionization treatment. After that, the EDI drainage pump and the EDI drainage solenoid valve can be turned on to discharge the deionized water into the deionization drainage pipe.

[0032] At the same time, by closing the EDI drain solenoid valve and opening the EDI inlet solenoid valve 17, the deionized water can be transported to the ultrapure water treatment system 22 for ultrapure water treatment. After that, the ultrapure water can be transported to the ultrapure water drain pipe by opening the ultrapure water drain pump and the ultrapure water drain valve.

[0033] At the same time, the ultrapure water drain valve can be closed and the ultrapure water inlet valve can be opened so that the treated water can be transported to the microfiltration sterilization module 23 for sterilization. After that, the microfiltration sterilization drain valve can be opened to discharge the sterilized ultrapure water. Through the above steps, water of different qualities can be used.

[0034] Furthermore, during drainage, water quality sensors 13 are installed on the reverse osmosis drainage pipe 11, ultrapure water drainage pipe, and deionized water drainage pipe. When the water in the pipe has not been discharged for a long time, the water stored in it can be tested as needed. When the water quality does not meet the standards, the reverse osmosis circulation pump 14, deionized water circulation pump, or ultrapure water circulation pump can be started, and the circulation solenoid valve 16, circulation solenoid valve 2, or circulation solenoid valve 3 can be opened so that the water stored in it can be pumped back for treatment to prevent the unqualified water from being discharged directly and wasted.

[0035] Through a series of filters including a PP cotton filter 3, a composite filter 6, an activated carbon filter 5, and an ultrafiltration membrane filter 7, the water in the sterile water tank 2 undergoes preliminary treatment to eliminate most of the impurities present. During drainage, a water quality sensor 13 monitors the water quality in the reverse osmosis drain pipe 11, the ultrapure water drain pipe, and the deionization drain pipe. If the water quality is substandard due to membrane replacement or insufficient treatment dosage, the water quality sensor 13 will detect that the treated water does not meet the standards, thus controlling the corresponding... The reverse osmosis circulation pump 14, ultrapure water circulation pump, and deionization circulation pump are started, and the corresponding circulation solenoid valves 16, 2, and 3 are opened to draw the water back. Additives can be added or new osmosis membranes can be replaced as needed. The water flow is then treated again and circulated three to five times. Only after the water quality sensor 13 detects that the water quality is qualified each time can the treated water flow be released through the drainage module 20 according to the above drainage steps to prevent the water flow from being unqualified when taking water, which would cause great interference to the experiment.

[0036] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A laboratory ultrapure water system capable of producing water of different qualities, comprising a pure water system body (1) and a sterile water tank (2), wherein a PP cotton filter (3), an activated carbon filter (5), a composite filter (6), and an ultrafiltration membrane filter (7) are disposed at the rear of the interior of the pure water system body (1), and the bottom end of the PP cotton filter (3) is connected to the outlet valve of the sterile water tank (2) via a water supply pipe (4), characterized in that: The pure water machine body (1) is internally divided into multiple treatment cavities, and the reverse osmosis membrane assembly (9), the EDI deionization treatment module (21), the ultra-purification treatment system (22) and the microfiltration sterilization module (23) are sequentially installed in the treatment cavities from back to front. The top end of the reverse osmosis membrane assembly (9) is provided with a reverse osmosis drainage pump (10), the water suction pipe of the reverse osmosis drainage pump (10) is connected with the water outlet of the reverse osmosis membrane assembly (9), the rear end of the pure water machine body (1) is provided with a reverse osmosis booster pump (8) on one side, the water inlet of the reverse osmosis membrane assembly (9) is connected with the water outlet of the reverse osmosis booster pump (8) through a reverse osmosis water inlet pipe (19), the water outlet of the reverse osmosis drainage pump (10) is connected with a reverse osmosis drainage pipe (11) and an EDI water inlet pipe (18) through a double-way connector, the connection position of the reverse osmosis drainage pipe (11) and the reverse osmosis drainage pump (10) is provided with a reverse osmosis drainage electromagnetic valve (12), the connection position of the EDI water inlet pipe (18) and the reverse osmosis drainage pump (10) is provided with an EDI water inlet electromagnetic valve (17), the installation cavity in which the reverse osmosis membrane assembly (9) is installed is internally provided with a reverse osmosis circulating pump (14), the water suction outlet of the reverse osmosis circulating pump (14) is connected with the reverse osmosis drainage pipe (11) through a circulating pipe (15), the connection position of the circulating pipe (15) and the reverse osmosis drainage pipe (11) is provided with a circulating electromagnetic valve (16), the water outlet of the reverse osmosis circulating pump (14) is connected with the water inlet of the reverse osmosis membrane assembly (9) through a backflow pipe (1), and the end of the EDI water inlet pipe (18) away from the reverse osmosis drainage pump (10) is connected with the water inlet of the EDI deionization treatment module (21).

