Lissajous optical fiber scanner with supporting plate

Abstract

The utility model discloses a Lissajous optical fiber scanner with a supporting plate, which comprises a piezoelectric material cylindrical body, a supporting plate and an optical fiber, and is characterized in that at least one of the left and right sides of the piezoelectric material cylindrical body is provided with a first inner electrode and a first outer electrode which are correspondingly matched with each other; at least one of the upper side and the lower side of the piezoelectric material barrel-shaped body is provided with a second inner electrode and a second outer electrode which are correspondingly arranged in a matched mode, the left side wall and the right side wall of the piezoelectric material barrel-shaped body are each provided with an installation groove used for being connected with a supporting plate, and the rear end of the supporting plate is partially inserted into the installation grooves. According to the invention, by utilizing the adjustment of the appearance structures and / or size parameters of the supporting plate and the overlapping part, the inherent frequencies of the combination parts utilized in two directions can meet the requirements that the inherent frequencies can be close enough, a good scanning effect is ensured, and a uniform and compact scanning grid is provided; and meanwhile, an enough difference value is provided, so that the vibration of the combination part in two directions cannot generate coupling.

Description

[0001] This application is a divisional application of Chinese Patent Application No. 2024232650214, filed with the Chinese Patent Office on December 30, 2024, entitled "A Lissajous Fiber Optic Scanner with a Support Plate", the entire contents of which are incorporated herein by reference. Technical Field

[0002] This application relates to the field of fiber optic scanner structure technology, and more particularly to a Lissajous fiber optic scanner with a support plate. Background Technology

[0003] A fiber optic scanner is a display technology that uses a scanning driver to control the oscillation of an optical fiber while simultaneously emitting light. It is primarily used in fiber optic scanning display technology, fiber optic scanning endoscopy technology, and fiber optic scanning radar. When applied to image display, fiber optic scanners produce images with sharp, saturated colors, high contrast, high brightness, and a very small structural size.

[0004] Fiber optic scanners utilize the principle of mechanical resonance to enable a large scanning range for the fiber optic cantilever. Scanning methods of the scanning driver can be categorized into helical scanning, grid scanning, and Lissajous scanning. Lissajous scanning micro-piezoelectric scanning devices typically have driving sections in two directions, driving the scanning device to vibrate simultaneously in both directions. In Lissajous scanning, the closer the driving frequencies in the two directions, the closer the uniformity (density) of the scanning grid in both directions. Theoretically, the closer the driving frequencies in these two directions, the better. However, the closer the natural frequencies used by the scanner in the two directions, the more pronounced the vibration coupling effect becomes, which degrades the scanning trajectory, causing uncontrolled components in the scanning trajectory and resulting in image distortion that is difficult to completely eliminate through post-processing. Therefore, the natural frequencies used by the Lissajous scanner in the two directions should ideally have a precise difference range, avoiding both excessively small differences that cause coupling effects and excessively large differences that lead to unsatisfactory uniformity.

[0005] The manufacturing of Lissajous scanners, which utilize the inherent frequencies in both directions with precise differences, requires extremely high processing accuracy, making it difficult to guarantee both the cost of processing equipment and the yield rate. Utility Model Content

[0006] This application provides a Lissajous fiber optic scanner with a support plate to reduce processing difficulty and improve processing yield.

[0007] To achieve the aforementioned objectives, this application provides a Lissajous fiber optic scanner with a support plate, comprising a piezoelectric cylindrical body, a support plate fixedly connected to the piezoelectric cylindrical body, and an optical fiber fixedly mounted on the support plate in a cantilevered support manner.

[0008] With the axial extension direction of the piezoelectric material cylindrical body as the front-to-back direction, the rear end of the piezoelectric material cylindrical body is fixedly connected to the base for support.

[0009] At least one of the inner and outer surfaces of the piezoelectric material cylindrical body is provided with a first inner electrode and a first outer electrode respectively. The portion of the piezoelectric material cylindrical body located between the corresponding first inner electrode and the corresponding first outer electrode is polarized along the thickness direction. The piezoelectric material located between the first inner electrode and the corresponding first outer electrode is driven to extend and retract in the front-back direction, and the front end of the piezoelectric material cylindrical body is driven to vibrate left and right in the horizontal direction.

