High-energy linear light spot detection device

Abstract

The utility model provides a high-energy linear light spot detection device. The high-energy linear light spot detection device comprises a base; the linear driver is arranged on the base; the light spot analyzer is arranged on the linear driver and is driven by the linear driver to move along a horizontal first direction so as to scan the linear light spot, and the length direction of the linear light spot is parallel to the first direction; and the energy absorption piece is arranged on an irradiation path of the linear light spot and is positioned below the light spot analyzer. The high-energy linear light spot detection device provided by the embodiment of the utility model can prevent redundant light spots from damaging the lower part of equipment.

Description

Technical Field

[0001] This application belongs to the field of laser processing technology, and more specifically, relates to a high-energy linear spot detection device. Background Technology

[0002] High-energy linear beam detection devices are typically used in mechanisms below the optical exit within equipment. The principle is that when the linear beam illuminates the beam quality analyzer, the quality of the focused linear light is analyzed by the movement of the analyzer. Excess high-energy linear beams can directly illuminate the bottom platform or other mechanisms of the equipment, causing damage. Utility Model Content

[0003] This application provides a high-energy linear light spot detection device that can prevent excess light spots from causing damage to the area below the equipment.

[0004] The technical solution adopted in this application embodiment is: to provide a high-energy linear spot detection device, including:

[0005] Base;

[0006] A linear actuator is mounted on the base;

[0007] A spot analyzer is mounted on the linear actuator and is driven by the linear actuator to move along a horizontal first direction to scan the linear spot, the length direction of the linear spot being parallel to the first direction;

[0008] An energy-absorbing element is disposed on the irradiation path of the linear light spot and located below the light spot analyzer.

[0009] Furthermore, the energy-absorbing component has a coolant channel inside, one end of which is used to connect to the inlet pipe and the other end is used to connect to the outlet pipe.

[0010] Furthermore, the energy-absorbing element extends along the first direction, and the top of the energy-absorbing element begins to have a groove extending along the first direction, and the linear light spot irradiates the groove.

[0011] Furthermore, the distance between the two side walls of the groove gradually decreases from top to bottom, forming a V-shape.

[0012] Furthermore, the extension direction of the coolant channel is parallel to the length direction of the linear light spot.

[0013] Furthermore, it also includes a lifting driver, the spot analyzer is connected to the linear driver through the lifting driver, the spot analyzer is driven by the linear driver to move along a first horizontal direction, and the spot analyzer is used to drive the spot analyzer to lift.

[0014] Furthermore, it also includes two first fixing brackets, which are disposed on the base and located at both ends of the energy-absorbing component. The first fixing brackets are provided with mounting holes for fixing pipe joints. The pipe joints, the inlet pipe or the outlet pipe are connected to the coolant channel through the pipe joints.

[0015] Furthermore, the linear actuator is a U-shaped linear motor module, the spot analyzer is located above the U-shaped linear motor module, and the energy-absorbing component is disposed between the spot analyzer and the U-shaped linear motor module.

[0016] Furthermore, the high-energy linear spot detection device also includes a movable frame and multiple air bearings. The movable frame includes a top plate and two side plates located at both ends of the top plate. The top plate is connected to the mover of the U-shaped linear motor module, and the top plate is connected to the stator of the U-shaped linear motor module through the air bearings. The two side plates are located on both sides of the stator, and the side plates are connected to the stator through the air bearings.

[0017] Furthermore, it also includes a second fixing frame, which includes a vertical part and a horizontal part. The lower end of the vertical part is disposed on the base and located on one side of the U-shaped linear motor module. The upper end of the vertical part is connected to one end of the horizontal part. One end of the horizontal part extends to the top of the U-shaped linear motor module. The energy-absorbing member is disposed on the horizontal part.

