Drying equipment applied to display panel

Abstract

The utility model relates to drying equipment applied to a display panel. The drying equipment comprises a drying box, an air inlet device, an air exhaust device and an air injection device. A processing chamber is arranged in the drying box, and the drying box is provided with an inlet, an outlet and a box door. The gas inlet device is communicated with the processing chamber, and the gas exhaust device is communicated with the processing chamber. The air injection device is rotationally arranged at the end, close to the inlet and outlet, of the processing cavity and provided with air injection holes, a torsional spring is arranged between the air injection device and the drying box and used for driving the air injection device to rotate to the first position, and the box door selectively abuts against the air injection device and can drive the air injection device to rotate to the second position. The air injection device rotates to the first position, hot air is injected to the outside through the air injection device, and it is avoided that cold air and internal hot air are opposite to each other to form condensate water. And the air injection device rotates to the second position, hot air is injected into the processing cavity through the air injection device, and the temperature of all the areas of the display panel tends to be balanced.

Description

Technical Field

[0001] This utility model relates to the field of display device manufacturing technology, and in particular to a drying device for display panels. Background Technology

[0002] In the manufacturing process of display panels, photolithography is a crucial step. It involves using photolithography to create pixel patterns from vapor-deposited layers on a glass substrate. The photolithography process includes steps such as photoresist coating, exposure, and etching. During photoresist coating, a layer of photoresist is applied to the glass substrate, and then the photoresist is dried to remove the solvent. The remaining photoresist solute is then used in the exposure process. Removing the solvent from the photoresist typically involves two steps: first, vacuuming the glass substrate to remove most of the solvent; second, drying the glass substrate using a drying device to remove the remaining small amount of solvent.

[0003] Reference Figure 1 As shown, a conventional drying device includes a drying chamber 1', a hot air knife 2', and an exhaust pipe 3'. The drying chamber 1' is a rectangular hollow structure, with an inlet / outlet 11' located at one end along its length (X direction in the diagram). The display panel 4' is fed into or out of the drying chamber 1' through the inlet / outlet 11'. During drying, the display panel 4' is placed horizontally inside the drying chamber 1'. The hot air knife 2' is installed at one end of the drying chamber 1' along its width (Y direction in the diagram) and is used to blow hot air toward the display panel 4' to dry the photoresist solvent. The exhaust pipe 3' is installed at the other end of the drying chamber 1' along its width and is used to exhaust the dried hot air.

[0004] The existing repair method has the following shortcomings: The interior of drying chamber 1' contains hot air for drying, while the exterior contains cooler air. When the inlet / outlet 11' changes from closed to open, the cool air quickly enters drying chamber 1'. The clash between the cool air and the hot air easily produces condensation, which adheres to the display panel 4' and affects subsequent exposure quality. Furthermore, the inlet / outlet 11' needs to be frequently opened and closed when the display panel 4' enters and exits drying chamber 1'. The cool air entering drying chamber 1' causes the temperature in the area near the inlet / outlet 11' to be lower than in other areas. This results in a relatively lower drying rate at the end of display panel 4' near the inlet / outlet 11', leading to inconsistent drying effects across different areas of display panel 4'. Utility Model Content

[0005] The purpose of this invention is to provide a drying device for display panels, which has a good overall drying effect and can prevent condensation from adhering to the display panels.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] A drying device for display panels is provided, comprising:

[0008] A drying oven, wherein the drying oven is provided with a processing chamber for drying the display panel, and the drying oven is provided with an inlet and outlet for the display panel to enter and exit and a door for sealing the inlet and outlet;

[0009] An air intake device is connected to the processing chamber and is used to input hot air into the processing chamber.

[0010] An exhaust device, which is connected to the processing chamber, is used to exhaust hot air from the processing chamber.

[0011] A jetting device is rotatably disposed within the processing chamber near one end of the inlet / outlet. The jetting device is provided with jet nozzles for spraying hot air. A torsion spring is provided between the jetting device and the drying chamber. The torsion spring is used to drive the jetting device to rotate to a first position and to make the jet nozzles face the outside of the processing chamber. The chamber door selectively abuts against the jetting device. The chamber door can drive the jetting device to rotate to a second position and to make the jet nozzles face the inside of the processing chamber.

