Liquid supply and collection device and glue uniformizing system

Abstract

According to the liquid supply and collection device and the glue uniformizing system with the liquid supply and collection device provided by the utility model, the glue uniformizing system comprises a glue uniformizing wheel which is used for rotating to take away redundant glue at a glue outlet, a glue scraping part which is used for removing the glue adhered to the periphery of the glue uniformizing wheel, and the liquid supply and collection device, the liquid supply and collection device comprises a solution tank containing cleaning liquid, the cleaning liquid can dilute glue liquid adhered to the periphery of the glue homogenizing wheel, the viscosity of the glue liquid is reduced, the glue scraping part can quickly scrape the diluted glue liquid conveniently, the solution tank can further collect the scraped glue liquid, and the glue liquid can be classified and treated conveniently after being collected; the glue homogenizing wheel after the glue solution is scraped rotates along the axis of the glue homogenizing wheel, so that the redundant glue solution at the glue outlet can be removed, the glue homogenizing distance between the glue outlet and the glue homogenizing wheel is always within a set threshold value, and the glue outlet has a set glue solution amount; and the amount of the glue solution firstly coated on the semiconductor substrate is uniform and consistent with the amount of the glue solution later coated on the semiconductor substrate.

Description

TECHNICAL FIELD

[0001] The utility model relates to a liquid supply and collection device, and also relates to a uniform coating system with the liquid supply and collection device. BACKGROUND

[0002] Before the coating system coats, the glue outlet will adhere to the excess glue, generally through the rotating uniform coating wheel to remove the excess glue of the glue outlet, and then through the glue scraping part to scrape the glue adhered to the outer periphery of the uniform coating wheel, so as to ensure that the uniform coating distance between the uniform coating wheel and the glue outlet is always within the set threshold.

[0003] However, due to the large viscosity of the glue, the glue scraping part cannot completely scrape the glue adhered to the outer periphery of the uniform coating wheel, and the unscraped glue on the outer periphery of the uniform coating wheel reduces the uniform coating distance between the uniform coating wheel and the glue outlet, which will take away the glue that does not need to be scraped from the glue outlet, causing the amount of glue coated on the semiconductor substrate first and the amount of glue coated on the semiconductor substrate later to be inconsistent.

[0004] Based on the above reasons, there is an urgent need for a liquid supply and collection device to solve the above problems. UTILITY MODEL CONTENTS

[0005] The utility model aims at overcoming the defects of the prior art, and provides a liquid supply and collection device applied to a uniform coating system, cleaning liquid in a solution tank can dilute glue adhered to the outer periphery of a uniform coating component, the glue scraping part can quickly scrape the glue adhered to the outer periphery of the uniform coating wheel, the uniform coating distance between the glue outlet and the uniform coating wheel is always within the set threshold, and the amount of glue coated on the semiconductor substrate first and the amount of glue coated on the semiconductor substrate later are uniform and consistent.

[0006] The utility model is implemented in the following manner: a liquid supply and collection device is applied to a uniform coating system, the uniform coating system comprises a uniform coating wheel for rotating to take away excess glue at a glue outlet, a glue scraping part for removing glue on the outer periphery of the uniform coating wheel, and the liquid supply and collection device.

[0007] The solution tank contains cleaning liquid, part of the outer periphery of the uniform coating wheel is arranged in the cleaning liquid, during rotation of the uniform coating wheel, the cleaning liquid in the solution tank is used for diluting glue adhered to the outer periphery of the uniform coating wheel, and the solution tank is located below the uniform coating wheel and the glue scraping part and is used for collecting the glue scraped by the glue scraping part.

[0008] Further, the solution tank has an overflow port, and the overflow port is used for maintaining the liquid level of the cleaning liquid in the solution tank at a set horizontal position.

[0009] Further, the solution tank has a liquid discharge port, and the liquid discharge port is used for discharging the cleaning liquid and the glue in the solution tank.