[0010] At least one of the inner and outer surfaces of the piezoelectric material cylindrical body is provided with a correspondingly matched second inner electrode and a second outer electrode. The portion of the piezoelectric material cylindrical body located between the corresponding second inner electrode and the second outer electrode is polarized along the thickness direction. The piezoelectric material located between the two electrodes is driven to extend and retract in the front-back direction, and the front end of the piezoelectric material cylindrical body is driven to vibrate in the vertical direction.

[0011] A support plate is arranged parallel to the horizontal plane and located at the front of the piezoelectric material cylindrical body. Its rear end is fixedly connected to the piezoelectric material cylindrical body. The left and right walls of the piezoelectric material cylindrical body are provided with mounting grooves for connecting the support plate. The rear end of the support plate is inserted into the mounting groove and fixedly connected to the piezoelectric material cylindrical body. The optical fiber is fixedly mounted on the front end of the support plate in a cantilever support manner. The support plate and the piezoelectric material cylindrical body have overlapping parts in the front-back direction. The part of the support plate installed in the mounting groove and the part of the piezoelectric material cylindrical body that overlaps with this part of the support plate in the front-back direction form an overlapping part. The support plate and the overlapping part make the natural frequency of the combination of the piezoelectric material cylindrical body, the support plate and the optical fiber in the horizontal direction greater than the same order natural frequency of the combination in the vertical direction. It also makes the natural frequency of the combination in the vertical direction that is closest to its V-order natural frequency in the horizontal direction have a difference between the V-order natural frequency in the horizontal direction and the V-order natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

[0012] Specifically, by adjusting the shape and / or size parameters of the support plate and the overlapping part, the natural frequencies of the combined part used in both directions are made to be sufficiently close to ensure good scanning effect and have a uniform and dense scanning grid; at the same time, they have sufficient difference so that the vibration of the combined part in the two directions will not couple.

[0013] The difference ensures that when the assembly performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal direction and the vibrations in the vertical direction will not couple.

[0014] Generally, the difference ranges from 10Hz to 12kHz. More preferably, the difference ranges from 1kHz to 10kHz. Specifically, the difference is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs a Lissajous scan under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0015] Optionally, the mounting groove can be located in the middle, upper or lower part of the left and right side walls of the piezoelectric material cylindrical body in the vertical direction, without limitation.

[0016] Optionally, the piezoelectric cylindrical body has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction, its outer contour is square, and its interior is provided with a central hole with a square or circular contour that is coaxial with the outer contour.

[0017] Alternatively, the piezoelectric material cylindrical body has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction, and its outer contour is circular. Its interior is provided with a central hole that is coaxial with the outer contour and has a circular or square contour.

[0018] Optionally, a first inner electrode and a first outer electrode are respectively provided on the inner and outer surfaces of either the left or right sides of the piezoelectric material cylindrical body. The portion of the piezoelectric material cylindrical body located between the first inner electrode and the corresponding first outer electrode is polarized along the thickness direction. The piezoelectric material located between the first inner electrode and the corresponding first outer electrode is driven to extend and retract in the front-back direction, driving the front end of the cylindrical body to vibrate left and right in the horizontal direction. The number of first inner electrodes or first outer electrodes can be one, two, or more.

[0019] Alternatively, the inner and outer surfaces of the left and right sides of the piezoelectric cylindrical body are respectively provided with corresponding first inner electrodes and first outer electrodes. The portion of the piezoelectric cylindrical body located between the first inner electrode and the corresponding first outer electrode is polarized along the thickness direction. The piezoelectric material located between the first inner electrode and the corresponding first outer electrode is driven to extend and retract in the front-back direction, while the piezoelectric materials on the left and right sides extend and retract synchronously in opposite directions with equal length, driving the front end of the cylindrical body to vibrate left and right in the horizontal direction. The number of first inner electrodes or first outer electrodes can be one, two, or more.

[0020] Optionally, a second inner electrode and a second outer electrode are respectively provided on the inner and outer surfaces of either the upper or lower sides of the piezoelectric material cylindrical body. The portion of the piezoelectric material cylindrical body located between the second inner electrode and the second outer electrode is polarized along the thickness direction. The second inner electrode and the second outer electrode drive the piezoelectric material located between them to expand and contract in the front-back direction, driving the front end of the piezoelectric material cylindrical body to vibrate in the vertical direction. The number of second inner electrodes or second outer electrodes located on the same side can be one, two, or more.

