Phosphorus supply device, phosphorus doping system and solar cell manufacturing production line

Abstract

The utility model relates to a phosphorus supply device, a phosphorus doping system and a solar cell manufacturing production line. The phosphorus supply device comprises a plurality of phosphorus supply assemblies, each phosphorus supply assembly comprises a phosphorus supply container, a phosphorus supply air inlet pipe and a phosphorus supply air outlet pipe, and the phosphorus supply air inlet pipes and the phosphorus supply air outlet pipes are both communicated with the phosphorus supply containers; the phosphorus supplementing assembly comprises a phosphorus supplementing container, a phosphorus supplementing air inlet pipe and a phosphorus supplementing pipeline unit, the phosphorus supplementing air inlet pipe is communicated with the phosphorus supplementing container, and the phosphorus supplementing container is communicated with all the phosphorus supplying containers through the phosphorus supplementing pipeline unit; wherein the phosphorus supply gas inlet pipe and the phosphorus supplement gas inlet pipe are used for inputting bubbling gas into the phosphorus supply container and the phosphorus supplement container respectively. According to the phosphorus supply device, the phosphorus doping system and the solar cell manufacturing production line, the phosphorus doping effect can be improved, and phosphorus source waste can be reduced.

Description

Technical Field

[0001] This application relates to the field of solar cell manufacturing technology, specifically to a phosphorus supply device, a phosphorus doping system, and a solar cell manufacturing production line. Background Technology

[0002] In the fabrication of solar cells, phosphorus doping is required to form PN junctions and improve the photoelectric conversion efficiency and performance of the solar cells. During phosphorus doping, a phosphorus source containing phosphorus, such as phosphorus oxychloride, is introduced into the phosphorus doping device to complete the doping process.

[0003] Conventional phosphorus supply systems typically consist of multiple phosphorus supply containers, each corresponding to a phosphorus doping tube in the phosphorus doping device. The containers supply phosphorus to the doping chamber through their respective tubes. However, over time, the phosphorus level in the supply containers gradually decreases. When the phosphorus level falls below a certain threshold, it affects the amount of phosphorus entering the doping chamber, thus impacting phosphorus doping and reducing its effectiveness. While replacing the supply containers prematurely avoids the negative effects of a low phosphorus level, it also results in a waste of phosphorus. Utility Model Content

[0004] Therefore, it is necessary to provide a phosphorus supply device, phosphorus doping system, and solar cell manufacturing production line that can improve the phosphorus doping effect and reduce phosphorus source waste, in order to address the above problems.

[0005] A phosphorus supply device, comprising:

[0006] Multiple phosphorus supply assemblies, each comprising a phosphorus supply container, a phosphorus supply inlet pipe, and a phosphorus supply outlet pipe, wherein both the phosphorus supply inlet pipe and the phosphorus supply outlet pipe are connected to the phosphorus supply container; and

[0007] A phosphorus replenishment assembly includes a phosphorus replenishment container, a phosphorus replenishment air inlet pipe, and a phosphorus replenishment pipeline unit. The phosphorus replenishment air inlet pipe is connected to the phosphorus replenishment container, and the phosphorus replenishment container is connected to all the phosphorus supply containers through the phosphorus replenishment pipeline unit.

[0008] The phosphorus supply inlet pipe and the phosphorus replenishment inlet pipe are used to input bubbling gas into the phosphorus supply container and the phosphorus replenishment container, respectively.

[0009] In some embodiments, the phosphorus replenishment pipeline unit includes a main pipeline and a plurality of branch pipelines. The main pipeline is connected to the phosphorus replenishment container, and the branch pipelines correspond one-to-one with the phosphorus supply containers. The branch pipelines are connected between the main pipeline and the corresponding phosphorus supply containers.

[0010] In some embodiments, the phosphorus supplementation pipeline unit further includes a plurality of branch control valves, each corresponding to a branch pipe. The branch control valves are disposed on the corresponding branch pipes and are used to open and close the corresponding branch pipes.

