Boron diffusion heating furnace electric control heating wire manufacturing tool

Abstract

The utility model relates to a boron diffusion heating furnace electric control heating wire manufacturing tool which comprises a driving motor and a rotating disc installed at the output end of the driving motor, a rotating column is installed in the middle of the end face of the outer side of the rotating disc, a positioning frame is installed on the side edge of the end face of the outer side of the rotating disc, and a heating wire is arranged on the outer side of the rotating column in a sleeved mode. One end of the heating wire is inserted into the positioning frame, the driving motor is in meshed connection with an auxiliary gear through a driving gear, a rotating cylinder is installed in the middle of the outer end face of the auxiliary gear, the inner wall of the rotating cylinder is in threaded connection with a threaded column, and at least two clamping blocks are rotationally arranged at the outer end of the threaded column; and the two clamping blocks are symmetrically distributed. According to the manufacturing tool for the electric control heating wire of the boron diffusion heating furnace, under rotation of the rotating column and horizontal pushing of the clamping blocks, the heating wire is spirally distributed on the outer side of the rotating column, and the effect of accurately manufacturing the heating wire is achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to boron expansion heating furnace body technical field, specifically for a kind of boron expansion heating furnace electric control heating wire manufacturing tool. BACKGROUND

[0002] Boron expansion heating furnace body is a kind of industrial equipment for semiconductor or special material processing, mainly used for boron diffusion process.

[0003] When boron expansion heating furnace body is manufactured, electric heating wire needs to be added to its side inside, so as to facilitate its subsequent use, and electric heating wire is usually used in spiral winding state, so when electric heating wire is manufactured, it needs to be moved horizontally and vertically in ring shape, and the traditional device usually uses two parts driving separately, which is easy to cause waste of power and structural components.

[0004] Therefore, a boron expansion heating furnace electric control heating wire manufacturing tool is proposed to solve the problems mentioned above. UTILITY MODEL CONTENTS

[0005] In view of the deficiencies of the prior art, the utility model provides a boron expansion heating furnace electric control heating wire manufacturing tool, which can achieve synchronous control of the rotation and horizontal movement of the device

[0006] To achieve the above object, the utility model provides the following technical scheme: including drive motor and rotating disc installed at the output end of the drive motor, rotating column is installed in the middle of the outer side end surface of the rotating disc, positioning frame is installed on the side of the outer side end surface of the rotating disc, heating wire is sleeved outside the rotating column, and one end of the heating wire is inserted into the inside of the positioning frame.

[0007] The drive motor is connected with auxiliary gear through driving gear, rotating cylinder is installed in the middle of the outer end surface of the auxiliary gear, threaded column is connected with the inner wall of the rotating cylinder in screw thread, clamping block is rotationally arranged at the outer end of the threaded column, the clamping block is at least two, and the two clamping blocks are symmetrically distributed.

[0008] Preferably, the driving gear is fixedly sleeved outside the rotating column, the auxiliary gear is fixedly provided with rotating rod in the middle of the rear end surface, and the rotating rod and the rotating cylinder are rotationally connected with supporting plate.

[0009] Preferably, the outer end surface of the threaded column is fixedly connected with limit rotating disc, the limit rotating disc is rotationally connected with link block, the limit rotating disc is inserted into the inside of the link block, and the cavity for limiting rotation of the limit rotating disc is formed in the inside of the link block.

[0010] Preferably, the rotating cylinder and the link block are fixedly sleeved with guide ring outside, a plurality of guide rods are arranged through the guide ring, and the guide rods are evenly distributed in the ring shape outside the rotating cylinder.

[0011] Preferably, a limiting frame is rotatably provided on the inner end face of the connecting block, and a limiting groove is provided on the outer side of the rotating cylinder, with the limiting frame located directly above the limiting groove.

[0012] Preferably, a fastening assembly is provided between the upper and lower horizontal planes of the two clamping blocks, and the fastening assembly consists of a fastening bolt and a fastening sleeve.

[0013] Preferably, the heating wire is inserted into the middle of two adjacent clamping blocks, and the middle of the two adjacent clamping blocks is arranged in an arc shape.

[0014] Compared with the prior art, this utility model provides a tooling for manufacturing electrically controlled heating wires in a boron diffusion furnace, which has the following beneficial effects:

[0015] 1. The electrically controlled heating wire manufacturing fixture of the boron expansion heating furnace, under the rotation of the rotating column and the horizontal pushing of the clamping block, makes the heating wire spirally distributed on the outside of the rotating column, so as to achieve the effect of accurate preparation.

[0016] 2. The tooling for manufacturing the electrically controlled heating wire of the boron expansion heating furnace, under the threaded connection between the rotating drum and the threaded column, enables the limiting turntable to rotate synchronously inside the connecting block, providing a stable horizontal push for the heating wire.