[0021] Alternatively, the inner and outer surfaces of the upper and lower sides of the piezoelectric material cylindrical body are respectively provided with correspondingly matched second inner and outer electrodes. The portion of the piezoelectric material cylindrical body located between the second inner and second outer electrodes is polarized along the thickness direction. The second inner and second outer electrodes drive the piezoelectric material located between them to expand and contract in the front-back direction, while the piezoelectric materials on the upper and lower sides expand and contract synchronously in opposite directions with equal length, driving the front end of the piezoelectric material cylindrical body to vibrate in the vertical direction. The number of second inner or second outer electrodes located on the same side can be one, two, or more.

[0022] More preferably, when the inner and outer surfaces of the left and right sides of the piezoelectric material cylindrical body are respectively provided with a first inner electrode and a corresponding first outer electrode, the first inner electrodes on the left and right sides of the piezoelectric material cylindrical body are symmetrically arranged to drive the piezoelectric material cylindrical body to vibrate accurately in the horizontal direction without generating a vertical displacement component; when the inner and outer surfaces of the upper and lower sides of the piezoelectric material cylindrical body are respectively provided with a second inner electrode and a corresponding second outer electrode, the second inner electrodes on the upper and lower sides of the piezoelectric material cylindrical body are symmetrically arranged to drive the piezoelectric material cylindrical body to vibrate accurately in the vertical direction without generating a horizontal displacement component.

[0023] One or more technical solutions in this application have at least the following technical effects or advantages:

[0024] This application utilizes the adjustment of the shape and / or size parameters of the support plate and the overlapping part to ensure that the natural frequencies of the combined part used in both directions are sufficiently close to guarantee good scanning effect and have a uniform and dense scanning grid; at the same time, they have sufficient difference so that the vibration of the combined part in both directions will not couple.

[0025] This application eliminates the need for a specific difference in the natural frequencies of the piezoelectric actuator in the two driving directions of the Lissajous scanner, thus avoiding coupling of vibrations in the two driving directions and reducing the requirements for processing difficulty and precision. More preferably, this application allows the cylindrical body to have the same or similar natural frequencies in the two driving directions, and allows the cylindrical body itself to be a rotationally symmetric structure. This further reduces the processing difficulty of the piezoelectric actuator in the Lissajous scanner, resulting in a significant improvement in processing efficiency and yield. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the structure of this utility model;

[0027] Figure 2 This is a schematic diagram of the overlapping structure between the support plate and the cylindrical body in the front-to-back direction. Detailed Implementation

[0028] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0029] Combination Figure 1 , Figure 2 As shown, a Lissajous fiber optic scanner with a support plate includes a piezoelectric cylindrical body 100, a support plate 103 fixedly connected to the piezoelectric cylindrical body 100, and an optical fiber 104 fixedly mounted on the support plate 103 in a cantilever support manner.

[0030] With the axial extension direction of the piezoelectric material cylindrical body 100 as the front-to-back direction, the rear end of the piezoelectric material cylindrical body 100 is fixedly connected to the base 200 and supported by the base 200.

[0031] At least one of the inner and outer surfaces of the piezoelectric material cylindrical body 100 is provided with a first inner electrode 1011 and a first outer electrode 1012 respectively. The portion of the piezoelectric material cylindrical body 100 located between the corresponding first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along the thickness direction. The piezoelectric material located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, and the front end of the piezoelectric material cylindrical body 100 is driven to vibrate left and right in the horizontal direction.

[0032] At least one of the inner and outer surfaces of the piezoelectric material cylindrical body 100 is provided with a second inner electrode 1021 and a second outer electrode 1022 respectively. The portion of the piezoelectric material cylindrical body 100 located between the corresponding second inner electrode 1021 and second outer electrode 1022 is polarized along the thickness direction. The piezoelectric material located between the second inner electrode 1021 and the second outer electrode 1022 is driven to extend and retract in the front-back direction, and the front end of the piezoelectric material cylindrical body 100 is driven to vibrate in the vertical direction.

