Probe maintenance cover
By designing the outer and inner disc structures of the probe maintenance cover, the problem of accidental contact during probe adjustment was solved, improving testing accuracy and efficiency, and extending the probe's service life.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-07
- Publication Date
- 2026-03-06
AI Technical Summary
In traditional probe adjustment, operators are prone to accidentally touching other probes, which can damage or misalign the probes, affecting test accuracy and efficiency. Frequent adjustments also increase wear and shorten the lifespan of the probes.
Design a probe maintenance cover, including an outer plate and an inner plate. The outer plate is fixed on the probe holder, and the inner plate is movable. The area to be adjusted is exposed through the operation hole to avoid accidental contact with other probes. The inner plate covers other areas to ensure accurate adjustment.
It improves testing accuracy and efficiency, reduces the number of probe adjustments, and extends the probe's lifespan.
Smart Images
Figure CN223977275U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of wafer testing equipment technology, and in particular to a probe maintenance cover. Background Technology
[0002] Pin cards are key equipment used for wafer testing in the semiconductor manufacturing process. Their main function is to connect automated test equipment (ATE) and semiconductor wafers to achieve preliminary measurement and screening of the chip's electrical performance.
[0003] When using dot matrix converters, such as 3D MEMS (Micro-Electro-Mechanical Systems) (Smart Matryx) converters, probe adjustment is particularly critical. In traditional adjustment methods, operators are prone to accidentally touching other probes when adjusting the center probe, leading to probe damage or misalignment, affecting testing accuracy and efficiency. Furthermore, if the probe position is accidentally misaligned, frequent adjustments will increase probe wear and shorten its lifespan. Utility Model Content
[0004] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a probe maintenance cover to solve the problem of accidental contact with other probes in traditional probe adjustment methods.
[0005] This utility model provides a probe maintenance cover, including a disc body covering the part to be adjusted. The disc body includes an outer disc and an inner disc that are movably connected. The outer disc is detachably connected to the part to be adjusted. The inner disc has a through-hole for the passage of an adjustment tool. The through-hole is used to expose different adjustment areas of the part to be adjusted when the inner disc and the outer disc move relative to each other.
[0006] Based on the aforementioned probe maintenance cover, when adjusting the probes on the probe holder, first, the disc body is placed on the probe holder, and then the outer disc is fixed on the probe holder to ensure the stability of the disc body and prevent the disc body from shifting or falling off during the probe adjustment process. Then, the inner disc is moved so that the operating hole overlaps with the corresponding area to be adjusted on the part to be adjusted, ensuring that the operator can only extend the adjustment tool to the corresponding area to be adjusted through the operating hole, and then adjust the probe in the current adjustable area. The inner disc covering other adjustment areas of the probe holder prevents the operator from accidentally touching other probes, thereby improving the testing accuracy and efficiency, while reducing the number of probe adjustments caused by accidental probe touching, thus reducing probe wear and extending the probe's service life.
[0007] In one embodiment of the probe maintenance cover described above, the outer plate is provided with a mounting hole, the inner plate is provided with a through hole, and a limiting rod for threaded connection with the part to be adjusted is provided in the mounting hole;
[0008] In the first state, the limiting rod partially extends into the through hole; in the second state, the limiting rod does not extend into the through hole.
[0009] In one embodiment of the probe maintenance cover described above, the probe maintenance cover further includes a limiting member for pressing against the inner disk and / or the outer disk.
[0010] In one embodiment of the probe maintenance cover described above, the limiting member includes a support and a locking member, the support being fixedly connected to one of the outer disk and the inner disk, and the locking member being threadedly connected to the support and passing through the support to press against the other of the outer disk and the inner disk.
[0011] In one embodiment of the probe maintenance cover described above, there are at least two limiting members that are equidistantly distributed around the circumference of the disk.
[0012] In one embodiment of the probe maintenance cover described above, the inner disk is rotatably connected to the outer disk.
