Snowflake dry ice generating device

Abstract

The utility model relates to the technical field of semiconductor mold cleaning, and provides a snowflake dry ice generating device which comprises an equipment body, a dry ice processing box and a dry ice discharging piece, the dry ice processing box comprises a box body, a partition plate, a cutter disc and a sieve plate, the box body is arranged on the equipment body, and the partition plate is arranged in the box body. Dry ice located in the upper cavity of the box body is cut up through the cutter disc, the cut-up dry ice is borne and screened through the screen plate, so that the cut-up dry ice meets the specified small-size requirement and is stored in the lower cavity of the dry ice treatment box, and the dry ice conveying pipeline is communicated with the discharging opening and the dry ice discharging piece; according to the dry ice processing device, the dry ice discharging piece is arranged, so that snowflake dry ice located in the lower cavity of the dry ice processing box is sprayed out from the dry ice discharging piece, the sprayed dry ice is small-size dry ice after being screened by the screen plate, the small-size dry ice can cover special-shaped cracks in the surface of the semiconductor mold, and therefore the cleaning effect on the semiconductor mold is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor mould cleaning technical field especially relates to a snowflake dry ice generating device. BACKGROUND

[0002] Semiconductor mold cleaning is an important link in the semiconductor manufacturing process, involving the cleaning and maintenance of the mold surface to ensure product quality and production efficiency. Semiconductor manufacturing usually includes multiple steps such as photolithography, etching, ion implantation and chemical vapor deposition, etc. In these processes, the semiconductor mold will contact various chemicals and materials, which are prone to accumulate dirt, residues and particles, etc.

[0003] At present, the semiconductor mold is usually cleaned by dry ice on the market. When dry ice cleaning is performed, dry ice is sprayed onto the mold surface to produce a physical reaction of temperature difference (different materials have different shrinkage rates) to make the dirt separate; when dry ice particles at-78 degrees Celsius contact the surface of the dirt, they become brittle and explode, causing the dirt to shrink and loosen, the dry ice particles immediately vaporize and expand 800 times, generating strong peeling force to quickly remove the dirt, making the dirt completely fall off the mold surface, thereby achieving a fast, efficient, safe and energy-saving cleaning effect.

[0004] The invention with publication number CN102205288B proposes a dry ice particle spraying device that can efficiently form dry ice particles that are softer than granular dry ice and harder than snow-like dry ice from liquid carbon dioxide, and can spray the dry ice particles out in a effortless state. The dry ice particle spraying device includes: a liquid carbon dioxide supply source; a gas-liquid carbon dioxide supply flow path; a pressure reduction part; a dry ice particle generating part; and a dry ice particle introduction flow path, and the dry ice particle generating part has a dry ice particle generating element. However, the existing dry ice spraying device for semiconductor mold cleaning sprays dry ice in block form, and the blocky dry ice cannot cover the irregular gaps between the semiconductor mold, the above-mentioned dry ice particle spraying device cannot perform dry ice cutting and screening treatment before dry ice spraying, resulting in large volume of blocky dry ice sprayed, which in turn leads to the technical problem of poor cleaning effect of the sprayed dry ice on the semiconductor mold. Therefore, the present scheme proposes a snowflake dry ice generating device to solve the above-mentioned problems. UTILITY MODEL CONTENTS

[0005] In view of this, the present invention proposes a snowflake dry ice generating device. A cutting disc shreds the dry ice located in the upper cavity of the chamber, and a sieve plate sieves the shredded dry ice. The sieved small-sized dry ice falls into the lower cavity of the dry ice processing chamber. Simultaneously, the sieve plate carries the still relatively large dry ice after shredding and continues to be shredded by the cutting disc until the shredded dry ice reaches the specified small size requirement before falling from the sieve plate and being stored in the lower cavity of the dry ice processing chamber. This completes the feeding process of small-sized dry ice into the lower cavity of the chamber. By connecting the dry ice conveying pipeline to the outlet and the dry ice discharge component, the snowflake dry ice located in the lower cavity of the dry ice processing chamber is sprayed out from the dry ice discharge component. The sprayed dry ice, after being sieved by the sieve plate, is all small-sized dry ice. The small-sized dry ice can cover the irregular crevices on the surface of the semiconductor mold, thereby increasing the cleaning effect on the semiconductor mold.

[0006] The technical solution of this utility model is achieved as follows: This utility model provides a snowflake dry ice generating device, including a device body, a dry ice processing box, and a dry ice discharging component. The dry ice processing box includes a box body, a partition, a cutting disc, and a sieve plate.