[0033] The support plate 103 is arranged parallel to the horizontal plane and is located at the front of the piezoelectric material cylindrical body 100. Its rear end is fixedly connected to the piezoelectric material cylindrical body 100. The left and right sides of the piezoelectric material cylindrical body 100 are provided with mounting grooves 106 for connecting the support plate 103. The rear end of the support plate 103 is inserted into the mounting grooves 106 and fixedly connected to the piezoelectric material cylindrical body 100. The optical fiber 104 is fixedly mounted on the front end of the support plate 103 in a cantilever support manner. The support plate 103 and the piezoelectric material cylindrical body 100 have overlapping portions in the front-rear direction. 105. The portion of the support plate 103 installed in the mounting groove 106 and the portion of the piezoelectric material cylindrical body 100 that overlaps with this portion of the support plate 103 in the front-rear direction constitute an overlapping portion 105. The support plate 103 and the overlapping portion 105 cause the natural frequency of the assembly consisting of the piezoelectric material cylindrical body 100, the support plate 103, and the optical fiber 104 in the horizontal direction to be greater than the same order natural frequency of the assembly in the vertical direction. Furthermore, the U-order natural frequency of the assembly in the vertical direction, which is closest to its V-order natural frequency in the horizontal direction, has a difference from the V-order natural frequency in the horizontal direction. In this embodiment, the V-order is first order, and the U-order is second order.

[0034] Of course, this is only the parameter selection for this embodiment. In other embodiments with similar structure types to this embodiment, V can also be an integer greater than 1, and U can be an integer greater than V.

[0035] Specifically, by adjusting the shape and / or size parameters of the support plate 103 and the overlapping part 105, the natural frequencies of the combined part used in both directions are simultaneously close enough to ensure good scanning effect and have a uniform and dense scanning grid; at the same time, they have a sufficient difference so that the vibration of the combined part in both directions will not couple.

[0036] The difference ensures that when the assembly performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal direction and the vibrations in the vertical direction will not couple.

[0037] Generally, the difference ranges from 10Hz to 12kHz. More preferably, the difference ranges from 1kHz to 10kHz. Specifically, the difference is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs a Lissajous scan under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0038] Optionally, the mounting groove 106 may be located in the middle, upper or lower part of the left and right side walls of the piezoelectric material cylindrical body 100 in the vertical direction, without limitation.

[0039] Optional, such as Figure 1 As shown, the piezoelectric material cylindrical body 100 has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction. Its outer contour is square, and its interior is provided with a central hole with a square or circular contour that is coaxial with the outer contour.

[0040] Alternatively, the piezoelectric material cylindrical body 100 has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction, and its outer contour is circular. Its interior is provided with a central hole that is coaxial with the outer contour and has a circular or square contour.

[0041] Optionally, a first inner electrode 1011 and a first outer electrode 1012 are respectively provided on the inner and outer surfaces of either the left or right sides of the piezoelectric material cylindrical body 100. The portion of the piezoelectric material cylindrical body 100 located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along the thickness direction. The piezoelectric material located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, driving the front end of the cylindrical body 100 to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two, or more.

[0042] Alternatively, the inner and outer surfaces of the left and right sides of the piezoelectric material cylindrical body 100 are respectively provided with correspondingly matched first inner electrodes 1011 and first outer electrodes 1012. The portion of the piezoelectric material cylindrical body 100 located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along the thickness direction. The piezoelectric material located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, and the piezoelectric materials on the left and right sides extend and retract synchronously in opposite directions with equal length, driving the front end of the cylindrical body 100 to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two, or more.

[0043] Optionally, a second inner electrode 1021 and a second outer electrode 1022 are respectively provided on the inner and outer surfaces of either the upper or lower sides of the piezoelectric material cylindrical body 100. The portion of the piezoelectric material cylindrical body 100 located between the second inner electrode 1021 and the second outer electrode 1022 is polarized along the thickness direction. The piezoelectric material located between the two electrodes is driven to extend and retract in the front-rear direction by the second inner electrode 1021 and the second outer electrode 1022, driving the front end of the piezoelectric material cylindrical body 100 to vibrate in the vertical direction. The number of second inner electrodes 1021 or second outer electrodes 1022 located on the same side can be one, two, or more.

