Energy-saving clean air conditioning system based on process exhaust air recovery

Abstract

The utility model relates to the technical field of clean air-conditioning systems, in particular to an energy-saving clean air-conditioning system based on process exhaust air recovery, which comprises an air handling unit, a fan, a dry coil and a filter unit, the air handling unit is used for handling fresh air and process exhaust return air and sending the treated fresh air and process exhaust return air into a clean workshop, and the filter unit is used for filtering the fresh air and the process exhaust return air. And the draught fan is used for sending exhaust air in the clean workshop to the air handling unit or directly exhausting the exhaust air outdoors. The exhaust air in the clean workshop is sent to the air handling unit through the fan, the exhaust air in the clean workshop can be recycled, the exhaust air in the clean workshop is recycled to the air handling unit under the condition that no equipment needs to be added in the mode, energy consumed by the air handling unit for handling fresh air can be reduced, and the energy consumption of the air handling unit is reduced. Therefore, the energy efficiency level and the economic benefit of the whole clean air-conditioning system are improved.

Description

Technical Field

[0001] This utility model relates to the field of clean air conditioning system technology, and in particular to an energy-saving clean air conditioning system based on process exhaust air recovery. Background Technology

[0002] Cleanrooms are energy-intensive to operate, with air conditioning systems accounting for up to 30% of the energy consumption. Therefore, improving the energy efficiency of cleanroom air conditioning systems is increasingly important. Currently, the common form of cleanroom air conditioning systems is a combination of a fresh air handling unit (FLU), a fan-filter unit, and a dry coil unit with independent temperature and humidity control. The FLU maintains the relative humidity and positive pressure of the cleanroom and provides fresh air for personnel. The fan-filter unit ensures the cleanliness of the cleanroom, and the dry coil unit maintains the temperature. During production, various process equipment in the cleanroom generates a large amount of gas. This gas is typically exhausted outdoors via localized exhaust ventilation at the process equipment locations. A portion of this exhaust air is recyclable general exhaust air or general hot exhaust air. To maintain positive pressure in the cleanroom, the presence of a large amount of process emissions leads to a large fresh air volume in the fresh air handling unit. At the same time, in order to treat the fresh air to specific parameters, the fresh air treatment process inevitably involves a cooling and heating cancellation phenomenon, resulting in high energy consumption (for example, when the outdoor temperature is low in winter, the fresh air generally needs to be preheated and humidified. When isenthalpic humidification is used, the temperature of the preheated air will drop, and it needs to be reheated; when the outdoor temperature is high in summer, the fresh air generally needs to be cooled, dehumidified, and reheated). Utility Model Content

[0003] In response to the shortcomings of the existing production technology, the applicant provides an energy-saving clean air conditioning system based on process exhaust air recovery. By improving the clean air conditioning system, the fresh air handling capacity of the fresh air handling unit can be reduced, and exhaust air energy can be recovered to achieve energy saving and emission reduction.

[0004] The technical solution adopted in this utility model is as follows:

[0005] An energy-saving cleanroom air conditioning system based on process exhaust air recovery includes: an air handling unit, a fan, a dry coil, and a filter unit. The air handling unit is used to process fresh air, process exhaust air, and return air, and delivers the processed fresh air, process exhaust air, and return air into the cleanroom to maintain positive pressure and air humidity in the cleanroom. The fan is used to send exhaust air from the cleanroom to the air handling unit or directly exhaust it to the outside. The dry coil is installed in the cleanroom and is used to eliminate the load in the cleanroom to ensure the temperature inside the cleanroom. The filter unit is used to pressurize and filter the air in the cleanroom to ensure the cleanliness of the air inside the cleanroom.

[0006] Therefore, by sending the exhaust air from the cleanroom to the air handling unit via a fan, the exhaust air in the cleanroom can be recycled and reused. Compared with the existing cleanroom air conditioning system of fresh air handling unit + fan filter unit + dry coil, this method has a simple structure and is easy to operate. Without adding equipment, the exhaust air in the cleanroom can be recycled to the air handling unit, which can reduce the energy consumed by the air handling unit to process fresh air, thereby improving the energy efficiency and economic benefits of the entire cleanroom air conditioning system. At the same time, if the cleanliness of the recycled exhaust air is higher than that of the outdoor fresh air, the processing time of the air handling unit filtration can also be reduced. In addition, the exhaust air that does not need to be recycled can be directly discharged to the outside.