[0007] A housing is disposed on the main body of the equipment, and the partition is disposed inside the housing to divide the inner cavity of the housing into an upper cavity and a lower cavity;

[0008] A cutting disc is rotatably mounted inside the upper cavity of the housing, used to cut the dry ice inside the upper cavity of the housing;

[0009] The partition plate has a discharge hole that connects to the upper and lower cavities of the box body. The sieve plate is set in the discharge hole for screening the dry ice that has been shredded by the cutter disc.

[0010] A dry ice discharge component is installed on the main body of the equipment, and a discharge port is opened in the lower cavity of the housing. An external dry ice conveying pipeline connects the discharge port and the dry ice discharge component, which is used to spray dry ice.

[0011] Based on the above technical solutions, preferably, the sieve plate is a grid plate, and the sieve plate has a plurality of square sieve holes.

[0012] Based on the above technical solutions, preferably, the dry ice dispensing component includes an assembly tube, a connector, and a dispensing nozzle, wherein,

[0013] The assembly tube, connector, and discharge nozzle are interconnected, and the side wall of the connector is threaded. The assembly tube and the discharge nozzle are threaded to both ends of the connector, and the assembly tube is provided with an inlet for connecting to an external dry ice delivery pipeline.

[0014] Based on the above technical solutions, preferably, the discharge nozzle includes a horizontal discharge section, a connecting section, and a vertical discharge section, wherein,

[0015] The horizontal discharge section extends in the width direction of the equipment body, the vertical discharge section extends in the height direction of the equipment body, and the connecting section is disposed between the horizontal discharge section and the vertical discharge section and communicates with the horizontal discharge section and the vertical discharge section.

[0016] Based on the above technical solutions, preferably, the connecting part is arc-shaped.

[0017] Based on the above technical solutions, preferably, the longitudinal discharge section has a nozzle for dry ice spraying, and the nozzle is conical in shape.

[0018] Based on the above technical solutions, preferably, it also includes a positioning mechanism, which comprises a first linear module, a second linear module, and a third linear module, wherein...

[0019] The first linear module is slidably disposed on the device body and slides along the length direction of the device body;

[0020] The second linear module is slidably disposed on the device body and slides in the width direction of the device body;

[0021] The third linear module is slidably mounted on the device body and slides along the height direction of the device body, and the dry ice discharge component is mounted on the third linear module.

[0022] Based on the above technical solutions, preferably, the system also includes a rotary motor and a connecting component, wherein,

[0023] A connector is provided on the third linear module, and the dry ice discharge component is rotatably provided on the connector. A rotary motor is provided on the connector and is used to drive the dry ice discharge component to rotate.

[0024] Based on the above technical solutions, preferably, the connector includes a first connector body, wherein,

[0025] A transfer gear is rotatably mounted on the first connecting body. The dry ice discharge part passes through the inside of the transfer gear and is fixedly connected to the transfer gear. A transmission belt is connected between the output shaft of the rotary motor and the transfer gear.

[0026] Based on the above technical solutions, preferably, the connector further includes a second connector, wherein,

[0027] The second connecting body and the first connecting body are distributed in the width direction of the device body. A support bearing is rotatably mounted on the second connecting body. The support bearing is an inner and outer separable bearing. The outer ring of the support bearing is fixedly connected to the second connecting body, and the inner ring of the support bearing is fixedly connected to the dry ice discharge part.

[0028] The snowflake dry ice generating device of this invention has the following advantages over the prior art:

[0029] (1) The dry ice in the upper chamber of the box is shredded by the cutter disc and sieved by the sieve plate. The shredded dry ice falls into the lower chamber of the dry ice processing box. At the same time, the sieve plate carries the dry ice that is still relatively large after shredding and continues to be shredded by the cutter disc until the shredded dry ice reaches the specified small size requirement and then falls from the sieve plate and is stored in the lower chamber of the dry ice processing box. This completes the feeding process of the small-sized dry ice in the lower chamber of the box. By connecting the dry ice conveying pipeline to the outlet and the dry ice discharge part, the snowflake dry ice in the lower chamber of the dry ice processing box is sprayed out from the dry ice discharge part. The sprayed dry ice is sieved by the sieve plate and is all small-sized dry ice. The small-sized dry ice can cover the irregular gaps on the surface of the semiconductor mold, thereby increasing the cleaning effect of the semiconductor mold.

