Cluster ion nozzle

Abstract

The utility model discloses a cluster ion nozzle which comprises a nozzle shell, a gas input channel, a cluster ion generating cavity and a nozzle head, the gas input channel is arranged at the top end in the nozzle shell, and the cluster ion generating cavity is arranged in the nozzle shell below the gas input channel. A flow dividing plate is arranged in the center of the interior of the cluster ion generation cavity, flow dividing holes are evenly distributed in the flow dividing plate, flow dividing pipelines are arranged in the positions, below the flow dividing holes, of the interior of the cluster ion generation cavity, throttling valves are arranged on the flow dividing pipelines, and a nozzle head is arranged at the bottom end of the nozzle shell. By installing the nozzle shell, the gas input channel, the cluster ion generating cavity, the flow dividing plate, the flow dividing pipeline, the throttling valve and the nozzle head and adjusting the spraying direction, flow and energy distribution of cluster ion beams, all areas of the surface of a workpiece can be subjected to the effect of the uniform ion beams, and the polishing uniformity is improved.

Description

Technical Field

[0001] This utility model relates to the field of cluster ion nozzle technology, specifically a cluster ion nozzle. Background Technology

[0002] Cluster ion nozzles are key components used to generate and accelerate cluster ion beams. They are widely used in materials science, surface treatment, nanofabrication and other fields. They expand gas under high pressure to form clusters, and then generate cluster ion beams through ionization and acceleration, which are then sprayed onto the workpiece surface to achieve high-quality polishing, improve the surface smoothness and flatness, reduce surface roughness, and avoid the damage and contamination caused by traditional polishing methods.

[0003] Existing nozzle devices have shortcomings in structural design and performance. Common nozzles have difficulty in accurately controlling the spray direction, flow rate and energy distribution of cluster ion beams, resulting in problems such as uneven polishing and low efficiency during the polishing process. Utility Model Content

[0004] The purpose of this invention is to provide a cluster ion nozzle to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a cluster ion nozzle, comprising a nozzle housing, a gas input channel, a cluster ion generation chamber, and a nozzle head. The nozzle housing has a gas input channel at its top end, and a cluster ion generation chamber is located within the nozzle housing below the gas input channel. A flow divider is located at the center of the cluster ion generation chamber, and flow divider holes are evenly distributed on the flow divider. Flow divider pipes are located within the cluster ion generation chamber below the flow divider holes, and throttling valves are installed on each flow divider pipe. The nozzle head is located at the bottom end of the nozzle housing, and the top of the nozzle head is connected to the flow divider pipes.

[0006] Preferably, the bottom of the nozzle housing is provided with a connecting flange, and the connecting flange has an annular groove, and a sealing ring is embedded in the interior of the annular groove.

[0007] Preferably, a cooling chamber is provided on the outer side of the nozzle housing, and a cooling pipe is provided inside the cooling chamber. An inlet and an outlet are respectively provided at both ends of the cooling chamber, and the inlet and outlet are respectively connected to both ends of the cooling pipe.

[0008] Preferably, the cluster ion generation chamber is made of ceramic material, and the inner wall of the cluster ion generation chamber is uniformly provided with corrugated sections.

[0009] Preferably, the nozzle head includes a first nozzle and a second nozzle, and the first nozzle is disposed inside the second nozzle. Both the first nozzle and the second nozzle have a conical structure.

[0010] Preferably, the inner walls of both the first and second nozzles are coated with a protective coating, and the protective coating is a boron nitride coating.

[0011] Preferably, anti-rotation blocks are provided around the sealing ring, and anti-rotation grooves matching the anti-rotation blocks are provided around the inside of the annular groove.

[0012] Preferably, the cooling pipe has fins evenly distributed inside, and the fins are distributed in a concentric circle structure along the inner wall of the cooling pipe.

[0013] Compared with the prior art, the beneficial effects of this utility model are as follows: The cluster ion nozzle is equipped with a nozzle shell, a gas input channel, a cluster ion generation chamber, a flow divider plate, a flow divider pipe, a throttle valve, and a nozzle head. High-pressure gas enters the gas input channel inside the nozzle shell and then expands in the cluster ion generation chamber to form clusters. The clusters are then ionized by an ionization device to form a cluster ion beam. The flow divider plate has evenly distributed flow dividers to divide the cluster ion beam into multiple smaller beams. Each smaller beam corresponds to an independent flow divider pipe. A throttle valve is installed on each flow divider pipe. By changing the opening of the throttle valve, the flow rate of each smaller beam is controlled. At the same time, by adjusting the opening of different throttle valves, the pressure distribution of the beam is changed, thereby adjusting the spray direction. The flow rate of the beam can also be changed by adjusting the opening of the throttle valve, thereby controlling the speed of the ion beam. By adjusting the spray direction, flow rate, and energy distribution of the cluster ion beam, every area of ​​the workpiece surface can be subjected to a uniform ion beam, thereby improving the uniformity of polishing and improving polishing efficiency. Attached Figure Description

[0014] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This is a front view cross-sectional structural diagram of the present invention;

[0016] Figure 2 This is a schematic diagram of the cross-sectional structure of the nozzle head of this utility model;

[0017] Figure 3 This is a top view of the diverter structure of this utility model;

[0018] Figure 4 For the present utility model Figure 1 Enlarged cross-sectional structural diagram at point A in the middle;

[0019] Figure 5 This is a top view of the connecting flange structure of this utility model.

