Door cover and wafer box

Abstract

The utility model discloses a door cover and a wafer cassette, the door cover comprises a cover body and a locking assembly, the cover body is provided with a first side surface and a second side surface which are arranged back to back, and the cover body is provided with a lock hole penetrating through the first side surface and the second side surface; the locking assembly is arranged on the first side face and comprises a rotating piece and a locking piece, the rotating piece is provided with an operation hole opposite to the lock hole in position, the rotating piece is rotationally connected with the cover body around a hole shaft of the lock hole, the locking piece is rotationally connected with the cover body around a first axis, the first axis is parallel to the first side face, and the rotating piece is in transmission connection with the locking piece. When the key penetrates through the lock hole and the operation hole to drive the rotating piece to rotate, the locking piece is driven to rotate, so that the locking piece is switched between the locking position and the unlocking position. According to the embodiment, the rotating piece and the locking piece can be driven to rotate only by rotating the key, so that locking and unlocking of the door cover are achieved, the possibility that the locking assembly shakes in the transportation process of the wafer box is reduced, and the locking stability between the cover body and the box body is improved.

Description

Technical Field

[0001] This application relates to the field of wafer cell technology, and more particularly to a door cover and a wafer cell. Background Technology

[0002] After wafers are manufactured, they are loaded into wafer cassettes for dust-proof storage and to facilitate batch handling and transportation for subsequent production processes. In related technologies, wafer cassettes are equipped with covers to seal the cassettes. To ensure the safety of the wafers during transportation, it is necessary to improve the locking stability between the cover and the cassette. Utility Model Content

[0003] This application provides a door cover and a wafer box, which can improve the locking stability between the door cover and the box body.

[0004] In a first aspect, embodiments of this application provide a door cover, including:

[0005] A cover has a first side and a second side facing away from each other, and the cover has a locking hole penetrating the first side and the second side; and,

[0006] A locking assembly is disposed on the first side. The locking assembly includes a rotating member and a locking member. The rotating member has an operating hole opposite to the lock hole. The rotating member is rotatably connected to the cover about the hole axis of the lock hole. The locking member is rotatably connected to the cover about a first axis parallel to the first side. The rotating member and the locking member are kinetically connected. When a key passes through the lock hole and the operating hole to drive the rotating member to rotate, it drives the locking member to rotate, thereby switching the locking member between a locked position and an unlocked position.

[0007] In some embodiments of this application, the locking assembly further includes a connector disposed on the first side. The connector is slidable relative to the cover along a first direction, which is perpendicular to the extension direction of the first axis. The rotating member is connected to the locking member via the connector. When the rotating member rotates, it drives the connector to slide along the first direction, thereby driving the locking member to rotate.

[0008] In some embodiments of this application, the connector has a first end and a second end disposed opposite to each other, the first end being slidably connected to the rotating member, and the second end being rotatably connected to the locking member about a second axis, the second axis being parallel to the first axis.

[0009] In some embodiments of this application, the locking assembly further includes:

[0010] The transmission structure connects the rotating component to the connecting component, and when the rotating component rotates, it drives the connecting component to slide along the first direction through the transmission structure.

[0011] In some embodiments of this application, the transmission structure includes a cam portion and an abutment portion. The cam portion is disposed on the rotating member, and the abutment portion is disposed on the connecting member. The abutment portion abuts against the cam portion. Rotation of the rotating member can drive the cam portion to rotate, so that the cam portion moves relative to the abutment portion. The cam portion has a first position and a second position on its movement trajectory. When the cam portion is in the first position, the connecting member drives the locking member to rotate to the locking position. When the cam portion is in the second position, the connecting member drives the locking member to rotate to the unlocking position.

[0012] In some embodiments of this application, the connector is provided with a limiting groove extending along the first direction, and a first limiting member is provided on the first side. The first limiting member is located in the limiting groove and can slide in the limiting groove along the first direction.

[0013] When the locking member is in the locked position, the first limiting member abuts against the side of the limiting groove near the rotating member. When the locking member is in the unlocked position, the first limiting member abuts against the side of the limiting groove near the locking member.

[0014] In some embodiments of this application, a support member is provided on the first side, the support member is disposed close to the connector, the support member has an abutting surface opposite to the first side, and the connector abuts against the abutting surface.