[0017] 3. The tooling for manufacturing the electrically controlled heating wire of the boron expansion heating furnace, with the limit frame blocking the limit groove, restricts the movement distance of the rotating drum to prevent it from moving beyond the range and falling off. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall front view of the present invention;

[0019] Figure 2 This is a schematic diagram of the overall side view structure of this utility model;

[0020] Figure 3 This is a schematic diagram of the horizontal movement structure of this utility model;

[0021] Figure 4 This is a schematic diagram of the rotation mechanism of this utility model;

[0022] Figure 5 This is a partially enlarged structural schematic diagram of the present invention.

[0023] In the diagram: 1. Drive motor; 2. Rotary disc; 3. Rotating column; 4. Positioning frame; 5. Heating wire; 6. Drive gear; 7. Auxiliary gear; 8. Rotating rod; 9. Rotary cylinder; 10. Threaded column; 11. Clamping block; 12. Limiting turntable; 13. Connecting block; 14. Guide ring; 15. Guide rod; 16. Limiting frame; 17. Limiting groove. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model. Example

[0025] Please see Figure 1 - Figure 5 The boron expansion heating furnace electrically controlled heating wire manufacturing tooling in this embodiment includes a drive motor 1 and a rotating disk 2 installed at the output end of the drive motor 1. A rotating column 3 is installed in the middle of the outer end face of the rotating disk 2, and a positioning frame 4 is installed on the side of the outer end face of the rotating disk 2. A heating wire 5 is sleeved on the outside of the rotating column 3, and one end of the heating wire 5 is inserted into the positioning frame 4.

[0026] The drive motor 1 is connected to the auxiliary gear 7 through the active gear 6. A rotating drum 9 is installed in the middle of the outer end face of the auxiliary gear 7. A threaded column 10 is threadedly connected to the inner wall of the rotating drum 9. A clamping block 11 is rotatably set at the outer end of the threaded column 10. There are at least two clamping blocks 11, and the two clamping blocks 11 are symmetrically distributed.

[0027] The device is positioned stably and the heating wire is accurately fed by setting up a wire feeder and a support frame next to it. The feeder and support frame are well-known technologies in the field and have been widely used in actual processing, so they are not described in detail in this embodiment.

[0028] Driven by the drive motor 1, and driven by the meshing transmission of the active gear 6 and the auxiliary gear 7, the rotating column 3 and the rotating drum 9 rotate synchronously. Based on the positioning frame 4, the heating wire 5 is positioned at one end, so that when the rotating column 3 rotates, the heating wire 5 changes from a straight line to a ring shape on the outside of the rotating column 3. Based on the threaded connection between the rotating drum 9 and the threaded column 10, the clamping block 11 is pushed horizontally, causing the heating wire 5 to move synchronously. Finally, under the rotation of the rotating column 3 and the horizontal push of the clamping block 11, the heating wire 5 is distributed in a spiral shape on the outside of the rotating column 3, achieving the effect of accurate preparation.

[0029] The drive gear 6 is fixedly sleeved on the outside of the rotating column 3, and the auxiliary gear 7 has a rotating rod 8 fixedly installed in the middle of the rear end face. The rotating rod 8 and the rotating cylinder 9 are rotatably connected to the support plate.

[0030] The outer end face of the threaded column 10 is fixedly connected to the limiting turntable 12, the limiting turntable 12 is rotatably connected to the connecting block 13, and the limiting turntable 12 is inserted into the connecting block 13. The connecting block 13 has a cavity inside for limiting the rotation of the limiting turntable 12.

[0031] Guide rings 14 are fixedly sleeved on the outer side of the rotating drum 9 and the connecting block 13. Several guide rods 15 are installed through the guide rings 14. The guide rods 15 are evenly distributed in a ring on the outer side of the rotating drum 9.

[0032] By setting the support plate, rotational support is provided for the auxiliary gear 7, rotating rod 8, and rotating cylinder 9, ensuring the stability of the rotation of the rotating cylinder 9 and its side clamping block 11 after the auxiliary gear 7 meshes with the driving gear 6. Under the rotation and limiting of the cavity in the connecting block 13, the limiting turntable 12 can rotate inside the connecting block 13.

[0033] And under the positioning guidance of the guide ring 14 on the sliding direction of the guide rod 15, the accuracy of the moving direction of the connecting block 13 and the clamping block 11 is further ensured;

[0034] With the threaded connection between the rotating drum 9 and the threaded column 10, when the threaded column 10 is rotated and pushed, the limiting turntable 12 rotates synchronously inside the connecting block 13, and at the same time pushes the connecting block 13 and the clamping block 11 to move. Under the simultaneous clamping of the two clamping blocks 11, a stable horizontal push is provided for the heating wire 5, so that the movement of the threaded column 10 meets the length of the heating wire 5.

