Spray header for coating machine

Abstract

The utility model relates to a spray header for a coating machine, which comprises a partition plate group and a main body with a planar outlet end, a plurality of independent first cavities are arranged in the main body, and each first cavity is provided with a plurality of outlets and at least one inlet; the outlet of each first cavity forms air outlet holes which are uniformly and linearly arranged at the outlet end through an air outlet pipeline, and the air outlet holes of the adjacent first cavities are arranged at equal intervals, so that a rectangular array is formed; air inlet pipelines with the number corresponding to that of the first cavities are further arranged in the main body, the air inlet pipelines are communicated with inlets of the first cavities in a one-to-one correspondence mode, and an air inlet connector is formed outside the main body; the partition plate set is detachably fixed to the outlet end and composed of at least two partition plates which are the same in shape and stacked. The partition plate is provided with a long-strip-shaped slit corresponding to the air outlet hole of each first cavity. The spraying head has the advantages that the spraying openings of the spraying head are arranged in a rectangular array, can directly face workpieces such as battery pieces, are consistent with the side edges of the battery pieces, and can directly face spraying.

Description

Technical Field

[0001] This utility model relates to a spray head for coating machines used in photovoltaic silicon wafers / cells in the photovoltaic industry and other industries where side insulation layers require insulating spraying. Background Technology

[0002] Experiments have verified that applying an insulating layer to the sides of half or multiple photovoltaic silicon wafers / cells can effectively improve the efficiency of the sliced ​​cells. This not only enhances the performance of the cells but also allows cells nearing their grade limits to be sold at a higher grade.

[0003] Currently, the mainstream spray head on the market adopts an arc-shaped design. The special gas is sprayed through the gap in the middle of the arc onto the top of the carrier box, and sprayed on the half-side of the silicon wafer / cell.

[0004] Disadvantages of this shower head:

[0005] The supporting equipment needs to be designed as a turntable;

[0006] The spraying direction can only be from top to bottom, and spraying can only be done on one side.

[0007] Therefore, it is necessary to improve and optimize the existing spray heads for coating machines so that they can better meet user needs. Utility Model Content

[0008] The purpose of this utility model embodiment is to address the shortcomings of the existing technology structure by proposing a spray head for a coating machine to solve the defects in the existing technology.

[0009] To achieve the above-mentioned utility model objectives, the spray head for a coating machine proposed in this utility model embodiment is implemented through the following technical solution:

[0010] A spray head for a coating machine, characterized in that: the spray head includes a partition assembly and a main body with a flat outlet end; the main body has a plurality of independent first cavities, each first cavity having a plurality of outlets and at least one inlet; each outlet of the first cavity has uniformly arranged straight air holes at its outlet end through an air outlet pipe, and the air holes of adjacent first cavities are equally spaced, thereby forming a rectangular array; the main body also has an air inlet pipe corresponding to the number of first cavities, the air inlet pipes being connected one-to-one with the inlets of the first cavities, and forming an air inlet interface on the outside of the main body; the partition assembly is detachably fixed to the outlet end, and is composed of at least two identical and stacked partitions; each partition forms a long strip slit corresponding to the air hole of each first cavity.

[0011] The main body is provided with several interconnected second cavities, each with several inlets; each inlet of the second cavity has a uniformly arranged straight air extraction hole at its outlet end through a sub-extraction pipe, and the air extraction hole of each second cavity is located between the air outlet holes of two adjacent first cavities and is equally spaced; the main body is also provided with a main air extraction pipe, which connects to the second cavities and forms an air extraction interface on the outside of the main body; the partition plate forms a long strip slit corresponding to the air extraction hole of each second cavity.

[0012] The air extraction holes and air outlet holes are arranged in a rectangular array.

[0013] Both the first cavity and the second cavity are elongated and arranged evenly and parallel to the outlet end.

[0014] The main body is a rectangular metal block. The first cavity, the second cavity, the air outlet pipe, the air inlet pipe, the main exhaust pipe, and the sub-exhaust pipe are all formed on the metal block through deep holes. A connecting pipe perpendicular to all the second cavities is also formed on the metal block through deep holes. The ends of the connecting pipe, the first cavity, and the second cavity are all sealed. The air outlet pipe and the air inlet pipe are blind holes perpendicular to the first cavity. The sub-exhaust pipe is a blind hole perpendicular to the second cavity. The main exhaust pipe is a blind hole perpendicular to the connecting pipe.