[0015] In some embodiments of this application, the abutting surface extends along the first direction, and the first direction is set at an angle to the first side surface;

[0016] The connector includes a connecting body and a top support that are connected to each other. The connecting body is connected to the rotating member and the locking member. The top support abuts against the abutting surface. When the connector slides along the first direction, the top support slides on the abutting surface.

[0017] In some embodiments of this application, a plurality of second limiting members are provided on the first side, and the plurality of second limiting members are arranged around the periphery of the rotating member; the rotating member is provided with a mating part, and when the locking member is in the locked position and the unlocked position, the mating part is locked with the second limiting member, and when the rotating member rotates, the mating part moves away from the second limiting member.

[0018] Secondly, embodiments of this application also provide a wafer cassette, comprising:

[0019] The box body has a receiving cavity and an opening communicating with the receiving cavity; and,

[0020] As described in any of the above embodiments, the door cover is installed on the box body, with the first side facing the receiving cavity. When the locking member is in the locked position, the cover closes to the opening, and when the locking member is in the unlocked position, the cover opens the opening.

[0021] Based on the door cover and wafer cassette in this embodiment, the rotating component and the locking component are connected by a transmission connection. The rotating component can drive the locking component to rotate through its own rotational motion, thereby enabling the locking component to lock and unlock the door cover. Therefore, only by turning the key can the rotating component and the locking component be driven to rotate, so as to lock and unlock the door cover, thereby reducing the possibility of the locking assembly shaking during the transportation of the wafer cassette and improving the locking tightness and stability between the cover and the cassette. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a first-view structural diagram of the door cover in one embodiment of this application;

[0024] Figure 2 This is a schematic diagram of the second-view structure of the door cover in one embodiment of this application;

[0025] Figure 3 for Figure 2 Enlarged structural diagram at point B;

[0026] Figure 4 This is a schematic diagram of the structure of a portion of the door cover in another embodiment of this application;

[0027] Figure 5 for Figure 4 Enlarged structural diagram at point D;

[0028] Figure 6 for Figure 1 Enlarged structural diagram at point A;

[0029] Figure 7 for Figure 2 Enlarged structural diagram at point C;

[0030] Figure 8 This is a schematic diagram of the cover structure in another embodiment of this application.

[0031] Figure label:

[0032] 1. Door cover;

[0033] 10. Cover; 11. First side surface; 12. Locking opening; 13. First limiting member; 14. Support member; 141. Abutting surface; 15. Second limiting member;

[0034] 20. Locking assembly; 21. Rotating component; 211. Operating hole; 212. Mating part; 22. Locking component; 221. First straight end; 222. Second straight end; 223. Protruding surface; 23. Connecting component; 231. First end; 232. Second end; 233. Limiting groove; 234. Connecting body; 235. Top support; 236. Reinforcing rib; 24. Transmission structure; 241. Cam part; 2411. First limiting end; 2412. Second limiting end; 242. Abutting part. Detailed Implementation

[0035] To more clearly illustrate the technical solutions in the embodiments of this application or related technologies, a clear and complete description will be provided below with reference to the accompanying drawings in the embodiments of this application. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0036] In related technologies, wafer boxes are equipped with covers for sealing the box body. The covers lock with the box body. In order to ensure a clean storage environment for the wafers and to ensure the safe storage of the wafers during the transportation of the wafer boxes, it is necessary to improve the tightness and stability of the locking between the covers and the box body.

[0037] Regarding the above situation, firstly, please refer to [link / reference needed]. Figures 1-3 This application proposes a door cover 1, including a cover body 10 and a locking assembly 20. The locking assembly 20 is disposed on the cover body 10. The door cover 1 can be installed on a box with an opening. Taking a wafer box as an example, when the door cover 1 is installed on the box of the wafer box, the locking assembly 20 can lock the door cover 1 to the box, so that the connection between the door cover 1 and the box is more stable and reliable.

[0038] The cover 10 has a first side 11 and a second side (not shown in the figure) facing each other. The cover 10 is provided with a lock hole (not shown in the figure) passing through the first side 11 and the second side. When the cover 1 is installed on a box with an opening, the first side 11 faces the inside of the box and the second side faces the outside of the box. The lock hole is used for inserting a key.

