Wind speed monitoring device used in equipment cavity

Abstract

The utility model discloses an air speed monitoring device used in an equipment cavity, the cavity is formed by a cavity shell and a base, and the cavity shell is provided with an air supply outlet used for supplying clean air into the cavity; the wind speed monitoring device comprises an anemometer and a controller; one end, provided with a measuring head, of the anemometer is arranged in the cavity, is aligned with the air supply outlet and is used for detecting the feeding air speed of the clean air; the controller is electrically connected with the anemometer and used for receiving wind speed value information detected by the anemometer, judging whether the wind speed value is within a preset range or not and sending an alarm instruction when the wind speed value exceeds the preset range. The air speed monitoring device is additionally arranged in the cavity, so that when the air speed in the cavity is abnormal, an alarm prompt is given in time, and measurement is stopped at the same time; and the yield of products and the automation degree of equipment can be effectively improved.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing technology, specifically relating to a wind speed monitoring device for use inside the cavity of equipment. Background Technology

[0002] After all the manufacturing processes are completed, the surface particles of each wafer must be measured before packaging and shipping. Only wafers with a measured particle count that meets the specifications can be shipped to the customer. Therefore, wafer measurement is a critical process station, and the measurement equipment used to measure wafer particles has strict requirements on the particles inside its chamber. The top of the equipment is equipped with an FFU (Fan Filter Unit), which delivers clean air into the chamber, ensuring a clean and dust-free environment inside the chamber. This also ensures that no new particles are added during the wafer particle measurement process, thus achieving the goal of accurate wafer measurement.

[0003] During the actual measurement of a wafer by the metrology equipment, a wafer is conveyed into the cavity and measurement begins. Because the FFU (Fan Filter Unit) continuously supplies air into the cavity, particles in the cavity environment and particles generated by the movement of various mechanisms are carried away by the air from the FFU, ensuring the cleanliness of the cavity. However, when the FFU malfunctions or the pipeline is damaged, the air supply may be reduced or stopped. In this case, the cleanliness of the cavity environment cannot be guaranteed, resulting in an increase in particles on the wafer during or after measurement. Increased particles on the wafer during measurement lead to product quality abnormalities, while increased particles on the wafer after measurement cause abnormalities at the customer's site, leading to customer complaints. Since there is no airflow monitoring device inside the cavity, abnormal air supply cannot be detected in a timely manner, causing the abnormalities to persist and seriously affecting product quality.

[0004] Therefore, this application addresses this problem by further improving the cavity of the measuring equipment. A new device for monitoring wind speed is added inside the cavity, enabling it to promptly issue an alarm and stop the measurement when abnormal wind speed occurs. This has significant technical value for improving product yield and the automation level of the equipment. Utility Model Content

[0005] The purpose of this invention is to provide a wind speed monitoring device for the interior of a device cavity to address the shortcomings of existing technologies.

[0006] The objective of this utility model is achieved through the following technical solution:

[0007] A wind speed monitoring device for the interior of a device cavity, wherein the cavity is formed by a cavity shell and a base, and the cavity shell is provided with an air outlet for supplying clean air into the cavity; the wind speed monitoring device includes an anemometer and a controller.

[0008] The anemometer with a measuring head is located inside the cavity and aligned with the air outlet to detect the wind speed of the clean air being delivered.

[0009] The controller is electrically connected to the anemometer and is used to receive the wind speed value information detected by the anemometer and determine whether the wind speed value is within a preset range. When it exceeds the preset range, an alarm command is sent.

[0010] Preferably, the other end of the anemometer is located on the outside of the cavity shell.

[0011] Preferably, the anemometer has positioning blocks at both ends; the bottom of the positioning block is fixed to the base, and the top is fixedly connected to the anemometer.

[0012] Preferably, the positioning block is fixedly connected to the anemometer by a second screw.

[0013] Preferably, the air outlet is located at the top of the cavity shell, and the measuring head of the anemometer is located directly below the air outlet.

[0014] Preferably, the base is further provided with a support for supporting the wafer;

[0015] The support base is located at the center inside the cavity, and the air outlet and the anemometer are located on one side inside the cavity.

[0016] Preferably, the outer side of the support base is provided with a plurality of positioning posts for positioning the wafer.

[0017] Preferably, the outer shell of the cavity is further provided with a transfer port for transferring wafers into the cavity;

[0018] The delivery port and the anemometer are located on different sides of the cavity shell.

[0019] Preferably, a fan filter unit is connected to the top of the cavity shell via a support plate, and a corrugated pipe is provided between the fan filter unit and the air outlet for delivering clean air.

