Separating device for electrostatic chuck

Abstract

The separating device for the electrostatic chuck comprises a workbench, a constant-speed moving assembly is fixedly installed on the top of the workbench, a stabilizing assembly is arranged below the constant-speed moving assembly, a dismounting and mounting assembly is arranged on one side of the constant-speed moving assembly, and a clamping assembly is fixedly installed on the top of the workbench. The constant-speed moving assembly comprises a fixing plate and a threaded rod, the fixing plate is fixedly installed at the top of the workbench, the threaded rod is connected to one side of the fixing plate through a bearing, and one end of the threaded rod is fixedly connected with a grooved wheel. According to the separation device for the electrostatic chuck, through the arrangement of the constant-speed moving assembly, tool separation is controlled at a constant speed in the separation process of the electrostatic chuck, so that the electrostatic chuck has a better separation effect, the speed is easy to control, the electrostatic chuck cannot be scratched in the separation process, the quality of the electrostatic chuck is better, and the use effect is effectively guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of electrostatic chuck technology, specifically to a separation device for electrostatic chucks. Background Technology

[0002] The background technology of electrostatic chucks involves several aspects, which are detailed below: Technical Principle Background: Electrostatic chucks operate based on the principle of electrostatic adsorption. Its theoretical basis is Coulomb's law and Lorentz's law. Coulomb's law states that the interaction force between two stationary point charges in a vacuum is directly proportional to the product of their charges and inversely proportional to the square of the distance between them. When a charged object approaches an uncharged object, electrostatic induction occurs, causing the uncharged object to accumulate charges of opposite polarity on the side closest to the charged object, thus producing an electrostatic adsorption phenomenon. The electrostatic chuck converts DC voltage into high-voltage static electricity through an electrostatic adsorption controller. This static electricity, through the electrostatic adsorption unit, forms an electrostatic magnetic field, enabling the adsorption of conductive or non-conductive objects.

[0003] Patent publication number "CN222471376U" discloses "A separation device for an electrostatic chuck, belonging to the field of electrostatic chuck technology, including a support assembly. The support assembly includes a first support rod and a second support rod, with a separation wire between the first and second support rods. A support assembly for supporting the electrostatic chuck is located above the separation wire. The electrostatic chuck is tilted above the separation wire, and the separation wire is also connected to a heating wire. By setting the separation wire, the electrostatic chuck substrate and ceramic plate can be separated, while avoiding damage to the ceramic plate during the separation process. With the separation wire and heating wire, the electrostatic chuck above it moves downward slowly under the action of gravity and separates gradually. The electrostatic chuck is tilted above the separation wire, and the separation wire is in contact with the substrate more often, avoiding damage to the ceramic plate during the separation process."

[0004] In the aforementioned patent, the existing separation device does not have a good uniform speed separation function, which can easily damage the electrostatic chuck during actual use, affecting the performance. It also does not have a good quick tool disassembly function, which makes disassembly troublesome when the tool is not sharp enough, thus affecting disassembly and grinding.

[0005] To address these issues, this invention provides a separation device for electrostatic chucks. Utility Model Content

[0006] To address the shortcomings of existing technologies, this utility model provides a separation device for electrostatic chucks, which solves the problem that the existing separation devices do not have a good uniform separation function and are prone to damaging the electrostatic chuck during actual use, thus affecting the performance.

[0007] To achieve the above objectives, this utility model provides the following technical solution: a separation device for an electrostatic chuck, comprising a worktable, a uniform speed moving component fixedly mounted on the top of the worktable, a stabilizing component disposed below the uniform speed moving component, a disassembly and assembly component disposed on one side of the uniform speed moving component, and a clamping component fixedly mounted on the top of the worktable; the uniform speed moving component comprises a fixed plate and a threaded rod, the fixed plate being fixedly mounted on the top of the worktable, the threaded rod being connected to one side of the fixed plate via a bearing, a grooved wheel being fixedly connected to one end of the threaded rod, a moving plate being threadedly connected to the side wall of the threaded rod, a motor being fixedly mounted on the top of the worktable, a circular block being fixedly connected to the output end of the motor, a connecting rod being fixedly connected to one side of the circular block, a sliding rod being fixedly connected to one side of the connecting rod, and the sliding rod being slidably connected to the grooved wheel.

