Bed material cast ingot hydrogenation equipment after single crystal pulling

Abstract

The utility model relates to the technical field of metal reduction, in particular to equipment for hydrogenating a base material cast ingot after single crystal pulling. A vacuumizing mechanism and a hydrogen inlet pipe are connected to the two sides of the upper portion of the furnace body respectively, the hydrogen inlet pipe is connected with a hydrogen source, an exhaust pipe is connected to the bottom of the furnace body, a heating mechanism is arranged on the periphery of the lower portion of the furnace body, a lifting appliance with the top open is arranged in the furnace body, and a gap is formed between the outer wall of the lifting appliance and the inner wall of the furnace body. A detachable multi-cavity ingot casting module is arranged at the bottom of the inner cavity of the lifting appliance, a placing mechanism is arranged at the top of the multi-cavity ingot casting module and used for placing a backing material, and the center of the bottom of the placing mechanism communicates with the ingot casting mechanism. Deoxidation and ingot casting forming are synchronously completed in a single device, the device is particularly suitable for direct treatment of high-oxygen-content base materials, the problem that in the prior art, the purification efficiency of low-impurity and high-oxygen-content base materials is low is solved, distributed casting of large-size base materials is achieved through the multi-cavity ingot casting module, and the production efficiency is improved. And the inherent defect of insufficient cavity size of zone melting equipment is overcome.

Description

TECHNICAL FIELD

[0001] The utility model relates to metal reduction technical field, concretely is a kind of single crystal pulling after bottom material ingot hydrogenation equipment. BACKGROUND

[0002] With the rapid development of high-tech industries such as semiconductor, photovoltaic, the demand for high-purity single crystal silicon and non-ferrous metal continues to grow. As a key equipment for preparing single crystal materials, the single crystal furnace produces a large amount of residual metal bottom material during the crystal pulling process. These bottom materials are large in size, low in internal impurity content, but high in oxygen content, and direct recycling is difficult. The traditional processing method includes vacuum distillation purification and zone melting, but the former has high energy consumption and long cycle, and the latter is limited by the size of the equipment, making it difficult to handle large pieces of bottom material.

[0003] Currently, the recycling of single crystal furnace bottom material in the industry still faces the following problems: first, the existing vacuum distillation process has low purification efficiency for bottom material with low impurities and high oxygen content; second, the cavity size of the zone melting furnace is limited and cannot accommodate large size bottom material; third, there is a lack of integrated equipment that can both form ingots and effectively remove oxygen. These problems result in a large amount of high-value metal bottom material being idle or being downgraded, causing resource waste. SUMMARY

[0004] The utility model aims at solving the above-mentioned problem, and provides a kind of single crystal pulling after bottom material ingot hydrogenation equipment for effectively processing high-oxygen-content bottom material.

[0005] The utility model solves the problem by adopting the following technical scheme:

[0006] A single crystal pulling after bottom material ingot hydrogenation equipment, comprising a furnace body, the furnace mouth of the furnace body is located at the top, the upper part of the furnace body is connected with a vacuum pumping mechanism and a hydrogen inlet pipe on both sides respectively, the hydrogen inlet pipe is connected with a hydrogen source, the bottom of the furnace body is connected with an exhaust pipe, the outer periphery of the lower part of the furnace body is provided with a heating mechanism, the furnace body is provided with a lifting appliance with an open top, an air gap is formed between the outer wall of the lifting appliance and the inner wall of the furnace body, a detachable multi-cavity ingot mold is arranged at the bottom of the inner cavity of the lifting appliance, a placing mechanism is arranged at the top of the multi-cavity ingot mold, and the placing mechanism is used for placing the bottom material and the bottom center is connected with the ingot forming mechanism.

[0007] The utility model adopting the above technical scheme has the following outstanding features compared with the prior art:

[0008] Through the cooperative design of integrated hydrogenation reaction cavity and multi-cavity ingot mold, deoxygenation and ingot forming are simultaneously completed in a single equipment, which is particularly suitable for direct processing of high-oxygen-content bottom material, solving the problem of low purification efficiency of existing technology for low-impurity, high-oxygen-content bottom material. The multi-cavity ingot mold realizes distributed casting of large-size bottom material, overcoming the inherent defect of insufficient cavity size of zone melting equipment.