[0010] Further, the liquid supply and collection device further comprises:

[0011] A waste liquid collection tank is arranged for collecting the cleaning liquid and the glue liquid discharged from the overflow port and the liquid discharge port.

[0012] Further, the liquid supply and collection device further comprises:

[0013] A waste liquid collection container is arranged for collecting the cleaning liquid and the glue liquid discharged from the waste liquid collection tank.

[0014] A waste liquid pipeline is arranged for sealingly connecting the waste liquid collection tank and the waste liquid collection container.

[0015] Further, the liquid supply and collection device further comprises:

[0016] A flow guide plate is arranged for guiding the glue liquid scraped by the glue scraping part to the solution tank.

[0017] Further, the liquid supply and collection device further comprises:

[0018] A liquid level sensor is arranged for detecting the liquid level of the cleaning liquid and outputting a liquid level data signal.

[0019] A liquid supply pump is arranged for injecting the cleaning liquid in the liquid supply container into the solution tank.

[0020] A controller is arranged for storing a preset standard liquid level, receiving the liquid level data signal fed by the liquid level sensor, and controlling the liquid supply pump to start working when the detected liquid level deviates from the standard liquid level, and stopping working when the liquid level in the solution tank reaches the standard liquid level.

[0021] Further, the liquid supply and collection device further comprises:

[0022] A liquid supply pipeline is arranged for sealingly connecting the liquid supply pump, the solution tank and the liquid supply container.

[0023] The utility model further provides a glue uniforming system, its characterized in that, including:

[0024] A glue uniforming wheel is arranged for rotating to take away the redundant glue liquid at the glue outlet.

[0025] A glue scraping part is arranged for removing the glue liquid adhered to the outer circumferential surface of the glue uniforming wheel.

[0026] The glue uniforming system further comprises the liquid supply and collection device as described above.

[0027] Further, the glue uniforming system further comprises:

[0028] a chamber configured to be isolated from ambient air, the liquid supply device being disposed in the chamber;

[0029] an exhaust gas suction device for discharging exhaust gas generated in the liquid supply device.

[0030] The liquid supply device and the uniform glue system with the same provided by the utility model have the advantages that the cleaning liquid contained in the solution tank can dilute the glue solution adhered to the outer periphery of the uniform glue wheel, the cleaning liquid reduces the viscosity of the glue solution, the glue scraping part can quickly scrape off the diluted glue solution, the solution tank can also collect the scraped glue solution, and the glue solution can be collected and classified for treatment; the uniform glue wheel rotates along the axis after the glue solution is scraped off, the excess glue solution at the glue outlet can be removed, the uniform glue distance between the glue outlet and the uniform glue wheel is always kept within the set threshold, the glue outlet has a set amount of glue solution, and the amount of the glue solution coated on the semiconductor substrate first and the amount of the glue solution coated on the semiconductor substrate later are uniform. BRIEF DESCRIPTION OF DRAWINGS

[0031] In order to more clearly illustrate the technical scheme of the utility model, the following will be briefly introduced the drawings needed to be used in the embodiment, obviously, the drawings in the following description are only some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained according to these drawings without creative labor.

[0032] Figure 1 It is the structural diagram of the liquid supply device, the uniform glue wheel and the glue scraping part in the uniform glue system provided by the embodiment of the utility model.

[0033] Figure 2 It is the structural diagram of the liquid supply device, the uniform glue wheel and the glue scraping part in the uniform glue system provided by the embodiment of the utility model.

[0034] Figure 3 It is the schematic diagram of the controller controlling the liquid supply pump to supply the cleaning liquid into the solution tank in the liquid supply device provided by the embodiment of the utility model.

[0035] Figure 4 It is the structural diagram of the chamber and the exhaust gas suction device in the liquid supply device provided by the embodiment of the utility model.

[0036] The implementation, functional features and advantages of the utility model will be further illustrated with reference to the embodiment and the accompanying drawings.

[0037] Among them, the following is the explanation of the reference signs:

[0038] Glue outlet 100;

[0039] Uniform glue wheel 200, vertical diameter D1 of uniform glue wheel 200.