[0015] The central axes of all the first cavities lie on a virtual plane, and the central axes of all the second cavities lie on another virtual plane parallel to the central axes of the first cavities.

[0016] The connecting pipe, the first cavity, and the second cavity are all through holes, and their ends are sealed with plugs.

[0017] The partition is a rectangular perforated metal plate.

[0018] The metal block has a screw hole at its outlet end, and the partitions are stacked one by one and fixed to the screw hole at the outlet end by bolts to form a partition group.

[0019] Compared with the prior art, the beneficial effects of this utility model are:

[0020] 1. The spray nozzles of the spray head are set as a rectangular array, which can be directly aimed at workpieces such as battery cells. They are aligned with the side of the battery cell and can be sprayed directly.

[0021] 2. The spray nozzles of the spray head can be adjusted in distance from the workpiece by adding or removing baffles, thus adapting to the size of the material box and having strong compatibility;

[0022] 3. The spray head can be installed on both sides of the production line, thus enabling double-sided spraying, suitable for single-sided and double-sided coating. Attached Figure Description

[0023] The above features and advantages of the present invention will become clearer and easier to understand from the following description of exemplary embodiments thereof in conjunction with the accompanying drawings.

[0024] Figure 1 This is a three-dimensional structural diagram (I) of the spray head according to an embodiment of the present invention;

[0025] Figure 2 This is a schematic diagram (II) of the three-dimensional structure of the spray head according to an embodiment of the present invention;

[0026] Figure 3 This is a top view of the spray head according to an embodiment of the present utility model;

[0027] Figure 4 for Figure 3 Sectional view along axis AA;

[0028] Figure 5 for Figure 3 CC-direction sectional view;

[0029] Figure 6 This is a front view of the spray head according to an embodiment of the present utility model;

[0030] Figure 7 for Figure 6 BB-direction sectional view;

[0031] Figure 8 for Figure 6 DD section view;

[0032] Figure 9 for Figure 6 EE-directed sectional view;

[0033] Figure 10 This is a three-dimensional structural diagram of the spray head after the partition assembly is removed, according to an embodiment of the present invention.

[0034] Figure 11 This is a rear view of the spray head after the partition assembly has been removed, according to an embodiment of the present invention.

[0035] Figure 12 for Figure 11 FF section view. Detailed Implementation

[0036] The following specific embodiments illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0037] The terms "front," "rear," "left," "right," "inner," and "outer" used in this specification are merely for clarity of description and are not intended to limit the scope of implementation of this utility model. Any changes or adjustments to their relative relationships, without substantially altering the technical content, shall also be considered within the scope of implementation of this utility model.

[0038] In the description of the following embodiments, unless otherwise expressly specified and limited, the term "connection" and other such terms should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral part; it can be a mechanical connection or an indirect connection through an intermediate medium; it can be the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0039] See Figure 1-12 As shown in the figure, this utility model embodiment proposes a spray head for a coating machine, the spray head including a partition group 2 and a main body 1.

[0040] The main body 1 has several independent first cavities 11 and several interconnected second cavities 12. The first cavities 11 and the second cavities 12 are both elongated and are evenly arranged parallel to the outlet end of the main body 1.

[0041] The first cavity 11 is provided with several outlets and one inlet; each outlet of the first cavity 11 is formed by a uniformly arranged straight air outlet 131 at the outlet end of the main body 1 through an air outlet pipe 13; and the air outlets 131 of adjacent first cavities 11 are arranged at equal intervals.

[0042] The second cavity 12 is provided with several inlets; each inlet of the second cavity 12 forms a uniformly arranged straight air extraction hole 141 at the outlet end of the main body 1 through a sub-extraction pipe 14. The air extraction hole 141 of each second cavity 12 is located between the air outlet holes 131 of two adjacent first cavities 11 and is set at equal intervals.

[0043] Thus, the air outlet 131 and the air extraction port 141 form a rectangular array.

[0044] In addition, the main body is also provided with an air intake pipe 15 corresponding to the number of first cavities 11. The air intake pipe 15 is connected to the inlet of the first cavity 11 and forms various air intake interfaces 18 on the outside of the main body 1.