[0009] As preferred, the utility model further provides a technical scheme:

[0010] Further, the multi-cavity ingot casting module comprises a graphite outer cylinder placed at the bottom of the inner cavity of the lifting tool, a graphite inner core is arranged in the graphite outer cylinder, a first ingot groove is formed in the middle of the graphite inner core, second ingot grooves are formed on the graphite inner core and located at the outer periphery of the first ingot groove at equal intervals, and an overflow hole is arranged between the top of the first ingot groove and the second ingot groove. The modular design facilitates the replacement of the inner core specifications according to different sizes of the base material, and the overflow hole structure can reasonably distribute the molten metal among the ingot grooves.

[0011] Further, the placing mechanism comprises a graphite tower disc clamped at the top of the graphite outer cylinder, a graphite sleeve is clamped at the top of the graphite tower disc, a gap is arranged between the graphite sleeve and the inner wall of the lifting tool, a ventilation hole is formed in the side wall of the graphite sleeve and communicates with the inside, a quartz bowl is clamped and buckled at the top of the graphite sleeve, the base material is placed on the graphite tower disc, the bottom surface of the graphite tower disc is arc-shaped and a blanking hole is formed in the middle of the arc-shaped bottom surface and communicates with the first ingot groove, the arc-shaped bottom surface is beneficial to the directional flow of the molten metal to the blanking hole, the ventilation hole is arranged to promote the uniform distribution of the hydrogen flow field, and the quartz material can reduce the pollution of the metal melt.

[0012] Further, the vacuum extraction mechanism comprises a vacuum pump, the vacuum pump is connected to the upper part of the furnace body through a corrugated pipe and a rigid vacuum pipe in sequence, a vacuum valve is arranged between the corrugated pipe and the rigid vacuum pipe, a vacuum pressure gauge is arranged on the rigid vacuum pipe, the flexible connection of the corrugated pipe can compensate for the displacement caused by thermal deformation, and the pressure gauge is configured to facilitate real-time monitoring of the vacuum degree.

[0013] Further, the heating mechanism comprises a composite heating sleeve sleeved on the lower part of the furnace body, and a heating power supply is connected to the composite heating sleeve, so that the single crystal base material is melted and cast into an ingot through power supply and heating of the heating mechanism.

[0014] Further, a cooling water jacket is sleeved on the furnace body and located between the heating mechanism and the vacuum extraction mechanism, and a water inlet and a water outlet are arranged on the cooling water jacket, so that the furnace body is cooled in the later stage.

[0015] Further, a stop valve is arranged on each of the hydrogen inlet pipe and the exhaust pipe, a flow meter is arranged on the hydrogen inlet pipe and located between the stop valve and the furnace body, the double-valve design improves the operation safety, and the flow meter is helpful for accurately controlling the hydrogen flow rate. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is a front view of the sectional structure of the utility model embodiment;

[0017] Figure 2 It is a local enlarged structure schematic view of the multi-cavity ingot casting module and the placing mechanism of the utility model embodiment;

[0018] Marked in the figure: furnace body 1, hydrogen inlet pipe 2, exhaust pipe 3, lifting appliance 4, graphite outer cylinder 5, graphite inner core 6, first ingot groove 7, second ingot groove 8, graphite tray 9, graphite sleeve 10, air hole 11, quartz bowl 12, base material 13, material hole 14, corrugated pipe 15, rigid vacuum pipe 16, composite heating sleeve 17, cooling water jacket 18, water tank 19, heating power 20. DETAILED DESCRIPTION

[0019] The utility model will be further explained in connection with the embodiments, the purpose is only in better understanding the utility model content, therefore, the example does not limit the protection scope of the utility model.

[0020] A kind of hydrogenation equipment of ingot casting after pulling single crystal base material, including furnace body 1, furnace mouth of furnace body 1 is located at top, vacuumizing mechanism and hydrogen inlet pipe 2 are connected on the two sides of furnace body 1 upper portion respectively, hydrogen inlet pipe 2 is connected hydrogen source, furnace body 1 bottom is connected with exhaust pipe 3, exhaust pipe 3 extends to high altitude and is discharged, heating mechanism is arranged on the outer periphery of furnace body 1 lower part, furnace body 1 is equipped with the lifting appliance 4 of top open, clearance is equipped between the outer wall of lifting appliance 4 and the inner wall of furnace body 1, the detachable multi-cavity ingot casting module is equipped in the inner chamber of lifting appliance 4, the multi-cavity ingot casting module top is equipped with placing mechanism, placing mechanism is used to place base material 13 and bottom center is connected with ingot casting mechanism.