[0012] As a preferred embodiment of a drying device for display panels, the jetting device includes a jetting pipe located at the top of the processing chamber, the length of the jetting pipe extending along the length direction of the inlet and outlet, and the jetting holes disposed on the jetting pipe.

[0013] As a preferred embodiment of a drying device for display panels, the jet nozzle is an elongated nozzle, the length of which extends along the length direction of the jet pipe.

[0014] As a preferred embodiment of a drying device for display panels, there are multiple air jet holes, which are spaced apart along the length of the air jet pipe.

[0015] As a preferred embodiment of a drying device for display panels, the plurality of air jets are divided into at least two air jet groups, each air jet group including a plurality of air jets spaced apart along the length of the air jet tube, and all the air jet groups are spaced apart along the circumferential direction of the air jet tube.

[0016] As a preferred embodiment of a drying device for display panels, the jet device further includes a rack and a toothed ring meshing with the rack, the toothed ring being coaxially mounted on the jet pipe, and one end of the rack extending to the outside of the inlet / outlet and for abutting against the cabinet door.

[0017] As a preferred embodiment of a drying device for display panels, the jetting device is connected to the air intake device, and when the jetting device moves to the second position, the jetting nozzle faces the bottom of the processing chamber.

[0018] As a preferred embodiment of a drying device for display panels, the air intake device includes a heater, an air intake pipe, and a hot air knife. The heater is installed outside the drying chamber, and the hot air knife is installed on the inner wall of the processing chamber. The hot air knife is used to blow hot air toward the display panel, and the heater and the hot air knife are connected through the air intake pipe.

[0019] As a preferred embodiment of a drying device for display panels, the exhaust device includes a plurality of exhaust pipes, which are spaced apart on the side of the processing chamber away from the hot air knife, with one of the exhaust pipes being close to the inlet and outlet.

[0020] As a preferred embodiment of a drying device for display panels, there are multiple drying chambers stacked vertically.

[0021] The advantages of this utility model compared to the prior art are:

[0022] This invention relates to a drying device for display panels. By installing jet sprayers at the inlet and outlet of the drying chamber, when the chamber door is opened, the jet sprayers rotate to a first position, blowing hot air outwards to prevent cooler air from entering the processing chamber. This avoids the formation of condensation due to the interaction of cooler air and hot air, thus preventing condensation from affecting the subsequent exposure quality of the display panel. When the chamber door is closed, the jet sprayers rotate to a second position, blowing hot air into the processing chamber to raise the temperature near the inlet and outlet areas. This promotes temperature equilibrium across the display panel, ensuring a consistent and effective drying process. Attached Figure Description

[0023] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments.

[0024] Figure 1 This is a schematic diagram of a drying device in the prior art.

[0025] Figure 2 This is a schematic diagram of a drying device applied to a display panel according to an embodiment of the present invention.

[0026] Figure 3 This is a cross-sectional view of the drying oven according to an embodiment of the present invention.

[0027] Figure 4 This is a schematic diagram of the jet device according to an embodiment of the present invention.

[0028] Figure 5 This is a cross-sectional view of the jet pipe in the first position according to an embodiment of the present invention.

[0029] Figure 6 This is a cross-sectional view of the jet pipe in the second position according to an embodiment of the present invention.

[0030] Figure 7 This is a cross-sectional view of the jet device according to an embodiment of the present invention.

[0031] Figure 8 This is a schematic diagram of a jet device according to another embodiment of the present invention.

[0032] Figure 1 middle:

[0033] 1′ Drying oven; 11′ Inlet and outlet; 2′ Hot air knife; 3′ Exhaust pipe; 4′ Display panel.