[0030] (2) By setting up dry ice discharge components including assembly tube, connector and discharge nozzle, and both assembly tube and discharge nozzle are threaded to connector, both connector and discharge nozzle can be disassembled. By disassembling discharge nozzle and connector, it is convenient to clean the inner cavity of assembly tube and discharge nozzle, and at the same time, it is convenient to replace and maintain discharge nozzle, making it convenient to use. Attached Figure Description

[0031] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0032] Figure 1 This is a three-dimensional schematic diagram of the snowflake dry ice generating device of this utility model;

[0033] Figure 2 This is a three-dimensional schematic diagram of the structure of the dry ice processing box of the snowflake dry ice generating device of this utility model.

[0034] Figure 3 This invention relates to a snowflake dry ice generating device. Figure 2 An enlarged view of point A is shown below;

[0035] Figure 4 This is a three-dimensional schematic diagram of the adjusting mechanism of the snowflake dry ice generating device of this utility model;

[0036] Figure 5 This is a cross-sectional schematic diagram of the dry ice discharge component of the snowflake dry ice generating device of this utility model;

[0037] Figure 6 This invention relates to a snowflake dry ice generating device. Figure 5 A magnified view of point B shown.

[0038] In the diagram: 1. Equipment body; 2. Dry ice processing box; 21. Box body; 22. Partition plate; 221. Material discharge hole; 23. Cutter disc; 24. Screen plate; 241. Screen hole; 25. Discharge port; 3. Adjustment mechanism; 31. First linear module; 32. Second linear module; 33. Third linear module; 4. Dry ice discharge component; 41. Assembly pipe; 411. Inlet; 42. Connector; 43. Discharge nozzle; 431. Horizontal discharge section; 432. Connecting section; 433. Vertical discharge section; 4331. Spray nozzle; 5. Rotary motor; 6. Connector; 61. First connecting body; 611. Adapter gear; 612. Drive belt; 62. Second connecting body; 621. Support bearing; 7. Limiting frame; 71. Limiting hole. Detailed Implementation

[0039] The technical solutions of this utility model will be clearly and completely described below with reference to the embodiments of this utility model. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of this utility model.

[0040] like Figures 1-6 As shown, the dry ice generating device of this utility model includes a device body 1, a dry ice processing box 2, and a dry ice discharge component 4. The dry ice processing box 2 includes a box body 21, a partition 22, a cutting disc 23, and a sieve plate 24. The box body 21 is mounted on the device body 1, and the partition 22 is located inside the box body 21 to divide the inner cavity of the box body 21 into an upper cavity and a lower cavity. The cutting disc 23 is rotatably mounted in the upper cavity of the box body 21 to cut the dry ice in the upper cavity of the box body 21. The partition 22 has a discharge hole 221 that connects to the upper cavity and the lower cavity of the box body 21. The sieve plate 24 is located in the discharge hole 221 to screen the dry ice cut by the cutting disc 23. The dry ice discharge component 4 is mounted on the device body 1, and a discharge port 25 is located in the lower cavity of the box body 21. An external dry ice conveying pipeline connects the discharge port 25 and the dry ice discharge component 4. The dry ice discharge component 4 is used to spray out dry ice.

[0041] Figure 1 In the middle, the X direction is the length direction of the device body 1, the Y direction is the width direction of the device body 1, and the Z direction is the height direction of the device body 1.

[0042] In practice, the dry ice to be processed is fed into the upper chamber of the dry ice processing box 2. The cutting disc 23, located in the upper chamber, is rotated to shred the dry ice. The shredded dry ice falls from the sieve plate 24 into the lower chamber of the dry ice processing box 2. The sieve plate 24 separates the shredded dry ice, with larger pieces remaining at the top and continuing to be shredded by the cutting disc 23 until they reach the specified small size. The shredded dry ice then falls from the sieve plate 24 and is stored in the lower chamber of the dry ice processing box 2. By connecting the dry ice delivery pipeline to the outlet 25 and the dry ice discharge component 4, the snowflake dry ice in the lower chamber of the dry ice processing box 2 is sprayed out from the dry ice discharge component 4. The sprayed dry ice is sieved by the sieve plate 24 into small-sized pieces. These small pieces of dry ice can cover irregularly shaped gaps on the surface of the semiconductor mold, thereby increasing the cleaning effect on the semiconductor mold.

[0043] In a preferred embodiment, the sieve plate 24 is a grid plate, and the sieve plate 24 has a plurality of square sieve holes 241.

[0044] In a preferred embodiment, the dry ice dispensing component 4 includes an assembly pipe 41, a connector 42, and a dispensing nozzle 43. The assembly pipe 41, the connector 42, and the dispensing nozzle 43 are interconnected. The side wall of the connector 42 is provided with threads. The assembly pipe 41 and the dispensing nozzle 43 are respectively threaded to both ends of the connector 42. The assembly pipe 41 is provided with a feed inlet 411, which is used to connect to an external dry ice conveying pipeline.