[0040] The glue scraping part 300;

[0041] The liquid supply device 400, the solution tank 410, the overflow port 411, the liquid discharge port 412, the waste liquid collection tank 420, the support seat 430, the upper support arm 431, the flow guide groove 432, the lower support arm 433, the flow guide plate 440, the liquid level sensor 450;

[0042] The chamber 500, the waste gas suction device 600. DETAILED DESCRIPTION

[0043] In the present application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "transverse", "longitudinal" and the like indicate the orientation or state relationship based on the orientation or state relationship shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not intended to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0044] In addition, in addition to indicating the orientation or state relationship, the above-mentioned terms may also be used to indicate other meanings, for example, the term "upper" may also be used to indicate a certain dependent relationship or connection relationship in some cases. For those skilled in the art, the specific meaning of these terms in the present application can be understood according to the specific circumstances.

[0045] In addition, the terms "mounting", "setting", "provided with", "connected", "connected" should be broadly understood. For example, it can be fixedly connected, detachably connected, or integrally constructed; it can be mechanically connected, or electrically connected; it can be directly connected, or indirectly connected through an intermediate medium, or internal communication between two devices, elements or components. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0046] In addition, the terms "first", "second" and the like are mainly used to distinguish different devices, elements or components, and the specific type and structure may be the same or different, and are not intended to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise stated, the meaning of "multiple" is two or more.

[0047] The technical solutions in the embodiments of the present application will be described clearly and completely in conjunction with the drawings in the embodiments of the present application.

[0048] As Figure 1 And Figure 2As shown, the liquid supply and collection device provided by the embodiment of the utility model is applied to the uniform glue system, the uniform glue system includes the uniform glue wheel 200 for rotating and taking away the excess glue liquid at the glue outlet 100, the glue scraping part 300 for removing the glue liquid on the outer periphery of the uniform glue wheel 200 and the liquid supply and collection device 400, the liquid supply and collection device 400 includes:

[0049] The solution tank 410 contains the cleaning liquid for diluting the glue liquid adhered to the outer periphery of the uniform glue wheel 200 and is used for collecting the diluted glue liquid scraped by the glue scraping part 300, in the embodiment, the solution tank 410 is located below the uniform glue wheel 200, preferably, the center position of the length direction of the solution tank 410 is arranged opposite to the axis of the uniform glue wheel 200, which is beneficial to the structural layout of the product and facilitates the support seat 430 to uniformly bear the weight of the uniform glue wheel 200 and the solution tank 410.

[0050] The glue liquid adhered to the outer periphery of the uniform glue wheel 200 in the non-rotating state is located in the cleaning liquid, when the uniform glue wheel 200 rotates along the axis, the cleaning liquid contained in the solution tank 410 can uniformly dilute the glue liquid adhered to the outer periphery of the uniform glue wheel 200, and the glue scraping part 300 can quickly scrape the diluted glue liquid.

[0051] The liquid supply and collection device 400 and the uniform glue system with the liquid supply and collection device 400 are provided, wherein the cleaning liquid contained in the solution tank 410 can dilute the glue liquid adhered to the outer periphery of the uniform glue wheel 200, the cleaning liquid reduces the viscosity of the glue liquid, the glue scraping part 300 can quickly scrape the diluted glue liquid, the solution tank 410 can also collect the scraped glue liquid, and the collected glue liquid can be classified and treated; the uniform glue wheel 200 after scraping the glue liquid rotates along the axis, can remove the excess glue liquid at the glue outlet 100, ensures that the uniform glue distance between the glue outlet 100 and the uniform glue wheel 200 is always within the set threshold, and then makes the glue outlet 100 have a set amount of glue liquid, so that the amount of the glue liquid coated on the semiconductor substrate first and the amount of the glue liquid coated on the semiconductor substrate later are uniform.