[0011] In some embodiments, the phosphorus supply assembly further includes a level sensor, which corresponds one-to-one with the phosphorus supply container. The level sensor is used to detect the phosphorus source level in the corresponding phosphorus supply container, and the branch control valve is configured to open when the phosphorus source level detected by the corresponding level sensor is less than or equal to a set level.

[0012] In some embodiments, the phosphorus supply assembly further includes a weighing device corresponding to each of the phosphorus supply containers. The weighing device is used to weigh the corresponding phosphorus supply container, and the branch control valve is configured to open when the weight weighed by the corresponding weighing device is less than or equal to a set weight.

[0013] In some embodiments, the phosphorus supply device further includes a controller;

[0014] The controller is electrically connected to each of the liquid level sensors and each of the branch control valves, and is used to control the branch control valve corresponding to the liquid level sensor to open when the phosphorus source liquid level detected by the liquid level sensor is less than or equal to the set liquid level; or...

[0015] The controller is electrically connected to each of the weighing devices and each of the branch control valves, and is used to control the branch control valve corresponding to the weighing device to open when the weight weighed by the weighing device is less than or equal to the set weight.

[0016] In some embodiments, the phosphorus supply assembly further includes a phosphorus supply inlet control valve and a phosphorus supply outlet control valve. The phosphorus supply inlet control valve is disposed on the phosphorus supply inlet pipe and is used to open and close the phosphorus supply inlet pipe. The phosphorus supply outlet control valve is disposed on the phosphorus supply outlet pipe and is used to open and close the phosphorus supply outlet pipe.

[0017] In some embodiments, the phosphorus replenishment assembly further includes a phosphorus replenishment air intake control valve, which is disposed on the phosphorus replenishment air intake pipe and is used to open and close the phosphorus replenishment air intake pipe.

[0018] A phosphorus-doped system comprising:

[0019] The phosphorus doping device includes a phosphorus doping chamber and multiple phosphorus doping tubes; and

[0020] In any of the above embodiments of the phosphorus supply device, the phosphorus doping pipe corresponds one-to-one with the phosphorus supply outlet pipe, and the phosphorus doping pipe is connected between the phosphorus doping chamber and the corresponding phosphorus supply outlet pipe.

[0021] A solar cell manufacturing production line includes a phosphorus doping system as described in the above embodiments.

[0022] Compared with the prior art, this application has the following beneficial effects:

[0023] The aforementioned phosphorus supply device, phosphorus doping system, and solar cell manufacturing production line are designed with a phosphorus replenishment component. When the phosphorus source liquid level in the phosphorus supply container drops to a certain value, the phosphorus replenishment component can promptly replenish phosphorus into the phosphorus supply container through the phosphorus replenishment pipeline unit. This design reduces the occurrence of poor phosphorus doping effects due to insufficient phosphorus source in the phosphorus supply container and ensures that the phosphorus supply container always has a sufficient phosphorus source, thus eliminating the need for frequent replacement of the phosphorus supply container and reducing phosphorus source waste caused by container replacement. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the phosphorus supply device in one embodiment of this application;

[0025] Figure 2 for Figure 1 The diagram shows the structure of the phosphorus supply component in the phosphorus supply device.

[0026] Icon labels:

[0027] 1. Phosphorus supply device;

[0028] 10. Phosphorus supply assembly; 20. Phosphorus replenishment assembly;

[0029] 11. Phosphorus supply container; 12. Phosphorus supply inlet pipe; 13. Phosphorus supply outlet pipe; 14. Phosphorus supply inlet control valve; 15. Phosphorus supply outlet control valve; 16. Weighing device;

[0030] 21. Phosphorus replenishment container; 22. Phosphorus replenishment air inlet pipe; 23. Phosphorus replenishment pipeline unit; 231. Main pipe; 232. Branch pipe; 233. Branch control valve; 24. Phosphorus replenishment air inlet control valve. Detailed Implementation

[0031] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0032] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0033] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0034] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0035] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0036] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0037] In the fabrication of solar cells, phosphorus doping is required to form PN junctions and improve the photoelectric conversion efficiency and performance of the solar cells. During phosphorus doping, a phosphorus source containing phosphorus, such as phosphorus oxychloride, is introduced into the phosphorus doping device to carry out the phosphorus doping process.