[0045] The dry ice discharge component 4 includes an assembly tube 41, a connector 42, and a discharge nozzle 43. Both the assembly tube 41 and the discharge nozzle 43 are threadedly connected to the connector 42. Therefore, both the connector 42 and the discharge nozzle 43 can be disassembled. By disassembling the discharge nozzle 43 and the connector 42, it is convenient to clean the inner cavity of the assembly tube 41 and the discharge nozzle 43, and it is also convenient to replace and maintain the discharge nozzle 43, making it convenient to use.

[0046] In a preferred embodiment, the discharge nozzle 43 includes a horizontal discharge section 431, a connecting section 432, and a vertical discharge section 433. The horizontal discharge section 431 extends in the width direction of the equipment body 1, the vertical discharge section 433 extends in the height direction of the equipment body 1, and the connecting section 432 is disposed between the horizontal discharge section 431 and the vertical discharge section 433 and communicates with the horizontal discharge section 431 and the vertical discharge section 433.

[0047] In practice, the dry ice discharge component 4 is rotatably arranged. The discharge nozzle 43, comprising a horizontal discharge section 431, a connecting section 432, and a vertical discharge section 433, is L-shaped. Furthermore, the rotatable arrangement of the dry ice discharge component 4 allows the rotating nozzle 43 to spray dry ice 360°. This design increases the coverage of the sprayed dry ice.

[0048] In a preferred embodiment, the connecting portion 432 is arc-shaped.

[0049] This design is intended to reduce energy consumption when dry ice flows through the connector 432.

[0050] In a preferred embodiment, the longitudinal discharge section 433 has a nozzle 4331 for dry ice to be sprayed out, and the nozzle 4331 is conical in shape.

[0051] This design is intended to increase the kinetic energy of the dry ice ejected from the nozzle 4331, thereby enhancing the cleaning effect of the dry ice.

[0052] In a preferred embodiment, the device further includes an adjustment mechanism 3, which includes a first linear module 31, a second linear module 32, and a third linear module 33. The first linear module 31 is slidably disposed on the device body 1 and slides along the length direction of the device body 1; the second linear module 32 is slidably disposed on the device body 1 and slides along the width direction of the device body 1; the third linear module 33 is slidably disposed on the device body 1 and slides along the height direction of the device body 1, and the dry ice discharge component 4 is disposed on the third linear module 33.

[0053] It also includes a rotary motor 5 and a connector 6, wherein the connector 6 is disposed on the third linear module 33, and the dry ice discharge part 4 is rotatably disposed on the connector 6, and the rotary motor 5 is disposed on the connector 6 for driving the dry ice discharge part 4 to rotate.

[0054] In specific implementation, by adjusting the first linear module 31 to move in the length direction of the equipment body 1, by adjusting the second linear module 32 to move in the width direction of the equipment body 1, and by adjusting the third linear module 33 to move in the height direction of the equipment body 1, the dry ice discharge component 4 can be moved in the X / Y / Z directions, so that the dry ice discharge component 4 can be moved to any position of the semiconductor module for dry ice sandblasting cleaning.

[0055] In a preferred embodiment, the connector 6 includes a first connector 61, wherein a transfer gear 611 is rotatably mounted on the first connector 61, the dry ice discharge part 4 passes through the inside of the transfer gear 611 and is fixedly connected to the transfer gear 611, and a transmission belt 612 is connected between the output shaft of the rotary motor 5 and the transfer gear 611.

[0056] Specifically, when it is necessary to drive the dry ice dispensing component 4 to rotate, the rotary motor 5 is started. At this time, the rotary motor 5 drives the adapter gear 611 to rotate through the transmission belt 612. The adapter gear 611 drives the dry ice dispensing component 4 to rotate, thereby completing the rotation adjustment process of the dry ice dispensing component 4.

[0057] In a preferred embodiment, the connector 6 further includes a second connector 62, wherein the second connector 62 and the first connector 61 are distributed in the width direction of the device body 1, and a support bearing 621 is rotatably disposed on the second connector 62. The support bearing 621 is an inner and outer separable bearing, the outer ring of the support bearing 621 is fixedly connected to the second connector 62, and the inner ring of the support bearing 621 is fixedly connected to the dry ice discharge part 4.

[0058] In practice, the dry ice discharge component 4 is supported by a support bearing 621 to increase the rotational stability of the dry ice discharge component 4.