[0052] As shown, Figure 2 Further, the solution tank 410 has an overflow port 411 for maintaining the liquid level of the cleaning liquid in the solution tank 410 at a set horizontal position, in the embodiment, the overflow port 411 is located below the uniform glue wheel 200, the overflow port 411 plays a role of overflow, ensures that the cleaning liquid in the solution tank 410 is always at the set horizontal position, also plays a role of avoiding the glue scraping part 300, and expands the rotation range of the glue scraping part 300.

[0053] As shown, Figure 2As shown, the solution tank 410 further includes a drain port 412 for draining the cleaning solution and / or adhesive solution in the solution tank 410, which facilitates the replacement of cleaning solutions with different formulations in the solution tank 410.

[0054] like Figure 1 and Figure 2 As shown, the liquid supply and receiving device 400 further includes:

[0055] Waste liquid collection tank 420 is used to collect cleaning liquid and adhesive liquid flowing out of overflow port 411 and drain port 412.

[0056] In this embodiment, the liquid supply and collection device 400 further includes a cuboid support base 430. The support base 430 has a plurality of symmetrically arranged upper support arms 431 in the width direction for supporting the solution tank 410. The support base 430 is provided with a guide channel 432. The outer dimensions of the guide channel 432 are larger than the outer dimensions of the solution tank 410 so that the cleaning liquid overflowing from the solution tank 410 flows into the guide channel 432 and then flows into the waste liquid collection tank 420. Specifically, the guide channel 432 is provided with a guide port (not shown) for guiding the cleaning liquid overflowing from the solution tank 410 to the waste liquid collection tank 420.

[0057] like Figure 1 As shown, further, the support base 430 is symmetrically provided with lower support arms 433 at both ends along its length, and the waste liquid collection tank 420 is located between the two lower support arms 433. The above structure can save the installation space inside the liquid supply and collection device 400.

[0058] Furthermore, the liquid supply and receiving device 400 also includes:

[0059] Waste liquid collection container (not shown) is installed below waste liquid collection tank 420 to collect cleaning liquid and adhesive liquid discharged from waste liquid collection tank 420. The collected cleaning liquid and adhesive liquid can be transferred through the waste liquid collection container for convenient centralized treatment.

[0060] Waste liquid pipeline (not shown) is used to seal and connect the waste liquid collection tank 420 and the waste liquid collection container.

[0061] like Figure 2 As shown, the liquid supply and receiving device 400 further includes:

[0062] The guide plate 440 is used to guide the adhesive scraped by the scraper 300 into the solution tank 410. The guide plate 440 prevents the scraped adhesive from flowing along the scraper 311 to areas outside the solution tank 410 and contaminating other components in the homogenizing system.

[0063] like Figure 3As shown, further, the liquid supply and collection device 400 further comprises:

[0064] A liquid level sensor 450 is arranged in the solution tank 410 and used to detect the liquid level of the cleaning liquid and output a liquid level data signal to the outside;

[0065] A liquid supply pump 460 is used to inject the cleaning liquid in the liquid supply container 470 into the solution tank 410;

[0066] A controller 480 is provided with a preset standard liquid level, and the controller 480 is used to receive the liquid level data signal fed by the liquid level sensor 450, and when the detected liquid level deviates from the standard liquid level (for example, the current liquid level is lower than the standard liquid level), the controller 480 controls the liquid supply pump 460 to start working to inject the cleaning liquid in the liquid supply container 470 into the solution tank 410, and when the liquid level in the solution tank 410 reaches the standard liquid level, the controller 480 controls the liquid supply pump 460 to stop working, so that the liquid supply is intelligent and convenient to use.

[0067] As shown in the drawings, Figure 3 As shown, further, the liquid supply and collection device 400 further comprises:

[0068] A liquid supply pipeline 490 is used to detachably and sealingly communicate between the liquid supply pump 460 and the solution tank 410 and the liquid supply container 470.

