Surface acoustic wave resonance device and filtering device

By using lithium niobate (YX-cut) as the piezoelectric layer material in the surface acoustic wave resonator and controlling the piezoelectric layer thickness and the use of the temperature compensation layer, the interdigital transducer was optimized, solving the problems of insufficient electromechanical coupling coefficient and wave velocity in existing devices, and achieving wider applicability and better clutter suppression.

CN223993665UActive Publication Date: 2026-03-13CHANGZHOU CHEMSEMI CO LTD
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Patent Information

Application Number
CN202423321073.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-31
Publication Date
2026-03-13
Estimated Expiration
2034-12-31

AI Technical Summary

Technical Problem

Existing surface acoustic wave resonator devices have shortcomings in terms of electromechanical coupling coefficient and wave velocity, and their ability to suppress clutter is poor, which affects their application in high-frequency communication systems.

Method used

Lithium niobate (YX-cut) was used as the piezoelectric layer material, and the thickness of the piezoelectric layer was controlled within the range of 0.27λ to 0.5λ. Combined with the use of a temperature compensation layer, the material and structural design of the interdigital transducer were optimized to improve the electromechanical coupling coefficient and wave velocity, and reduce the influence of clutter.

Benefits of technology

It significantly improves the electromechanical coupling coefficient and wave velocity of surface acoustic wave resonators, expands their application range, and effectively suppresses the influence of clutter on device performance, making it suitable for high-frequency communication systems.

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Abstract

The utility model provides a surface acoustic wave resonance device and a filtering device wherein the surface acoustic wave resonance device comprises a substrate; the middle layer is positioned on the substrate; the piezoelectric layer is located on the middle layer, the material of the piezoelectric layer comprises Y-X cut lithium niobate, the cut angle range is 140 degrees to 170 degrees, the thickness range of the piezoelectric layer is 0.27 lambda to 0.5 lambda, and lambda is the wavelength of surface acoustic waves; the interdigital transducer is positioned on the piezoelectric layer; the temperature compensation layer is located on the piezoelectric layer, and the temperature compensation layer covers the interdigital transducer; the large electromechanical coupling coefficient (Kt) is obtained by selecting the corner cut of the piezoelectric layer, the electromechanical coupling coefficient and the wave velocity can be further improved by controlling the thickness of the piezoelectric layer, and the application range is wide.
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