Particle detection device for clean room

Abstract

The utility model relates to the technical field of air purification and detection, and discloses a particle detection device for a clean room, the particle detection device comprises a bottom plate and a mounting base fixedly connected to the bottom plate, and a laser generator is mounted above the mounting base. According to the particle detection device for the clean room, the high-stability laser generator and the high-transmissivity receiving mirror group are adopted, a high-performance detection platform is constructed in combination with the high-performance photoelectric converter, the accuracy and stability of particle detection are remarkably improved, and the particle detection device can also be excellent in performance even in a complex and changeable clean room environment; through cooperation with the arranged collection unit, the device can form an effective particulate matter collection mechanism, the risk of secondary pollution is greatly reduced, the air quality of a clean room is guaranteed, in addition, a processor and a display panel in the device cooperate with each other, it is ensured that the whole detection process is accurate and convenient, the use effect of the device is further optimized, and the use effect of the device is improved. And the device is more practical.

Description

Technical Field

[0001] This application relates to the field of air purification and detection technology, specifically a particle detection device for cleanrooms. Background Technology

[0002] Most particulate matter detection devices currently on the market are based on the laser scattering method. This method involves emitting a laser beam to irradiate particulate matter in the air and determining the size and concentration of the particulate matter based on the intensity of light scattering. This method is widely used in various situations, especially in cleanroom environments where high air quality is required.

[0003] An existing patent (publication number: CN221926037U) discloses a particle detection structure for cleanrooms, including a sampling probe and a vibration sensor. The sampling probe is installed at an air sampling location within the cleanroom for air sampling and is connected to a particle counter via a sampling pipeline. The vibration sensor is installed at or near the sampling probe for vibration detection and is connected to the cleanroom's control system signal. This invention, by adding a vibration sensor to or near the sampling probe and recording the duration of detected vibrations, compares the vibration time with the time when particulate matter exceeds the standard, effectively eliminating or identifying transient factors. This significantly improves the efficiency of particulate matter detection, reduces the difficulty of detection, and to some extent improves the accuracy of particulate matter factor judgment.

[0004] The aforementioned comparative documents failed to effectively handle the particulate matter generated during the detection process. If these particles are not removed in time, they can easily re-enter the cleanroom environment, causing secondary pollution. This not only reduces the effectiveness of the detection but also seriously affects the overall air quality of the cleanroom. To address these issues, a particulate detection device for cleanrooms is proposed. Utility Model Content

[0005] To address the shortcomings of existing technologies, this application provides a particle detection device for cleanrooms, which can improve the stability and reliability of particle detection devices and effectively collect particles generated during the detection process.

[0006] To achieve the above objectives, this application provides the following technical solution: a particle detection device for cleanrooms, comprising a base plate and a mounting base fixedly connected to the base plate. A laser generator is mounted above the mounting base. A bracket is fixedly connected to one side of the base plate. A receiving lens group corresponding to the laser generator is mounted on the inner wall of the bracket. A photoelectric converter for signal conversion is mounted behind the receiving lens group. A collection unit is provided below the receiving lens group. The collection unit includes a collection box fixedly connected to the upper surface of the base plate and a HEPA filter installed on the inner wall of the collection box, as well as an air pump installed on the bottom wall of the collection box. A processor is mounted on one side of the mounting base, and a display panel is embedded on the front of the mounting base.

[0007] The above scheme utilizes a highly stable laser generator, a high-transmittance receiving mirror group, and a high-performance photoelectric converter to construct a highly sensitive detection platform, significantly improving the accuracy and stability of particulate matter detection. It maintains good performance even in complex cleanroom environments. Combined with the set collection unit, it can form an effective particulate matter collection mechanism, greatly reducing the risk of secondary pollution and ensuring the air quality of the cleanroom. The processor and display panel work together to make the entire detection process both accurate and convenient, optimizing the use of the device and making it more practical.

[0008] Furthermore, the photoelectric converter, the air pump, and the display panel are all electrically connected to the processor.

