Reinforcing plate

By designing a reinforcing plate, the problem of probe card circuit board deformation during testing was solved, achieving stable support for the probe card and protection of the circuit board, thus ensuring the accuracy of test results.

CN223977253UActive Publication Date: 2026-03-06MICROPROBE TECH SUZHOU
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Patent Information

Application Number
CN202520104598.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-01-16
Publication Date
2026-03-06
Estimated Expiration
2035-01-16

AI Technical Summary

Technical Problem

The circuit board of existing probe cards is prone to deformation during testing, which leads to changes in the height of the probe tip, poor contact, and affects the accuracy of the test results.

Method used

Design a reinforcing plate including a central part, an outer ring part and a connecting rib. The bottom of the central part is provided with a fixing seat, and the bottom of the outer ring part is provided with a receiving groove. The central part and the outer ring part are connected into an integral structure by the connecting rib to provide stable support and fix the probe in the probe groove. The bottom end face of the outer ring part protects the bottom of the circuit board.

Benefits of technology

It improves the overall strength of the probe card and the support reliability of the circuit board, ensures the flatness of the probe test end, protects the bottom of the circuit board, avoids damage from protrusions, reduces the probability of contact short circuits, and improves test reliability.

✦ Generated by Eureka AI based on patent content.

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Abstract

The reinforcing plate comprises a plate body, the plate body comprises a center part, an outer ring part and connecting ribs, the outer ring part is arranged on the outer side of the center part in a sleeving mode, and the outer side wall of the center part and the inner side wall of the outer ring part are connected through the connecting ribs; a fixing seat for fixing a probe is arranged at the bottom of the central part; a containing groove used for containing a circuit board is formed in the bottom of the outer ring part, and the containing groove is provided with a supporting face attached to the top face of the circuit board. According to the embodiment of the invention, the central part and the outer ring part are arranged and can be used as a fixing device of a probe and a fixing device of a circuit board, and the central part and the outer ring part are connected into an integrated structure through the connecting ribs, so that the overall strength of the reinforcing plate can be improved, and the supporting reliability and stability of the supporting surface on the circuit board are further improved; through the fixing seat on the central part, the upper part of the test end of the probe can be supported, and the flatness of the test ends of all the probes is further improved.
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Description

Technical Field

[0001] This application relates to the field of semiconductor testing technology, and more particularly to a reinforcing plate. Background Technology

[0002] A probe card is a device configured to connect a semiconductor chip in its pre-packaging wafer state to testing equipment. A probe card includes multiple probes that physically contact the wafer. The probe card sends electrical signals to the wafer via the probes and receives the returned electrical signals.

[0003] Current probe cards often require a circuit board as a carrier to transmit electrical signals received by the probe from the wafer. Since the circuit board on the probe card is generally thin and has a large area, it is prone to deformation during the test, resulting in problems such as changes in the height of the probe tip and poor contact between the probe and the card, which in turn leads to inaccurate test results. Utility Model Content

[0004] This application aims to address at least one of the technical problems existing in the prior art. To this end, this application proposes a reinforcing plate to solve the problem that the circuit board of the probe card is prone to deformation during testing, affecting the test results.

[0005] This application provides a reinforcing plate, comprising: a plate body, the plate body including a central portion, an outer ring portion, and connecting ribs, the outer ring portion being sleeved on the outside of the central portion, the outer sidewall of the central portion and the inner sidewall of the outer ring portion being connected by the connecting ribs; a fixing seat for fixing a probe is provided at the bottom of the central portion; a receiving groove for accommodating a circuit board is formed at the bottom of the outer ring portion, the receiving groove having a supporting surface that fits against the top surface of the circuit board; the height of the receiving groove is greater than the thickness of the circuit board, and the bottom of the outer ring portion forms a bottom end surface, the bottom end surface being a planar structure that is parallel to the circuit board and lower than the bottom surface of the circuit board.