[0039] The locking assembly 20 is disposed on the first side 11. The locking assembly 20 includes a rotating member 21 and a locking member 22. The rotating member 21 has an operating hole 211 that is opposite to the position of the lock hole. The rotating member 21 is rotatably connected to the cover 10 about the hole axis of the lock hole. The locking member 22 is rotatably connected to the cover 10 about a first axis that is parallel to the first side 11. The rotating member 21 and the locking member 22 are connected in a transmission manner. A key can be inserted into the lock hole and the operating hole 211. Turning the key can drive the rotating member 21 to rotate. At this time, the rotating member 21 can drive the locking member 22 to rotate, so that the locking member 22 can switch between the locked position and the unlocked position.

[0040] Specifically, the locking assembly 20 is located on the side of the cover 10 facing the interior of the box. The locking member 22 rotates away from the rotating member 21 to the locked position, where it is locked to the box. Rotating the locking member 22 towards the rotating member 21 allows it to be unlocked, where it is unlocked from the box. The locking member 22 is positioned at the edge of the first side surface 11 so that at least a portion of it can extend outside the first side surface 11 during rotation, thus locking the cover 10 to the box. This embodiment does not limit the number of locking assemblies 20; for example, multiple locking assemblies 20 can be provided, spaced apart on the first side surface 11, to ensure a more secure lock between the cover 10 and the box.

[0041] It should be noted that when the cover 1 is installed on the box body and the locking member 22 is in the locked position, the locking member 22 abuts against the box body. At this time, there is an interaction force between the box body and the locking member 22. The locking member 22 will generate a component force perpendicular to the first side 11 on the cover 10, thereby pressing the cover 1 tightly against the box body, so as to improve the sealing between the cover 1 and the box body. The rotating member 21 is connected to the locking member 22 through its own rotational movement, so that the locking member 22 can lock and unlock the cover 1. Therefore, only by turning the key can the rotating member 21 and the locking member 22 be driven to rotate, so as to lock and unlock the cover 1, thereby reducing the possibility of the locking assembly 20 shaking during the transportation of the wafer box and improving the locking tightness and stability between the cover 10 and the box body.

[0042] It should also be noted that, such as Figures 4-5As shown, the cover 10 can be a double-layer structure. The cover 10 has an installation cavity and a locking port 12 communicating with the installation cavity. The locking assembly 20 is located in the installation cavity. During the rotation, the locking member 22 can enter and exit the installation cavity through the locking port 12, thereby providing installation space and protection for the locking assembly 20 and reducing the interference of objects contained in the box to the locking assembly 20. When the locking member 22 is rotated to the locked position, the locking member 22 extends out of the installation cavity from the locking port 12 and abuts against the box. When the locking member 22 is rotated to the unlocked position, the locking member 22 enters the installation cavity from the locking port 12.

[0043] In some embodiments, the rotating member 21 may include a first gear, and the locking member 22 may include a second gear and a locking part disposed on the side wall of the second gear. The first gear meshes with the second gear. When the first gear rotates, it can drive the second gear and the locking part to rotate, so that the locking part switches between the locked position and the unlocked position.

[0044] Please see Figure 1 In some embodiments of this application, the locking assembly 20 further includes a connector 23, which is disposed on the first side 11. The connector 23 is slidable relative to the cover 10 along a first direction, which is perpendicular to the extension direction of the first axis. That is, the connector 23 can push or pull the locking member 22 to rotate around the first axis along the first direction, so as to switch the locking member 22 between the locked position and the unlocked position. The rotating member 21 is connected to the locking member 22 through the connector 23. When the rotating member 21 rotates, it drives the connector 23 to slide along the first direction, thereby driving the locking member 22 to rotate. The connector 23 may be provided with a plurality of spaced reinforcing ribs 236 to improve the structural strength of the connector 23.

[0045] In some embodiments, such as Figure 1 As shown, the locking assembly 20 may include two locking members 22 and two connecting members 23. The two locking members 22 are respectively disposed on opposite sides of the rotating member 21, and the two connecting members 23 are also respectively disposed on opposite sides of the rotating member 21. That is, the locking assembly 20 includes a first locking member 22, a first connecting member 23, a rotating member 21, a second connecting member 23, and a second locking member 22 arranged in sequence. The first locking member 22 and the second locking member 22 are located at two opposite edges of the first side 11, so that at least a portion of the first locking member 22 and the second locking member 22 can rotate and extend to the outside of the first side 11 to achieve the locking of the door cover 1 and the box body. In this embodiment, by providing two locking members 22 in the locking assembly 20, the locking between the cover 10 and the box body is more secure, and the sealing performance between the door cover 1 and the box body is improved.