[0018] The beneficial effects of the high-energy linear spot detection device provided in this application embodiment are as follows: In the high-energy linear spot detection device of this application embodiment, the linear driver is mounted on the base to drive the spot analyzer to move along a horizontal first direction to scan the linear spot. Furthermore, an energy-absorbing element is provided, positioned on the illumination path of the linear spot and below the spot analyzer, so that excess high-energy linear spot light is absorbed by the energy-absorbing element, preventing damage to the area below the device. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a three-dimensional structural schematic diagram of the high-energy linear spot detection device provided in the embodiments of this application;

[0021] Figure 2A top view schematic diagram of the high-energy linear spot detection device provided in the embodiments of this application;

[0022] Figure 3 A three-dimensional structural schematic diagram of the energy-absorbing component provided in the embodiments of this application;

[0023] Figure 4 This is an assembly diagram of the movable frame and air bearing provided in an embodiment of this application.

[0024] The following are the labeling elements in the figure:

[0025] 10. Base;

[0026] 20. Linear actuator; 21. Stator; 22. Mover; 23. Cleanroom cable chain;

[0027] 30. Spot analyzer;

[0028] 40. Energy-absorbing component; 41. Groove; 42. Coolant channel; 43. Through groove;

[0029] 50. Lifting drive;

[0030] 60. First fixing bracket; 61. Mounting hole;

[0031] 70. Movable frame; 71. Top plate; 72. Side plate;

[0032] 80. Air bearing;

[0033] 90. Second fixing frame; 91. Vertical part; 92. Horizontal part;

[0034] X, the first direction. Detailed Implementation

[0035] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0036] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0037] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0038] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0039] Please see Figure 1 The high-energy linear spot detection device provided in the embodiments of this application will now be described.

[0040] A linear light spot is like a thin, high-energy beam of light. High-energy linear light spot detection devices are used to analyze various characteristics of linear light spots.

[0041] Reference Figure 1 and Figure 2 The high-energy linear spot detection device provided in this application includes a base 10, a linear driver 20, a spot analyzer 30, and an energy-absorbing component 40.

[0042] The base 10 is a stable platform that provides a foundation for the installation and support of other components. Specifically, the base 10 can be a metal plate or a marble slab with sufficient flatness, weight, and stability.

[0043] A linear actuator 20 is mounted on the base 10 and is used to provide driving force for the movement of the spot analyzer 30. The linear actuator 20 can be a linear motor, preferably a U-shaped linear motor module.

[0044] The spot analyzer 30 is mounted on the linear actuator 20 and is driven by the linear actuator 20 to move along a horizontal first direction X to scan the linear spot, the length direction of the linear spot being parallel to the first direction X.

[0045] When a linear light spot shines on the light, the light spot analyzer 30 can measure parameters such as the size, shape, and energy distribution of the light spot. The light spot analyzer 30 is driven by the linear actuator 20 and moves along a horizontal first direction X, that is, from one end of the linear light spot to the other end. The first direction X can be a left-right direction or a front-back direction.

[0046] Reference Figure 1 and Figure 3 The energy-absorbing element 40 is disposed on the irradiation path of the linear light spot and located below the light spot analyzer 30.

[0047] The energy absorber 40 is positioned along the illumination path of the linear light spot and below the light spot analyzer 30, ensuring that the entire linear light spot can illuminate the energy absorber 40. The function of the energy absorber 40 is to absorb excess high-energy linear light spots, preventing these excess spots from directly illuminating the bottom platform of the equipment or other mechanisms, thus avoiding damage to them.

[0048] Based on the above structure, the working process of the high-energy linear spot detection device provided in this application embodiment is as follows:

[0049] A high-energy linear light spot is emitted from the optical exit. The linear actuator 20 drives the light spot analyzer 30 to move along the first direction X, from one end of the linear light spot to the other. As the light spot analyzer 30 moves, it scans the linear light spot and acquires relevant data. Excess linear light spot will illuminate the energy-absorbing component 40 below, which absorbs energy to prevent damage to the lower part of the equipment.

[0050] Reference Figure 1 The energy-absorbing component 40 has a coolant channel 42 inside, one end of which is used to connect to the inlet pipe and the other end is used to connect to the outlet pipe.