[0006] Based on the reinforcing plate, the central and outer ring sections serve as both probe and circuit board mounting devices. Connecting ribs link the central and outer ring sections into a single structure, enhancing the overall strength of the reinforcing plate and further improving the reliability and stability of the support surface on the circuit board. The mounting base on the central section provides support above the probe's test end, further improving the flatness of all probe test ends and ensuring reliable testing for all probes. The bottom surface of the outer ring section protects the bottom structure of the circuit board, preventing damage to protrusions and providing a large-area support for the entire reinforcing plate.

[0007] Optionally, the bottom of the mounting base is provided with a probe groove for fixing the probe.

[0008] Furthermore, in accordance with the extension direction of the probe's test end, the probe groove can extend radially along the mounting base, forming reliable support and protection for the test end of each probe.

[0009] In some further examples, the number of probe slots is the same as the number of probes. There is an isolation rib between every two adjacent probe slots to prevent two adjacent probes from contacting each other. The probe slots can be arc-shaped slots to ensure the stability of each probe in the probe slot and reduce the probability of the probe sliding out of the probe slot.

[0010] Optionally, the probe groove extends in an inclined direction. Since one end of the probe is electrically connected to the connection point on the circuit board, the test end extends toward the fixed base and needs to abut against the test point below the fixed base. The probe is in an inclined posture, and the inclination angle of the probe groove can match the overall inclination angle of the probe, thereby increasing the contact area between the probe groove and the probe.

[0011] Furthermore, based on the aforementioned probe groove, the contact area between the probe groove and the probe can be increased, thereby further improving the support stability of the probe groove for the probe.

[0012] Optionally, the fixing base is detachably connected to the central part. Specifically, the fixing base can be connected to the central part by means of bolts or snap-fit.

[0013] Furthermore, based on the aforementioned mounting base, it is possible to select and replace different probes, thereby improving the versatility of the reinforcing plate.

[0014] Optionally, the outer wall of the fixing seat abuts against the inner wall of the central hole of the circuit board, thereby enabling the fixing seat, the circuit board, and the central part to support and position each other.

[0015] Furthermore, based on the aforementioned mounting base, a more stable support structure can be formed with the circuit board, supporting and positioning each other, further improving the positional accuracy of the mounting base, thereby providing a more precise support position for the probe.

[0016] Optionally, there is a set interval between the bottom end face and the bottom surface of the circuit board to accommodate the protrusions on the bottom of the circuit board. The set interval can be 0.5 to 1 mm, and can be selected according to the height of the protrusions on the bottom of the circuit board.

[0017] Furthermore, based on the aforementioned bottom surface design, not only can the reinforcing plate be reliably supported, but the probability of short circuits occurring between the protrusions (solder joints, pins, etc.) on the bottom of the circuit board and the testing equipment can also be reduced.

[0018] Optionally, the plate body is provided with connecting bolts for connecting the circuit board. There are multiple connecting bolts, which are evenly arranged within the coverage area of ​​the circuit board. Each connecting bolt is provided with an insulating layer.

[0019] Furthermore, based on the aforementioned reinforcing plate, the connection reliability between the reinforcing plate and the circuit board can be further enhanced, while also ensuring insulation between them.

[0020] Optionally, the top of the receiving groove is provided with a clearance hole that communicates with the outside, and the clearance hole is positioned opposite to the edge of the top of the circuit board.

[0021] Furthermore, based on the aforementioned clearance holes, interference at the connection between the top of the circuit board and the receiving groove can be reduced, while also making it easier to remove the circuit board from the receiving groove.

[0022] Optionally, a clearance groove is formed between the central portion and the outer ring portion to avoid protrusions on the top of the circuit board.

[0023] Furthermore, based on the aforementioned clearance groove, it can cooperate with the bottom surface to avoid protrusions on the top and bottom sides of the circuit board. The clearance groove on the top can be a hollow structure or a recessed groove structure, as long as it can prevent the protrusions on the top of the circuit board from being squeezed and collided with the supporting surface.

[0024] Optionally, at least two connecting ribs are arranged circumferentially along the center portion to separate at least two clearance grooves.