[0046] Further reading is available upon request. Figure 1In some embodiments of this application, the connector 23 has a first end 231 and a second end 232 disposed opposite to each other. The first end 231 is slidably connected to the rotating member 21, and the second end 232 is rotatably connected to the locking member 22 about a second axis, which is parallel to the first axis.

[0047] Specifically, during the rotation of the rotating member 21, the rotating member 21 rotates relative to the connecting member 23, while the connecting member 23 slides relative to the cover 10. This allows the connecting member 23 to push or pull the locking member 22, causing the locking member 22 to rotate relative to the cover 10. Taking the locking member 22 as a tile-shaped arc-shaped latch as an example, the arc-shaped latch has a first straight end 221 and a second straight end 222 that are arranged opposite to each other. Both the first straight end 221 and the second straight end 222 extend along the direction of the first axis. The first straight end 221 is about the first axis and is perpendicular to the cover 10. Rotary connection; the arc-shaped latch also has a raised protruding surface 223. The second end 232 of the connector 23 is rotatably connected to the raised surface 223 about the second axis. The connector 23 can apply a force to the raised surface 223 so that the arc-shaped latch rotates relative to the connector 23 and the cover 10. When the arc-shaped latch rotates from the unlocked position to the locked position, the connector 23 pushes the raised surface 223 so that the arc-shaped latch rotates away from the rotating member 21 until the second straight end 222 of the arc-shaped latch abuts against the box body to lock the door cover 1 onto the box body.

[0048] For example, the rotating member 21 includes a first gear, the locking member 22 includes a second gear and a locking part disposed on the side wall of the second gear, and the connecting member 23 includes a rack extending in a first direction. The rack meshes with both the first gear and the second gear. When the first gear rotates, it can drive the rack to slide in the first direction. At the same time, the rack drives the second gear and the locking part to rotate, so that the locking part switches between the locked position and the unlocked position.

[0049] Further, please see Figure 6 In some embodiments of this application, the locking assembly 20 further includes a transmission structure 24, and the rotating member 21 is connected to the connecting member 23 through the transmission structure 24. When the rotating member 21 rotates, it drives the connecting member 23 to slide along the first direction through the transmission structure 24.

[0050] It is easy to understand that the transmission structure 24 converts the rotational motion of the rotating member 21 around the lock hole axis into the linear motion of the connecting member 23 along the first direction. During the linear motion, the connecting member 23 can realize the position switching of the locking member 22. In this embodiment, the specific type of the transmission structure 24 is not limited. For example, the transmission structure 24 can be a crank-rocker structure, a slider-connecting rod structure, etc.

[0051] Furthermore, please continue to see Figure 6The transmission structure 24 includes a cam portion 241 and an abutment portion 242. The cam portion 241 is disposed on the rotating member 21, and the abutment portion 242 is disposed on the connecting member 23. The abutment portion 242 abuts against the cam portion 241. The rotation of the rotating member 21 can drive the cam portion 241 to rotate, so that the cam portion 241 moves relative to the abutment portion 242. The cam portion 241 has a first position and a second position on its movement trajectory. When the cam portion 241 is in the first position, the connecting member 23 drives the locking member 22 to rotate to the locked position. When the cam portion 241 is in the second position, the connecting member 23 drives the locking member 22 to rotate to the unlocked position.

[0052] It should be noted that the overall orthographic projection of the cam portion 241 on the first side 11 includes a first limiting end 2411 and a second limiting end 2412 arranged around the hole axis of the lock hole. The distance between the first limiting end 2411 and the hole axis of the lock hole is greater than the distance between the second limiting end 2412 and the hole axis of the lock hole. In other words, the distance between the first limiting end 2411 and the lock hole is large, and the distance between the second limiting end 2412 and the lock hole is small. During the rotation of the cam 241 by the rotating member 21, the abutment 242 moves between the first limiting end 2411 and the second limiting end 2412. When the rotating member 21 drives the cam 241 to rotate to the first position, the abutment 242 abuts against the first limiting end 2411. At this time, the connecting member 23 slides away from the rotating member 21 to push the locking member 22 to rotate away from the rotating member 21 to the locking position. When the rotating member 21 drives the cam 241 to rotate to the second position, the abutment 242 abuts against the second limiting end 2412. At this time, the connecting member 23 slides towards the rotating member 21 to pull the locking member 22 towards the rotating member 21 to the unlocking position.

