Die water cooling structure for ion implantation production

Abstract

The utility model belongs to the field of mold water-cooling structures, and particularly relates to a mold water-cooling structure for ion implantation production, which comprises a mold, a water-cooling pipe is arranged in the mold, a water inlet is fixedly connected onto the water-cooling pipe, a water inlet is fixedly connected in the mold, and a cover body is contacted in the water inlet. The interior of the water inlet is connected with a threaded sleeve through threads, the threaded sleeve is fixedly connected with the cover body, and a sealing mechanism is arranged in the water inlet. According to the scheme, by designing a screw, a rotating plate, a rotating ring, an elastic clamping block, a rotating block, an annular groove and other components, the rotating screw and the water inlet make threaded motion, the screw rotates to drive a semicircular sealing sleeve and other components to move, the semicircular sealing sleeve moves to make contact with the cover body, and then the joint of the water inlet and the cover body is sealed; and liquid on the device is prevented from flowing out from the joint of the water inlet and the cover body.

Description

Technical Field

[0001] This solution belongs to the field of mold water-cooling structure, specifically involving a mold water-cooling structure for ion implantation production. Background Technology

[0002] Ion implantation molds typically employ water-cooling structures for heat dissipation. These structures usually consist of an internal water pipe network that circulates water to absorb and dissipate heat from the mold surface. In ion implantation, a well-designed water-cooling structure significantly impacts mold performance. For example, utility model patent CN217798903U proposes a water-cooling structure for a casting mold. It includes a mold body with a cavity end face on its lower surface and a contour groove on its upper surface. The contour groove has the same structure as the cavity end face, and the distance from each position of the contour groove to the corresponding position on the cavity end face directly below is the same. A water-cooling runner insert is installed within the contour groove, with the lower end face of the water-cooling runner insert having the same structure as the contour groove, and the lower end face of the water-cooling runner insert and the contour groove are fitted together. This utility model's water-cooling structure enables uniform cooling of the casting mold, reducing temperature differences across the mold cavity surface and minimizing the risk of cracking due to uneven heating. Furthermore, by using a mold insert as a separate water-cooling component to provide secondary protection for the cooling water, this utility model significantly enhances safety. In existing technology, the device lacks a sealing mechanism, making it difficult to seal the connection between the inlet and the cover. This can lead to liquid leakage from the connection point, and the absence of a blower mechanism can cause overheating of the liquid in the cooling water pipes, resulting in low heat dissipation efficiency. Therefore, improvements to the existing technology are necessary. Utility Model Content

[0003] The purpose of this solution is to provide a water-cooling structure for ion implantation production molds to solve the problems that when the device is in use, the lack of a sealing mechanism makes it difficult to seal the connection between the inlet and the cover, which may cause liquid to leak out from the connection between the inlet and the cover. In addition, the lack of a blower mechanism may cause the liquid in the cold water pipes to overheat, resulting in low heat dissipation efficiency of the device.

[0004] To achieve the above objectives, this utility model provides a water-cooled structure for a mold produced by ion implantation, including a mold, a water-cooling pipe inside the mold, a water inlet fixedly connected to the water-cooling pipe, a cover body inside the water inlet, a threaded sleeve inside the water inlet connected by threads, the threaded sleeve being fixedly connected to the cover body, a sealing mechanism inside the water inlet, a water pump on the water-cooling pipe, the mold contacting the water pump, a support block fixedly connected to the lower end of the mold, a base fixedly connected to the lower end of the support block, and a blower mechanism inside the base.

[0005] The principle of this solution is as follows: When the device is in use, the cover is moved, which in turn moves the threaded sleeve. The cover moves to the water inlet, and the threaded sleeve moves and contacts the water inlet. Then, the cover is rotated, which in turn rotates the threaded sleeve. The threaded sleeve rotates and creates a threaded motion with the water inlet. The cover and the threaded sleeve rotate to a designated position inside the water inlet. Then, the rotating ring is rotated, which in turn rotates the rotating plate. The rotating plate rotates and drives the screw to rotate. The screw rotates and creates a threaded motion with the water inlet, which in turn causes the screw to have a relative displacement. The screw rotates and drives the rotating block and connecting sleeve to move. The connecting sleeve moves and drives the semi-circular sleeve to move. The semi-circular sleeve moves and drives the semi-circular sealing sleeve to move. The semi-circular sealing sleeve moves and contacts the cover, thus sealing the connection between the water inlet and the cover, preventing liquid from the device from flowing out from the connection between the water inlet and the cover.