[0034] Figures 2 to 8 middle:

[0035] 1. Drying oven; 11. Oven body; 12. Oven door; 13. Processing chamber; 14. Inlet / outlet; 15. Support rod; 2. Air intake device; 21. Heater; 22. Air intake pipe; 23. Hot air knife; 24. Air pump; 3. Exhaust device; 31. Exhaust pipe; 4. Jet device; 41. Jet pipe; 411. Jet orifice; 42. Air delivery pipe; 43. Torsion spring; 44. Rack; 45. Gear ring; 46. Mounting shaft; 5. Detection device. Detailed Implementation

[0036] The advantages and features of this invention, as well as methods of implementing them, will become apparent from the following detailed description of the embodiments in conjunction with the accompanying drawings. However, this invention is not limited to the embodiments disclosed below, but can be implemented in various different forms. These embodiments are provided merely to complete the disclosure of this invention and to enable those skilled in the art to fully understand its scope, which is defined only by the scope of the claims. The same reference numerals denote the same constituent elements throughout the specification.

[0037] The present invention will now be described in detail with reference to the accompanying drawings.

[0038] like Figures 2 to 7As shown, a drying apparatus (hereinafter referred to as the drying apparatus) for display panels is provided for drying display panels coated with photoresist. After the display panel is coated with photoresist, it first undergoes a vacuum drying process to remove most of the photoresist solvent; then, it undergoes a second drying process using the same drying apparatus to remove the remaining small portion of the photoresist solvent. The drying apparatus includes a drying chamber 1, an air inlet device 2, an exhaust device 3, and an air jet device 4. The drying chamber 1 provides space for the drying process. The drying chamber 1 has a rectangular hollow structure, with its length direction defined as the X direction, width direction as the Y direction, and height direction as the Z direction. A processing chamber 13 is provided inside the drying chamber 1, where the display panel undergoes drying. The drying chamber 1 is provided with an inlet / outlet 14 and a door 12. The inlet / outlet 14 is located at one end along the length of the drying chamber 1, through which the display panel enters and exits the processing chamber 13. The door 12 is installed at the end of the drying chamber 1 corresponding to the inlet / outlet 14, and is rotatably connected to the drying chamber 1. The chamber door 12 is used to block the inlet and outlet 14. When the chamber door 12 is open, the display panel can enter and exit the processing chamber 13 through the inlet and outlet 14. When the chamber door 12 is closed, the chamber door 12 blocks the inlet and outlet 14, and the processing chamber 13 is in a sealed state. The air intake device 2 is installed on the drying chamber 1 and is used to supply hot air to the drying chamber 1 to dry the residual photoresist solvent on the display panel. The air intake device 2 is connected to the processing chamber 13 and can input hot air into the processing chamber 13. The exhaust device 3 is installed on the drying chamber 1 and is used to exhaust the hot air after drying. The exhaust device 3 is connected to the processing chamber 13 so that the hot air in the processing chamber 13 can be discharged through the exhaust device 3. The jet device 4 is installed at the inlet and outlet 14 of the drying chamber 1 and is used to spray hot air. The jet device 4 is rotatably set in the processing chamber 13 near the end of the inlet and outlet 14. The jet device 4 is provided with jet holes 411 and sprays hot air through the jet holes 411. This can also be understood as follows: the jet device 4 is installed at the inlet / outlet 14, and is located inside the inlet / outlet 14. A torsion spring 43 is provided between the jet device 4 and the drying chamber 1, and the torsion spring 43 is used to drive the jet device 4 to rotate to the first position. When the jet device 4 is in the first position, the jet nozzle 411 faces the outside of the processing chamber 13, that is, the jet nozzle 411 blows hot air towards the outside of the processing chamber 13 through the inlet / outlet 14, and the hot air blown out by the jet device 4 prevents external gas from entering the processing chamber 13. The chamber door 12 selectively abuts against the jet device 4, that is, when the chamber door 12 is closed, the chamber door 12 covers the inlet / outlet 14 and allows the chamber door 12 to abut against the jet device 4. The chamber door 12 drives the jet device 4 to rotate to the second position, at which time the jet nozzle 411 faces the inside of the processing chamber 13, that is, the jet nozzle 411 blows hot air into the processing chamber 13.