[0053] Please see Figure 6 In some embodiments of this application, a plurality of second limiting members 15 are provided on the first side 11, and the plurality of second limiting members 15 are arranged around the periphery of the rotating member 21; the rotating member 21 is provided with a mating part 212. When the locking member 22 is in the locked position and the unlocked position, the mating part 212 locks with the second limiting member 15, thereby restricting the rotating member 21 from continuing to rotate. When the rotating member 21 is rotating, the mating part 212 leaves the second limiting member 15, thereby releasing the restriction on the rotating member 21.

[0054] For example, taking two second limiting members 15 as an example, the two second limiting members 15 are located on opposite sides of the connecting member 23. When the locking member 22 is in the locked position, the mating part 212 is locked with one of the second limiting members 15. When the locking member 22 is in the unlocked position, the mating part 212 is locked with the other second limiting member 15. The second limiting member 15 can be a groove, and the mating part 212 can be a protrusion. When the mating part 212 is locked with the second limiting member 15, the protrusion engages with the groove.

[0055] Please see Figure 7 In some embodiments of this application, a support member 14 is provided on the first side 11. The support member 14 is located close to the connector 23. The support member 14 has an abutting surface 141 that is away from the first side 11. The connector 23 abuts against the abutting surface 141.

[0056] It should be noted that the locking member 22 is rotatably connected to the cover 10 around the first axis, and the connecting member 23 is rotatably connected to the locking member 22 around the second axis. The connecting member 23 drives the locking member 22 to rotate around the first axis by pushing and pulling the locking member 22. Therefore, the first axis and the second axis are parallel and do not coincide. The distance from the first axis to the first side 11 is different from the distance from the second axis to the first side 11. It can be seen that there is a gap between the connecting member 23 and the first side 11. That is, at least part of the connecting member 23 is suspended on the first side 11. The abutment surface 141 on the support member 14 can provide support for the connecting member 23, thereby making the movement of the connecting member 23 more stable.

[0057] Further, please see Figures 6-7 The abutment surface 141 extends along a first direction, and the first direction is set at an angle with the first side surface 11. That is, the connector 23 is inclined relative to the first side surface 11. The connector 23 includes a connecting body 234 and a top support 235 that are connected to each other. The connecting body 234 is connected to the rotating member 21 and the locking member 22, and the connecting body 234 extends inclinedly from the rotating member 21 toward the locking member 22. The top support 235 abuts against the abutment surface 141. When the connector 23 slides along the first direction, the top support 235 slides on the abutment surface 141. The abutment surface 141 provides support for the top support 235 and the connecting body 234.

[0058] Please see Figures 6-8In some embodiments of this application, the connector 23 is provided with a limiting groove 233 extending along a first direction, and a first limiting member 13 is provided on the first side 11. The first limiting member 13 is located in the limiting groove 233 and can slide in the limiting groove 233 along the first direction. When the locking member 22 is in the locked position, the first limiting member 13 abuts against the side of the limiting groove 233 near the rotating member 21. When the locking member 22 is in the unlocked position, the first limiting member 13 abuts against the side of the limiting groove 233 near the locking member 22.

[0059] In this embodiment, the sliding direction of the connector 23 is limited by the first limiting member 13 and the limiting groove 233, thereby improving the sliding stability of the connector 23 and preventing the connector 23 from shifting position. At the same time, the extension length of the limiting groove 233 along the first direction is the same as the movement distance of the connector 23 along the first direction, thereby preventing the connector 23 from sliding too far along the first direction, which could lead to locking or unlocking failure.

[0060] Secondly, this application also provides a wafer cassette (not shown in the figure) for storing and transporting wafers in semiconductor production. The wafer cassette includes a cassette body and a cover 1 as described in any of the above embodiments. The cassette body has a receiving cavity and an opening communicating with the receiving cavity. The receiving cavity is used to hold the wafer, and the opening is for the wafer to enter and exit the receiving cavity. The cover 1 is installed on the cassette body, with its first side 11 facing the receiving cavity. When the locking member 22 is in the locked position, the cover 10 covers the opening to close the receiving cavity. When the locking member 22 is in the unlocked position, the cover 10 opens the opening.