[0020] In the diagram: 1. Nozzle housing; 2. Gas input channel; 3. Connecting flange; 4. Cluster ion generation chamber; 5. Diverter plate; 6. Diverter pipe; 7. Throttling valve; 8. Nozzle head; 9. First nozzle; 10. Second nozzle; 11. Cooling chamber; 12. Liquid inlet; 13. Liquid outlet; 14. Protective coating; 15. Diverter hole; 16. Cooling pipe; 17. Fin; 18. Corrugated section; 19. Annular groove; 20. Sealing ring; 21. Anti-rotation groove; 22. Anti-rotation block. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0022] Please see Figure 1-5 The present invention provides an embodiment of a cluster ion nozzle, comprising a nozzle housing 1, a gas input channel 2, a cluster ion generation chamber 4, and a nozzle head 8. The top of the nozzle housing 1 is provided with a gas input channel 2, and the nozzle housing 1 below the gas input channel 2 is provided with a cluster ion generation chamber 4.

[0023] The nozzle housing 1 is provided with a connecting flange 3 at the bottom, and an annular groove 19 is provided on the connecting flange 3, and a sealing ring 20 is embedded in the annular groove 19.

[0024] The nozzle housing 1 is connected to the gas supply pipeline via the connecting flange 3. The connecting flange 3 has an annular groove 19, and the interior of the annular groove 19 is embedded with a sealing ring 20 to increase the sealing performance.

[0025] The sealing ring 20 is provided with anti-rotation blocks 22 around its perimeter, and the annular groove 19 is provided with anti-rotation grooves 21 that match the anti-rotation blocks 22 around its perimeter, so that the sealing ring 20 is more stable after being embedded and is less prone to torsion.

[0026] The nozzle housing 1 is provided with a nozzle head 8 at the bottom end, and the top of the nozzle head 8 is connected to the diversion pipe 6.

[0027] High-pressure gas enters the gas input channel 2 inside the nozzle housing 1, and then expands in the cluster ion generation chamber 4 to form clusters. An ionizer is provided in the cluster ion generation chamber 4. The clusters form a cluster ion beam through the ionizer and are sprayed onto the workpiece surface through the nozzle head 8 to polish it.

[0028] The nozzle head 8 includes a first nozzle 9 and a second nozzle 10, with the first nozzle 9 disposed inside the second nozzle 10. Both the first nozzle 9 and the second nozzle 10 have a conical structure.

[0029] The second nozzle 10 is used to eject a divergent airflow, and the inner first nozzle 9 is used to eject a stream of neutral cluster particles concentrated on the central axis.

[0030] The inner walls of the first nozzle 9 and the second nozzle 10 are both coated with a protective coating 14. The protective coating 14 is a boron nitride coating, which has the characteristics of high temperature resistance and corrosion resistance.

[0031] The cluster ion generation chamber 4 is made of ceramic material, which has good thermal conductivity to quickly dissipate the heat generated during gas expansion. The inner wall of the cluster ion generation chamber 4 is uniformly provided with corrugated parts 18 to guide gas flow, increase the probability of gas molecule collision, and promote gas flow and cluster formation.

[0032] A flow divider 5 is provided at the center of the cluster ion generation chamber 4, and flow divider holes 15 are evenly distributed on the flow divider 5 to divide the cluster ion beam into multiple small beams.

[0033] Each cluster ion generation chamber 4 below the diversion orifice 15 is provided with a diversion pipe 6, and each diversion pipe 6 is provided with a throttle valve 7.

[0034] By changing the opening of the throttle valve 7, the flow rate of each split beam can be controlled. At the same time, by adjusting the opening of different throttle valves 7, the pressure distribution of the beam can be changed, thereby adjusting the injection direction. The flow rate of the beam can also be changed by adjusting the opening of the throttle valve 7, thereby controlling the speed of the ion beam.

[0035] By adjusting the spray direction, flow rate, and energy distribution of the cluster ion beam, each area of ​​the workpiece surface can be subjected to a uniform ion beam, thereby improving the uniformity of polishing and increasing polishing efficiency.

[0036] A cooling chamber 11 is provided on the outer side of the nozzle housing 1, and a cooling pipe 16 is provided inside the cooling chamber 11. An inlet 12 and an outlet 13 are respectively provided at both ends of the cooling chamber 11, and the inlet 12 and the outlet 13 are respectively connected to the two ends of the cooling pipe 16.

[0037] Coolant is introduced into the cooling pipe 16 through the inlet 12 to remove the heat generated by the expansion and ionization of high-pressure gas inside the nozzle housing 1, maintain the temperature within a reasonable range, and improve the stability and service life of the nozzle body.