[0039] Understandably, during the drying process, the display panel enters the processing chamber 13 through inlet / outlet 14, and then the inlet / outlet 14 is closed. The display panel is placed horizontally inside the processing chamber 13. Hot air is introduced into the processing chamber 13 through the air intake device 2 to dry the photoresist solvent on the display panel. The hot air is discharged through the exhaust device 3 to maintain the air pressure balance inside the processing chamber 13. After the drying process is completed, the inlet / outlet 14 is opened, and the display panel is then removed from the processing chamber 13 by a robotic arm. When the inlet / outlet 14 is open, cooler external gas will enter the processing chamber 13 through the inlet / outlet 14. When the cooler external gas collides with the warmer internal gas, condensation water mist is easily formed. In this embodiment, by setting an air jet device 4 at the position of the inlet / outlet 14, hot air is blown towards the outside of the drying chamber 1 using the air jet device 4, forming an air wall to block the cooler external gas from entering the processing chamber 13, thereby preventing condensation water mist from adhering to the display panel and affecting the subsequent exposure quality. Furthermore, after the door 12 is opened, the temperature of the area near the inlet / outlet 14 in the processing chamber 13 decreases. After a new display panel is sent into the processing chamber 13, the door 12 is immediately closed. Hot air is blown into the interior of the processing chamber 13 by the jet device 4. This hot air can quickly raise the temperature of the area near the inlet / outlet 14, thereby promoting temperature equilibrium in all areas of the display panel and ensuring that the drying effect is the same in all areas of the display panel.

[0040] Specifically, the drying oven 1 includes a body 11, a door 12, and several support rods 15. The body 11 is the main part of the drying oven 1, and the inlet / outlet 14 is located at one end of the body 11 along its length (X direction in the figure). The door 12 is installed below the inlet / outlet 14, and the jetting device 4 is installed above the inlet / outlet 14. The door 12 is rotatably mounted on the body 11, and the connection point between the door 12 and the body 11 is located below the inlet / outlet 14. The bottom end of the door 12 is used for rotatable connection with the body 11. Several support rods 15 are arranged in an array. One end of each support rod 15 is fixed to the bottom of the processing chamber 13, and the other end is used to support the display panel. By setting the support rods 15 to place the display panel, the display panel is suspended in the processing chamber 13, making it convenient to place and remove the display panel.

[0041] Specifically, the jet device 4 includes a jet pipe 41, an air supply pipe 42, and a mounting shaft 46. The jet pipe 41 is a circular pipe structure, and its length direction (i.e., axial direction) is parallel to the width direction of the drying chamber 1. The jet pipe 41 is installed on the top of the processing chamber 13, and mounting shafts 46 are respectively provided at both ends of the jet pipe 41. The two ends of the jet pipe 41 are rotatably connected to the two side walls of the processing chamber 13 through the mounting shafts 46. The jet pipe 41 is provided with multiple jet holes 411, which are spaced apart along the length direction of the jet pipe 41. The air supply pipe 42 is used to input hot air into the jet pipe 41. One end of the air supply pipe 42 is connected to the jet pipe 41, and the other end is connected to the air intake device 2, that is, the jet device 4 and the air intake device 2 share a common air source.

[0042] Specifically, the multiple jet holes 411 are divided into at least two jet hole groups, each jet hole group including multiple jet holes 411. All jet hole groups are arranged at intervals along the circumferential direction of the jet pipe 41. In this embodiment, there are two jet hole groups, and the two jet hole groups are arranged at intervals along the circumferential direction of the jet pipe 41. The multiple jet holes 411 in each jet hole group are arranged at intervals along the length direction of the jet pipe 41. The jet holes 411 in adjacent jet hole groups are staggered. This structure allows the hot air blown by the jet device 4 to be more evenly distributed within the length direction of the inlet and outlet 14, improving the blocking effect of hot air on external cold air.