[0045] In addition, the main body is equipped with a main exhaust pipe 16, which connects to each of the second cavities 12 and forms an exhaust port 19 on the outside of the main body 1.

[0046] See Figure 3-9 As shown, in a preferred embodiment, the main body 1 is a rectangular metal block. The first cavity 11, the second cavity 12, the exhaust pipe 13, the intake pipe 15, the main exhaust pipe 16, and the sub-exhaust pipe 14 are all formed on the metal block by deep drilling. A connecting pipe 17 perpendicular to the second cavity 12 is also formed on the metal block by deep drilling.

[0047] For ease of description, the side of the main body 91 with the air intake port 918 is shown below as the front, which is used to describe the layout of the various pipes. For details, please refer to the main body front view. Figure 12 .

[0048] The first cavity 911 and the second cavity 912 are parallel to the front of the main body 91 and are arranged vertically;

[0049] The connecting pipe 917 is parallel to the front of the main body 91 and is arranged horizontally;

[0050] The exhaust pipe 913, the intake pipe 915, the sub-extraction pipe 914 and the main extraction pipe 916 are all arranged perpendicular to the front of the main body 91.

[0051] The connecting pipe 17, the first cavity 11, and the second cavity 12 are all through holes, and their ends are sealed with plugs. In order to make the air outlet 131 and the air extraction port 141 closely arranged without reducing the diameter of the first cavity 11 and the second cavity 12, the first cavity 11 and the second cavity 12 can be arranged in two layers. That is, the central axis of all the first cavities 11 is located on a virtual vertical plane, and the central axis of all the second cavities 12 is located on another virtual vertical plane parallel to the central axis of the first cavity.

[0052] The exhaust pipe 13 and the intake pipe 15 are blind holes vertically connected to the first cavity 11, with the intake pipe 15 having an intake port 18 fixed to its outer end. The sub-extraction pipe 14 is a blind hole vertically connected to the second cavity 12. The main extraction pipe 16 is a blind hole vertically connected to the connecting pipe 17, with an extraction port 19 fixed to its outer end.

[0053] The partition assembly 2 is detachably fixed to the outlet end of the main body 1, and consists of at least two stacked, grid-like partitions 21 of the same shape. Specifically, the outlet end of the metal block of the main body 1 is provided with screw holes, and the partitions 21 are rectangular perforated metal plates. These partitions 21 are stacked one by one and fixed to the screw holes at the outlet end with bolts to form the partition assembly 2. By adjusting the number of partitions 21 in the partition assembly 2, the thickness of the partition assembly 2 can be adjusted, thereby adjusting the distance from the workpiece. This allows for adaptation to the size of the material box, providing strong compatibility and enabling close-range coating processes, reducing the waste of process gases during the coating process.

[0054] The partition 21 has a long strip slit corresponding to the air outlet 131 of each first cavity 11, and a long strip slit corresponding to the air extraction hole 141 of each second cavity 12.

[0055] When the aforementioned spray head is applied to the ALD process (using alternating gaseous precursor molecule reactions, where each precursor molecule undergoes a chemical reaction on the surface to complete a layer deposition), its gas inlet 18 can be divided into three types: N2, TMA, and H2O. These four connectors constitute a spray port group, and multiple spray port groups can be stacked as needed. All special gas connectors use VCR connectors, and vacuum ports use KF connectors to ensure a tight seal and prevent leakage. Of course, the type and combination of process gases can also be changed according to process requirements. The aforementioned baffle assembly method enables the isolation of the spray gases.

[0056] As can be seen from the above application, in this technical solution, terms such as "inlet pipe", "outlet pipe", "inlet port" and "outlet port" are not limited to the passage of gas only; other liquids such as water can also pass through.

[0057] Therefore, the advantages of the above technical solution are:

[0058] 1. The pipeline of the spray head is drilled with deep holes, and the air lines are isolated from each other to avoid cross-contamination;

[0059] 2. The intake pipe of the special gas uses a large hole, and the exhaust pipe uses a small hole to form a jet airflow;

[0060] 3. A baffle is used in front of the spray head to isolate the spray gases from each other. The distance from the workpiece can be adjusted by adding or removing baffles. This allows it to be adapted to the size of the material box, which not only has strong compatibility, but also enables close-range coating processes and reduces the waste of process gases during the coating process.