[0038] Conventional phosphorus supply systems typically consist of multiple phosphorus supply containers, each corresponding to a phosphorus doping tube in the phosphorus doping device. Each container supplies phosphorus source to the phosphorus doping chamber through its corresponding tube. However, over time, the phosphorus source in the supply containers gradually decreases. When the phosphorus source level falls below a certain value, it affects the amount of phosphorus source flowing into the doping chamber, thus impacting phosphorus doping and reducing its effectiveness. Replacing the supply containers prematurely avoids the negative impact of a low phosphorus source level, but it also results in a waste of phosphorus source.

[0039] Please see Figure 1 and Figure 2 To alleviate the above problems, this application provides a phosphorus supply device 1 and a phosphorus doping system including the same. The phosphorus doping system includes a phosphorus doping device and a phosphorus supply device 1. The phosphorus doping device has a phosphorus doping chamber and multiple phosphorus doping tubes. The phosphorus doping chamber provides a site for phosphorus doping of the solar cells. The phosphorus supply device 1 includes multiple sets of phosphorus supply components 10 and phosphorus replenishment components 20. The phosphorus supply component 10 includes a phosphorus supply container 11, a phosphorus supply inlet pipe 12, and a phosphorus supply outlet pipe 13. The phosphorus supply inlet pipe 12 and the phosphorus supply outlet pipe 13 are both connected to the phosphorus supply container 11. The phosphorus doping tubes correspond one-to-one with the phosphorus supply outlet pipes 13, and the phosphorus doping tubes are connected between the phosphorus doping chamber and the corresponding phosphorus supply outlet pipes 13. The phosphorus replenishment assembly 20 includes a phosphorus replenishment container 21, a phosphorus replenishment air inlet pipe 22, and a phosphorus replenishment pipeline unit 23. The phosphorus replenishment air inlet pipe 22 is connected to the phosphorus replenishment container 21, and the phosphorus replenishment container 21 is connected to all phosphorus supply containers 11 through the phosphorus replenishment pipeline unit 23. The phosphorus supply air inlet pipe 12 and the phosphorus replenishment air inlet pipe 22 are used to input bubbling gas into the phosphorus supply container 11 and the phosphorus replenishment container 21, respectively.

[0040] The bubbling gas can be air, nitrogen, oxygen, etc., and can be specifically set according to requirements. For ease of explanation, the following examples will use nitrogen as the bubbling gas.

[0041] The number of phosphorus supply containers 11 and phosphorus supply outlet pipes 13 are the same as the number of phosphorus doping pipes in the phosphorus doping device and correspond one-to-one. The phosphorus supply containers 11 are connected to the corresponding phosphorus doping chambers through phosphorus supply inlet pipes 12. As an example, there are six phosphorus supply containers 11, six phosphorus supply outlet pipes 13, and six phosphorus doping pipes.

[0042] Both the phosphorus supply container 11 and the phosphorus replenishment container 21 store liquid phosphorus sources. When bubbling gas is introduced into the phosphorus supply container 11 through the phosphorus supply inlet pipe 12, the bubbling gas thoroughly stirs the liquid phosphorus source within the container, agitating bubbles and causing the liquid phosphorus source to dissipate heat and condense into a gaseous state. This gaseous state then flows sequentially through the phosphorus supply outlet pipe 13 and the phosphorus doping pipe into the phosphorus doping chamber for phosphorus doping. As the usage time increases, the phosphorus source liquid level in the phosphorus supply container 11 decreases. When it drops to a certain value, bubbling gas is introduced into the phosphorus replenishment container 21 through the phosphorus replenishment inlet pipe 22. The bubbling gas thoroughly stirs the liquid phosphorus source within the replenishment container 21, causing the liquid phosphorus source to dissipate heat and condense into a gaseous state. This gaseous state then flows sequentially through the phosphorus replenishment pipe unit 23 into the phosphorus supply container 11 to replenish the phosphorus source within the container 11. It is understandable that after the gaseous phosphorus source enters the phosphorus supply container 11 from the phosphorus replenishment container 21, as the gas pressure gradually increases, the gaseous phosphorus source undergoes a phase change to form a liquid phosphorus source and is stored in the phosphorus supply container 11.