[0043] Specifically, the jet device 4 also includes a rack 44 and a toothed ring 45. The rack 44 is horizontally mounted on the housing 11. Correspondingly, a base for mounting the rack 44 is provided inside the housing 11, and the rack 44 is slidably connected to the base. The toothed ring 45 is a circular ring structure, and the toothed ring 45 is sleeved on the mounting shaft 46 to achieve coaxial mounting between the toothed ring 45 and the jet pipe 41. In some embodiments, the toothed ring 45 can also be directly mounted on the end of the jet pipe 41. The rack 44 meshes with the toothed ring 45, and one end of the rack 44 extends to the outside of the inlet / outlet 14. The end of the rack 44 located outside the inlet / outlet 14 is used to abut against the housing door 12. The rack 44 and the toothed ring 45 form a transmission mechanism, which serves to transmit power between the housing door 12 and the jet pipe 41. (Refer to...) Figure 7 As shown, when the chamber door 12 is closed, the end of the chamber door 12 abuts against the rack 44, and the chamber door 12 drives the rack 44 to move to the left. Under the action of the transmission mechanism, the jet pipe 41 rotates clockwise, and the jet hole 411 rotates to the lower part of the jet pipe 41, so that the jet pipe 41 blows hot air downward. When the chamber door 12 is opened, the chamber door 12 separates from the rack 44. Under the driving action of the torsion spring 43, the jet pipe 41 rotates counterclockwise, and the jet hole 411 rotates to the side of the jet pipe 41 facing the inlet and outlet 14, so that the jet pipe 41 blows hot air to the outside of the drying chamber 1.

[0044] Specifically, a detection device 5 is installed on the cavity wall of the processing chamber 13 near the inlet / outlet 14. The detection device 5 is a temperature sensor to detect the gas temperature in the inlet / outlet 14 area. By detecting the temperature in the inlet / outlet 14 area, it is ensured that the gas temperature in this area meets the process requirements, and to avoid affecting the drying effect of the display panel or producing condensation due to malfunction of the jetting device 4.

[0045] Specifically, the air intake device 2 includes a heater 21, an air intake pipe 22, an air pump 24, and a hot air knife 23. The heater 21 is installed outside the drying chamber 1 and has an air inlet and an air outlet. An electric heating element is installed inside the heater 21. Clean gas from outside enters the heater 21 through the air inlet, and the electric heating element heats the gas to form hot air, which is then output through the air outlet. The hot air knife 23 is a long strip structure. The hot air knife 23 is existing technology, and its structure and working principle will not be described in detail here. The hot air knife 23 is installed on the inner wall of the processing chamber 13, and its length extends along the length of the drying chamber 1. The hot air blown by the hot air knife 23 can cover the length of the display panel. During the drying process, the hot air knife 23 blows hot air towards the display panel. The heater 21 and the hot air knife 23 are connected by the air intake pipe 22. The air pump 24 is installed on the air intake pipe 22 and is used to provide power for the delivery of hot air.

[0046] Specifically, the exhaust device 3 includes a recovery assembly and multiple exhaust pipes 31. The recovery assembly includes existing gas filtration and heat dissipation equipment to filter and cool the hot air discharged from the drying chamber 1. The structure of the recovery assembly will not be described in detail here. Multiple exhaust pipes 31 are spaced apart along the length of the drying chamber 1, and the exhaust pipes 31 are installed on the side of the processing chamber 13 opposite to the hot air knife 23. This structure allows the hot air to flow over the surface of the display panel during entry and exit from the processing chamber 13, ensuring drying efficiency. One end of the exhaust pipe 31 communicates with the processing chamber 13, and the other end communicates with the recovery assembly. One of the exhaust pipes 31 is located near the inlet / outlet 14. This structure allows some of the hot air in the processing chamber 13 to flow towards the inlet / outlet 14, thereby enhancing the ability of the inlet / outlet 14 area to block external gases.

[0047] Specifically, the drying equipment includes multiple drying chambers 1, which are stacked vertically. Each drying chamber 1 has the same structure, that is, each drying chamber 1 is equipped with an air intake device 2, an exhaust device 3, and a jet device 4. By setting up multiple drying chambers 1, multiple display panels can be dried simultaneously, thereby improving processing efficiency.