[0007] As a further improvement to the above technical solution, it also includes a static pressure box, which is used to optimize airflow distribution to achieve uniform distribution.

[0008] As a further improvement to the above technical solution: the air inlet of the air handling unit is connected to the first port of the static pressure box through an air inlet duct, and the air outlet of the air handling unit is connected to the cleanroom through an air supply duct.

[0009] As a further improvement to the above technical solution: one end of the fan is connected to the process equipment in the cleanroom through an exhaust section duct, and the other end of the fan is connected to the second port of the static pressure box through a return air section duct; the other end of the fan is also provided with an exhaust section duct.

[0010] As a further improvement to the above technical solution: a fresh air section duct is provided at the third port of the static pressure box.

[0011] As a further improvement to the above technical solution: the fresh air section duct is equipped with a first temperature sensor, and the fresh air section duct is connected in series with a first air valve. Thus, the first temperature sensor is used to detect the temperature of the outdoor air; the opening and closing of the first air valve controls the flow of the fresh air section duct, and the first air valve also regulates the airflow of the fresh air section duct.

[0012] As a further improvement to the above technical solution: a second temperature sensor is installed in the air inlet duct, and a second air valve is connected in series in the air inlet duct. Thus, the second temperature sensor is used to detect the temperature of the air flowing through the air inlet duct; the opening and closing of the second air valve controls the flow of the air in the air inlet duct, and the airflow of the air in the air inlet duct is adjusted by the second air valve.

[0013] As a further improvement to the above technical solution: a third temperature sensor is installed at the other end of the fan; a third air valve is connected in series in the return air duct; and a fourth air valve is connected in series in the exhaust air duct. Thus, the third temperature sensor is used to detect the temperature of the exhaust air from the cleanroom; the opening and closing of the third air valve controls the opening and closing of the return air duct, and regulates the airflow of the return air duct; the opening and closing of the fourth air valve controls the opening and closing of the exhaust air duct, and regulates the airflow of the exhaust air duct.

[0014] As a further improvement to the above technical solution: the air handling unit is internally equipped with a coil section, a humidification section and a filtration section. The coil section is used to preheat, recool, preheat and reheat the air. The humidification section is used to humidify the air. The filtration section is used to filter dust particles in the air.

[0015] As a further improvement to the above technical solution, the air handling unit is also equipped with a chemical filtration section or a water spray section to remove molecular pollutants in the air.

[0016] The beneficial effects of this utility model are as follows:

[0017] By sending exhaust air from the cleanroom to the air handling unit via a fan, the exhaust air in the cleanroom can be recycled and reused. Compared with the existing cleanroom air conditioning system of fresh air handling unit + fan filter unit + dry coil, this method has a simple structure and is easy to operate. Without adding equipment, the exhaust air in the cleanroom can be recycled to the air handling unit, which can reduce the energy consumed by the air handling unit to process fresh air, thereby improving the energy efficiency and economic benefits of the entire cleanroom air conditioning system. At the same time, if the cleanliness of the recycled exhaust air is higher than that of the outdoor fresh air, the processing time of the air handling unit filtration can also be reduced. In addition, exhaust air that does not need to be recycled can be directly discharged to the outside.

[0018] This utility model also has the following advantages:

[0019] This invention determines whether the first, second, third, and fourth air valves are open and the proportion of their opening by comparing the outdoor fresh air temperature, the exhaust air temperature, the designed temperature of the air handling unit, and the pressure difference value of the cleanroom. Attached Figure Description

[0020] Figure 1 This is a system diagram of the energy-saving clean air conditioning system based on process exhaust air recovery according to this utility model;

[0021] Figure 2 This is a diagram illustrating the enthalpy-humidity of the air recovered by the air handling unit when the outdoor air temperature T1 ≤ the exhaust air temperature T3.