[0013] In one embodiment of the probe maintenance cover described above, the outer disk is provided with an annular groove, and the inner disk is provided with an annular protrusion that mates with the annular groove.
[0014] In one embodiment of the probe maintenance cover described above, the inner plate is provided with a movable baffle, which at least partially covers the operating hole.
[0015] In one embodiment of the probe maintenance cover described above, the inner disk is provided with a sliding structure along the length of the operating hole, and the baffle is slidably connected to the inner disk through the sliding structure.
[0016] In one embodiment of the probe maintenance cover described above, the inner disk and / or the outer disk are made of transparent acrylic sheet.
[0017] The above-described one or more embodiments of this utility model have at least one or more of the following beneficial effects:
[0018] When adjusting the probes on the probe holder, first place the disc body on the probe holder, then fix the outer disc on the probe holder to ensure the stability of the disc body and prevent it from shifting or falling off during probe adjustment. Then move the inner disc so that the operating hole overlaps with the local adjustment area on the part to be adjusted, ensuring that the operator can only extend the adjustment tool to the local adjustment area through the operating hole to adjust the probe at the current local adjustment area. The inner disc covering other adjustment areas of the probe holder prevents the operator from accidentally touching other probes, thereby improving testing accuracy and efficiency, reducing the number of probe adjustments caused by accidental probe touching, thus reducing probe wear and extending probe life.
[0019] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description
[0020] The disclosure of this utility model will become more readily understood with reference to the accompanying drawings. It will be readily understood by those skilled in the art that these drawings are for illustrative purposes only and are not intended to limit the scope of protection of this utility model. Furthermore, similar numbers in the drawings are used to denote similar components, wherein:
[0021] Figure 1 This is a schematic diagram illustrating the structure of a probe maintenance cover provided in an embodiment of this application;
[0022] Figure 2 This is another cross-sectional view provided in this application embodiment for showing the probe maintenance cover;
[0023] Figure 3 This application provides a partial cross-sectional view for showing a probe maintenance cover;
[0024] Figure 4 yes Figure 3 Enlarged view of point A in the middle;
[0025] Figure 5 yes Figure 3 Enlarged view of point B in the middle.
[0026] Explanation of reference numerals in the attached figures
[0027] 1. Disc body; 11. Outer disc; 111. Mounting hole; 112. Annular groove; 113. Moving groove; 12. Inner disc; 121. Operating hole; 122. Through hole; 123. Annular protrusion; 2. Limiting component; 21. Support; 22. Locking component; 3. Limiting rod. Detailed Implementation
[0028] Some embodiments of the present invention will now be described with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of the present invention and are not intended to limit the scope of protection of the present invention.
[0029] Currently, when operators adjust the middle probe of the probe card, they are prone to accidentally touching other probes, which can cause probe damage or positional displacement, affecting test accuracy and efficiency. It may also increase the number of probe adjustments, thereby increasing probe wear and shortening its service life.
[0030] Therefore, this application creatively proposes a probe maintenance cover, which includes a disc body covering the part to be adjusted. The disc body includes an outer disc and an inner disc that are movably connected. The outer disc is detachably connected to the part to be adjusted, and the inner disc has a through-hole for external objects to pass through. When adjusting the probe on the probe holder, first, the disc body is placed on the probe holder, and then the outer disc is fixed on the probe holder to ensure the stability of the disc body and prevent the disc body from shifting or falling off during probe adjustment. Then, the inner disc is moved so that the operating hole overlaps with the corresponding area to be adjusted on the part to be adjusted, ensuring that the operator can only extend the adjustment tool to the corresponding area to be adjusted through the operating hole, and then adjust the probe in the currently adjustable area. The inner disc covering other adjustment areas of the probe holder prevents the operator from accidentally touching other probes, thereby improving testing accuracy and efficiency, while reducing the number of probe adjustments caused by accidental probe touching, thus reducing probe wear and extending probe life.
[0031] The present invention will be specifically described below through specific embodiments.