2. The laboratory ultrapure water machine with the function of producing different water qualities according to claim 1, characterized in that: The top end of the EDI deionization treatment module (21) is provided with a deionization drainage pump, and the water outlet of the deionization drainage pump is connected with a deionization drainage pipe and an ultra-pure water inlet pipe through a double-way connector.

3. The laboratory ultrapure water machine with the function of producing different water qualities according to claim 2, characterized in that: The connection position of the deionization drainage pipe and the deionization drainage pump is provided with a deionization drainage valve, the end of the ultra-pure water inlet pipe away from the deionization drainage pump is connected with the water inlet of the ultra-purification treatment system (22), and the connection position of the ultra-pure water inlet pipe and the deionization drainage pump is provided with an ultra-pure water inlet electromagnetic valve.

4. The laboratory ultrapure water machine with the function of producing different water qualities according to claim 2, characterized in that: The top end of the ultra-purification treatment system (22) is provided with an ultra-pure water drainage pump, and the water outlet of the ultra-pure water drainage pump is connected with an ultra-pure water drainage pipe and a microfiltration sterilization water inlet pipe through a double-way connector.

5. The laboratory ultrapure water machine with the function of producing different water quality according to claim 4, characterized in that: The connection position of the ultra-pure water drainage pipe and the ultra-pure water drainage pump is provided with an ultra-pure water drainage valve, the end of the ultra-pure water inlet pipe away from the ultra-pure water drainage pump is connected with the water inlet of the ultra-purification treatment system (22), and the connection position of the microfiltration sterilization water inlet pipe and the ultra-pure water drainage pump is provided with a microfiltration sterilization water inlet electromagnetic valve.

6. The laboratory ultrapure water machine with the function of producing different water qualities according to claim 4, characterized in that: The internal front position of the pure water machine body (1) is provided with a drainage module (20), the distribution port of the drainage module (20) is connected with the end of the reverse osmosis drainage pipe (11), the ultra-pure water drainage pipe and the deionization drainage pipe, and the outer ring of the reverse osmosis drainage pipe (11), the ultra-pure water drainage pipe and the deionization drainage pipe is provided with a water quality sensor (13).

7. The laboratory ultrapure water machine with the function of producing different water qualities according to claim 6, characterized in that: The internal one side position of the installation cavity with the EDI deionization treatment module (21) is installed with a deionization circulating pump, the pumping port of the deionization circulating pump is connected with a deionization drainage pipe through a circulating pipe two, and a circulating electromagnetic valve two is arranged at the connection position of the circulating pipe two and the deionization drainage pipe, the internal one side position of the installation cavity with the ultra-purification treatment system (22) is installed with an ultra-pure water circulating pump, the pumping port of the ultra-pure water circulating pump is connected with an ultra-pure water drainage pipe through a circulating pipe three, and a circulating electromagnetic valve three is arranged at the connection position of the circulating pipe three and the ultra-pure water drainage pipe.

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