[0006] When the liquid in the water-cooling pipes of the device becomes overheated, the fan is turned on. The fan blows air onto the heat-conducting block, and the filter screen and annular filter screen filter the outside air, thereby preventing impurities in the outside air from entering. This allows the heat-conducting block to dissipate heat, which in turn allows the heat-conducting plate and heat-collecting jacket to dissipate heat, and finally allows the liquid in the water-cooling pipes to dissipate heat, resulting in high heat dissipation efficiency of the device.

[0007] The technical advantages of this solution are as follows: By designing components such as a screw, rotating plate, rotating ring, elastic locking block, rotating block, and annular groove, the rotating screw creates a threaded motion with the water inlet. The rotation of the screw drives the semi-circular sealing sleeve and other components to move, and the semi-circular sealing sleeve moves to contact the cover, thereby sealing the connection between the water inlet and the cover, preventing liquid from flowing out of the device from the connection between the water inlet and the cover. By designing components such as a heat collection jacket, heat conduction plate, heat conduction block, fan, filter screen, and annular filter screen, the fan, when activated, blows air onto the heat conduction block, thereby dissipating heat from the heat collection jacket and other components, and thus dissipating heat from the liquid in the water-cooling pipe, resulting in high heat dissipation efficiency of the device.

[0008] Furthermore, the sealing mechanism includes a screw, which is threadedly connected to the inside of the water inlet. A rotating plate is fixedly connected to the screw, and a rotating block is fixedly connected to the screw. A connecting sleeve contacts the outer side of the rotating block, and a bolt is threadedly connected to the inside of the connecting sleeve. A semi-circular sleeve is fixedly connected to the connecting sleeve, and the water inlet contacts the semi-circular sleeve. A semi-circular sealing sleeve is fixedly connected to the semi-circular sleeve, and the semi-circular sealing sleeve contacts both the water inlet and the cover. By rotating the screw and the water inlet, a threaded movement occurs, causing the screw to rotate and move the semi-circular sealing sleeve and other components. The semi-circular sealing sleeve moves and contacts the cover, thereby sealing the connection between the water inlet and the cover, preventing liquid from flowing out from the connection between the water inlet and the cover.

[0009] Furthermore, the water inlet is in contact with the rotating plate, and a rotating ring is fixedly connected to the side of the rotating plate away from the screw. By designing the rotating ring, the rotating plate can be driven to rotate.

[0010] Furthermore, the inlet is internally fitted with an elastic locking block, which is fixedly connected to the rotating plate. By designing the elastic locking block, the rotating plate can be limited.

[0011] Furthermore, the rotating block has an annular groove inside, and a bolt is slidably connected inside the annular groove. By designing the bolt, the rotating block and the connecting sleeve can be connected.

[0012] Furthermore, the blower mechanism includes a heat-collecting sleeve, which is fixedly connected to the outer side of the water-cooling pipe. The heat-collecting sleeve is in contact with the mold. A heat-conducting plate is fixedly connected to the outer side of the heat-collecting sleeve, and the heat-conducting plate is in contact with the mold. A heat-conducting block is fixedly connected to the lower end of the heat-conducting plate. A fan is fixedly installed inside the base, and an annular filter screen is fixedly connected to the upper end of the base, with the annular filter screen in contact with the mold. By activating the fan, the fan rotates and blows air onto the heat-conducting block, thereby dissipating heat from the heat-collecting sleeve and other components, and further dissipating heat from the liquid inside the water-cooling pipe, resulting in high heat dissipation efficiency of the device.

[0013] Furthermore, a filter screen is fixedly connected inside the base. The filter screen is made of iron, which makes it more durable. Attached Figure Description

[0014] Figure 1 This is a perspective view of the overall structure of an embodiment of the present utility model;

[0015] Figure 2 This is an embodiment of the present utility model. Figure 1 Partial sectional perspective view of the structure;

[0016] Figure 3 This is an embodiment of the present utility model. Figure 1 A front sectional view;

[0017] Figure 4 This is an embodiment of the present utility model. Figure 2 Enlarged view of the cover;

[0018] Figure 5 This is an embodiment of the present utility model. Figure 4 Enlarged view of point A.

[0019] The following detailed description illustrates the specific implementation method:

[0020] The reference numerals in the accompanying drawings include: mold 1, water cooling pipe 2, water inlet 3, cover 4, threaded sleeve 5, sealing mechanism 6, screw 61, rotating plate 62, rotating ring 63, elastic locking block 64, rotating block 65, annular groove 66, bolt 67, connecting sleeve 68, semi-circular sleeve 69, semi-circular sealing sleeve 610, water pump 7, support block 8, base 9, blower mechanism 10, heat collecting sleeve 101, heat conducting plate 102, heat conducting block 103, fan 104, filter screen 105, and annular filter screen 106. Detailed Implementation