[0009] Through the above scheme, the processor can receive electrical signals from the photoelectric converter, calculate parameters such as the number and size of particulate matter through algorithms, and control the start of the air pump based on the detection results. The display panel can display the particulate matter detection results in real time.

[0010] Furthermore, a limiting groove is formed on the inner wall of the collection box, and the HEPA filter is slidably sleeved on the inner wall of the limiting groove.

[0011] The above method allows for a more stable installation of the HEPA filter in the collection box.

[0012] Furthermore, an air extraction pipe is installed at the top of the collection box, and the output end of the air extraction pipe is located below the receiving mirror assembly.

[0013] The above method allows particulate matter to be drawn into a collection box for separation and storage.

[0014] Furthermore, two reinforcing blocks are fixedly connected to the inner wall of the bracket, and both reinforcing blocks are fixedly connected to the outer surface of the air extraction pipe.

[0015] The above method can reinforce the extraction pipe, thereby improving its stability.

[0016] Furthermore, the output end of the air pump is connected to an air outlet pipe, which passes through the collection box and the bottom plate in sequence and extends to the bottom of the bottom plate.

[0017] The above method allows the filtered gas to be discharged into the cleanroom.

[0018] Furthermore, a sealing cover is bolted to one side of the collection box, and two blocking blocks and one squeezing block are fixedly connected to one side of the sealing cover. The dimensions of the two blocking blocks correspond to the dimensions of the limiting groove.

[0019] The above solution enables the sealing cover to be easily disassembled and reassembled, facilitating the removal of particles collected inside the collection box. Furthermore, the blocking and squeezing blocks ensure that the HEPA filter is more stably contained within the collection box, improving the stability of the HEPA filter during installation.

[0020] Furthermore, the base plate has an opening inside, and support columns are fixedly connected to the four corners of the bottom surface of the base plate.

[0021] The above solution allows air in the cleanroom to flow smoothly through the base plate, and the installation of support columns makes the device more stable on the cleanroom floor.

[0022] Compared with the prior art, the technical solution of this application has the following beneficial effects:

[0023] This particle detection device for cleanrooms employs a high-stability laser generator and a high-transmittance receiving lens assembly, combined with a high-performance photoelectric converter to construct a high-performance detection platform. This significantly improves the accuracy and stability of particle detection, performing excellently even in complex and variable cleanroom environments. By cooperating with the designated collection unit, the device forms an effective particle collection mechanism, greatly reducing the risk of secondary pollution and thus ensuring the air quality of the cleanroom. Furthermore, the processor and display panel within the device work together to ensure that the entire detection process is both accurate and convenient, further optimizing the device's usability and making it more practical. Attached Figure Description

[0024] Figure 1 This is a top view of the overall structure of this application.

[0025] Figure 2 This is a schematic diagram of the overall bottom view of the structure of this application;

[0026] Figure 3 This is a partial cross-sectional view of the structure of this application;

[0027] Figure 4 This is a schematic diagram of the sealing cap structure of this application.

[0028] In the picture:

[0029] 1. Base plate; 2. Mounting base; 3. Laser generator; 4. Bracket; 5. Receiver lens assembly; 6. Photoelectric converter; 7. Collection unit; 701. Collection box; 702. Limiting groove; 703. HEPA filter; 704. Air pump; 705. Air extraction pipe; 706. Air outlet pipe; 707. Sealing cover; 708. Block; 709. Squeezing block; 710. Reinforcing block; 8. Processor; 9. Display panel; 10. Through port; 11. Support column. Detailed Implementation