[0051] The energy-absorbing component 40 has a coolant channel 42 inside. Coolant can enter the coolant channel 42 from the inlet pipe, flow in the coolant channel 42, and then be discharged from the outlet pipe. The coolant can be water or some special coolant. When the coolant flows in the channel, it can carry away the heat generated by the high-energy light spot absorbed by the energy-absorbing component 40, thereby cooling it down and ensuring that the energy-absorbing component 40 will not be damaged due to excessive temperature.

[0052] At this time, the coolant flows in from the inlet pipe, absorbs the heat of the energy-absorbing component 40, and then flows out from the outlet pipe, ensuring that the energy-absorbing component 40 works normally.

[0053] Reference Figure 1 and Figure 2 The energy-absorbing element 40 extends along the first direction X, and the top of the energy-absorbing element 40 has a groove 41 extending along the first direction X, and the linear light spot irradiates the groove 41.

[0054] The energy-absorbing element 40 extends along the first direction X and has a certain length in the first direction X, so that the energy-absorbing element 40 can cover the possible position range of the linear light spot in the first direction X, and prevent the linear light spot from exceeding the energy-absorbing element 40 and irradiating the mechanism below.

[0055] Reference Figure 3 The top of the energy-absorbing component 40 is provided with a groove 41. When the linear light spot shines down from above, the light spot will directly shine into the groove 41, so that the linear light spot can be concentrated in the area of ​​the groove 41, thereby improving the absorption efficiency of the energy-absorbing component 40 for the light spot energy.

[0056] Preferably, one or more coolant channels 42 are provided in both side walls of the groove 41.

[0057] Coolant channels 42 are provided inside both side walls of the groove 41. The number of coolant channels 42 in each side wall can be one, two, three, or even more. By providing coolant channels 42 in both side walls of the groove 41, the cooling efficiency of the energy-absorbing component 40 is improved, preventing the energy-absorbing component 40 from being damaged due to excessive temperature.

[0058] Reference Figure 1 and Figure 3 The distance between the two side walls of the groove 41 gradually decreases from top to bottom, forming a V-shape. The groove 41 is V-shaped so that when a high-energy linear light spot irradiates the groove 41, due to the V-shaped structure, each time the light spot hits a side wall of the V-shape, it is reflected, changing its propagation direction, and thus collides and reflects again with the other side wall. This multiple reflection process increases the contact time and contact area with the surface of the energy-absorbing component 40, allowing the high heat generated by the light spot irradiating the surface of the energy-absorbing component 40 to be quickly absorbed, thus improving the energy absorption effect.

[0059] Reference Figure 3 The bottom of the groove 41 has a rectangular through-slot 43, into which the linear light spot is irradiated. The through-slot 43 also extends along the first direction X. The linear light spot is first irradiated in the through-slot 43, and then continuously reflected between the inner wall of the through-slot 43 and the V-shaped inner wall, further improving the energy absorption efficiency.

[0060] Reference Figure 1 and Figure 3 The extension direction of the coolant channel 42 is parallel to the length direction of the linear light spot. When the high-energy linear light spot irradiates the energy-absorbing component 40, especially the groove 41 (including the V-shaped groove 41 and the rectangular through groove 43 at the bottom), the energy-absorbing component 40 absorbs the energy of the light spot and generates heat. Since the extension direction of the coolant channel 42 is parallel to the length direction of the linear light spot, the coolant can more effectively exchange heat with the heat-absorbing parts along the main direction of the light spot energy distribution when flowing in the channel. Preferably, the length direction of the linear light spot is the first direction X.

[0061] Reference Figure 1The high-energy linear spot detection device also includes a lifting driver 50. The spot analyzer 30 is connected to the linear driver 20 through the lifting driver 50. The spot analyzer 30 is driven by the linear driver 20 to move along a horizontal first direction X. The spot analyzer 30 is used to drive the spot analyzer 30 to move up and down.

[0062] The lifting driver 50 can drive the spot analyzer 30 to move up and down within a certain range to ensure that the linear spot can illuminate the detection port (approximately 10mm × 10mm) of the spot analyzer 30, thus guaranteeing the detection quality. Specifically, the lifting driver 50 is a miniature motor.