[0021] The basic implementation examples are as follows: Figure 1 — Figure 5 As shown, this embodiment provides a water-cooled structure for an ion implantation production mold, including a mold 1. A water-cooling pipe 2 is provided inside the mold 1. An inlet 3 is fixedly connected to the water-cooling pipe 2. The inlet 3 is fixedly connected inside the mold 1. A cover 4 is in contact with the inside of the inlet 3. A threaded sleeve 5 is threadedly connected inside the inlet 3. The threaded sleeve 5 is fixedly connected to the cover 4. A sealing mechanism 6 is provided inside the inlet 3. A water pump 7 is provided on the water-cooling pipe 2. The mold 1 is in contact with the water pump 7. A support block 8 is fixedly connected to the lower end of the mold 1. A base 9 is fixedly connected to the lower end of the support block 8. A blower mechanism 10 is provided inside the base 9.

[0022] The basic implementation examples are as follows: Figure 4 , Figure 5As shown, the sealing mechanism 6 includes a screw 61. The screw 61 is threadedly connected to the inside of the water inlet 3. A rotating plate 62 is fixedly connected to the screw 61, and the water inlet 3 contacts the rotating plate 62. A rotating ring 63 is fixedly connected to the side of the rotating plate 62 away from the screw 61. By designing the rotating ring 63, the rotating plate 62 can be rotated. An elastic locking block 64 is engaged inside the water inlet 3 and is fixedly connected to the rotating plate 62. By designing the elastic locking block 64, the rotating plate 62 can be limited. A rotating block 65 is fixedly connected to the screw 61. An annular groove 66 is opened inside the rotating block 65. A bolt 67 is slidably connected inside the annular groove 66. By designing the bolt 67, the rotating block 65 and the connecting ring 65 can be engaged. The connecting sleeve 68 is connected to the outer side of the rotating block 65. The connecting sleeve 68 is connected to the inside of the connecting sleeve 68 by a bolt 67 through a thread. A semi-circular sleeve 69 is fixedly connected to the connecting sleeve 68. The water inlet 3 is in contact with the semi-circular sleeve 69. A semi-circular sealing sleeve 610 is fixedly connected to the semi-circular sleeve 69. The semi-circular sealing sleeve 610 is in contact with the water inlet 3 and the cover 4. By rotating the screw 61, the threaded movement occurs between the screw 61 and the water inlet 3. The rotation of the screw 61 drives the semi-circular sealing sleeve 610 and other components to move. The semi-circular sealing sleeve 610 moves and contacts the cover 4, thereby sealing the connection between the water inlet 3 and the cover 4 and preventing liquid in the device from flowing out from the connection between the water inlet 3 and the cover 4.

[0023] The basic implementation examples are as follows: Figure 3 As shown, the blower mechanism 10 includes a heat collection jacket 101. The heat collection jacket 101 is fixedly connected to the outside of the water-cooling pipe 2 and contacts the mold 1. A heat-conducting plate 102 is fixedly connected to the outside of the heat collection jacket 101 and contacts the mold 1. A heat-conducting block 103 is fixedly connected to the lower end of the heat-conducting plate 102. A fan 104 is fixedly installed inside the base 9. A filter screen 105 is fixedly connected inside the base 9. The filter screen 105 is made of iron. By designing the filter screen 105 to be made of iron, the filter screen 105 becomes more durable. An annular filter screen 106 is fixedly connected to the upper end of the base 9 and contacts the mold 1. By starting the fan 104, the fan 104 rotates and blows air onto the heat-conducting block 103, thereby dissipating heat from the heat collection jacket 101 and other components, and dissipating heat from the liquid in the water-cooling pipe 2, resulting in high heat dissipation efficiency of the device.

[0024] The specific implementation process of this utility model is as follows: When the device is in use, the cover 4 is moved, which drives the threaded sleeve 5 to move. The cover 4 moves to the water inlet 3, and the threaded sleeve 5 moves to contact the water inlet 3. Then, the cover 4 is rotated, which drives the threaded sleeve 5 to rotate. The threaded sleeve 5 rotates and makes threaded movement with the water inlet 3. The cover 4 and the threaded sleeve 5 rotate to the designated position inside the water inlet 3. Then, the rotating ring 63 is rotated, which drives the rotating plate 62. The rotating plate 62 rotates and drives the screw 61 to rotate. The screw 61 rotates and makes threaded movement with the water inlet 3, thereby causing the screw 61 to generate relative displacement. The screw 61 rotates and drives the rotating block 65 and the connecting sleeve 68 to move. The connecting sleeve 68 moves and drives the semi-circular sleeve 69 to move. The semi-circular sleeve 69 moves and drives the semi-circular sealing sleeve 610 to move. The semi-circular sealing sleeve 610 moves and contacts the cover 4, thereby sealing the connection between the water inlet 3 and the cover 4 and preventing the liquid on the device from flowing out from the connection between the water inlet 3 and the cover 4.