[0021] Further, the multi-cavity ingot casting module includes graphite outer cylinder 5 placed in the inner chamber bottom of lifting appliance 4, graphite inner core 6 is arranged in graphite outer cylinder 5, first ingot groove 7 is formed in the middle of graphite inner core 6, second ingot groove 8 is arranged on graphite inner core 6 and located at the outer periphery of first ingot groove 7, overflow hole is arranged between the top of first ingot groove 7 and second ingot groove 8, modular design is convenient for replacing graphite inner core 6 specification according to different base material 13 size, overflow hole structure can make molten metal be reasonably distributed between each ingot groove, first ingot groove 7 and second ingot groove 8 are all circular truncated cone cavities of thickening from top to bottom, facilitate demoulding.

[0022] Further, the placing mechanism comprises a graphite tray 9 clamped to the top of the graphite outer cylinder 5, the top outer edge of the graphite outer cylinder 5 is provided with a first clamping groove, the bottom outer edge of the graphite tray 9 is provided with a first clamping ring matched with the first clamping groove, the top of the graphite tray 9 is clamped with a graphite sleeve 10, the top outer edge of the graphite tray 9 is provided with a second clamping groove, the bottom outer edge of the graphite sleeve 10 is provided with a second clamping ring matched with the second clamping groove, a gap is provided between the graphite sleeve 10 and the inner wall of the lifting appliance 4, a ventilation hole 11 is formed in the side wall of the graphite sleeve 10 and communicates with the inside, the quartz bowl 12 is clamped and buckled on the top of the graphite sleeve 10, the top inner edge of the graphite sleeve 10 is provided with a third clamping groove, the quartz bowl 12 is clamped in the third clamping groove, the base material 13 is placed on the graphite tray 9, the bottom surface of the graphite tray 9 is arc-shaped and the middle part of the bottom surface is provided with a material falling hole 14 communicating with the first ingot groove 7, the arc-shaped bottom surface is beneficial to the directional flow of the molten metal to the material falling hole 14, the ventilation hole 11 is arranged to promote the uniform distribution of the hydrogen flow field, and the quartz material can reduce the pollution of the metal melt.

[0023] Further, the vacuum pumping mechanism comprises a vacuum pump connected to the upper part of the furnace body 1 through a corrugated pipe 15 and a rigid vacuum pipe 16 in sequence, a vacuum valve is arranged between the corrugated pipe 15 and the rigid vacuum pipe 16, and a vacuum pressure gauge is arranged on the rigid vacuum pipe 16. The flexible connection of the corrugated pipe 15 can compensate for the displacement caused by thermal deformation, and the pressure gauge is configured to help monitor the vacuum degree in real time.

[0024] Further, the heating mechanism comprises a composite heating sleeve 17 sleeved on the lower part of the furnace body 1, and a heating power supply 20 is connected to the composite heating sleeve 17. The single crystal base material 13 is melted and cast by power supply and heating of the heating mechanism.

[0025] Further, a cooling water jacket 18 is sleeved on the furnace body 1 and located between the heating mechanism and the vacuum pumping mechanism, the cooling water jacket 18 is provided with a water inlet and a water outlet, the cooling water jacket 18 is used for cooling the furnace body 1 in the later stage, one side of the furnace body 1 is provided with a water tank 19, the water tank 19 is provided with a water pump, the water pump is connected to the water inlet, the water outlet is connected to the water tank 19, and a titanium pipe refrigeration evaporator is integrated in the water tank 19. R404A refrigerant is used for phase change heat transfer.

[0026] Further, a stop valve is arranged on each of the hydrogen inlet pipe 2 and the exhaust pipe 3, a 50ML-500ML / Min flowmeter is arranged on the hydrogen inlet pipe 2 and located between the stop valve and the furnace body 1, and the double-valve design improves the operation safety, and the flowmeter helps to accurately control the hydrogen flow rate.