[0008] Furthermore, the stabilizing component includes a slider and a groove. The slider is fixedly installed on the bottom of the moving plate, and the groove is formed on the top of the worktable. The slider and the groove are slidably connected.

[0009] By adopting the above technical solution, stability can be improved, making the product more stable in use.

[0010] Furthermore, the disassembly and assembly assembly includes a rectangular groove and a sliding plate. The rectangular groove is formed on one side of the movable plate, and the sliding plate is slidably connected to one side of the rectangular groove. A connecting plate is fixedly installed on one side of the sliding plate, a spring is fixedly connected to one side of the connecting plate, and a locking rod is fixedly connected to one side of the spring. A blade is provided below the connecting plate, and a connecting block is fixedly connected to the top of the blade. The locking rod and the connecting block are engaged with each other.

[0011] The above technical solution enables rapid disassembly and assembly, making the process more convenient.

[0012] Furthermore, the assembly / disassembly assembly also includes a limiting plate, which is fixedly installed on one side of the movable plate and is located below the blade.

[0013] The above technical solution can achieve a limiting effect, making installation and disassembly more convenient.

[0014] Furthermore, the assembly / disassembly assembly also includes a limiting ring, which is fixedly installed on one side of the connecting plate, and the spring is located inside the limiting ring.

[0015] The above technical solution can achieve a good disassembly and assembly effect.

[0016] Furthermore, the clamping assembly includes an electric push rod and a clamping plate. The electric push rod is fixedly installed on the top of the worktable, and the clamping plate is fixedly connected to the output end of the electric push rod.

[0017] The above technical solution can clamp the electrostatic chuck body for operation, facilitating subsequent separation.

[0018] Furthermore, an electrostatic chuck body is provided on the top of the workbench, and the electrostatic chuck body is located in the middle of the clamping plate.

[0019] The above technical solution can achieve a good clamping effect.

[0020] Beneficial effects

[0021] This invention provides a separation device for electrostatic chucks. Compared with the prior art, it has the following advantages:

[0022] 1. The separation device for this electrostatic chuck uses a uniform speed moving component to control the separation of the cutting tool at a uniform speed during the separation process, resulting in a better separation effect and easier speed control. It also prevents scratches on the electrostatic chuck during separation, thus improving the quality of the chuck and effectively guaranteeing its performance.

[0023] 2. The electrostatic chuck uses a separation device that allows for quick disassembly of the blades via a set of disassembly and assembly components. During the use of the electrostatic chuck, the blades may wear out or become damaged due to prolonged use, requiring timely replacement. The disassembly and assembly components enable quick blade removal, greatly reducing the time spent on blade replacement and thus minimizing downtime of the entire equipment. This allows the production process to resume normal operation more quickly, ensuring that production tasks proceed as planned and effectively improving overall production efficiency. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0026] Figure 2 This is a utility model Figure 1 Enlarged view of the structure at point A in the middle;

[0027] Figure 3This is a side view of the overall structure of this utility model;

[0028] Figure 4 This is a utility model Figure 3 Enlarged view of the structure at point B.

[0029] In the diagram: 1. Workbench; 2. Uniform speed moving assembly; 21. Fixed plate; 22. Threaded rod; 23. Grooved wheel; 24. Moving plate; 25. Motor; 26. Circular block; 27. Connecting rod; 28. Slide rod; 3. Stabilizing assembly; 31. Slider; 32. Slide groove; 4. Assembly / disassembly assembly; 41. Rectangular groove; 42. Sliding plate; 43. Connecting plate; 44. Spring; 45. Clamping rod; 46. Blade; 47. Connecting block; 48. Limiting plate; 49. Limiting ring; 5. Clamping assembly; 51. Electric push rod; 52. Clamping plate; 6. Electrostatic chuck body. Detailed Implementation

[0030] It should be noted that in the description of the embodiments of this application, the terms "front," "rear," "left," "right," "up," "down," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. The terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two elements. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances.