[0044] Alternatively, the inner and outer surfaces of the upper and lower sides of the piezoelectric material cylindrical body 100 are respectively provided with correspondingly matched second inner electrodes 1021 and second outer electrodes 1022. The portion of the piezoelectric material cylindrical body 100 located between the second inner electrodes 1021 and the second outer electrodes 1022 is polarized along the thickness direction. The piezoelectric material located between the second inner electrodes 1021 and the second outer electrodes 1022 is driven to extend and retract in the front-back direction, and the piezoelectric materials on the upper and lower sides extend and retract synchronously in opposite directions with equal length, driving the front end of the piezoelectric material cylindrical body 100 to vibrate in the vertical direction. The number of second inner electrodes 1021 or second outer electrodes 1022 located on the same side can be one, two, or more.

[0045] More preferably, when the inner and outer surfaces of the piezoelectric material cylindrical body 100 on both the left and right sides are respectively provided with a first inner electrode 1011 and a corresponding first outer electrode 1012, the first inner electrodes 1011 on the left and right sides of the piezoelectric material cylindrical body 100 are symmetrically arranged to drive the piezoelectric material cylindrical body 100 to vibrate accurately in the horizontal direction without generating a vertical displacement component; when the inner and outer surfaces of the upper and lower sides of the piezoelectric material cylindrical body 100 are respectively provided with a second inner electrode 1021 and a corresponding second outer electrode 1022, the second inner electrodes 1021 on the upper and lower sides of the piezoelectric material cylindrical body 100 are symmetrically arranged to drive the piezoelectric material cylindrical body 100 to vibrate accurately in the vertical direction without generating a horizontal displacement component.

[0046] This application eliminates the need for the piezoelectric actuator of the Lissajous scanner to have a specific difference in its natural frequency in the two driving directions, thus avoiding coupling of vibrations in the two driving directions and reducing the processing difficulty and accuracy requirements. More preferably, this application allows the piezoelectric material cylindrical body 100 to have the same or similar natural frequencies in the two driving directions, and allows the piezoelectric material cylindrical body 100 itself to be a rotationally symmetric structure. This further reduces the processing difficulty of the piezoelectric actuator of the Lissajous scanner, resulting in a significant improvement in processing efficiency and yield.

[0047] Combination Figure 1 , Figure 2 As shown, a Lissajous fiber optic scanner with a support plate includes a piezoelectric cylindrical body 100, a support plate 103 fixedly connected to the piezoelectric cylindrical body 100, and an optical fiber 104 fixedly mounted on the support plate 103 in a cantilever support manner.

[0048] With the axial extension direction of the piezoelectric material cylindrical body 100 as the front-to-back direction, the rear end of the piezoelectric material cylindrical body 100 is fixedly connected to the base 200 and supported by the base 200.

[0049] At least one of the inner and outer surfaces of the piezoelectric material cylindrical body 100 is provided with a first inner electrode 1011 and a first outer electrode 1012 respectively. The portion of the piezoelectric material cylindrical body 100 located between the corresponding first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along the thickness direction. The piezoelectric material located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, and the front end of the piezoelectric material cylindrical body 100 is driven to vibrate left and right in the horizontal direction.

[0050] At least one of the inner and outer surfaces of the piezoelectric material cylindrical body 100 is provided with a second inner electrode 1021 and a second outer electrode 1022 respectively. The portion of the piezoelectric material cylindrical body 100 located between the corresponding second inner electrode 1021 and second outer electrode 1022 is polarized along the thickness direction. The piezoelectric material located between the second inner electrode 1021 and the second outer electrode 1022 is driven to extend and retract in the front-back direction, and the front end of the piezoelectric material cylindrical body 100 is driven to vibrate in the vertical direction.

[0051] The piezoelectric material cylindrical body 100 has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction. Its outer contour is square, and its interior is provided with a central hole with a square or circular contour that is coaxial with the outer contour.