[0043] In this application, by designing a phosphorus replenishment component 20, when the phosphorus source liquid level in the phosphorus supply container 11 drops to a certain value, the phosphorus replenishment component 20 can replenish phosphorus to the phosphorus supply container 11 in a timely manner through the phosphorus replenishment pipeline unit 23. This design reduces the occurrence of poor phosphorus doping effects due to insufficient phosphorus source in the phosphorus supply container 11, and ensures that the phosphorus supply container 11 always has a sufficient phosphorus source. Therefore, it eliminates the need for frequent replacement of the phosphorus supply container 11, thereby reducing phosphorus source waste caused by replacing the phosphorus supply container 11.

[0044] Phosphorus replenishment and phosphorus doping are carried out asynchronously. To prevent bubbling gas from accumulating in the phosphorus supply container 11 and causing an explosion when phosphorus replenishment container 21 replenishes phosphorus into the phosphorus supply container 11, the phosphorus supply inlet pipe 12 can be designed as the outlet pipe for bubbling gas. The phosphorus supply inlet pipe 12 is opened after phosphorus replenishment for a period of time to release excess bubbling gas in the phosphorus supply container 11 in a timely manner.

[0045] Of course, in some other embodiments, the phosphorus supply assembly 10 may also include an exhaust pipe that is different from the phosphorus supply inlet pipe 12 and the phosphorus supply outlet pipe 13. The exhaust pipe is connected to the phosphorus supply container 11 and is used to conduct after phosphorus is added for a period of time so as to timely discharge the excess bubbling gas in the phosphorus supply container 11.

[0046] It should be noted that since the phosphorus source in the phosphorus replenishment container 21 is only introduced into the phosphorus supply container 11, the phosphorus source liquid level in the phosphorus replenishment container 21 has little impact on the amount of phosphorus source in the phosphorus doping chamber. Therefore, when the phosphorus source liquid level in the phosphorus replenishment container 21 is low, the phosphorus replenishment container 21 can still replenish phosphorus to the phosphorus supply container 11 until all the phosphorus source in the phosphorus replenishment container 21 is used up, and then the phosphorus replenishment container 21 is replaced to reduce the waste of phosphorus source.

[0047] In some embodiments, the phosphorus replenishment pipeline unit 23 includes a main pipeline 231 and a plurality of branch pipelines 232. The main pipeline 231 is connected to the phosphorus replenishment container 21, and the branch pipelines 232 correspond one-to-one with the phosphorus supply containers 11. The branch pipelines 232 are connected between the main pipeline 231 and the corresponding phosphorus supply containers 11.

[0048] In actual operation, the bubbling gas in the phosphorus replenishment container 21 carries the phosphorus source through the main pipe 231 and the branch pipe 232 to the phosphorus supply container 11 corresponding to the branch pipe 232, and replenishes the phosphorus supply container 11. The main pipe 231 and the branch pipe 232 are designed to facilitate the phosphorus replenishment container 21 to replenish phosphorus to each phosphorus supply container 11.

[0049] In some embodiments, the phosphorus supplementation pipeline unit 23 further includes a plurality of branch control valves 233, each corresponding to a branch pipe 232. The branch control valves 233 are disposed on the corresponding branch pipes 232 and are used to open and close the corresponding branch pipes 232.

[0050] When the phosphorus source liquid level in the phosphorus supply container 11 is lower than a certain value, the branch control valve 233 corresponding to the phosphorus supply container 11 opens. The bubbling gas in the phosphorus replenishment container 21 carries the phosphorus source through the main pipe 231 and the branch pipe 232 to the phosphorus supply container 11 for phosphorus replenishment. After the phosphorus replenishment is completed, the branch control valve 233 closes to prevent the phosphorus supply container 11 corresponding to the branch pipe 232 from overflowing due to excessive phosphorus source.

