Adjustable light source system

By designing an adjustable light source system and using adjustable sliders and diffraction lens groups to change the position of the diffraction lens, the contradiction between high resolution and large depth of field is resolved, and the light source system can be flexibly adjusted to meet the production needs of different products.

CN223966813UActive Publication Date: 2026-03-03WUXI XUDIAN TECH
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Patent Information

Application Number
CN202520597404.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-04-01
Publication Date
2026-03-03
Estimated Expiration
2035-04-01

AI Technical Summary

Technical Problem

Existing technologies cannot simultaneously meet the demands of high resolution and large depth of field, resulting in reduced depth of field when producing high-resolution products, and vice versa when producing products with large depth of field.

Method used

Design an adjustable light source system. By adjusting the slider and diffraction lens group, the position and spacing of the diffraction lens can be changed, thereby adjusting the depth of field and resolution of the light source system. The system includes a light source box, an emitting part, a refraction part, a focusing part, and a front lens. Adjustment and reset components are used to drive the adjustment limit fork to contact the lens frame, and the adjustment slider is moved to change the position of the diffraction lens.

Benefits of technology

It enables flexible adjustment of the depth of field and resolution of the light source system, meeting the needs of different products and improving production flexibility and product quality.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses an adjustable light source system which comprises a light source lamp box, and an emitting part, a refraction part, a light gathering part and a front lens which are arranged in the light source lamp box, a diffraction lens group is arranged between the light gathering part and the refraction part and comprises an adjusting sliding block which is arranged on the light source lamp box and is in sliding fit with the light source lamp box; a plurality of groups of adjusting units are designed, and each group comprises an adjusting piece and a resetting piece which are arranged on the adjusting sliding block, and an adjusting limiting fork frame connected with the adjusting piece; and a plurality of diffracted light lenses are designed, the periphery of each diffracted light lens is provided with a lens frame, and the lens frames are matched with the adjusting and limiting fork frames. The reset piece and the adjusting piece are designed to drive the adjusting limiting fork frame to make contact with the lens frame, after the adjusting limiting fork frame makes contact with the lens frame, the adjusting sliding block is moved, the position of the diffraction light lens can be changed, and the depth of field and the resolution ratio of a light source system can be changed.
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Description

Technical Field

[0001] This utility model relates to the field of compound semiconductor light source systems, specifically an adjustable light source system used to overlap a substrate coated with photoresist with a photomask, and to transfer the photomask pattern onto the substrate through exposure via the light source system. Background Technology

[0002] In the semiconductor field, the exposure process mainly involves overlapping a substrate coated with photoresist with a photomask, and then transferring the photomask pattern onto the substrate using a light source system.

[0003] Currently, customers need to use corresponding high-resolution analytical light sources when producing high-resolution products;

[0004] However, this would not be able to meet the requirements of products with large depth of field. When producing products with large depth of field, if the light source cannot meet the requirements of large depth of field, the product resolution will be reduced.

[0005] High resolution and large depth of field lighting systems are inherently contradictory structures. Normally, if high resolution is needed, the depth of field will be reduced, and vice versa.

[0006] To solve the above problems, it is necessary to design an adjustable light source system that can adjust the depth of field or resolution, so as to achieve a light source system with adjustable resolution and depth of field. Utility Model Content

[0007] Purpose of the utility model: To provide an adjustable light source system to solve the above-mentioned problems existing in the prior art.

[0008] Technical solution: An adjustable light source system, comprising:

[0009] A light source box, and an emitting part, a refraction part, a focusing part and a front lens disposed within the light source box;

[0010] The light source box is in the shape of three sections, with the middle section being horizontal and the two ends being vertical;

[0011] A diffraction lens group is provided between the focusing part and the refractive part, and the diffraction lens group includes:

[0012] An adjusting slider is mounted on the light source box and slides in conjunction with the light source box.

[0013] The adjustment unit is designed in multiple groups, each group including an adjustment component and a reset component disposed on the adjustment slider, and an adjustment limit fork connected to the adjustment component;

[0014] The diffractive light lens is designed with multiple lenses, and each diffractive light lens has a lens frame on its periphery. The lens frame is adapted to the adjustment and limiting fork.