[0052] A support plate 103 is arranged parallel to the horizontal plane and is located at the front of the piezoelectric material cylindrical body 100. Its rear end is fixedly connected to the piezoelectric material cylindrical body 100. The optical fiber 104 is fixedly mounted on the front end of the support plate 103 in a cantilever support manner. The support plate 103 and the piezoelectric material cylindrical body 100 have an overlapping portion 105 in the front-rear direction. The left and right sides of the piezoelectric material cylindrical body 100 are provided with mounting grooves 106 for connecting the support plate 103. The rear end portion of the support plate 103 is inserted into the mounting grooves 106 and fixedly connected to the piezoelectric material cylindrical body 100. A fixed connection is established, with the portion of the support plate 103 installed within the mounting groove 106 forming an overlapping portion 105 with the portion of the piezoelectric material cylindrical body 100 that overlaps with this portion of the support plate 103 in the front-rear direction. The support plate 103 and the overlapping portion 105 ensure that the natural frequency of the assembly consisting of the piezoelectric material cylindrical body 100, the support plate 103, and the optical fiber 104 in the horizontal direction is greater than the same-order natural frequency in the vertical direction. Furthermore, a difference exists between the U-order natural frequency in the vertical direction, which is closest to its V-order natural frequency in the horizontal direction, and the V-order natural frequency in the horizontal direction. In this embodiment, V-order is first-order, and U-order is second-order.

[0053] Of course, this is only the parameter selection for this embodiment. In other embodiments with similar structure types to this embodiment, V can also be an integer greater than 1, and U can be an integer greater than V.

[0054] Specifically, by adjusting the shape and / or size parameters of the support plate 103 and the overlapping part 105, the natural frequencies of the combined part used in both directions are simultaneously close enough to ensure good scanning effect and have a uniform and dense scanning grid; at the same time, they have a sufficient difference so that the vibration of the combined part in both directions will not couple.

[0055] The difference ensures that when the assembly performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal direction and the vibrations in the vertical direction will not couple.

[0056] Generally, the difference ranges from 10Hz to 12kHz. More preferably, the difference ranges from 1kHz to 10kHz. Specifically, the difference is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs a Lissajous scan under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0057] Optionally, the mounting groove 106 may be located in the middle, upper or lower part of the left and right side walls of the piezoelectric material cylindrical body 100 in the vertical direction, without limitation.

[0058] In this embodiment, the arrangement of the first inner electrode 1011 and the first outer electrode 1012, as well as the second inner electrode 1021 and the second outer electrode 1022, is the same as in Embodiment 6. The polarization method, driving method, and driving principle of the corresponding part of the piezoelectric material cylindrical body 100 are also the same as in Embodiment 1.

[0059] refer to Figure 1 , Figure 2 As shown, a Lissajous fiber optic scanner with a support plate includes a piezoelectric cylindrical body 100, a support plate 103 fixedly connected to the piezoelectric cylindrical body 100, and an optical fiber 104 fixedly mounted on the support plate 103 in a cantilever support manner.

[0060] With the axial extension direction of the piezoelectric material cylindrical body 100 as the front-to-back direction, the rear end of the piezoelectric material cylindrical body 100 is fixedly connected to the base 200 for support. At least one of the left and right sides of the piezoelectric material cylindrical body 100 has a first inner electrode 1011 and a first outer electrode 1012 respectively provided on the inner and outer surfaces. The portion of the piezoelectric material cylindrical body 100 located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along the thickness direction. The piezoelectric material located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-to-back direction, and the front end of the piezoelectric material cylindrical body 100 is driven to vibrate left and right in the horizontal direction.

[0061] At least one of the inner and outer surfaces of the piezoelectric material cylindrical body 100 is provided with a second inner electrode 1021 and a second outer electrode 1022 respectively. The portion of the piezoelectric material cylindrical body 100 located between the second inner electrode 1021 and the second outer electrode 1022 is polarized along the thickness direction. The piezoelectric material located between the second inner electrode 1021 and the second outer electrode 1022 is driven to extend and retract in the front-back direction, and the front end of the piezoelectric material cylindrical body 100 is driven to vibrate in the vertical direction.

[0062] The piezoelectric material cylindrical body 100 has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction. Its outer contour is circular, and its interior is provided with a central hole that is coaxial with the outer contour and has a circular or square contour.