[0051] In this embodiment, by setting multiple branch control valves 233, the on / off states of each branch pipe 232 do not affect each other, thus ensuring that phosphorus replenishment between each phosphorus supply container 11 does not affect each other. Therefore, phosphorus can be selectively replenished to the phosphorus supply container 11 with a low phosphorus source liquid level based on the phosphorus source liquid level of each phosphorus supply container 11, making phosphorus replenishment more precise.

[0052] In some embodiments, the phosphorus supply assembly 10 further includes a level sensor, which corresponds one-to-one with the phosphorus supply container 11. The level sensor is used to detect the phosphorus source liquid level in the corresponding phosphorus supply container 11, and the branch control valve 233 is configured to open when the phosphorus source liquid level detected by the corresponding level sensor is less than or equal to a set liquid level.

[0053] Specifically, a level sensor is installed in the corresponding phosphorus supply container 11 and is used to detect the phosphorus source liquid level of the corresponding phosphorus supply container 11, so as to know the phosphorus source liquid level of the phosphorus supply container 11 and thus determine whether phosphorus needs to be added.

[0054] The set liquid level is the critical value of the phosphorus source liquid level. When the phosphorus source liquid level in the phosphorus supply container 11 is higher than the set liquid level, the amount of phosphorus source introduced into the phosphorus doping chamber by the phosphorus supply container 11 is sufficient and the doping effect is good. When the phosphorus source liquid level in the phosphorus supply container 11 is less than or equal to the set liquid level, the amount of phosphorus source introduced into the phosphorus doping chamber by the phosphorus supply container 11 is affected and the doping effect deteriorates.

[0055] As an example, the phosphorus supply assembly 10 may also include a display, which is electrically connected to a level sensor and is used to display the phosphorus source level detected by the level sensor. When the phosphorus source level in the phosphorus supply container 11 is less than or equal to a set level, the branch control valve 233 corresponding to the phosphorus supply container 11 is opened by operating it to replenish phosphorus into the phosphorus supply container 11 in a timely manner.

[0056] As an example, the phosphorus supply device 1 may also include a controller, which is electrically connected to each level sensor and each branch control valve 233, and is used to control the branch control valve 233 corresponding to the level sensor to open when the phosphorus source level detected by the level sensor is less than or equal to the set level. By setting the controller to automatically control the branch control valve 233 to open, automatic phosphorus replenishment can be achieved, reducing manual operation and saving time and effort.

[0057] In some embodiments, the phosphorus supply assembly 10 further includes a weighing device 16, which corresponds one-to-one with the phosphorus supply container 11. The weighing device 16 is used to weigh the corresponding phosphorus supply container 11, and the branch control valve 233 is configured to open when the weight weighed by the corresponding weighing device 16 is less than or equal to a set weight.

[0058] Specifically, the weighing device 16 is installed on the bottom side of the corresponding phosphorus supply container 11 and is used to detect the weight of the corresponding phosphorus supply container 11 so as to know the weight of the phosphorus supply container 11 and thus determine whether phosphorus needs to be added.

[0059] The set weight is a critical value for the phosphorus source weight. When the phosphorus source weight in the phosphorus supply container 11 is greater than the set weight, the amount of phosphorus source supplied into the phosphorus doping chamber by the phosphorus supply container 11 is sufficient and the doping effect is good. When the weight in the phosphorus supply container 11 is less than or equal to the set weight, the amount of phosphorus source supplied into the phosphorus doping chamber by the phosphorus supply container 11 is affected and the doping effect deteriorates.

[0060] As an example, the phosphorus supply assembly 10 may also include a display, which is electrically connected to each weighing device 16 and is used to display the weight detected by the weighing device 16. When the weight of the phosphorus supply container 11 is less than or equal to the set weight, the branch control valve 233 corresponding to the phosphorus supply container 11 is opened to facilitate timely replenishment of phosphorus into the phosphorus supply container 11.