[0020] Preferably, a joint is provided between the corrugated pipe and the fan filter unit and the air outlet.

[0021] This application introduces a wind speed monitoring device inside the cavity, enabling timely alarm prompts and simultaneous cessation of measurement when abnormal wind speeds occur within the cavity. This effectively improves product yield and the automation level of the equipment. Therefore, the wind speed monitoring device provided in this application has significant practical value and technological improvement implications in semiconductor wafer processing measurement technology. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall left side of the wind speed monitoring device provided in this application;

[0023] Figure 2 This is a schematic diagram of the wind speed monitoring device provided in this application from the right side.

[0024] Figure 3 This is a schematic diagram of the front side of the wind speed monitoring device provided in this application;

[0025] Figure 4 This is a schematic diagram of the rear side of the wind speed monitoring device provided in this application;

[0026] Figure 5 This is a schematic diagram of the cavity cross-section of the wind speed monitoring device provided in this application;

[0027] Figure 6 This is a chip measurement status diagram.

[0028] Explanation of reference numerals in the attached figures:

[0029] 1-Fan filter unit; 2-Support plate; 3-Cavity shell; 4-Base; 5-Bellwall; 6-Anemometer; 7-First connector; 8-Second connector; 9-Transmission port; 10-Positioning post; 11-First screw; 12-Support base; 13-Second screw; 14-Positioning block; 15-Crystal; 16-Air outlet. Detailed Implementation

[0030] A preferred embodiment of this application provides a wind speed monitoring device for use inside a device cavity, the wind speed monitoring device being located within the cavity of a measuring machine. For example... Figures 1-6 As shown, the cavity is formed by a cavity shell 3 and a base 4, and is generally rectangular. The cavity shell 3 consists of four plates: left, right, rear, and top. The front side serves as a maintenance passage and is sealed with a cover plate during use (the front sealing cover plate is not shown in the figure to clearly show the internal structure of the cavity). The cavity shell 3 has an air inlet 16 for supplying clean air into the cavity, where the wafer 15 is used for particle count measurement. During measurement, clean air is continuously supplied into the cavity through the air inlet 16 to ensure the cleanliness of the cavity interior. Figures 1-6 As shown, the wind speed monitoring device includes an anemometer 6 and a controller. The controller is electrically connected to the anemometer and can receive anemometer detection information and send alarm commands.

[0031] The anemometer 6, with its measuring head, is located inside the cavity and aligned with the air outlet 16. It is used to detect the incoming clean air velocity and transmit the detection information to the controller in real time. Preferably, the air outlet 16 is located at the top of the cavity shell, and the anemometer's measuring head is located directly below the air outlet, ensuring that clean air can reach the anemometer and improving detection efficiency and accuracy.

[0032] The controller receives wind speed data from the anemometer and compares it with preset values ​​to determine if the wind speed is within the preset range. If the wind speed exceeds the preset range, it indicates a problem with the clean air supply, prompting an alarm command and stopping the measuring instrument until maintenance personnel confirm and resolve the issue. Alarms preferably include audible and visual alarms to alert personnel.

[0033] The controller can be a microcontroller, PLC, etc., and only needs to have simple logic operation functions (to determine whether the wind speed value is within the preset range). In addition, this controller can also be integrated into the controller of the measuring machine.

[0034] Preferably, the other end of the anemometer 6 is located on the outside of the cavity shell, that is, the cavity shell has a through hole for the anemometer to pass through. The anemometer passes through this through hole, with one end of the measuring head located inside the cavity and the tail end located outside the cavity. Since the tail end of the anemometer has connecting lines, if it is located inside the cavity, it is easy to interfere with the support base (the support base needs to rotate or move during the measurement process). Therefore, placing the tail end of the anemometer outside the cavity can reduce the risk of interference.

[0035] Preferably, the anemometer 6 has positioning blocks 14 at both ends; the bottom of the positioning block 14 is fixed to the base 4, and the top is fixedly connected to the anemometer. The positioning blocks provide stable support for the anemometer.

[0036] Furthermore, the positioning block 14 is fixedly connected to the anemometer 6 by the second screw 13.

[0037] Preferably, the base 4 is further provided with a support seat 12 for supporting the wafer 15; wherein the support seat 12 is located in the center of the cavity for easy measurement of the wafer; the air outlet 16 and the anemometer 6 are located on one side of the cavity to prevent clean air from blowing directly onto the wafer and affecting the wafer particle count measurement results. Furthermore, the support seat 12 is fixed to the base 4 by a first screw 11.