[0063] A support plate 103 is arranged parallel to the horizontal plane and is located at the front of the piezoelectric material cylindrical body 100. Its rear end is fixedly connected to the piezoelectric material cylindrical body 100. The optical fiber 104 is fixedly mounted on the front end of the support plate 103 in a cantilever support manner. The support plate 103 and the piezoelectric material cylindrical body 100 have an overlapping portion 105 in the front-rear direction. The left and right sides of the piezoelectric material cylindrical body 100 are provided with mounting grooves 106 for connecting the support plate 103. The rear end portion of the support plate 103 is inserted into the mounting grooves 106 and fixedly connected to the piezoelectric material cylindrical body 100. A fixed connection is established, with the portion of the support plate 103 installed within the mounting groove 106 forming an overlapping portion 105 with the portion of the piezoelectric material cylindrical body 100 that overlaps with this portion of the support plate 103 in the front-rear direction. The support plate 103 and the overlapping portion 105 ensure that the natural frequency of the assembly consisting of the piezoelectric material cylindrical body 100, the support plate 103, and the optical fiber 104 in the horizontal direction is greater than the same-order natural frequency in the vertical direction. Furthermore, a difference exists between the U-order natural frequency in the vertical direction, which is closest to its V-order natural frequency in the horizontal direction, and the V-order natural frequency in the horizontal direction. In this embodiment, V-order is first-order, and U-order is second-order.

[0064] Of course, this is only the parameter selection for this embodiment. In other embodiments with similar structure types to this embodiment, V can also be an integer greater than 1, and U can be an integer greater than V.

[0065] Specifically, by adjusting the shape and / or size parameters of the support plate 103 and the overlapping part 105, the natural frequencies of the combined part used in both directions are simultaneously close enough to ensure good scanning effect and have a uniform and dense scanning grid; at the same time, they have a sufficient difference so that the vibration of the combined part in both directions will not couple.

[0066] The difference value ensures that when the piezoelectric actuator performs a Lissajous scan under the drive signal, the vibrations of the actuator in the horizontal direction and the vibrations in the vertical direction do not couple. Generally, the difference value ranges from 10Hz to 12kHz. More preferably, the difference value ranges from 1kHz to 10kHz. Specifically, it is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference value is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs a Lissajous scan under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0067] Optionally, the mounting groove 106 may be located in the middle, upper or lower part of the left and right side walls of the piezoelectric material cylindrical body 100 in the vertical direction, without limitation.

[0068] In this embodiment, the arrangement of the first inner electrode 1011 and the first outer electrode 1012, as well as the second inner electrode 1021 and the second outer electrode 1022, is the same as in Embodiment 6. The polarization method, driving method, and driving principle of the corresponding part of the piezoelectric material cylindrical body 100 are also the same as in Embodiment 1.

[0069] It should be noted that the above embodiments are illustrative of this application and not limiting of it, and that those skilled in the art can devise alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses should not be construed as limiting the claims. The words “comprising” or “including” do not exclude the presence of elements or steps not listed in the claims. The words “a” or “an” preceding an element do not exclude the presence of a plurality of such elements. The use of the words first, second, and third, etc., does not indicate any order and these words can be interpreted as names.

[0070] All features disclosed in this specification, except for mutually exclusive features, can be combined in any way.

[0071] Any feature disclosed in this specification (including any appended claims, abstract, and drawings) may be replaced by other equivalent or similar features for a similar purpose, unless specifically stated otherwise. That is, unless specifically stated otherwise, each feature is merely one example of a series of equivalent or similar features.

[0072] This application is not limited to the specific embodiments described above. This application extends to any new features or combinations disclosed in this specification, as well as any new steps or combinations of any new methods or processes disclosed.