[0032] Reference Figures 1 to 5 As shown, this application embodiment provides a probe maintenance cover, which includes a disc 1 covering the part to be adjusted. The disc 1 includes an outer disc 11 and an inner disc 12 that are movably connected. The outer disc 11 is detachably connected to the part to be adjusted. The inner disc 12 has an operation hole 121 through which an adjustment tool can pass. The operation hole 121 is used to expose different areas of the part to be adjusted when the inner disc 12 and the outer disc 11 move relative to each other.
[0033] In some embodiments, the component to be adjusted refers to the pin clip. Of course, the component to be adjusted can also be other parts that need to be adjusted, such as a circuit board.
[0034] It is understood that the shape of the disc 1 can be a regular shape such as a circle or square, or any other irregular shape. The key is that it can completely cover the part to be adjusted without affecting the adjustment of the part. In this embodiment, the disc 1 is generally disc-shaped.
[0035] Specifically, when adjusting the probes on the probe holder, first, the disc 1 is placed on the probe holder, and then the outer disc 11 is fixed on the probe holder to ensure the stability of the disc 1 and prevent the disc 1 from shifting or falling off during the probe adjustment process. Then, the inner disc 12 is moved so that the operating hole 121 overlaps with the adjustable area on the part to be adjusted, ensuring that the operator can only extend the adjustment tool to the adjustable area through the operating hole 121 to adjust the probe at the current adjustable area. The inner disc 12 covering other adjustment areas of the probe holder prevents the operator from accidentally touching other probes, thereby improving the testing accuracy and efficiency, while reducing the number of probe adjustments caused by accidental probe touching, thus reducing probe wear and extending probe life.
[0036] It should be noted that the movable connection between the outer plate 11 and the inner plate 12 includes sliding connection, rotational connection, etc. For example, the inner plate 12 is slidably connected to the outer plate 11. During the movement of the inner plate 12 relative to the outer plate 11, the portion of the inner plate 12 that is slidably connected to the outer plate 11 remains within the outer plate 11, allowing the inner plate 12 and the outer plate 11 to fully cover the portion of the pin clip that does not require immediate adjustment. Specifically, refer to... Figure 2 As shown, the disc body 1 is generally square in shape, and the inner disc 12 is also generally square in shape. A movable groove 113 is provided along the periphery of the outer disc 11 for the inner disc 12 to pass through, allowing the inner disc 12 to slide along the linear direction of the disc body 1, thereby changing the position of the adjustable area of the component to be adjusted. Furthermore, different adjustable areas of the component can be flexibly exposed by adjusting the number and distribution of the operating holes 121.
[0037] Reference is provided as an example, not a limitation. Figure 3 and Figure 4 As shown, the inner disk 12 and the outer disk 11 are rotatably connected. The disk body 1 is generally disc-shaped, the inner disk 12 is generally disc-shaped, and the outer disk 11 is generally annular. When adjusting the probes in different areas on the needle holder, the operator only needs to rotate the inner disk 12, without needing to make the inner disk 12 displace in the linear direction. This greatly reduces the overall size of the disk body 1 and makes it easier for the operator to operate in a smaller space.
[0038] Furthermore, in some embodiments, the outer disk 11 is provided with an annular groove 112, and the inner disk 12 is provided with an annular protrusion 123 that cooperates with the annular groove 112.
[0039] It is understood that the annular groove 112 can be a complete ring or a half ring, and correspondingly, the annular protrusion 123 can also be a complete ring or a half ring, as long as the annular protrusion 123 can rotate a certain angle within the annular groove 112, thereby enabling the adjustment of the probe on the needle holder. In this embodiment, both the annular groove 112 and the annular protrusion 123 are complete rings. In addition, to reduce the friction between the annular protrusion 123 and the annular groove 112, ball bearings can be provided between the annular protrusion 123 and the annular groove 112 to improve the smoothness of the rotation of the inner disk 12 relative to the outer disk 11.