[0063] Reference Figure 1 The high-energy linear spot detection device also includes two first fixing frames 60. The two first fixing frames 60 are disposed on the base 10 and are respectively located at both ends of the energy-absorbing component 40. The first fixing frame 60 is provided with mounting holes 61 for fixing pipe joints. The pipe joint, the liquid inlet pipe or the liquid outlet pipe is connected to the coolant channel 42 through the pipe joint.

[0064] The first fixing bracket 60 is used to fix the pipe joints. The pipe joints are installed in the mounting holes 61 and can be fixed with screws to ensure a stable connection between the inlet and outlet pipes and the energy-absorbing component. Understandably, pipe joints are provided at both ends of the coolant passage 42.

[0065] In some embodiments, the first fixing frame 60 is plate-shaped.

[0066] Reference Figure 1 The linear driver 20 is a U-shaped linear motor module, the spot analyzer 30 is located above the U-shaped linear motor module, and the energy-absorbing component 40 is disposed between the spot analyzer 30 and the U-shaped linear motor module.

[0067] The U-shaped linear motor module enables the spot analyzer 30 to move with high stability, reducing the deviation of the spot analyzer 30 in spot quality analysis.

[0068] The energy-absorbing component 40 is located between the light spot analyzer 30 and the U-shaped linear motor module to prevent excess light spots from irradiating the U-shaped linear motor module and causing damage to it.

[0069] Understandably, the U-shaped linear motor module uses a dust-free cable chain to protect the connecting lines. The connecting lines are wrapped inside the dust-free cable chain, so that the connecting lines will not be damaged or broken by mechanical movement during the uniform movement of the high-energy linear spot detection device.

[0070] Reference Figure 1 and Figure 4The high-energy linear spot detection device also includes a movable frame 70 and multiple air bearings 80. The movable frame 70 includes a top plate 71 and two side plates 72 located at both ends of the top plate 71. The top plate 71 is connected to the mover 22 of the U-shaped linear motor module. The top plate 71 is connected to the stator 21 of the U-shaped linear motor module through the air bearings 80. The two side plates 72 are located on both sides of the stator 21, and the side plates 72 are connected to the stator 21 through the air bearings 80.

[0071] The movable frame 70 has a top plate 71 and two side plates 72 located at both ends of the top plate 71. Its overall structure is similar to an inverted "U" shape, which can work in conjunction with the U-shaped linear motor module. The air bearing 80 plays a connecting and supporting role between the movable frame 70 and the U-shaped linear motor module.

[0072] Reference Figure 4 The top plate 71 is connected to the mover 22 of the U-shaped linear motor module, and the two side plates 72 are located on both sides of the stator 21, forming a surrounding posture around the stator 21 in spatial position, further enhancing the stability and integrity of the connection between the moving frame 70 and the U-shaped linear motor module. When the U-shaped linear motor module is powered on, the mover 22 will move linearly under the action of electromagnetic force. Since the top plate 71 is connected to the mover 22, the top plate 71 will also move linearly, causing the spot analyzer 30 connected to the top plate 71 to move along the first direction X.

[0073] Reference Figure 4 The top plate 71 is connected to the stator 21 of the U-shaped linear motor module via an air bearing 80, and the side plate 72 is also connected to the stator 21 via an air bearing 80. The stator 21 is the stationary part of the linear motor module, and the air bearing 80 is a type of bearing that uses gas pressure to create support. The air bearing 80 forms an air film between the top plate 71 / side plate 72 and the stator 21, allowing the top plate 71 / side plate 72 to move linearly along the stator 21 with almost no friction. This reduces mechanical wear, lowers noise and vibration during movement, and ensures the stability and accuracy of the detection device.

[0074] Reference Figure 4 Specifically, the top plate 71 / side plate 72 has holes in which the air bearing 80 is installed and faces the stator 21.