[0025] When the liquid in the water-cooled pipe 2 of the device becomes overheated, the fan 104 is started. The fan 104 rotates to blow air onto the heat-conducting block 103. The filter screen 105 and the annular filter screen 106 filter the outside air, thereby preventing impurities in the outside air from entering. This allows the heat-conducting block 103 to dissipate heat, which in turn allows the heat-conducting plate 102 and the heat-collecting jacket 101 to dissipate heat, and in turn, dissipates the liquid in the water-cooled pipe 2, resulting in high heat dissipation efficiency of the device.

[0026] This design incorporates components such as a screw 61, a rotating plate 62, a rotating ring 63, an elastic locking block 64, a rotating block 65, and an annular groove 66. The rotating screw 61 engages with the inlet 3 via a threaded motion. This rotation causes components such as a semi-circular sealing sleeve 610 to move, contacting the cover 4 and sealing the connection between the inlet 3 and the cover 4. This prevents liquid from leaking out from the connection point. Furthermore, the design includes components such as a heat-collecting jacket 101, a heat-conducting plate 102, a heat-conducting block 103, a fan 104, a filter screen 105, and an annular filter screen 106. When the fan 104 is activated, it blows air onto the heat-conducting block 103, thereby dissipating heat from the heat-collecting jacket 101 and other components, and consequently, from the liquid inside the water-cooling pipe 2, resulting in high heat dissipation efficiency.

[0027] The above descriptions are merely embodiments of this utility model, and common knowledge regarding specific structures and characteristics is not elaborated upon here. It should be noted that those skilled in the art can make various modifications and improvements without departing from the structure of this utility model, and these should also be considered within the scope of protection of this utility model. These modifications will not affect the effectiveness of the implementation of this utility model or the practicality of the patent. The scope of protection claimed in this application shall be determined by the content of its claims, and the specific embodiments described in the specification can be used to interpret the content of the claims.

Claims

1. A mold water cooling structure for ion implantation production, comprising a mold, characterized by: The inside of the mold is provided with a water cooling pipe, the water cooling pipe is fixedly connected with a water inlet, the inside of the mold is fixedly connected with a water inlet, the inside of the water inlet is in contact with a cover, the inside of the water inlet is connected with a threaded sleeve through a threaded connection, the threaded sleeve is fixedly connected with the cover, the inside of the water inlet is provided with a sealing mechanism, the water cooling pipe is provided with a water pump, the mold is in contact with the water pump, the lower end of the mold is fixedly connected with a support block, the lower end of the support block is fixedly connected with a base, the inside of the base is provided with a blowing mechanism.

2. The mold water cooling structure for ion implantation production according to claim 1, characterized by: The sealing mechanism comprises a screw rod, the inside of the water inlet is connected with a screw rod through a threaded connection, the screw rod is fixedly connected with a rotating plate, the screw rod is fixedly connected with a rotating block, the outside of the rotating block is in contact with a connecting sleeve, the inside of the connecting sleeve is connected with a bolt through a threaded connection, the connecting sleeve is fixedly connected with a semicircular sleeve, the water inlet is in contact with the semicircular sleeve, the semicircular sleeve is fixedly connected with a semicircular sealing sleeve, the semicircular sealing sleeve is in contact with the water inlet, and the semicircular sealing sleeve is in contact with the cover.

3. The mold water cooling structure for ion implantation production according to claim 2, characterized by: The water inlet is in contact with the rotating plate, and the side of the rotating plate away from the screw rod is fixedly connected with a rotating ring.

4. The mold water cooling structure for ion implantation production according to claim 2, characterized by: The inside of the water inlet is clamped with an elastic clamping block, and the elastic clamping block is fixedly connected with the rotating plate.

5. The mold water cooling structure for ion implantation production according to claim 2, characterized by: The inside of the rotating block is provided with an annular groove, and the inside of the annular groove is slidably connected with a bolt.

6. The mold water cooling structure for ion implantation production according to claim 1, characterized by: The blowing mechanism comprises a heat collecting sleeve, the outside of the water cooling pipe is fixedly connected with a heat collecting sleeve, the heat collecting sleeve is in contact with the mold, the outside of the heat collecting sleeve is fixedly connected with a heat conducting plate, the heat conducting plate is in contact with the mold, the lower end of the heat conducting plate is fixedly connected with a heat conducting block, the inside of the base is fixedly installed with a fan, the upper end of the base is fixedly connected with an annular filter screen, and the annular filter screen is in contact with the mold.

7. The mold water cooling structure for ion implantation production according to claim 6, characterized by: The inside of the base is fixedly connected with a filter screen, and the filter screen is made of iron material.

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