[0059] Preferably, the equipment body 1 is provided with a limiting frame 7, and the limiting frame 7 is provided with a limiting hole 71 for the dry ice delivery pipeline to pass through. The limiting frame 7 is used to limit the dry ice delivery pipeline and to increase the connection stability of the dry ice delivery pipeline.

[0060] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A snowflake dry ice generating device, characterized in that: The equipment includes a main body (1), a dry ice processing box (2), and a dry ice discharge device (4). The dry ice processing box (2) includes a box body (21), a partition (22), a cutting disc (23), and a sieve plate (24). A housing (21) is disposed on the equipment body (1), and a partition (22) is disposed inside the housing (21) to divide the inner cavity of the housing (21) into an upper cavity and a lower cavity; The cutting disc (23) is rotatably disposed in the upper cavity of the box (21) and is used to cut the dry ice in the upper cavity of the box (21); The partition plate (22) has a discharge hole (221) that connects to the upper and lower cavities of the box body (21). The sieve plate (24) is set in the discharge hole (221) and is used to screen the dry ice that is cut by the cutter disc (23). A dry ice discharge component (4) is provided on the main body (1) of the equipment, and a discharge port (25) is provided in the lower cavity of the housing (21). An external dry ice conveying pipeline connects the discharge port (25) and the dry ice discharge component (4). The dry ice discharge component (4) is used to spray dry ice.

2. The snowflake dry ice generating apparatus as described in claim 1, characterized in that: The sieve plate (24) is a grid plate, and the sieve plate (24) has a plurality of square sieve holes (241).

3. The snowflake dry ice generating apparatus as described in claim 1, characterized in that: The dry ice discharge component (4) includes an assembly pipe (41), a connector (42), and a discharge nozzle (43), wherein, The assembly tube (41), connector (42) and discharge nozzle (43) are interconnected, and the side wall of the connector (42) is provided with threads. The assembly tube (41) and the discharge nozzle (43) are respectively threaded to the two ends of the connector (42). The assembly tube (41) is provided with a feed port (411), which is used to connect to the external dry ice conveying pipeline.

4. The snowflake dry ice generating apparatus as described in claim 3, characterized in that: The discharge nozzle (43) includes a horizontal discharge section (431), a connecting section (432), and a vertical discharge section (433), wherein, The horizontal discharge section (431) extends in the width direction of the equipment body (1), the vertical discharge section (433) extends in the height direction of the equipment body (1), and the connecting section (432) is disposed between the horizontal discharge section (431) and the vertical discharge section (433) and communicates with the horizontal discharge section (431) and the vertical discharge section (433).

5. The snowflake dry ice generating apparatus as described in claim 4, characterized in that: The connecting part (432) is arc-shaped.

6. The snowflake dry ice generating apparatus as described in claim 4, characterized in that: The longitudinal discharge section (433) has a nozzle (4331) for spraying dry ice, and the nozzle (4331) is conical in shape.

7. The snowflake dry ice generating apparatus as described in claim 1, characterized in that: It also includes a positioning mechanism (3), which comprises a first linear module (31), a second linear module (32), and a third linear module (33), wherein, The first linear module (31) is slidably disposed on the device body (1) and slides along the length direction of the device body (1); The second linear module (32) is slidably disposed on the device body (1) and slides in the width direction of the device body (1); The third linear module (33) is slidably disposed on the device body (1) and slides in the height direction of the device body (1), and the dry ice discharge component (4) is disposed on the third linear module (33).

8. The snowflake dry ice generating apparatus as described in claim 7, characterized in that: It also includes a rotary motor (5) and a connector (6), wherein, A connector (6) is provided on the third linear module (33), and the dry ice discharge part (4) is rotatably provided on the connector (6). The rotary motor (5) is provided on the connector (6) and is used to drive the dry ice discharge part (4) to rotate.

9. The snowflake dry ice generating apparatus as described in claim 8, characterized in that: The connector (6) includes a first connector (61), wherein, A transfer gear (611) is rotatably mounted on the first connecting body (61). The dry ice discharge part (4) passes through the inside of the transfer gear (611) and is fixedly connected to the transfer gear (611). A transmission belt (612) is connected between the output shaft of the rotary motor (5) and the transfer gear (611).

10. The snowflake dry ice generating apparatus as described in claim 9, characterized in that: The connector (6) further includes a second connector (62), wherein, The second connecting body (62) and the first connecting body (61) are distributed in the width direction of the equipment body (1). A support bearing (621) is rotatably provided on the second connecting body (62). The support bearing (621) is an inner and outer separable bearing. The outer ring of the support bearing (621) is fixedly connected to the second connecting body (62), and the inner ring of the support bearing (621) is fixedly connected to the dry ice discharge part (4).

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