[0061] 4. The spray heads are arranged in multiple groups, with N2, TMA, N2 and H2O as a group. The number of groups and the type of process gas can be freely adjusted according to the client's process requirements.

[0062] 5. The spray head is an independent unit that can be installed on both sides of the production line, thus enabling double-sided spraying and adapting to both double-piece and multi-piece applications.

[0063] 6. The gas passage can be monitored by superimposed flow meters, and the flow rate of each group of process gases can be adjusted in a targeted manner according to process requirements.

[0064] The present invention has been described in detail above through embodiments. However, those skilled in the art will understand that the above embodiments are only one of the preferred embodiments of the present invention. Due to space limitations, not all embodiments can be listed here. Any implementation that can embody the technical solution of the claims of the present invention is within the protection scope of the present invention.

[0065] It should be noted that the above content is a further detailed description of the present utility model in conjunction with specific embodiments, and it should not be considered that the specific embodiments of the present utility model are limited to this. Under the guidance of the above embodiments, those skilled in the art can make various improvements and modifications based on the above embodiments, and these improvements or modifications fall within the protection scope of the present utility model.

Claims

1. A shower head for a coating machine, characterized in that: The shower head comprises a baffle group and a main body with a flat outlet end, the main body is internally provided with a plurality of independent first cavities, the first cavities are provided with a plurality of outlets and at least one inlet; the outlets of each first cavity form uniformly linearly arranged gas outlets at the outlet end through gas outlet pipelines, and the gas outlets of adjacent first cavities are arranged at equal intervals, thereby forming a rectangular array; the main body is further internally provided with gas inlet pipelines corresponding to the number of first cavities, the gas inlet pipelines are in one-to-one correspondence with the inlets of the first cavities and are in communication with the inlets, and a gas inlet interface is formed outside the main body; the baffle group is detachably fixed at the outlet end and is composed of at least two baffles with the same shape and stacked; the baffle forms a long strip-shaped slit corresponding to the gas outlet of each first cavity.

2. The showerhead for a coating machine of claim 1, wherein: The main body is provided with a plurality of second cavities in communication with each other, and the second cavities are provided with a plurality of inlets; the inlets of each second cavity form uniformly linearly arranged gas extraction holes at the outlet end through sub-extraction pipelines, and the gas extraction holes of each second cavity are located between the gas outlets of adjacent first cavities and are arranged at equal intervals; the main body is further internally provided with a main extraction pipeline, the main extraction pipeline is in communication with the second cavities and forms a gas extraction interface outside the main body; the baffle forms a long strip-shaped slit corresponding to the gas extraction hole of each second cavity.

3. The showerhead of claim 2, wherein: The gas extraction holes and the gas outlets form a rectangular array as a whole.

4. The showerhead of claim 3, wherein: The first cavities and the second cavities are long strips and are uniformly and parallelly arranged to the outlet end.

5. The showerhead of claim 4, wherein: The main body is a cuboid-shaped metal block, the first cavities, the second cavities, the gas outlet pipelines, the gas inlet pipelines, the main extraction pipeline and the sub-extraction pipelines are formed on the metal block through deep hole drilling; the metal block is further provided with a communication pipeline perpendicularly intersecting all the second cavities through deep hole drilling, and the communication pipeline, the end of the first cavity and the end of the second cavity are all sealed; the gas outlet pipeline and the gas inlet pipeline are blind holes perpendicularly connected to the first cavity; the sub-extraction pipeline is a blind hole perpendicularly connected to the second cavity; and the main extraction pipeline is a blind hole perpendicularly connected to the communication pipeline.

6. The showerhead of claim 5, wherein: The central axes of all the first cavities are located on a virtual plane, and the central axes of all the second cavities are located on another virtual plane parallel to the central axes of the first cavities.

7. The showerhead of claim 6, wherein: The communication pipeline, the first cavity and the second cavity are all through holes, and the ends of both ends are sealed by plugs.

8. The showerhead of claim 7, wherein: The baffle is a long rectangular open metal plate.

9. The showerhead of claim 8, wherein: The outlet end of the metal block is provided with screw holes, and the baffles are one-by-one stacked and fixed to the screw holes of the outlet end of the metal block through bolts, thereby forming the baffle group.

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