[0015] This invention designs a reset component and an adjustment component to drive the adjustment limit fork to contact the lens frame. After the adjustment limit fork contacts the lens frame, moving the adjustment slider can change the position of the diffractive light lens and the spacing between multiple sets of diffractive light lenses, thereby changing the depth of field and resolution of the light source system. Thus, the light source system can be adjusted according to the needs of the product.

[0016] In a further embodiment, the emitting part includes a mercury lamp and an elliptical reflector installed inside the light source box;

[0017] The elliptical reflector surrounds the periphery of the mercury lamp.

[0018] In a further embodiment, the refractive part includes a cold light mirror and a reflector installed inside the light source box;

[0019] The cold light mirror and the reflector are installed at a predetermined angle inside the light source box.

[0020] In a further embodiment, the focusing part includes a compound eye lens and a focusing lens installed inside the light source box.

[0021] In a further embodiment, the cold light mirror is located below the mercury lamp and the elliptical reflector;

[0022] The front lens is located below the reflecting mirror;

[0023] The compound eye lens, condenser lens, and diffractive lens are located between the cold light mirror and the reflecting mirror, and are arranged in the order of compound eye lens, condenser lens, and diffractive lens from the cold light mirror to the reflecting mirror.

[0024] In a further embodiment, the light source box has a sliding groove and multiple sets of guide rods inside.

[0025] In a further embodiment, the top of the adjusting slider is provided with multiple sets of slider cylinders, and the side has multiple sets of reset cavities. Each set of reset cavities is provided with a first slider fixing ring and a second slider fixing ring.

[0026] The limiting ball is adapted to the reset cavity.

[0027] In a further embodiment, the adjusting member includes:

[0028] An adjusting rod is inserted into the adjusting slider and adapted to the slider cylinder; the adjusting rod has a ball groove inside.

[0029] An adjusting spring is sleeved on the adjusting rod and located between the adjusting rod and the slider cylinder;

[0030] A limiting ball is adapted to the ball groove, and a limiting spring is connected between the inner wall of the ball groove and the limiting ball;

[0031] By designing an adjustment component, the adjustment limit fork is brought into contact with the lens frame, and then the movement of the adjustment slider drives the movement of the diffractive lens, thereby adjusting the depth of field or resolution of the light source system.

[0032] In a further embodiment, the reset element includes:

[0033] A reset ball rod, located within the reset cavity, includes a ball and a rod connected to the ball. The rod passes through a first slider fixing ring and a second slider fixing ring. The ball is located on the side of the second fixing ring away from the first fixing ring and abuts against the limiting ball.

[0034] A reset baffle is provided on the rod body, located between the first slider fixing ring and the second slider fixing ring;

[0035] A reset post is adapted to the reset cavity and connected to the rod body;

[0036] A return spring is sleeved on the rod body, and the return spring is disposed between the second slider fixing ring and the return baffle.

[0037] By designing a reset component, the limit ball is reset, thereby causing the adjustment limit fork to disengage from the lens frame.

[0038] In a further embodiment, the adjusting limit fork is connected to the adjusting rod;

[0039] The lens holder is equipped with multiple sets of sliding sleeves that are adapted to the guide rod;

[0040] The sliding sleeve has a predetermined size. When two adjacent diffractive lenses are close together, they are blocked by the sliding sleeve, so that the two diffractive lenses have a predetermined distance, which facilitates the insertion of the limiting fork.

[0041] By designing a sliding sleeve and using intermittent diffractive lenses, the insertion of the limiting fork can be adjusted, thus facilitating adjustment.

[0042] Beneficial effects: This utility model discloses an adjustable light source system. By designing a reset component and an adjustment component, the adjustable limit fork is driven to contact the lens frame. After the adjustable limit fork contacts the lens frame, the adjustment slider can be moved to change the position of the diffractive light lens and the spacing of multiple diffractive light lenses, thereby changing the depth of field and resolution of the light source system. Thus, the light source system can be adjusted according to the needs of the product. Attached Figure Description

[0043] Figure 1 This is a schematic diagram of the structure of this utility model.