[0030] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0031] Please see Figure 1 , Figure 2 and Figure 3This embodiment of a particle detection device for a cleanroom includes a base plate 1 and a mounting base 2 fixedly connected to the base plate 1. A laser generator 3 is mounted on top of the mounting base 2. The laser generator 3 is a highly stable single-mode fiber laser to ensure stability and low power consumption during long-term operation. The laser generator 3 can emit a stable laser beam. A bracket 4 is fixedly connected to one side of the base plate 1. A receiving mirror group 5 corresponding to the laser generator 3 is mounted on the inner wall of the bracket 4. The receiving mirror group 5 is made of high-transmittance optical glass to reduce light energy loss. The receiving mirror group 5 can be used to capture scattered light signals. A photoelectric converter 6 is installed behind the receiving mirror group 5 to convert the received light signal into an electrical signal for subsequent processing. A collection unit is provided below the receiving mirror group 5. 7. The collection unit 7 includes a collection box 701 fixedly connected to the upper surface of the base plate 1, a HEPA filter 703 installed on the inner wall of the collection box 701, and an air pump 704 installed on the bottom wall of the collection box 701. The HEPA filter 703 can capture particles with a diameter of 0.3 micrometers or larger with an efficiency of up to 99.97%, realizing the effective recovery of particles. A processor 8 is installed on one side of the mounting base 2, and a display panel 9 is embedded on the front of the mounting base 2. The photoelectric converter 6, the air pump 704, and the display panel 9 are all electrically connected to the processor 8. The processor 8 can receive electrical signals from the photoelectric converter 6, calculate parameters such as the number and size of particles through algorithms, and control the start of the air pump 704 based on the detection results. The display panel 9 can display the particle detection results in real time.

[0032] Please see Figure 1 , Figure 2 and Figure 3The inner wall of the collection box 701 has a limiting groove 702. The HEPA filter 703 is slidably fitted onto the inner wall of the limiting groove 702. The limiting groove 702 allows the HEPA filter 703 to be installed more stably in the collection box 701, while also making it easy to install and remove, enabling regular maintenance and replacement of the HEPA filter 703. An air extraction pipe 705 is installed at the top of the collection box 701. The output end of the air extraction pipe 705 is located below the receiving mirror assembly 5. When the air pump 704 is started, air can be pumped through the air extraction pipe. 705 can suck particulate matter into the collection box 701 for separation and storage. Two reinforcing blocks 710 are fixedly connected to the inner wall of the support 4. Both reinforcing blocks 710 are fixedly connected to the outer surface of the suction pipe 705. By setting the reinforcing blocks 710, the suction pipe 705 can be reinforced, thereby improving the stability of the suction pipe 705. The output end of the suction pump 704 is connected to the exhaust pipe 706. The exhaust pipe 706 passes through the collection box 701 and the bottom plate 1 in sequence and extends to the bottom of the bottom plate 1. By setting the exhaust pipe 706, the filtered gas can be discharged into the clean room.

[0033] Please see Figure 2 , Figure 3 and Figure 4 A sealing cover 707 is bolted to one side of the collection box 701. Two blocking blocks 708 and one squeezing block 709 are fixedly connected to one side of the sealing cover 707. The dimensions of the two blocking blocks 708 correspond to the dimensions of the limiting groove 702. On the one hand, the sealing cover 707 can be easily disassembled and installed, making it convenient to remove the particles collected inside the collection box 701. On the other hand, the blocking blocks 708 and squeezing block 709 can more stably limit the HEPA filter 703 in the collection box 701, improving the stability of the HEPA filter 703 during installation. The bottom plate 1 has an opening 10 inside. Support columns 11 are fixedly connected to the four corners of the bottom surface of the bottom plate 1. The opening 10 allows the air in the clean room to flow smoothly through the bottom plate 1. The support columns 11 make the device more stable on the floor of the clean room.

[0034] It should be noted that the components installed on the upper surface of the base plate 1 are distributed on both sides of the base plate 1. The base plate 1 and the support column 11 are not necessary as they serve as devices to support other components. The above functions can also be achieved by directly installing the components on both sides of the clean room. There are no excessive restrictions on this, and specific operations can be carried out according to the specific situation.