[0075] Reference Figure 1The high-energy linear spot detection device also includes a second fixing frame 90, which includes a vertical part 91 and a horizontal part 92. The lower end of the vertical part 91 is disposed on the base 10 and located on one side of the U-shaped linear motor module. The upper end of the vertical part 91 is connected to one end of the horizontal part 92. One end of the horizontal part 92 extends to the top of the U-shaped linear motor module. The energy-absorbing member 40 is disposed on the horizontal part 92.

[0076] The function of the second mounting bracket 90 is to provide a stable mounting support for the energy-absorbing component 40. The vertical portion 91 of the second mounting bracket 90 is a vertical structural component, and the horizontal portion 92 is a horizontal structure. One end of the horizontal portion 92 extends from the connection point with the vertical portion 91 and extends all the way to the top of the U-shaped linear motor module. This design allows the horizontal portion 92 to span the space above the U-shaped linear motor module, providing a suitable position for the subsequent installation of the energy-absorbing component 40.

[0077] Reference Figure 1 Since the lateral portion 92 extends above the U-shaped linear motor module, the energy-absorbing component 40 can be installed at a suitable height and position, in the irradiation path of the linear light spot, to absorb excess light spot energy.

[0078] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A high energy linear spot detection device, characterized by, The utility model relates to a high-energy linear light spot detection device, comprising: a base; a linear driver arranged on the base; a light spot analyzer arranged on the linear driver and driven by the linear driver to move along a horizontal first direction to scan the linear light spot, the length direction of the linear light spot being parallel to the first direction; an energy-absorbing member arranged on the irradiation path of the linear light spot and below the light spot analyzer.

2. The high energy linear light spot detection device of claim 1, wherein, The energy-absorbing member is internally provided with a cooling liquid channel, one end of the cooling liquid channel being used to connect an inlet pipe and the other end being used to connect an outlet pipe.

3. The high energy linear spot detection device of claim 1, wherein, The energy-absorbing member extends along the first direction, the top of the energy-absorbing member being provided with a groove extending along the first direction, and the linear light spot is irradiated in the groove.

4. The high energy linear spot detection device of claim 3, wherein, The distance between the two side walls of the groove gradually decreases from top to bottom, forming a V shape.

5. The high energy linear spot detection device of claim 2, wherein, The extension direction of the cooling liquid channel is parallel to the length direction of the linear light spot.

6. The high energy linear spot detection device of claim 1, wherein, The light spot analyzer is connected to the linear driver by a lifting driver, the light spot analyzer is driven by the linear driver to move along the horizontal first direction, and the light spot analyzer is used to drive the light spot analyzer to lift and lower.

7. The high energy linear spot detection device of claim 2, wherein, Two first fixing frames are arranged on the base and located at the two ends of the energy-absorbing member, respectively, the first fixing frame is provided with a mounting hole for fixing a pipe joint, the pipe joint is used to connect the cooling liquid channel, and the inlet pipe or the outlet pipe is connected to the cooling liquid channel through the pipe joint.

8. The high energy linear spot detection device of any of claims 1-7, wherein, The linear driver is a U-shaped linear motor module, the light spot analyzer is located above the U-shaped linear motor module, and the energy-absorbing member is arranged between the light spot analyzer and the U-shaped linear motor module.

9. The high energy linear spot detection device of claim 8, wherein, The high-energy linear light spot detection device further comprises a moving frame and a plurality of air floating bearings, the moving frame comprises a top plate and two side plates located at the two ends of the top plate, the top plate is connected to the mover of the U-shaped linear motor module, the top plate and the stator of the U-shaped linear motor module are connected through the air floating bearings, the two side plates are located at the two sides of the stator, respectively, and the side plates and the stator are connected through the air floating bearings.

10. The high energy linear spot detection device of claim 8, wherein, The second fixing frame comprises a vertical part and a horizontal part, the lower end of the vertical part is arranged on the base and located at one side of the U-shaped linear motor module, the upper end of the vertical part is connected to one end of the horizontal part, one end of the horizontal part extends above the U-shaped linear motor module, and the energy-absorbing member is arranged on the horizontal part.

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