[0031] The present application will be further described in detail below with reference to the accompanying drawings and embodiments.

[0032] Reference Figures 1 to 4This application provides a separation device for an electrostatic chuck, including a worktable 1. A uniform speed moving component 2 is fixedly installed on the top of the worktable 1, a stabilizing component 3 is arranged below the uniform speed moving component 2, a disassembly and assembly component 4 is arranged on one side of the uniform speed moving component 2, and a clamping component 5 is fixedly installed on the top of the worktable 1. The uniform speed moving component 2 includes a fixed plate 21 and a threaded rod 22. The fixed plate 21 is fixedly installed on the top of the worktable 1, and the threaded rod 22 is connected to one side of the fixed plate 21 through a bearing. A grooved wheel 23 is fixedly connected to the end of the workbench 1. A movable plate 24 is threadedly connected to the side wall of the threaded rod 22. A motor 25 is fixedly installed on the top of the workbench 1. A circular block 26 is fixedly connected to the output end of the motor 25. A connecting rod 27 is fixedly connected to one side of the circular block 26. A sliding rod 28 is fixedly connected to one side of the connecting rod 27. The sliding rod 28 is slidably connected to the grooved wheel 23. The disassembly and assembly assembly 4 also includes a limiting plate 48, which is fixedly installed on one side of the movable plate 24 and is located below the blade 46.

[0033] In this embodiment, the starting motor 25 can drive the circular block 26 to rotate. Then, the circular block 26 will drive the connecting rod 27 and the slide rod 28 to move, so that the slide rod 28 can drive the grooved wheel 23 to rotate. The grooved wheel 23 can drive the moving plate 24 to move through the threaded rod 22, so that the moving plate 24 can drive the slider 31 to slide inside the groove 32. The moving plate 24 can use the blade 46 to uniformly separate the electrostatic chuck body 6, so as to cut its upper and lower parts.

[0034] Reference Figures 1 to 4 In one aspect of this embodiment, the stabilizing component 3 includes a slider 31 and a groove 32. The slider 31 is fixedly installed on the bottom of the moving plate 24, and the groove 32 is opened on the top of the worktable 1. The slider 31 and the groove 32 are slidably connected. The disassembly and assembly component 4 includes a rectangular groove 41 and a sliding plate 42. The rectangular groove 41 is opened on one side of the moving plate 24, and the sliding plate 42 is slidably connected to one side of the rectangular groove 41. A connecting plate 43 is fixedly installed on one side of the sliding plate 42, and a spring 44 is fixedly connected to one side of the connecting plate 43. A locking rod 45 is fixedly connected to one side of the spring 44. A blade 46 is provided below the connecting plate 43, and a connecting block 47 is fixedly connected to the top of the blade 46. The locking rod 45 and the connecting block 47 are engaged. The disassembly and assembly component 4 also includes a limiting ring 49, which is fixedly installed on one side of the connecting plate 43. The spring 44 is located inside the limiting ring 49.

[0035] In this embodiment, pulling the sliding plate 42 can cause the connecting plate 43 to compress the spring 44 and retract, so that the connecting plate 43 can cause the locking rod 45 to separate from the connecting block 47, so that the blade 46 can be disassembled. When the blade 46 is not sharp enough, it can be disassembled and sharpened in time, and the sharpening is simple and convenient.

[0036] Reference Figures 1 to 4 In one aspect of this embodiment, the clamping assembly 5 includes an electric push rod 51 and a clamping plate 52. The electric push rod 51 is fixedly installed on the top of the workbench 1. The clamping plate 52 is fixedly connected to the output end of the electric push rod 51. An electrostatic chuck body 6 is provided on the top of the workbench 1. The electrostatic chuck body 6 is located in the middle of the clamping plate 52.

[0037] In this embodiment, the electrostatic chuck body 6 is first placed on the top of the workbench 1, and then the electric push rod 51 is activated to drive the clamping plate 52 to clamp the electrostatic chuck body 6.