[0035] In this embodiment, a particle detection device for cleanrooms utilizes a high-stability laser generator 3, a high-transmittance receiving mirror group 5, and a high-performance photoelectric converter 6 to construct a highly sensitive detection platform. This significantly improves the accuracy and stability of particle detection, maintaining good performance even in complex cleanroom environments. Combined with the set collection unit 7, it forms an effective particle collection mechanism, greatly reducing the risk of secondary pollution and ensuring the air quality of the cleanroom. The processor 8 and display panel 9 work together to make the entire detection process both accurate and convenient, optimizing the device's usability and making it more practical.

[0036] The working principle of the above embodiment is as follows: Before the operation begins, the air pump 704 is started to preheat for a few minutes to ensure that the pipeline is unobstructed. Then, the laser generator 3 is turned on to emit a stable laser beam into the air. When a particulate matter passes through the laser beam area, light scattering occurs. The receiving mirror group 5 captures the scattered light and transmits it to the photoelectric converter 6. The latter converts the light signal into an electrical signal and sends it to the processor 8. The processor 8 can amplify, filter and perform a series of processes on the received electrical signal to calculate the specific characteristic value of the particulate matter and present it to the user through the display panel 9. At the same time, once a particulate matter is detected, the air pump 704 responds immediately and quickly draws air containing particulate matter into the collection box 701 through the air extraction pipe 705. The particulate matter is then filtered through the HEPA filter 703 to achieve effective collection of particulate matter.

[0037] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0038] Although embodiments of this application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A particle detection device for a clean room, comprising a base plate (1) and a mounting base (2) fixedly connected to the base plate (1), characterized in that: The upper side of the mounting base (2) is provided with a laser generator (3), one side of the bottom plate (1) is fixedly connected with a support (4), the inner wall of the support (4) is provided with a receiving mirror group (5) corresponding to the laser generator (3), the rear of the receiving mirror group (5) is provided with a photoelectric converter (6) for converting signals, the lower side of the receiving mirror group (5) is provided with a collecting unit (7), the collecting unit (7) comprises a collecting box (701) fixedly connected to the upper surface of the bottom plate (1), a HEPA filter screen (703) installed on the inner wall of the collecting box (701), and a gas suction pump (704) installed on the inner bottom wall of the collecting box (701), one side of the mounting base (2) is provided with a processor (8), and the front of the mounting base (2) is inlaid with a display panel (9).

2. The particle detection device for a clean room according to claim 1, wherein: The photoelectric converter (6), the gas suction pump (704) and the display panel (9) are electrically connected with the processor (8).

3. The particle detection device for a cleanroom of claim 1, wherein: The inner wall of the collecting box (701) is provided with a limiting groove (702), and the HEPA filter screen (703) is slidably arranged in the inner wall of the limiting groove (702).

4. The particle detection device for a cleanroom of claim 1, wherein: The top end of the collecting box (701) is provided with a gas suction pipe (705), and the output end of the gas suction pipe (705) is located below the receiving mirror group (5).

5. A particle detection device for a clean room according to claim 4, wherein: The inner wall of the support (4) is fixedly connected with two reinforcing blocks (710), and the two reinforcing blocks (710) are fixedly connected with the outer surface of the gas suction pipe (705).

6. The particle detection device for a cleanroom of claim 1, wherein: The output end of the gas suction pump (704) is communicated with an air outlet pipe (706), the air outlet pipe (706) penetrates the collecting box (701) and the bottom plate (1) in sequence and extends below the bottom plate (1).

7. The particle detection device for a cleanroom of claim 2, wherein: One side of the collecting box (701) is provided with a sealing cover (707) through bolts, one side of the sealing cover (707) is fixedly connected with two blocking blocks (708) and an extrusion block (709), and the sizes of the two blocking blocks (708) correspond to the size of the limiting groove (702).

8. The particle detection device for a cleanroom of claim 1, wherein: The inner part of the bottom plate (1) is provided with a through hole (10), and the bottom surface of the bottom plate (1) is fixedly connected with a supporting column (11) at four corners.

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