[0040] Of course, in some embodiments, the inner disk 12 can also be rotatably connected to the outer disk 11 through other structures, such as extending a U-shaped shaft from the outer disk 11, and rotatably connecting the inner disk 12 to one end of the U-shaped shaft.
[0041] Understandably, there are various ways to detach the outer disc 11 from the part to be adjusted, such as plug-in, snap-fit, or threaded connection. In some examples, the outer disc 11 and the part to be adjusted are connected by a threaded connection to ensure that the outer disc 11 and the part to be adjusted can be quickly separated while ensuring a stable connection.
[0042] Reference is provided as an example, not a limitation. Figure 4 As shown, the outer plate 11 is provided with a mounting hole 111, and the inner plate 12 is provided with a through hole 122. The mounting hole 111 is provided with a limiting rod 3 for threaded connection with the part to be adjusted. In the first state, the limiting rod 3 extends into the through hole 122. In the second state, the limiting rod 3 does not extend into the through hole 122.
[0043] It should be noted that the pin clip is generally provided with a corresponding fixing hole to align with the mounting hole 111, thereby fixing the pin clip and the outer plate 11 by means of the limiting rod 3. The side of the limiting rod 3 may have external threads partially or completely, while the through hole 122 may not have internal threads, in order to shorten the assembly time of the inner plate 12, the outer plate 11 and the pin clip.
[0044] Specifically, when installing the probe maintenance cover onto the needle holder, first align the through hole 122, mounting hole 111, and fixing hole. Then, screw in the limiting rod 3 to securely connect the outer plate 11 to the needle holder, while simultaneously restricting the inner plate 12 from rotating relative to the outer plate 11. If it is necessary to rotate the inner plate 12 later, the limiting rod 3 can be further screwed in using a screwdriver or other tools to move the limiting rod 3 out of the through hole 122, thereby releasing the restriction on the inner plate 12. Then, the operator can rotate the inner plate 12 to the appropriate position.
[0045] In some embodiments, refer to Figure 3 and Figure 5As shown, to prevent the inner disk 12 from rotating when the probe is adjusted, the probe maintenance cover also includes a limiting member 2, which is used to press against the inner disk 12 and / or the outer disk 11. After the inner disk 12 is rotated to the corresponding position, the limiting member 2 is used to press against the inner disk 12 and / or the outer disk 11, so that the inner disk 12 and / or the outer disk 11 remain relatively stationary.
[0046] The limiting component 2 can be a dovetail clip or other component that can perform a clamping function, or other component that can limit the rotation of the inner disk 12 and / or the outer disk 11.
[0047] Reference is provided as an example, not a limitation. Figure 5 As shown, the limiting member 2 includes a support 21 and a locking member 22. The support 21 is fixedly connected to one of the outer disk 11 and the inner disk 12. The locking rod is threaded to the support 21 and passes through the support 21 to press against the other of the outer disk 11 and the inner disk 12.
[0048] It is understandable that the support 21 can be fixed on either the inner plate 12 or the outer plate 11, as long as it can fix the inner plate 12.
[0049] In this embodiment, the support 21 is fixed on the outer plate 11. After the inner plate 12 is rotated by the corresponding angle, the locking member 22 is turned until the locking member 22 presses against the inner plate 12. At this time, even if the staff accidentally rotates the inner plate 12 while adjusting the probe on the needle card, the probe adjustment will not be affected by the rotation of the inner plate 12.
[0050] Furthermore, in some embodiments, reference is made to... Figure 1 As shown, there are at least two limiting members 2, which are evenly spaced around the circumference of the disk body 1. In this embodiment, there are four limiting members 2, which are evenly distributed along the circumference of the outer disk 11, thereby evenly pressing against the inner disk 12.
[0051] In some embodiments, the inner plate 12 is provided with a movable baffle, which at least partially blocks the operating hole 121. By moving the baffle, the size of the exposed area of the needle card corresponding to the operating hole 121 can be further adjusted, thereby further reducing the risk of operators accidentally touching other probes when adjusting the probe.