[0038] The interior of the cooling pipe 16 is uniformly distributed with fins 17, and the fins 17 are distributed in a concentric circle structure along the inner wall of the cooling pipe 16. By increasing the surface area of ​​the inner wall of the cooling pipe 16, the heat exchange area is significantly improved, thereby enhancing the heat exchange efficiency between the cooling medium and the pipe wall.

[0039] The specific model and specifications of the throttle valve 7 need to be determined by selection calculation based on the specifications and parameters of the device. The selection calculation method is existing technology, so it will not be described in detail here.

[0040] Working Principle: In this embodiment, the nozzle housing 1 is connected to the gas supply pipeline via a connecting flange 3. An annular groove 19 is provided on the connecting flange 3, and sealing rings 20 are embedded inside the annular groove 19 to increase sealing. High-pressure gas enters the gas input channel 2 inside the nozzle housing 1, and then expands in the cluster ion generation chamber 4 to form clusters. An ionizer is provided in the cluster ion generation chamber 4, and the clusters form a cluster ion beam through the ionizer. This beam is then sprayed onto the workpiece surface through the nozzle head 8 for polishing. The nozzle head 8 includes an outer second nozzle 10 and an inner first nozzle 9. The second nozzle 10 is used to spray a divergent airflow, and the inner first nozzle 9 is used to spray a neutral cluster particle stream concentrated on the central axis. A flow divider 5 is provided in the cluster ion generation chamber 4, and flow divider holes 15 are evenly distributed on the flow divider 5 to separate the clusters. The sub-beam is divided into multiple smaller beams, each corresponding to an independent branch pipe 6. Throttling valves 7 are installed on each branch pipe 6. By changing the opening of the throttle valve 7, the flow rate of each branch beam can be controlled. At the same time, by adjusting the opening of different throttle valves 7, the pressure distribution of the beam can be changed, thereby adjusting the spray direction. The flow rate of the beam can also be changed by adjusting the opening of the throttle valve 7, thereby controlling the speed of the ion beam. By adjusting the spray direction, flow rate, and energy distribution of the cluster ion beam, each area of ​​the workpiece surface can be uniformly affected by the ion beam, thereby improving the uniformity of polishing and improving polishing efficiency. In addition, coolant is introduced into the cooling pipe 16 through the liquid inlet 12 to remove the heat generated by the expansion and ionization of the high-pressure gas inside the nozzle housing 1, maintaining the temperature within a reasonable range and improving the stability and service life of the nozzle body.

[0041] Obviously, the embodiments described above are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0042] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0043] It should be noted that the terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in sequences other than those illustrated or described herein.

[0044] The above are merely preferred embodiments of this utility model and are not intended to limit the scope of this utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A cluster ion nozzle, characterized in that, The device includes a nozzle housing (1), a gas input channel (2), a cluster ion generation chamber (4), and a nozzle head (8). The top of the nozzle housing (1) is provided with a gas input channel (2), and the nozzle housing (1) below the gas input channel (2) is provided with a cluster ion generation chamber (4). A flow divider plate (5) is provided at the center of the cluster ion generation chamber (4), and flow divider holes (15) are evenly distributed on the flow divider plate (5). Flow divider pipes (6) are provided in the cluster ion generation chambers (4) below the flow divider holes (15), and throttle valves (7) are provided on the flow divider pipes (6). The bottom of the nozzle housing (1) is provided with a nozzle head (8), and the top of the nozzle head (8) is connected to the flow divider pipes (6).

2. The cluster ion nozzle according to claim 1, characterized in that: The nozzle housing (1) is provided with a connecting flange (3) at the bottom, and an annular groove (19) is provided on the connecting flange (3), and a sealing ring (20) is embedded in the annular groove (19).

3. The cluster ion nozzle according to claim 1, characterized in that: A cooling chamber (11) is provided on the outside of the nozzle housing (1), and a cooling pipe (16) is provided inside the cooling chamber (11). An inlet (12) and an outlet (13) are provided at both ends of the cooling chamber (11), and the inlet (12) and outlet (13) are respectively connected to both ends of the cooling pipe (16).

4. A cluster ion nozzle according to claim 1, characterized in that: The cluster ion generation chamber (4) is made of ceramic material, and the inner wall of the cluster ion generation chamber (4) is uniformly provided with corrugated parts (18).

5. A cluster ion nozzle according to claim 1, characterized in that: The nozzle head (8) includes a first nozzle (9) and a second nozzle (10), and the first nozzle (9) is disposed inside the second nozzle (10). Both the first nozzle (9) and the second nozzle (10) are conical structures.

6. A cluster ion nozzle according to claim 5, characterized in that: The inner walls of the first nozzle (9) and the second nozzle (10) are coated with a protective coating (14), and the protective coating (14) is a boron nitride coating.

7. A cluster ion nozzle according to claim 2, characterized in that: The sealing ring (20) is provided with anti-rotation blocks (22) around its perimeter, and the annular groove (19) is provided with anti-rotation grooves (21) that match the anti-rotation blocks (22) around its perimeter.

8. A cluster ion nozzle according to claim 3, characterized in that: The cooling pipe (16) has fins (17) evenly distributed inside, and the fins (17) are distributed in a concentric circle structure along the inner wall of the cooling pipe (16).

Images