[0035] A limit frame 16 is rotatably provided on the inner end face of the connecting block 13, and a limit groove 17 is opened on the outer side of the rotating cylinder 9, with the limit frame 16 located directly above the limit groove 17.

[0036] Under the weight of its own, the limiting frame 16 is always in contact with the outer surface of the rotating drum 9. As the rotating drum 9 moves outward, the limiting frame 16 moves to support the inside of the limiting groove 17. Under the positioning and limiting effect of the limiting groove 17 itself, the limiting frame 16 is positioned inside the limiting groove 17. Thus, the moving distance of the rotating drum 9 is limited by the blocking effect of the limiting frame 16 on the limiting groove 17, preventing it from moving beyond the range and falling.

[0037] Fastening components are provided between the upper and lower horizontal planes of the two clamping blocks 11. The fastening components consist of fastening bolts and fastening sleeves.

[0038] The heating wire 5 is inserted into the middle of two adjacent clamping blocks 11, and the middle of the two adjacent clamping blocks 11 is arranged in an arc shape;

[0039] The fastening bolt inside the fastening assembly is manually rotated. Under the action of the threads of the fastening sleeve and the fastening bolt, the distance between the two adjacent clamping blocks 11 is controlled, providing a suitable limiting state for the heating wire 5, and ensuring that the two clamping blocks 11 drive the heating wire 5 to move horizontally accurately and reliably.

[0040] The installation method, connection method, or setting method disclosed in this embodiment are all common mechanical connections.

[0041] Any connection method that can achieve its beneficial effect can be implemented. In addition, all electrical components in this embodiment are electrically connected to the main controller and the power supply. The main controller can be a conventional known device such as a computer that plays a control role. Those skilled in the art can control the electrical components through simple programming. Moreover, the existing public power connection technology is also common knowledge in the field. Therefore, the specific structural composition and working principle will not be described in detail in this embodiment.

[0042] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0043] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A tooling for manufacturing electrically controlled heating wires for a boron diffusion furnace, comprising a drive motor (1) and a rotating disk (2) mounted on the output end of the drive motor (1), characterized in that: A rotating column (3) is installed in the middle of the outer end face of the rotating disk (2), and a positioning frame (4) is installed on the side of the outer end face of the rotating disk (2). A heating wire (5) is sleeved on the outside of the rotating column (3), and one end of the heating wire (5) is inserted into the positioning frame (4). The drive motor (1) is connected to an auxiliary gear (7) through a drive gear (6). A rotating cylinder (9) is installed in the middle of the outer end face of the auxiliary gear (7). A threaded column (10) is threadedly connected to the inner wall of the rotating cylinder (9). A clamping block (11) is rotatably provided at the outer end of the threaded column (10). There are at least two clamping blocks (11), and the two clamping blocks (11) are symmetrically distributed.

2. The tooling for manufacturing electrically controlled heating wires in a boron diffusion furnace according to claim 1, characterized in that: The active gear (6) is fixedly sleeved on the outside of the rotating column (3), and a rotating rod (8) is fixedly installed in the middle of the rear end face of the auxiliary gear (7). The rotating rod (8) and the rotating cylinder (9) are rotatably connected to a support plate.

3. The tooling for manufacturing electrically controlled heating wires in a boron diffusion furnace according to claim 1, characterized in that: The outer end face of the threaded column (10) is fixedly connected to a limiting turntable (12), the limiting turntable (12) is rotatably connected to a connecting block (13), and the limiting turntable (12) is inserted into the connecting block (13). The connecting block (13) has a cavity inside for limiting the rotation of the limiting turntable (12).

4. The tooling for manufacturing electrically controlled heating wires in a boron diffusion furnace according to claim 3, characterized in that: Guide rings (14) are fixedly sleeved on the outer side of the rotating drum (9) and the connecting block (13). Several guide rods (15) are provided through the guide rings (14). The guide rods (15) are evenly distributed in a ring on the outer side of the rotating drum (9).

5. The tooling for manufacturing electrically controlled heating wires in a boron diffusion furnace according to claim 3, characterized in that: The inner end face of the connecting block (13) is rotatably provided with a limiting frame (16), and the outer side of the rotating cylinder (9) is provided with a limiting groove (17). The limiting frame (16) is located directly above the limiting groove (17).

6. The tooling for manufacturing electrically controlled heating wires in a boron diffusion furnace according to claim 1, characterized in that: Fastening components are provided between the upper and lower horizontal planes of the two clamping blocks (11), and the fastening components consist of fastening bolts and fastening sleeves.

7. The tooling for manufacturing electrically controlled heating wires in a boron diffusion furnace according to claim 6, characterized in that: The heating wire (5) is inserted into the middle of two adjacent clamping blocks (11), and the middle of the two adjacent clamping blocks (11) is arranged in an arc shape.

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