[0061] As an example, the phosphorus supply device 1 may also include a controller, which is electrically connected to each weighing device 16 and each branch control valve 233, and is used to control the opening of the branch control valve 233 corresponding to the weighing device 16 when the weight weighed by the weighing device 16 is less than or equal to a set weight. By setting the controller to automatically control the opening of the branch control valve 233, automatic phosphorus replenishment can be achieved, reducing manual operation and saving time and effort.

[0062] In some embodiments, the phosphorus supply assembly 10 further includes a phosphorus supply inlet control valve 14 and a phosphorus supply outlet control valve 15. The phosphorus supply inlet control valve 14 is disposed on the phosphorus supply inlet pipe 12 and is used to open and close the phosphorus supply inlet pipe 12. The phosphorus supply outlet control valve 15 is disposed on the phosphorus supply outlet pipe 13 and is used to open and close the phosphorus supply outlet pipe 13.

[0063] Specifically, the phosphorus supply inlet control valve 14 is used to control the opening and closing of the phosphorus supply inlet pipe 12, and the phosphorus supply outlet control valve 15 is used to control the opening and closing of the phosphorus supply outlet pipe 13. When both the phosphorus supply inlet control valve 14 and the phosphorus supply outlet control valve 15 are open, the phosphorus supply container 11 supplies phosphorus to the phosphorus doping chamber; when both the phosphorus supply inlet control valve 14 and the phosphorus supply outlet control valve 15 are closed, the phosphorus supply container 11 stops supplying phosphorus.

[0064] By designing the phosphorus supply inlet control valve 14 and the phosphorus supply outlet control valve 15, the phosphorus supply device 1 can be controlled to start or stop supplying phosphorus, making the phosphorus supply device 1 work more reliably.

[0065] In some embodiments, the phosphorus replenishment assembly 20 further includes a phosphorus replenishment air intake control valve 24, which is disposed on the phosphorus replenishment air intake pipe 22 and is used to open and close the phosphorus replenishment air intake pipe 22.

[0066] Specifically, the phosphorus replenishment air intake control valve 24 is used to control the opening and closing of the phosphorus replenishment air intake pipe 22. When both the phosphorus replenishment air intake control valve 24 and the branch control valve 233 are open, the phosphorus replenishment container 21 replenishes phosphorus into the phosphorus supply container 11. When both the phosphorus replenishment air intake control valve 24 and the branch control valve 233 are closed, the phosphorus replenishment container 21 stops replenishing phosphorus.

[0067] By designing a phosphorus supplementation air intake control valve 24, which works in conjunction with a branch control valve 233, the phosphorus supply device 1 can be controlled to start or stop phosphorus supplementation, making the phosphorus supply device 1 more reliable in operation.

[0068] This application also provides a solar cell manufacturing production line, which includes the phosphorus doping system as described in any of the above embodiments. The solar cell manufacturing production line of this application has the effects of any of the above embodiments, and therefore will not be described again here.

[0069] The aforementioned phosphorus supply device 1, phosphorus doping system, and solar cell manufacturing production line, through the design of the phosphorus replenishment component 20, can replenish phosphorus to the phosphorus supply container 11 in a timely manner via the phosphorus replenishment pipeline unit 23 when the phosphorus source liquid level in the phosphorus supply container 11 drops to a certain value. This design reduces the occurrence of poor phosphorus doping effects due to insufficient phosphorus source in the phosphorus supply container 11, and ensures that the phosphorus supply container 11 always has a sufficient phosphorus source. Therefore, frequent replacement of the phosphorus supply container 11 is unnecessary, thus reducing phosphorus source waste caused by replacement.