[0022] Figure 3 This is an enthalpy-humidity diagram of the air handling unit recovering exhaust air when the outdoor air temperature T1 is greater than the exhaust air temperature T3.

[0023] Among them: 1. Air handling units;

[0024] 2. Cleanroom;

[0025] 201. Process equipment;

[0026] 3. Fan; 301. Third temperature sensor;

[0027] 4. Dry coil;

[0028] 5. Filtration unit;

[0029] 6. Static pressure chamber;

[0030] 7. Air inlet duct;

[0031] 701. Second temperature sensor; 702. Second air valve;

[0032] 8. Air supply section duct;

[0033] 9. Exhaust duct section;

[0034] 10. Return air section duct;

[0035] 11. Exhaust duct section;

[0036] 12. Fresh air section duct;

[0037] 13. First temperature sensor; 14. First air valve;

[0038] 15. Third air valve;

[0039] 16. Fourth air valve. Detailed Implementation

[0040] The specific embodiments of this utility model are described below with reference to the accompanying drawings.

[0041] like Figures 1 to 3The diagram shows the preferred embodiment of this utility model. The energy-saving clean air conditioning system based on process exhaust air recovery in this embodiment includes: an air handling unit 1, a fan 3, a dry coil 4, and a filter unit 5. The air handling unit 1 is used to process fresh air, process exhaust air, and return air, and to send the processed fresh air, process exhaust air, and return air into the cleanroom 2 to maintain the positive pressure and air humidity of the cleanroom 2. The fan 3 is used to send the exhaust air in the cleanroom 2 to the air handling unit 1 or directly exhaust it to the outside. The dry coil 4 is installed in the cleanroom 2 and is used to eliminate the load in the cleanroom 2 to ensure the temperature in the cleanroom 2. The filter unit 5 is used to pressurize and filter the air in the cleanroom 2 to ensure the cleanliness of the air in the cleanroom 2. Therefore, by sending the exhaust air (i.e., general exhaust air or general hot exhaust air from process equipment 201) in cleanroom 2 to air handling unit 1 through fan 3, the exhaust air in cleanroom 2 can be recycled and reused. Compared with the existing clean air conditioning system of fresh air handling unit + fan 3 filter unit 5 + dry coil 4, this method has a simple structure and is easy to operate. Without adding equipment, the exhaust air in cleanroom 2 can be recycled to air handling unit 1, which can reduce the energy consumed by air handling unit 1 to process fresh air, thereby improving the energy efficiency and economic benefits of the entire clean air conditioning system. At the same time, if the cleanliness of the recycled exhaust air is higher than that of the outdoor fresh air, the processing time of air handling unit 1 can also be reduced. In addition, the exhaust air that does not need to be recycled can be directly discharged to the outside.

[0042] In other words, "no additional equipment required" means that by connecting the fan 3 to the air handling unit 1, exhaust air can be recycled and reused. Existing clean air conditioning systems have a fan 3, which directly discharges exhaust air outdoors.

[0043] Specifically, the dry coil 4 is installed in the upper or lower technical interlayer of the cleanroom 2; the air in the cleanroom 2 flows back to the return air duct through the lower technical interlayer or the elevated floor, and then is pressurized and filtered by the filter unit 5. This cycle is repeated to ensure the cleanliness of the air in the cleanroom 2.

[0044] In this embodiment, the system further includes a static pressure box 6, which is used to optimize airflow distribution to achieve uniform distribution. A fresh air section duct 12 is installed at the third port of the static pressure box 6. A first temperature sensor 13 is installed in the fresh air section duct 12, and a first air valve 14 is connected in series with the fresh air section duct 12. Thus, the first temperature sensor 13 is used to detect the temperature of the outdoor air; the opening and closing of the first air valve 14 controls the opening and closing of the fresh air section duct 12, and the first air valve 14 regulates the airflow of the fresh air section duct 12.