[0038] Working principle: First, place the electrostatic chuck body 6 on the top of the worktable 1. Then, start the electric push rod 51 to drive the clamping plate 52 to clamp the electrostatic chuck body 6. Then, start the motor 25 to drive the circular block 26 to rotate. After that, the circular block 26 will drive the connecting rod 27 and the slide rod 28 to move, so that the slide rod 28 can drive the grooved wheel 23 to rotate. The grooved wheel 23 can drive the moving plate 24 to move through the threaded rod 22. The moving plate 24 can drive the slider 31 to slide inside the groove 32. The moving plate 24 can use the blade 46 to separate the electrostatic chuck body 6 at a uniform speed, so as to cut its upper and lower parts.

[0039] Then, pulling the sliding plate 42 can cause the connecting plate 43 to compress the spring 44 and retract, so that the connecting plate 43 can cause the locking rod 45 to separate from the connecting block 47, so that the blade 46 can be disassembled. When the blade 46 is not sharp enough, it can be disassembled and sharpened in time, and the sharpening is simple and convenient.

[0040] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0041] Although embodiments of this application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A separation device for electrostatic chucks, comprising a table (1), characterized in that: The top of the workbench (1) is fixedly installed with a uniform speed moving assembly (2), the lower portion of the uniform speed moving assembly (2) is provided with a stabilizing assembly (3), one side of the uniform speed moving assembly (2) is provided with a disassembling assembly (4), and the top of the workbench (1) is fixedly installed with a clamping assembly (5). The uniform speed moving assembly (2) comprises a fixed plate (21) and a threaded rod (22), the fixed plate (21) is fixedly installed on the top of the workbench (1), the threaded rod (22) is connected on one side of the fixed plate (21) through a bearing, one end of the threaded rod (22) is fixedly connected with a grooved wheel (23), and the side wall of the threaded rod (22) is threadedly connected with a moving plate (24); the top of the workbench (1) is fixedly installed with a motor (25), the output end of the motor (25) is fixedly connected with a circular block (26), one side of the circular block (26) is fixedly connected with a connecting rod (27), one side of the connecting rod (27) is fixedly connected with a sliding rod (28), and the sliding rod (28) is slidably connected with the grooved wheel (23).

2. The separation device for an electrostatic chuck according to claim 1, characterized by: The stabilizing assembly (3) comprises a sliding block (31) and a sliding groove (32), the sliding block (31) is fixedly installed on the bottom of the moving plate (24), and the sliding groove (32) is formed in the top of the workbench (1); the sliding block (31) is slidably connected with the sliding groove (32).

3. The separation device for an electrostatic chuck according to claim 1, characterized by: The disassembling assembly (4) comprises a rectangular groove (41) and a sliding plate (42), the rectangular groove (41) is formed in one side of the moving plate (24), and the sliding plate (42) is slidably connected on one side of the rectangular groove (41); one side of the sliding plate (42) is fixedly installed with a connecting plate (43), one side of the connecting plate (43) is fixedly connected with a spring (44), one side of the spring (44) is fixedly connected with a clamping rod (45), the lower portion of the connecting plate (43) is provided with a blade (46), the top of the blade (46) is fixedly connected with a connecting block (47), and the clamping rod (45) is clamped with the connecting block (47).

4. The separation device for an electrostatic chuck according to claim 3, characterized by: The disassembling assembly (4) further comprises a limiting plate (48), the limiting plate (48) is fixedly installed on one side of the moving plate (24), and the limiting plate (48) is located below the blade (46).

5. The separation device for an electrostatic chuck according to claim 4, characterized by: The disassembling assembly (4) further comprises a limiting ring (49), the limiting ring (49) is fixedly installed on one side of the connecting plate (43), and the spring (44) is located in the limiting ring (49).

6. The separation device for an electrostatic chuck according to claim 1, characterized by: The clamping assembly (5) comprises an electric push rod (51) and a clamping plate (52), the electric push rod (51) is fixedly installed on the top of the workbench (1), and the clamping plate (52) is fixedly connected with the output end of the electric push rod (51).

7. The separation device for an electrostatic chuck according to claim 6, characterized by: The top of the workbench (1) is provided with an electrostatic chuck body (6), and the electrostatic chuck body (6) is located in the middle of the clamping plate (52).

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