[0069] As shown in the drawings, Figure 1 and Figure 2 The utility model also provides a uniform glue system, and the uniform glue system is characterized by comprising:

[0070] A uniform glue wheel 200 is used to rotate and take away the excess glue liquid at the glue outlet 100;

[0071] A glue scraping part 300 is used to remove the glue liquid adhered to the outer circumferential surface of the uniform glue wheel 200;

[0072] The uniform glue system further comprises the above liquid supply and collection device 400.

[0073] As shown in the drawings, Figure 4 As shown, further, the uniform glue system further comprises:

[0074] A chamber 500 is configured to be isolated from the outside air, and the liquid supply and collection device 400 is arranged in the chamber 500;

[0075] A waste gas suction device 600 is used to exhaust the waste gas generated in the liquid supply and collection device 400, so as to facilitate the operator to enter the chamber to repair the product or replace the product parts.

[0076] The above is the preferred embodiment of the present application, it should be pointed out that, for those skilled in the art, without departing from the principles of the present application, under the premise of can make a number of improvements and refinements, these improvements and refinements also as the protection scope of the present application.

Claims

1. A liquid supply and receiving device, characterized in that, This system, used in a spin coating system, includes a spin coating wheel for rotating the belt to remove excess adhesive from the outlet, a scraper for removing adhesive adhering to the outer circumference of the spin coating wheel, and a liquid supply and collection device. The liquid supply and collection device includes: A solution tank contains a cleaning solution. Part of the outer peripheral surface of the spreading wheel is placed in the cleaning solution. During the rotation of the spreading wheel, the cleaning solution in the solution tank is used to dilute the adhesive adhering to the outer peripheral surface of the spreading wheel. The solution tank is located below the spreading wheel and the scraping part, and is used to collect the adhesive scraped off by the scraping part.

2. The liquid supply and receiving device according to claim 1, characterized in that, The solution tank has an overflow port, which is used to maintain the liquid level of the cleaning solution in the solution tank at a set level.

3. The liquid supply and receiving device according to claim 2, characterized in that, The solution tank has a drain outlet for discharging the cleaning solution and adhesive solution from the solution tank.

4. The liquid supply and receiving device according to claim 3, characterized in that, include: Waste liquid collection tank is used to collect the cleaning liquid and adhesive liquid flowing out of the overflow port and drain port.

5. The liquid supply and receiving device according to claim 4, characterized in that, include: Waste liquid collection container, used to collect the cleaning liquid and adhesive liquid discharged from the waste liquid collection tank; Waste liquid pipeline is used to seal and connect the waste liquid collection tank and the waste liquid collection container.

6. The liquid supply and receiving device according to claim 1, characterized in that, include: A flow guide plate is used to guide the adhesive scraped off by the scraper into the solution tank.

7. The liquid supply and receiving device according to claim 1, characterized in that, include: A liquid level sensor is installed in the solution tank to detect the liquid level of the cleaning solution and output liquid level data signal to the outside. A liquid supply pump is used to inject the cleaning solution in the liquid supply container into the solution tank; The controller stores a preset standard liquid level height. The controller is used to receive the liquid level height data signal fed by the liquid level sensor. When the detected liquid level height is lower than the standard liquid level height, the controller controls the liquid supply pump to start working to inject the cleaning fluid in the liquid supply container into the solution tank. When the liquid level in the solution tank reaches the standard liquid level height, the controller controls the liquid supply pump to stop working.

8. The liquid supply and receiving device according to claim 7, characterized in that, It includes a liquid supply pipeline for enabling a detachable, sealed connection between the liquid supply pump and the solution tank and liquid supply container.

9. A spin coating system, characterized in that, include: A glue-spreading wheel is used to rotate and remove excess glue from the glue outlet. The glue scraper is used to remove the glue adhering to the outer circumference of the glue-spreading wheel; It also includes the liquid supply and receiving device according to any one of claims 1 to 8.

10. The spin coating system according to claim 9, characterized in that, include: The chamber is configured to be isolated from the outside air, and the liquid supply and collection device is located in the chamber; An exhaust gas extraction device is used to discharge the exhaust gas generated in the liquid supply and collection device.

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