[0045] In this embodiment, the air inlet of the air handling unit 1 is connected to the first port of the static pressure box 6 via an air inlet duct 7, and the air outlet of the air handling unit 1 is connected to the cleanroom 2 via a supply air duct 8. A second temperature sensor 701 is installed in the air inlet duct 7, and a second air valve 702 is connected in series with it. Thus, the second temperature sensor 701 is used to detect the temperature of the air flowing through the air inlet duct 7; the opening and closing of the second air valve 702 controls the opening and closing of the air inlet duct 7, and also regulates the airflow of the air inlet duct 7.

[0046] In this embodiment, one end of the fan 3 is connected to the process equipment 201 in the cleanroom 2 via an exhaust duct 9, and the other end of the fan 3 is connected to the second port of the static pressure box 6 via a return air duct 10. An exhaust duct 11 is also provided at the other end of the fan 3. A third temperature sensor 301 is provided at the other end of the fan 3. A third air valve 15 is connected in series with the return air duct 10, and a fourth air valve 16 is connected in series with the exhaust duct 11. Thus, the third temperature sensor 301 is used to detect the temperature of the exhaust air from the cleanroom 2; the opening and closing of the third air valve 15 controls the opening and closing of the return air duct 10 and adjusts the airflow of the return air duct 10; the opening and closing of the fourth air valve 16 controls the opening and closing of the exhaust duct 11 and adjusts the airflow of the exhaust duct 11.

[0047] It should be noted that the opening and opening ratio of the first air valve 14, the second air valve 702, the third air valve 15, and the fourth air valve 16 are determined by comparing the outdoor fresh air temperature, the exhaust air temperature, the designed temperature of the air handling unit 1, and the pressure difference value of the clean room 2.

[0048] Specifically, the end of the exhaust duct 11 furthest from the fan 3 is directly connected to the outdoor atmosphere.

[0049] In this embodiment, the air handling unit 1 is internally equipped with a coil section (not shown in the figure), a humidification section (not shown in the figure), and a filter section (not shown in the figure). The coil section is used for preheating, recooling, preheating, and reheating the air; the humidification section is used for humidifying the air; and the filter section is used for filtering dust particles in the air. The air handling unit 1 is also internally equipped with a chemical filter section (not shown in the figure) or a water spray section (not shown in the figure) to remove molecular pollutants in the air. Specifically, multiple coil sections and multiple filter sections are provided.

[0050] The working process of this clean air conditioning system is as follows:

[0051] 1. If the outdoor air temperature T1 (i.e., the outdoor air temperature T1 detected by the first temperature sensor 13) ≤ the exhaust air temperature T3 (i.e., the exhaust air temperature T3 of the cleanroom 2 detected by the first temperature sensor 13) and the outdoor air temperature T1 < the design temperature T4 of the air outlet of the air handling unit 1 (the air state that meets this condition is expressed on the enthalpy-humidity chart, such as...) Figure 2 As shown), the exhaust air can be recycled. Open the first air valve 14, the second air valve 702 and the third air valve 15.

[0052] 2. If the outdoor air temperature T1 > the exhaust air temperature T3, and the outdoor air temperature T1 ≥ the design temperature T4 of the air handling unit 1 (express the air condition that meets this condition on the enthalpy-humidity chart, such as...) Figure 3 As shown), the exhaust air can be recycled. Open the first air valve 14, the second air valve 702 and the third air valve 15.

[0053] 3. If the outdoor air temperature T1 is greater than the design temperature T4 of the air handling unit 1 outlet and the outdoor air temperature T1 is less than the exhaust temperature T3, or if the outdoor air temperature T1 is less than or equal to the design temperature T4 of the air handling unit 1 outlet and the outdoor air temperature T1 is greater than or equal to the exhaust temperature T3, close the third air valve 15 and open the first air valve 14, the second air valve 702 and the fourth air valve 16.

[0054] 4. By adjusting the opening ratio of the first air valve 14, the third air valve 15 and the fourth air valve 16, the recovery air volume of the exhaust air from the process equipment 201 is adjusted to the air handling unit 1, thereby adjusting the temperature T2 at the air inlet of the air handling unit 1 (i.e. the temperature of the air flowing through the air in the air inlet section duct 7 detected by the second temperature sensor 701).