[0048] In this embodiment, the jet pipe 41 rotates under the driving action of the torsion spring 43 and the chamber door 12. When the chamber door 12 is open, the jet pipe 41 is in a free state, and at this time, the jet pipe 41 is in the first position. When the jet pipe 41 is in the first position, the jet hole 411 faces the outside of the processing chamber 13. When hot air is sprayed, the hot air is sprayed out from the jet hole 411, and the flow direction of the hot air is inclined downward. That is, the hot air is sprayed downward from above the inlet and outlet 14, and the flow direction of the hot air is inclined towards the outside of the inlet and outlet 14, so that the wind wall formed by the hot air can block the external cold air from entering the processing chamber 13. When the chamber door 12 is closed, the chamber door 12 abuts against the rack 44, and the rack 44 and the toothed ring 45 drive the jet pipe 41 to rotate to the second position, and give the torsion spring 43 elastic potential energy. When the jet pipe 41 is in the second position, the jet hole 411 faces downward. When hot air is blown out, the hot air is ejected from the jet hole 411 and flows downward. This part of the hot air can dry the area of ​​the display panel near the inlet and outlet 14.

[0049] In another embodiment, reference is made to Figure 8 As shown, the jet orifice 411 is an elongated orifice, and its length extends along the length direction of the jet pipe 41. The length of the jet orifice 411 is greater than or equal to the length of the inlet and outlet 14, so that the hot air ejected from the jet orifice 411 can cover the entire length range of the inlet and outlet 14.

[0050] Although embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but can be made in various forms, and those skilled in the art will understand that the present invention can be implemented in other specific forms without changing the technical spirit or essential characteristics of the present invention. Therefore, it should be understood that the above embodiments are exemplary in all respects and not restrictive.

Claims

1. A drying apparatus applied to a display panel, characterized by, The application relates to a drying box for drying display panels, which comprises a processing chamber for drying the display panels, an inlet and outlet for the display panels, a box door for sealing the inlet and outlet, an air inlet device for inputting hot air into the processing chamber, an air outlet device for discharging hot air from the processing chamber, and a jet device. The jet device is rotatably arranged at one end of the processing chamber close to the inlet and outlet, and is provided with jet holes for blowing hot air. The jet device is provided with a torsion spring between the drying box and the jet device, which drives the jet device to rotate to a first position and makes the jet holes face the outside of the processing chamber. The box door selectively abuts against the jet device, and the box door can drive the jet device to rotate to a second position and make the jet holes face the inside of the processing chamber. The jet device comprises a jet pipe, which is arranged at the top of the processing chamber and extends along the length direction of the inlet and outlet.

2. The drying apparatus for a display panel according to claim 1, wherein The jet holes are long holes extending along the length direction of the jet pipe.

3. The drying apparatus for a display panel according to claim 2, wherein The jet holes are arranged in multiple groups, each group comprising multiple jet holes arranged along the length direction of the jet pipe, and all the groups are arranged along the circumferential direction of the jet pipe.

4. The drying apparatus for a display panel according to claim 2, wherein The jet device further comprises a rack and a pinion ring engaging with the rack, the pinion ring is coaxially arranged on the jet pipe, and one end of the rack extends to the outside of the inlet and outlet and is used for abutting against the box door.

5. The drying apparatus for a display panel according to claim 4, wherein The jet device communicates with the air inlet device, and when the jet device moves to the second position, the jet holes face the bottom of the processing chamber.

6. The drying apparatus for a display panel according to claim 2, wherein The air inlet device comprises a heater, an air inlet pipe and a hot air knife, the heater is arranged outside the drying box, the hot air knife is arranged on the inner side wall of the processing chamber and is used for blowing hot air towards the display panel, and the heater communicates with the hot air knife through the air inlet pipe.

7. The drying apparatus for a display panel according to any one of claims 1 to 6, wherein The air outlet device comprises multiple air outlet pipes, which are arranged on the side of the processing chamber away from the hot air knife, and one of the air outlet pipes is close to the inlet and outlet.

8. The drying apparatus for a display panel according to any one of claims 1 to 6, wherein The drying box is arranged in multiple layers in the vertical direction.

9. The drying apparatus for a display panel according to claim 8, wherein ​ 10. The drying apparatus for a display panel according to any one of claims 1 to 6, wherein ​

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