[0025] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0026] The disclosure of this application will become more readily understood with reference to the accompanying drawings. It will be readily understood by those skilled in the art that these drawings are for illustrative purposes only and are not intended to limit the scope of protection of this application. Furthermore, similar numbers in the drawings are used to denote similar components, wherein:

[0027] Figure 1 This is a schematic diagram of the circular reinforcing plate described in an embodiment of this application;

[0028] Figure 2 This is a schematic diagram of the bottom structure of the circular reinforcing plate described in the embodiment of this application;

[0029] Figure 3 This is a side view of the circular reinforcing plate described in an embodiment of this application;

[0030] Figure 4This is a cross-sectional view of the circular reinforcing plate described in the embodiment of this application;

[0031] Figure 5 This is a schematic diagram of the circuit board mounted on a circular reinforcing plate according to an embodiment of this application;

[0032] Figure 6 This is a schematic diagram of the square reinforcing plate described in an embodiment of this application;

[0033] Figure 7 This is a schematic diagram of the circuit board mounted on a square reinforcing plate according to an embodiment of this application;

[0034] Figure 8 This is a schematic diagram of the circuit board installed at the bottom of a square reinforcing plate according to an embodiment of this application.

[0035] Explanation of reference numerals in the attached figures

[0036] 1. Board body; 11. Center part; 111. Fixing base; 1111. Probe groove; 12. Outer ring part; 121. Receiving groove; 1211. Clearance hole; 122. Support surface; 123. Bottom end face; 13. Connecting rib; 14. Clearance groove; 2. Probe; 3. Circuit board. Detailed Implementation

[0037] Some embodiments of this application are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of this application and are not intended to limit the scope of protection of this application.

[0038] Current probe cards often require a circuit board as a carrier to transmit electrical signals received by the probe from the wafer. Since the circuit board on the probe card is generally thin and has a large area, it is prone to deformation during the test, resulting in problems such as changes in the height of the probe tip and poor contact between the probe and the card, which in turn leads to inaccurate test results.

[0039] Based on this, this application provides a reinforcing plate that, through the design of a central portion and an outer ring portion, can serve as a fixing device for probes and a fixing device for the circuit board. Connecting the central portion and the outer ring portion into a single structure using connecting ribs improves the overall strength of the reinforcing plate and further enhances the reliability and stability of the support surface on the circuit board. The fixing seat on the central portion provides support above the test ends of the probes, further improving the flatness of the test ends of all probes and ensuring that all probes can reliably perform testing. The bottom surface of the outer ring portion protects the bottom structure of the circuit board, preventing damage to protrusions on the bottom of the circuit board, while also providing a large-area support effect for the entire reinforcing plate.

[0040] The present application will be described in detail below through specific embodiments.

[0041] Reference Figures 1 to 8 As shown, this embodiment provides a reinforcing plate, including: a plate body 1, the plate body 1 including a central portion 11, an outer ring portion 12 and a connecting rib 13, the outer ring portion 12 being sleeved on the outside of the central portion 11, the outer sidewall of the central portion 11 and the inner sidewall of the outer ring portion 12 being connected by the connecting rib 13; a fixing seat 111 for fixing a probe 2 is provided at the bottom of the central portion 11; a receiving groove 121 for accommodating a circuit board 3 is formed at the bottom of the outer ring portion 12, the receiving groove 121 having a supporting surface 122 that fits against the top surface of the circuit board 3; the height of the receiving groove 121 is greater than the thickness of the circuit board 3, and a bottom end surface 123 is formed at the bottom of the outer ring portion 12, the bottom end surface 123 being a planar structure that is parallel to the circuit board 3 and lower than the bottom surface of the circuit board 3; the reinforcing plate can be Figures 1 to 5 The circular reinforcing plate in the middle, or Figures 6 to 8 The square reinforcing plate in the circuit board 3 can be selected based on its shape.