[0044] Figure 2 This is a schematic diagram of the diffraction lens assembly structure of this utility model.

[0045] Figure 3 This is a schematic diagram of the cross-sectional structure of the diffraction lens group of this utility model.

[0046] Figure 4 This is a partially enlarged structural diagram of the adjusting and resetting components of this utility model.

[0047] The attached figures are labeled as follows:

[0048] 11. Light source box; 12. Slide rail; 13. Guide rod;

[0049] 21. Elliptical reflector; 22. Mercury lamp; 31. Cold light mirror; 32. Reflector; 41. Compound eye lens; 51. Condensing lens; 61. Diffraction lens group;

[0050] 611. Adjusting slider; 611A. Slider cylinder; 611B. First slider retaining ring; 611C. Second slider retaining ring;

[0051] 612, Adjusting component; 612A, Adjusting rod; 612B, Adjusting spring; 612C, Limiting spring; 612D, Limiting ball;

[0052] 613, Reset component; 613A, Reset ball; 613B, Reset stop plate; 613C, Reset spring; 613D, Reset post;

[0053] 614. Adjustable limit fork; 615. Lens holder; 616. Sliding sleeve; 617. Diffractive lens;

[0054] 71. Front lens. Detailed Implementation

[0055] This application relates to an adjustable light source system, which will be explained in detail below through specific embodiments.

[0056] An adjustable light source system includes:

[0057] The light source box 11, and the emitting part, refraction part, focusing part and front lens 71 disposed in the light source box 11;

[0058] The light source box 11 is in the shape of three sections, with the middle section being horizontal and the two ends being vertical;

[0059] The emitting part includes a mercury lamp 22 and an elliptical reflector 21 installed in the light source box 11;

[0060] The elliptical reflector 21 surrounds the periphery of the mercury lamp 22.

[0061] The refractive part includes a cold light mirror 31 and a reflector 32 installed inside the light source box 11;

[0062] The cold light mirror 31 and the reflector 32 are installed in the light source box 11 at a predetermined angle.

[0063] The focusing part includes a compound eye lens 41 and a focusing lens 51 installed inside the light source box 11.

[0064] A diffraction lens group 61 is provided between the focusing part and the refractive part, and the diffraction lens group 61 includes:

[0065] An adjusting slider 611 is mounted on the light source box 11 and slides in cooperation with the light source box 11.

[0066] The adjustment unit is designed in multiple groups, each group including an adjustment member 612 and a reset member 613 disposed on the adjustment slider 611, and an adjustment limit fork 614 connected to the adjustment member 612;

[0067] The diffractive light lens 617 is designed to have multiple lenses, and each diffractive light lens 617 has a lens holder 615 on its periphery. The lens holder 615 is adapted to the adjustment and limiting fork 614.

[0068] This utility model designs a reset component 613 and an adjustment component 612 to drive the adjustment limit fork 614 to contact the lens frame 615. After the adjustment limit fork 614 contacts the lens frame 615, the adjustment slider 611 can be moved to change the position of the diffractive light lens 617 and the spacing of multiple sets of diffractive light lenses 617, thereby changing the depth of field and resolution of the light source system. Thus, the light source system can be adjusted according to the needs of the product.

[0069] The cold light mirror 31 is located below the mercury lamp 22 and the elliptical reflector 21;

[0070] The front lens 71 is located below the reflector 32;

[0071] The compound eye lens 41, the condenser lens 51 and the diffraction lens 617 are located between the cold light mirror 31 and the reflector 32, and are arranged sequentially from the cold light mirror 31 to the reflector 32.

[0072] The light source box 11 has a sliding groove 12 and multiple sets of guide rods 13 inside.

[0073] The top of the adjusting slider 611 is provided with multiple sets of slider cylinders 611A, and the side has multiple sets of reset cavities. Each set of reset cavities is provided with a first slider fixing ring 611B and a second slider fixing ring 611C.