[0061] Specifically, when the door cover 1 is installed on the box body and the locking member 22 is in the locked position, the locking member 22 abuts against the box body. At this time, there is a force between the box body and the locking member 22. The locking member 22 will generate a component force perpendicular to the first side 11 on the cover 10, thereby pressing the door cover 1 tightly against the box body, so as to make the sealing between the door cover 1 and the box body better.

[0062] In the accompanying drawings of this embodiment, the same or similar reference numerals correspond to the same or similar components. In the description of this application, it should be understood that if terms such as "upper," "lower," "left," and "right" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, they are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the drawings are only for illustrative purposes and should not be construed as limiting this application. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0063] The above are merely preferred embodiments of this application and are not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A door cover characterized by, The application relates to a lock assembly. The lock assembly comprises: a cover body having a first side and a second side arranged oppositely, a lock hole penetrating through the first side and the second side being arranged on the cover body; and a locking assembly arranged on the first side, the locking assembly comprising a rotating member and a locking member, the rotating member having an operation hole opposite to the position of the lock hole, the rotating member being rotatably connected with the cover body around the hole axis of the lock hole, the locking member being rotatably connected with the cover body around a first axis, the first axis being parallel to the first side, the rotating member being drivingly connected with the locking member, when a key is inserted into the lock hole and the operation hole to drive the rotating member to rotate, the locking member is driven to rotate to switch the locking member between a locking position and an unlocking position.

2. The door cover according to claim 1, characterized in that The locking assembly further comprises: a connecting member arranged on the first side, the connecting member being capable of sliding relative to the cover body along a first direction, the first direction being perpendicular to the extension direction of the first axis, the rotating member being drivingly connected with the locking member through the connecting member, when the rotating member rotates, the connecting member is driven to slide along the first direction, and the locking member is driven to rotate.

3. The door cover according to claim 2, characterized in that The connecting member has oppositely arranged first and second end portions, the first end portion is slidingly connected with the rotating member, and the second end portion is rotatably connected with the locking member around a second axis, the second axis being parallel to the first axis.

4. The door cover of claim 2, wherein The locking assembly further comprises: a transmission structure, the rotating member being drivingly connected with the connecting member through the transmission structure, when the rotating member rotates, the connecting member is driven to slide along the first direction through the transmission structure.

5. The door cover of claim 4, wherein, The transmission structure comprises a cam portion arranged on the rotating member and an abutting portion arranged on the connecting member, the abutting portion abutting against the cam portion, the rotating member being capable of driving the cam portion to rotate to make the cam portion move relative to the abutting portion; the cam portion has a first position and a second position on the moving track, when the cam portion is located at the first position, the connecting member drives the locking member to rotate to the locking position, and when the cam portion is located at the second position, the connecting member drives the locking member to rotate to the unlocking position.

6. The door cover of claim 2, wherein The connecting member is provided with a limiting groove extending along the first direction, the first side is provided with a first limiting member located in the limiting groove, and the first limiting member is capable of sliding in the limiting groove along the first direction; when the locking member is in the locking position, the first limiting member abuts against one side of the limiting groove close to the rotating member, and when the locking member is in the unlocking position, the first limiting member abuts against one side of the limiting groove close to the locking member.

7. The door cover of claim 2, wherein The first side is provided with a supporting member arranged close to the connecting member, the supporting member has an abutting surface facing away from the first side, and the connecting member abuts against the abutting surface.

8. The door cover according to claim 7, characterized in that The abutting surface extends along the first direction, and the first direction forms an included angle with the first side. The connecting piece comprises a connecting body and a top supporting part connected with each other, the connecting body is connected with the rotating piece and the locking piece, the top supporting part is in abutment with the abutment surface, and the top supporting part slides on the abutment surface when the connecting piece slides in the first direction.

9. The door cover of claim 1, wherein A plurality of second limiting pieces are arranged on the first side surface and around the circumferential side of the rotating piece; The rotating piece is provided with a matching part, the matching part is locked and matched with the second limiting piece when the locking piece is in the locked position and the unlocked position, and the matching part is away from the second limiting piece when the rotating piece rotates.

10. A wafer cassette, characterized by, Comprise: A box body having a containing cavity and an opening communicating with the containing cavity; And The door cover as claimed in any one of claims 1 to 9 is installed on the box body, the first side surface is arranged towards the containing cavity, the cover body covers the opening when the locking piece is in the locked position, and the cover body opens the opening when the locking piece is in the unlocked position.

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