[0052] For example, the inner disk 12 is provided with a sliding structure along the length direction of the operating hole 121, and the baffle is slidably connected to the inner disk 12 through the sliding structure. In this embodiment, the sliding structure includes a groove provided on the surface of the inner disk 12, and the surface portion of the baffle is embedded in the groove, so that the baffle can slide relative to the inner disk 12.
[0053] Of course, sliding structures can also be some structures that can achieve guided movement, such as slide rails.
[0054] In some embodiments, the inner disc 12 and / or the outer disc 11 are made of transparent acrylic sheet, allowing operators to observe the inside of the needle card through the inner disc 12. Of course, the inner disc 12 and the outer disc 11 can also be made of materials such as plastic or alloy.
[0055] Specifically, before adjusting the probes on the needle holder, first align the mounting hole 111 on the outer plate 11 and the through hole 122 on the inner plate 12 with the fixing hole on the needle holder. Then, pass the limiting rod 3 through the through hole 122 and screw it into the mounting hole 111 and the fixing hole to fix the outer plate 11 and the needle holder, and protect the needle holder through the plate body 1. Then, continue to screw in the limiting rod 3 so that the limiting rod 3 moves out of the through hole 122, thereby releasing the restriction on the inner plate 12. Then, rotate the inner plate 12 as needed so that the operating hole 121 rotates to the top of the corresponding needle holder area, making it convenient for the staff to adjust the probes in a specific area through the operating hole 121. Before adjustment, use the limiting member 2 to clamp the inner plate 12 to prevent the inner plate 12 from rotating and to avoid the inner plate 12 rotating and affecting the probe adjustment. When adjusting the probes in other areas later, simply loosen the limiting member 2, rotate the operating hole 121 on the inner plate 12 to the corresponding area, and then tighten the limiting member 2. After adjustment, observe the probe adjustment through disk 1 to ensure it meets the test requirements.
[0056] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.
[0057] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.
[0058] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.
Claims
1. A probe service cover characterized by, The probe maintenance cover comprises a disc body arranged on the component to be adjusted, the disc body comprises an outer disc and an inner disc connected movably, the outer disc is detachably connected with the component to be adjusted, and the inner disc is provided with an operation hole for passing through the adjusting tool, the operation hole is used to expose different areas to be adjusted of the component to be adjusted when the inner disc and the outer disc move relatively.
2. The probe service cover of claim 1, wherein, The outer disc is provided with a mounting hole, the inner disc is provided with a through hole, and the mounting hole is provided with a limiting rod for threadedly connecting with the component to be adjusted. In the first state, the limiting rod partially extends into the through hole; in the second state, the limiting rod does not extend into the through hole.
3. A probe service cover according to claim 1 or 2, characterised in that, The probe maintenance cover further comprises a limiting member for pressing against the inner disc and / or the outer disc.
4. The probe service cover of claim 3, wherein, The limiting member comprises a support and a locking member, the support is fixedly connected with one of the inner disc and the outer disc, and the locking member is threadedly connected with the support and passes through the support to press against the other one of the inner disc and the outer disc.
5. The probe service cover of claim 4, wherein, The limiting member is at least two and is distributed equidistantly around the circumference of the disc body.
6. The probe service cover of claim 1, wherein, The inner disc is rotationally connected with the outer disc.
7. The probe service cover of claim 6, wherein, The outer disc is provided with an annular groove, and the inner disc is provided with an annular protrusion matched with the annular groove.
8. The probe service cover of claim 1, wherein, The inner disc is provided with a movable baffle, and the baffle at least blocks part of the operation hole.
9. The probe service cover of claim 8, wherein, The inner disc is provided with a sliding structure along the length direction of the operation hole, and the baffle is slidably connected with the inner disc through the sliding structure.
10. A probe service cover according to any one of claims 4-9, characterized in that, The inner disc and / or the outer disc is made of transparent acrylic plate.