[0042] The reinforcing plate provided in this embodiment, through the setting of the central part 11 and the outer ring part 12, can serve as a fixing device for the probe 2 and the circuit board 3. The connecting rib 13 connects the central part 11 and the outer ring part 12 into an integral structure, which can improve the overall strength of the reinforcing plate and further improve the reliability and stability of the support surface 122 for the circuit board 3. The fixing seat 111 on the central part 11 can support the upper part of the test end of the probe 2, further improving the flatness of the test ends of all probes 2 and ensuring that all probes 2 can reliably perform testing. The bottom end surface 123 of the outer ring part 12 can protect the bottom structure of the circuit board 3, preventing the protrusions on the bottom of the circuit board 3 from being damaged, and at the same time, it can also form a large-area support effect for the entire reinforcing plate.

[0043] Continue to refer to Figure 2 , Figure 4 and Figure 5 As shown, the bottom of the mounting base 111 is provided with a probe groove 1111 for fixing the probe 2.

[0044] Furthermore, in accordance with the extension direction of the test end of probe 2, probe groove 1111 can extend radially along the fixing seat 111, forming reliable support and protection for the test end of each probe 2.

[0045] In some further examples, the number of probe slots 1111 is the same as the number of probes 2. There is an isolation rib between every two adjacent probe slots 1111 to prevent two adjacent probes 2 from contacting each other. Specifically, the probe slot 1111 can be an arc-shaped slot to ensure the stability of each probe 2 in the probe slot 1111 and reduce the probability of the probe 2 sliding out of the probe slot 1111.

[0046] Optionally, the probe groove 1111 extends in an inclined direction. Since one end of the probe 2 is electrically connected to the connection point on the circuit board 3, the test end extends toward the fixing base 111 and needs to abut against the test point below the fixing base 111. The probe 2 is in an inclined posture. The inclination angle of the probe groove 1111 can match the overall inclination angle of the probe 2, thereby increasing the contact area between the probe groove 1111 and the probe 2.

[0047] Furthermore, based on the aforementioned probe groove 1111, the contact area between the probe groove 1111 and the probe 2 can be increased, thereby further improving the support stability of the probe groove 1111 for the probe 2.

[0048] In some embodiments, the fixing base 111 is detachably connected to the center part 11. Specifically, the fixing base 111 can be connected to the center part 11 by means of bolts or snap-fit.

[0049] Furthermore, based on the aforementioned mounting base 111, it is possible to select and replace different probes 2, thereby improving the versatility of the reinforcing plate.

[0050] In some embodiments, the outer wall of the fixing base 111 abuts against the inner wall of the central hole of the circuit board 3, thereby enabling the fixing base 111, the circuit board 3 and the central part 11 to support and position each other.

[0051] Furthermore, based on the aforementioned fixing base 111, a more stable support structure can be formed with the circuit board 3, supporting and positioning each other, further improving the positional accuracy of the fixing base 111, thereby providing a more precise support position for the probe 2.

[0052] Optionally, there is a set gap between the bottom end face 123 and the bottom surface of the circuit board 3 to accommodate the protrusions on the bottom of the circuit board 3. The set gap can be 0.5 to 1 mm, and can be selected according to the height of the protrusions on the bottom of the circuit board 3.

[0053] Furthermore, based on the aforementioned bottom surface 123, not only can the reinforcing plate be reliably supported, but the probability of short circuits caused by contact between the protrusions (solder joints, pins, etc.) at the bottom of the circuit board 3 and the testing machine can also be reduced.

[0054] In some embodiments, the plate 1 is provided with connecting bolts for connecting the circuit board 3. There are multiple connecting bolts, which are evenly arranged within the coverage area of ​​the circuit board 3. The connecting bolts are provided with an insulating layer. The plate 1 can also be connected to the circuit board 3 by means of bonding, snap-fitting, etc. The connecting bolts can be coated with an insulating material coating, and insulation can also be achieved by structures such as rubber pads and plastic pads.

[0055] Furthermore, based on the aforementioned reinforcing plate, the connection reliability between the reinforcing plate and the circuit board 3 can be further enhanced, while also ensuring the insulation and isolation between them.