[0055] In summary, this utility model uses a fan 3 to send exhaust air from the cleanroom 2 to the air handling unit 1, enabling the recycling of exhaust air from the cleanroom 2. Compared to existing cleanroom air conditioning systems consisting of a fresh air handling unit + fan 3, filter unit 5, and dry coil 4, this method has a simpler structure and is easier to operate. Without adding any equipment, the exhaust air from the cleanroom 2 can be recycled to the air handling unit 1, reducing the energy consumed by the air handling unit 1 in processing fresh air, thereby improving the energy efficiency and economic benefits of the entire cleanroom air conditioning system. Furthermore, if the cleanliness of the recycled exhaust air is higher than that of the outdoor fresh air, the processing time of the air handling unit 1 can be reduced. In addition, exhaust air that does not need to be recycled can be directly discharged outdoors.

[0056] The above description is an explanation of the present utility model and not a limitation thereof. The scope of the present utility model is defined by the claims. Within the protection scope of the present utility model, any form of modification may be made.

Claims

1. An energy-saving clean air conditioning system based on process exhaust air recovery, characterized in that, include: Air handling unit (1), the air handling unit (1) is used to process fresh air, process exhaust air and return air, and send the processed fresh air, process exhaust air and return air into the clean room (2) to maintain the positive pressure and air humidity of the clean room (2); Fan (3), the fan (3) is used to send the exhaust air in the clean room (2) to the air handling unit (1) or directly to the outside; Dry coil (4), which is installed in the cleanroom (2) and is used to eliminate the load in the cleanroom (2) to ensure the temperature in the cleanroom (2); The filter unit (5) is used to pressurize and filter the air in the cleanroom (2) to ensure the cleanliness of the indoor air in the cleanroom (2).

2. The energy-saving clean air conditioning system based on process exhaust air recovery as described in claim 1, characterized in that: Also includes: A static pressure chamber (6) is used to optimize airflow distribution to achieve uniform distribution.

3. The energy-saving clean air conditioning system based on process exhaust air recovery as described in claim 2, characterized in that: The air inlet of the air handling unit (1) is connected to the first port of the static pressure box (6) through an air inlet duct (7), and the air outlet of the air handling unit (1) is connected to the cleanroom (2) through an air supply duct (8).

4. The energy-saving clean air conditioning system based on process exhaust air recovery as described in claim 2, characterized in that: One end of the fan (3) is connected to the process equipment (201) in the cleanroom (2) through an exhaust duct (9), and the other end of the fan (3) is connected to the second port of the static pressure box (6) through a return air duct (10). The other end of the fan (3) is also provided with an exhaust section duct (11).

5. The energy-saving clean air conditioning system based on process exhaust air recovery as described in claim 2, characterized in that: The third port of the static pressure box (6) is equipped with a fresh air section duct (12).

6. The energy-saving clean air conditioning system based on process exhaust air recovery as described in claim 5, characterized in that: The fresh air section duct (12) is equipped with a first temperature sensor (13), and the fresh air section duct (12) is connected in series with a first air valve (14).

7. The energy-saving clean air conditioning system based on process exhaust air recovery as described in claim 3, characterized in that: The air inlet duct (7) is equipped with a second temperature sensor (701), and the air inlet duct (7) is connected in series with a second air valve (702).

8. The energy-saving clean air conditioning system based on process exhaust air recovery as described in claim 4, characterized in that: A third temperature sensor (301) is provided at the other end of the fan (3), a third air valve (15) is connected in series in the return air section duct (10), and a fourth air valve (16) is connected in series in the exhaust section duct (11).

9. The energy-saving clean air conditioning system based on process exhaust air recovery as described in claim 1, characterized in that: The air handling unit (1) is internally equipped with a coil section, a humidification section and a filtration section. The coil section is used to preheat, recool, preheat and reheat the air. The humidification section is used to humidify the air. The filtration section is used to filter dust particles in the air.

10. The energy-saving clean air conditioning system based on process exhaust air recovery as described in claim 1, characterized in that: The air handling unit (1) is also equipped with a chemical filtration section or a water spray section to remove molecular pollutants from the air.

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