[0074] The limiting ball 612D is adapted to the reset cavity.

[0075] The adjusting member 612 includes:

[0076] An adjusting rod 612A is inserted into the adjusting slider 611 and adapted to the slider cylinder 611A. A ball groove is opened inside the adjusting rod 612A.

[0077] An adjusting spring 612B is sleeved on the adjusting rod 612A and located between the adjusting rod 612A and the slider cylinder 611A;

[0078] A limiting ball 612D is adapted to the ball groove, and a limiting spring 612C is connected between the inner wall of the ball groove and the limiting ball 612D.

[0079] By designing the adjustment component 612, the adjustment limit fork 614 is brought into contact with the lens holder 615, and then the movement of the adjustment slider 611 drives the movement of the diffraction lens 617, thereby adjusting the depth of field or resolution of the light source system.

[0080] The reset component 613 includes:

[0081] The reset ball rod 613A is located in the reset cavity and includes a ball and a rod connected to the ball. The rod passes through the first slider fixing ring 611B and the second slider fixing ring 611C. The ball is located on the side of the second fixing ring away from the first fixing ring and abuts against the limiting ball 612D.

[0082] A reset baffle 613B is disposed on the rod body, located between the first slider fixing ring 611B and the second slider fixing ring 611C;

[0083] The reset post 613D is adapted to the reset cavity and connected to the rod body;

[0084] A return spring 613C is sleeved on the rod body, and the return spring 613C is disposed between the second slider fixing ring 611C and the return baffle 613B.

[0085] The design of the return spring 613C can drive the return ball 613A to reset;

[0086] By designing the reset component 613, the reset limit ball 612D is reset, thereby causing the adjustment limit fork 614 to disengage from the lens holder 615.

[0087] The adjusting limit fork 614 is connected to the adjusting rod 612A, and the adjusting rod 612A passes through the slide groove 12 and is connected to the adjusting limit frame;

[0088] The lens holder 615 is provided with multiple sets of sliding sleeves 616 that are adapted to the guide rod 13;

[0089] The sliding sleeve 616 has a predetermined size. When two adjacent diffractive lenses 617 are close together, they are blocked by the sliding sleeve 616, so that the two diffractive lenses 617 have a predetermined distance, which facilitates the insertion of the adjusting limit fork 614.

[0090] By designing a sliding sleeve 616 and an intermittent diffraction lens 617, the insertion of the limiting fork 614 can be easily adjusted, thus facilitating adjustment.

[0091] Working principle description: When working, the mercury lamp 22 emits light, which shines through the elliptical reflector 21 onto the cold light mirror 31, and then shines out through the compound eye lens 41, the condenser lens 51, multiple diffraction lenses 617, the reflector 32, and the front lens 71.

[0092] During the illumination process, when it is necessary to adjust the depth of field or resolution, this is accomplished by adjusting the positions of multiple sets of diffractive lenses 617.

[0093] In the initial position (taking the position near the condenser lens 51 as an example), multiple diffractive lenses 617 are close to each other in the initial position. Pressing the adjustment rod 612A causes the adjustment limit fork 614 to descend and hold the lens frame 615. When the limit ball 612D is affected by the limit spring 612C, it enters part of the reset cavity, thus completing the limitation of the adjustment limit fork 614.

[0094] At this time, moving the adjustment slider 611 causes the adjustment rod 612A to move, which in turn causes the adjustment limit fork 614 to move, and the lens holder 615 to move along the guide rod 13, thereby changing the position of multiple diffractive lenses 617. When the diffractive lens 617 near the initial position reaches the position to be adjusted, the reset post 613D is pressed, causing the reset ball rod 613A to move against the limit ball 612D, causing the limit ball 612D to retract into the ball groove. The adjustment rod 612A is affected by the adjustment spring 612B and rises, thereby causing the adjustment limit fork 614 to disengage from the lens holder 615, completing the position adjustment of the diffractive lens 617 near the initial position. This process is repeated step by step to adjust the diffractive lens 617, thereby completing the adjustment of the depth of field or resolution of the light source system.