[0056] Optionally, the top of the receiving groove 121 is provided with a clearance hole 1211 that communicates with the outside, and the clearance hole 1211 is positioned opposite to the edge of the top of the circuit board 3.

[0057] Furthermore, based on the aforementioned clearance hole 1211, interference at the connection between the top of the circuit board 3 and the receiving groove 121 can be reduced, and the circuit board 3 can be easily removed from the receiving groove 121.

[0058] Continue to refer to Figure 1 , Figure 2 as well as Figure 6 and Figure 7 As shown, a clearance groove 14 is formed between the central portion 11 and the outer ring portion 12 to avoid the protrusion on the top of the circuit board 3.

[0059] Furthermore, based on the aforementioned clearance groove 14, it can cooperate with the bottom surface 123 to avoid protrusions on the top and bottom sides of the circuit board 3. The clearance groove 14 at the top can be a hollow structure or a recessed groove structure, as long as it can prevent the protrusions at the top of the circuit board 3 from being squeezed and collided with the support surface 122.

[0060] Optionally, at least two connecting ribs 13 are arranged circumferentially along the center portion 11 to separate at least two clearance grooves 14. The connecting ribs 13 can be arranged to avoid the protrusions on the top of the circuit board 3 according to their arrangement. That is, the connecting ribs 13 can avoid the protrusions on the top of the circuit board 3 at the same time as the clearance grooves 14, or the bottom of the connecting ribs 13 can be provided with a groove structure to avoid the protrusions on the top of the circuit board 3 separately.

[0061] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0062] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0063] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A reinforcing plate characterized by, The utility model relates to a probe fixing plate, including: A plate body (1) includes a center part (11), an outer ring part (12) and a connecting rib (13), the outer ring part (12) is sleeved on the outside of the center part (11), and the outer side wall of the center part (11) and the inner side wall of the outer ring part (12) are connected through the connecting rib (13); The bottom of the center part (11) is provided with a fixing seat (111) for fixing a probe (2); The bottom of the outer ring part (12) is provided with an accommodating groove (121) for accommodating a circuit board (3), and the accommodating groove (121) has a supporting surface (122) matched with the top surface of the circuit board (3); The height of the accommodating groove (121) is greater than the thickness of the circuit board (3), and the bottom of the outer ring part (12) forms a bottom end surface (123) which is a plane structure arranged in parallel with the circuit board (3) and lower than the bottom surface of the circuit board (3).

2. The reinforcing plate according to claim 1, characterized by The bottom of the fixing seat (111) is provided with a probe groove (1111) for fixing the probe (2).

3. The reinforcing plate according to claim 2, characterized in that The probe groove (1111) extends in an inclined direction.

4. The reinforcing plate according to claim 1, characterized by The fixing seat (111) is detachably connected with the center part (11).

5. The reinforcing plate according to claim 1, characterized by The outer side wall of the fixing seat (111) abuts against the inner side wall of the center hole of the circuit board (3).

6. The reinforcing plate according to claim 1, characterized by The bottom end surface (123) and the bottom surface of the circuit board (3) have a set interval to accommodate the protrusions at the bottom of the circuit board (3).

7. The reinforcing plate according to claim 1, characterized by The plate body (1) is provided with connecting bolts for connecting the circuit board (3), the number of the connecting bolts is multiple, the multiple connecting bolts are uniformly arranged in the coverage range of the circuit board (3), and the connecting bolts are provided with an insulating layer.

8. The reinforcing plate according to claim 1, characterized by The top of the accommodating groove (121) is provided with an avoiding hole (1211) in communication with the outside, and the avoiding hole (1211) is arranged opposite to the edge at the top of the circuit board (3).

9. A reinforcing plate according to any one of claims 1 to 8, characterised in that The center part (11) and the outer ring part (12) form an avoiding groove (14) for avoiding the protrusions at the top of the circuit board (3).

10. The reinforcing plate according to claim 9, characterized in that The connecting rib (13) is arranged in at least two along the circumference of the center part (11) to separate at least two avoiding grooves (14).