Claims

1. A Lissajous fiber scanner with a support plate, characterized in that, The optical fiber is fixedly arranged on the front end of the support plate in a cantilever support manner. The axis extension direction of the piezoelectric material cylinder body is regarded as the front-rear direction, and the rear end of the piezoelectric material cylinder body is fixedly connected with the base to be supported by the base. At least one of the inner surface and the outer surface of the left side and the right side of the piezoelectric material cylinder body is respectively provided with a corresponding first inner electrode and a first outer electrode, and the part of the piezoelectric material cylinder body between the first inner electrode and the first outer electrode is polarized along the thickness direction, and the piezoelectric material between the first inner electrode and the first outer electrode is driven to stretch and contract along the front-rear direction by the first inner electrode and the first outer electrode, and the front end of the piezoelectric material cylinder body is driven to vibrate left and right along the horizontal direction. At least one of the inner surface and the outer surface of the upper side and the lower side of the piezoelectric material cylinder body is respectively provided with a corresponding second inner electrode and a second outer electrode, and the part of the piezoelectric material cylinder body between the second inner electrode and the second outer electrode is polarized along the thickness direction, and the piezoelectric material between the second inner electrode and the second outer electrode is driven to stretch and contract along the front-rear direction by the second inner electrode and the second outer electrode, and the front end of the piezoelectric material cylinder body is driven to vibrate along the vertical direction. The support plate is arranged along the horizontal direction, and the front end of the support plate is located on the front side of the piezoelectric material cylinder body, and the rear end of the support plate is fixedly connected with the piezoelectric material cylinder body, and the left side wall and the right side wall of the piezoelectric material cylinder body are both provided with a mounting groove for connecting the support plate, and the rear end of the support plate is inserted into the mounting groove and is fixedly connected with the piezoelectric material cylinder body, and the optical fiber is fixedly arranged on the front end of the support plate in a cantilever support manner, and the support plate and the piezoelectric material cylinder body have an overlapping part in the front-rear direction, and the part of the support plate inserted into the mounting groove and the part of the piezoelectric material cylinder body overlapping with the part of the support plate in the front-rear direction constitute the overlapping part, and the support plate and the overlapping part make the natural frequency of the combination of the piezoelectric material cylinder body, the support plate and the optical fiber in the horizontal direction greater than the same order natural frequency of the combination in the vertical direction, and make the natural frequency of the combination in the vertical direction closest to the V-order natural frequency in the horizontal direction and the V-order natural frequency in the horizontal direction have a difference value, and V is an integer greater than or equal to 1.

2. A Lissajous fiber scanner with a support plate as claimed in claim 1, characterized in that, The difference value satisfies that when the piezoelectric actuating part is driven by the driving signal to perform Lissajous scanning, the vibration of the combination in the horizontal direction and the vibration in the vertical direction do not couple.

3. A Lissajous fiber scanner with a support plate as claimed in claim 1 or 2, characterized in that, The difference value ranges from 10 Hz to 12 KHz.

4. A Lissajous fiber scanner with a support plate as claimed in claim 3, characterized in that, The difference value ranges from 1 KHz to 10 KHz.

5. A Lissajous fiber scanner with a support plate as claimed in claim 1 or 2, characterized in that, The natural frequency of the piezoelectric material cylinder body in the horizontal direction and the same order natural frequency in the vertical direction are the same or close.

6. A Lissajous fiber scanner with a support plate as claimed in claim 5, characterized in that The outer contour of the piezoelectric material cylinder body is square, and a center hole with a square or circular contour is arranged coaxially in the piezoelectric material cylinder body.

7. A Lissajous fiber scanner with a support plate as claimed in claim 5, characterized in that The outer contour of the piezoelectric material cylinder body is circular, and a center hole with a circular or square contour is arranged coaxially in the piezoelectric material cylinder body.

8. A Lissajous fiber scanner with a support plate as claimed in claim 1 or 2, characterized in that, The inner surface and the outer surface of any one of the left side and the right side of the piezoelectric material cylinder body are respectively provided with a corresponding first inner electrode and a first outer electrode, or The inner surface and the outer surface of the left and right sides of the piezoelectric material cylinder body are respectively provided with first inner electrodes and first outer electrodes which are correspondingly matched.

9. A Lissajous fiber scanner with a support plate as claimed in claim 1 or 2, characterized in that, The inner surface and the outer surface of any one of the upper and lower sides of the piezoelectric material cylinder body are respectively provided with second inner electrodes and second outer electrodes which are correspondingly matched, or The inner surface and the outer surface of the upper and lower sides of the piezoelectric material cylinder body are respectively provided with second inner electrodes and second outer electrodes which are correspondingly matched.

10. A Lissajous fiber scanner with a support plate as claimed in claim 1 or 2, characterized in that, When the inner surface and the outer surface of the left and right sides of the piezoelectric material cylinder body are respectively provided with first inner electrodes and first outer electrodes which are correspondingly matched, the first inner electrodes of the left and right sides of the piezoelectric material cylinder body are symmetrically arranged; when the inner surface and the outer surface of the upper and lower sides of the piezoelectric material cylinder body are respectively provided with second inner electrodes and second outer electrodes which are correspondingly matched, the second inner electrodes of the upper and lower sides of the piezoelectric material cylinder body are symmetrically arranged.

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