[0027] In operation, first, the high-oxygen-content metal raw material is placed in the quartz bowl, and the sealing and positioning are realized through the clamping structure of the graphite sleeve and the graphite pedestal, and at this time, the air hole keeps the hydrogen flow channel unobstructed; after starting the vacuum pump to create vacuum, the vacuum valve is closed and the hydrogen inlet pipe stop valve is opened, the hydrogen flow is controlled through the flowmeter, and in the heating process of the composite heating jacket, the hydrogen reacts with the oxygen impurities in the raw material to generate water vapor which is discharged along the exhaust pipe; the molten metal is guided by the arc-shaped bottom surface of the graphite pedestal to fall into the multi-cavity ingot casting module through the falling hole, and is evenly distributed between the first ingot groove and the second ingot groove through the overflow hole, and the design of the upper coarse and lower fine circular truncated cone cavity makes the ingot cooling convenient for demolding; then the cooling water jacket rapidly cools the furnace body through circulating water.

[0028] Through the collaborative design of integrating the hydrogenation reaction cavity and the multi-cavity ingot casting module, the deoxidization and ingot forming are simultaneously completed in a single device, which is especially suitable for the direct treatment of high-oxygen-content raw material, solves the problem of low purification efficiency of low-impurity and high-oxygen-content raw material in the prior art, realizes the distributed melting and casting of large-size raw material through the multi-cavity ingot casting module, and overcomes the inherent defects of the insufficient cavity size of the zone melting equipment.

[0029] The above only describes the preferred and feasible embodiments of the present application, and does not limit the scope of the present application, and any equivalent changes made according to the content of the present application and the accompanying drawings are included in the scope of the present application.

Claims

1. A hydrogenation device for bottom material ingot casting after single crystal pulling, comprising a furnace body, wherein the furnace opening is located at the top, characterized in that: The upper part of the furnace body is connected to a vacuuming mechanism and a hydrogen inlet pipe on both sides. The hydrogen inlet pipe is connected to a hydrogen source. The bottom of the furnace body is connected to an exhaust pipe. A heating mechanism is set on the outer periphery of the lower part of the furnace body. The furnace body is equipped with a top-opening lifting device. There is a gap between the outer wall of the lifting device and the inner wall of the furnace body. The bottom of the inner cavity of the lifting device is equipped with a detachable multi-cavity ingot casting module. The top of the multi-cavity ingot casting module is equipped with a placement mechanism. The placement mechanism is used to place the bottom material and its bottom center is connected to the ingot casting mechanism.

2. The hydrogenation equipment for the substrate ingot after single crystal pulling according to claim 1, characterized in that: The multi-cavity ingot casting module includes a graphite outer cylinder placed at the bottom of the inner cavity of the lifting device, a graphite inner core inside the graphite outer cylinder, a first ingot groove in the middle of the graphite inner core, and a second ingot groove at equal intervals on the graphite inner core and located on the outer periphery of the first ingot groove. An overflow hole is provided between the top of the first ingot groove and the second ingot groove.

3. The hydrogenation equipment for the substrate ingot after single crystal pulling according to claim 2, characterized in that: The placement mechanism includes a graphite tray that snaps into the top of the graphite outer cylinder, a graphite sleeve that snaps into the top of the graphite tray, a gap between the graphite sleeve and the inner wall of the lifting device, a vent hole that communicates with the interior on the side wall of the graphite sleeve, a quartz bowl that snaps into the top of the graphite sleeve, and the bottom material that is placed on the graphite tray. The bottom surface of the graphite tray is arc-shaped and a material drop hole that communicates with the first ingot groove is opened in the middle of the bottom surface.

4. The hydrogenation equipment for the substrate ingot after single crystal pulling according to claim 1, characterized in that: The vacuum pumping mechanism includes a vacuum pump, which is connected to the upper part of the furnace body in sequence through a bellows and a rigid vacuum tube. A vacuum valve is installed between the bellows and the rigid vacuum tube, and a vacuum pressure gauge is installed on the rigid vacuum tube.

5. The hydrogenation equipment for the substrate ingot after single crystal pulling according to claim 1, characterized in that: The heating mechanism includes a composite heating jacket fitted at the bottom of the furnace body, and a heating power supply is connected to the composite heating jacket.

6. The hydrogenation equipment for the substrate ingot after single crystal pulling according to claim 1, characterized in that: A cooling water jacket is installed on the furnace body between the heating mechanism and the vacuum mechanism, and the cooling water jacket is provided with a water inlet and a water outlet.

7. The hydrogenation equipment for the substrate ingot after single crystal pulling according to claim 1, characterized in that: Both the hydrogen inlet pipe and the exhaust pipe are equipped with shut-off valves, and a flow meter is installed on the hydrogen inlet pipe between the shut-off valve and the furnace body.

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