[0038] Preferably, a plurality of positioning posts 10 are arranged around the outside of the support base 12, preferably eight, with each pair of positioning posts 10 spaced 45 degrees apart. The positioning posts 10 are used to position the wafer 15, which facilitates the measurement of the wafer.

[0039] Preferably, the cavity shell is also provided with a transfer port 9, through which the arm feeds or removes the wafer 15 into or out of the cavity. The transfer port 9 and the anemometer 6 are located on different sides of the cavity shell, which facilitates the installation of the anemometer.

[0040] Preferably, a fan filter unit 1 is connected to the top of the outer shell 3 of the cavity via a support plate 2. The fan filter unit 1 is mainly used to filter the air in the external environment and supply the filtered clean air to the cavity. A corrugated pipe 5 is provided between the fan filter unit 1 and the air outlet 16, so that the clean air generated by the fan filter unit 1 can pass into the cavity through the corrugated pipe 5. The support plate 2 is used to support and fix the fan filter unit 1, and it consists of two plates, left and right, with the lower end of the support plate 2 fixed to the top of the outer shell 3 of the cavity.

[0041] Furthermore, a connector is provided between the corrugated pipe 5 and the fan filter unit 1 and the air outlet 16. Specifically, it includes a first connector 7 at the upper fan filter unit and a second connector 8 at the lower air outlet. The connection and disassembly of the corrugated pipe can be facilitated by providing the connector.

[0042] This application introduces a wind speed monitoring device inside the cavity, enabling timely alarm prompts and simultaneous cessation of measurement when abnormal wind speeds occur within the cavity. This effectively improves product yield and the automation level of the equipment. Therefore, the wind speed monitoring device provided in this application has significant practical value and technological improvement implications in semiconductor wafer processing measurement technology.

[0043] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including both the preferred embodiments and all changes and modifications falling within the scope of the present invention. Clearly, those skilled in the art can make various alterations and modifications to the present invention without departing from its spirit and scope. Thus, if such modifications and modifications fall within the scope of the claims of the present invention and their equivalents, the present invention also intends to include such modifications and modifications.

Claims

1. A wind speed monitoring device for an internal cavity of an equipment, wherein the cavity is formed by a cavity shell and a base, and the cavity shell is provided with an air outlet for supplying clean air into the cavity; characterized in that, The wind speed monitoring device includes an anemometer and a controller; The anemometer with a measuring head is located inside the cavity and aligned with the air outlet to detect the wind speed of the clean air being delivered. The controller is electrically connected to the anemometer and is used to receive the wind speed value information detected by the anemometer and determine whether the wind speed value is within a preset range. When it exceeds the preset range, an alarm command is sent.

2. The wind speed monitoring device for the interior of a device cavity as described in claim 1, characterized in that, The other end of the anemometer is located on the outside of the cavity shell.

3. The wind speed monitoring device for the interior of a device cavity as described in claim 2, characterized in that, The anemometer has positioning blocks at both ends; the bottom of the positioning block is fixed to the base, and the top is fixedly connected to the anemometer.

4. The wind speed monitoring device for the interior of a device cavity as described in claim 3, characterized in that, The positioning block is fixedly connected to the anemometer by a second screw.

5. The wind speed monitoring device for the interior of a device cavity as described in claim 1, characterized in that, The air outlet is located at the top of the cavity shell, and the measuring head of the anemometer is located directly below the air outlet.

6. The wind speed monitoring device for the interior of a device cavity as described in claim 5, characterized in that, The base is also provided with a support for supporting the chip; The support base is located at the center inside the cavity, and the air outlet and the anemometer are located on one side inside the cavity.

7. The wind speed monitoring device for the interior of a device cavity as described in claim 6, characterized in that, The outer side of the support base is provided with multiple positioning posts for positioning the wafer.

8. The wind speed monitoring device for the interior of a device cavity as described in claim 1, characterized in that, The cavity shell is also provided with a transfer port for transferring wafers into the cavity; The delivery port and the anemometer are located on different sides of the cavity shell.

9. The wind speed monitoring device for the interior of a device cavity as described in claim 1, characterized in that, The top of the cavity shell is connected to a fan filter unit via a support plate. A corrugated pipe is provided between the fan filter unit and the air outlet for delivering clean air.

10. The wind speed monitoring device for the interior of a device cavity as described in claim 9, characterized in that, A joint is provided between the corrugated pipe and the fan filter unit and the air outlet.

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