[0095] The preferred embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the specific details of the above embodiments. Within the scope of the technical concept of the present invention, various equivalent transformations can be made to the technical solutions of the present invention, and all such equivalent transformations fall within the protection scope of the present invention.

Claims

1. An adjustable light source system, characterized in that, include: The light source box (11), and the emitting part, the refraction part, the focusing part and the front lens (71) disposed in the light source box (11). The feature is that a diffraction mirror group (61) is provided between the focusing part and the refractive part, and the diffraction mirror group (61) includes: An adjusting slider (611) is set on the light source box (11) and slides in cooperation with the light source box (11); The adjustment unit is designed in multiple groups, each group including an adjustment member (612) and a reset member (613) disposed on the adjustment slider (611), and an adjustment limit fork (614) connected to the adjustment member (612). The diffractive light lens (617) is designed in multiple pieces, and each diffractive light lens (617) has a lens frame (615) around its periphery. The lens frame (615) is adapted to the adjustment limiting fork (614).

2. The adjustable light source system according to claim 1, characterized in that: The emitting part includes a mercury lamp (22) and an elliptical reflector (21) installed in the light source box (11). The elliptical reflector (21) surrounds the periphery of the mercury lamp (22).

3. The adjustable light source system according to claim 1, characterized in that: The refractive part includes a cold light mirror (31) and a reflector (32) installed in the light source box (11). The cold light mirror (31) and the reflector (32) are installed in the light source box (11) at a predetermined angle.

4. The adjustable light source system according to claim 1, characterized in that: The focusing part includes a compound eye lens (41) and a focusing lens (51) installed in the light source box (11).

5. An adjustable light source system according to claim 3, characterized in that: The cold light mirror (31) is located below the mercury lamp (22) and the elliptical reflector (21); The front lens (71) is located below the reflector (32); The compound eye lens (41), the condenser lens (51) and the diffraction lens (617) are located between the cold light mirror (31) and the reflecting mirror (32), and are arranged in the order of compound eye lens (41), condenser lens (51) and diffraction lens (617) from the cold light mirror (31) to the reflecting mirror (32).

6. The adjustable light source system according to claim 1, characterized in that: The light source box (11) has a sliding groove (12) and multiple sets of guide rods (13) inside.

7. The adjustable light source system according to claim 1, characterized in that: The top of the adjusting slider (611) is provided with multiple sets of slider cylinders (611A), and the side has multiple sets of reset cavities. Each set of reset cavities is provided with a first slider fixing ring (611B) and a second slider fixing ring (611C). The adjusting member (612) includes: An adjusting rod (612A) is inserted into the adjusting slider (611) and adapted to the slider cylinder (611A). A ball groove is opened inside the adjusting rod (612A). An adjusting spring (612B) is sleeved on the adjusting rod (612A) and located between the adjusting rod (612A) and the slider cylinder (611A); A limiting ball (612D) is adapted to the ball groove, and a limiting spring (612C) is connected between the inner wall of the ball groove and the limiting ball (612D). The limiting ball (612D) is adapted to the reset cavity.

8. An adjustable light source system according to claim 7, characterized in that: The reset component (613) includes: The reset ball rod (613A) is located in the reset cavity and includes a ball and a rod connected to the ball. The rod passes through the first slider fixing ring (611B) and the second slider fixing ring (611C). The ball is located on the side of the second fixing ring away from the first fixing ring and abuts against the limiting ball (612D). A reset baffle (613B) is disposed on the rod body, located between the first slider fixing ring (611B) and the second slider fixing ring (611C); The reset post (613D) is adapted to the reset cavity and connected to the rod body; A return spring (613C) is sleeved on the rod body, and the return spring (613C) is disposed between the second slider fixing ring (611C) and the return baffle (613B).

9. An adjustable light source system according to claim 7, characterized in that: The adjusting limit fork (614) is connected to the adjusting rod (612A); The lens holder (615) is provided with multiple sets of sliding sleeves (616) that are adapted to the guide rod (13).