[0070] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0071] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A phosphorus supply device, characterized in that, The phosphorus supply device includes: Multiple sets of phosphorus supply assemblies (10), each phosphorus supply assembly (10) including a phosphorus supply container (11), a phosphorus supply inlet pipe (12), and a phosphorus supply outlet pipe (13), wherein both the phosphorus supply inlet pipe (12) and the phosphorus supply outlet pipe (13) are connected to the phosphorus supply container (11); and The phosphorus replenishment assembly (20) includes a phosphorus replenishment container (21), a phosphorus replenishment air inlet pipe (22), and a phosphorus replenishment pipeline unit (23). The phosphorus replenishment air inlet pipe (22) is connected to the phosphorus replenishment container (21), and the phosphorus replenishment container (21) is connected to all the phosphorus supply containers (11) through the phosphorus replenishment pipeline unit (23). The phosphorus supply inlet pipe (12) and the phosphorus replenishment inlet pipe (22) are used to input bubbling gas into the phosphorus supply container (11) and the phosphorus replenishment container (21), respectively.

2. The phosphorus supply device according to claim 1, characterized in that, The phosphorus replenishment pipeline unit (23) includes a main pipeline (231) and multiple branch pipelines (232). The main pipeline (231) is connected to the phosphorus replenishment container (21), and the branch pipelines (232) correspond one-to-one with the phosphorus supply container (11). The branch pipelines (232) are connected between the main pipeline (231) and the corresponding phosphorus supply container (11).

3. The phosphorus supply device according to claim 2, characterized in that, The phosphorus supplementation pipeline unit (23) also includes multiple branch control valves (233), each of which corresponds to a branch pipe (232). The branch control valve (233) is installed on the corresponding branch pipe (232) and is used to open and close the corresponding branch pipe (232).

4. The phosphorus supply device according to claim 3, characterized in that, The phosphorus supply assembly (10) also includes a level sensor, which corresponds one-to-one with the phosphorus supply container (11). The level sensor is used to detect the phosphorus source level in the corresponding phosphorus supply container (11). The branch control valve (233) is configured to open when the phosphorus source level detected by the corresponding level sensor is less than or equal to a set level.

5. The phosphorus supply device according to claim 4, characterized in that, The phosphorus supply assembly (10) also includes a weighing device (16) corresponding to the phosphorus supply container (11) and used to weigh the corresponding phosphorus supply container (11). The branch control valve (233) is configured to open when the weight weighed by the corresponding weighing device (16) is less than or equal to a set weight.

6. The phosphorus supply device according to claim 5, characterized in that, The phosphorus supply device also includes a controller; The controller is electrically connected to each of the liquid level sensors and each of the branch control valves (233), and is used to control the branch control valve (233) corresponding to the liquid level sensor to open when the phosphorus source liquid level detected by the liquid level sensor is less than or equal to the set liquid level; or, The controller is electrically connected to each of the weighing devices (16) and each of the branch control valves (233), and is used to control the branch control valves (233) corresponding to the weighing device (16) to open when the weight weighed by the weighing device (16) is less than or equal to the set weight.

7. The phosphorus supply device according to claim 1, characterized in that, The phosphorus supply assembly (10) further includes a phosphorus supply inlet control valve (14) and a phosphorus supply outlet control valve (15). The phosphorus supply inlet control valve (14) is disposed on the phosphorus supply inlet pipe (12) and is used to open and close the phosphorus supply inlet pipe (12). The phosphorus supply outlet control valve (15) is disposed on the phosphorus supply outlet pipe (13) and is used to open and close the phosphorus supply outlet pipe (13).

8. The phosphorus supply device according to claim 1, characterized in that, The phosphorus replenishment assembly (20) also includes a phosphorus replenishment air intake control valve (24), which is disposed on the phosphorus replenishment air intake pipe (22) and is used to open and close the phosphorus replenishment air intake pipe (22).

9. A phosphorus-doped system, characterized in that, include: A phosphorus doping device, comprising a phosphorus doping chamber and multiple phosphorus doping tubes; as well as As described in any one of claims 1 to 8, the phosphorus supply device has a one-to-one correspondence between the phosphorus doping pipe and the phosphorus supply outlet pipe (13), and the phosphorus doping pipe is connected between the phosphorus doping chamber and the corresponding phosphorus supply outlet pipe (13).

10. A solar cell manufacturing production line, characterized in that, Including the phosphorus doping system as described in claim 9 above.

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