Powder metallurgy tubular target material powder compaction device

Abstract

The utility model provides a powder metallurgy tubular target material powder compacting device which comprises a driving assembly and a forming die assembly, a tubular target material die in the forming die assembly is used for filling powder, and a driving piece in the driving assembly is used for driving a hollow cylindrical pressing head to compact the powder. According to the powder compaction device for the powder metallurgy tubular target material, the layering problem in the powder compaction process can be solved, the compaction density is improved, and standardization is facilitated.

Description

TECHNICAL FIELD

[0001] The utility model belongs to powder metallurgy tubular target material technical field, concretely relates to a powder metallurgy tubular target material powder compaction device. BACKGROUND

[0002] In the flat panel display coating industry, molybdenum alloy target material, aluminum alloy target material, niobium oxide target material and the like are mainly used, among which the molybdenum alloy target material is widely used for thin film electrodes, thin film wiring and the like in the sputtering preparation of liquid crystal display (LCD) and touch panel (TP). In the past, the molybdenum alloy target material was mostly made into a flat plate shape, which is called a planar target. Since the planar target and the magnetic field in the sputtering equipment do not move relatively, the utilization rate of the planar target is only about 30%, which not only causes waste of target material, but also greatly affects the production process because the work of the sputtering equipment must be interrupted for replacing the target material.

[0003] In order to improve the utilization rate of the target material, people more and more manufacture and use tubular target material, that is, the target material is made into a pipe shape, and a static magnet is installed in the pipe. During the sputtering process, the tubular target material rotates at a certain speed, so it is also called rotating target. Since the rotating tubular target material and the static magnet move relatively, the entire surface of the tubular target material uniformly sputters, and the utilization rate of the target material can be as high as more than 70%. Compared with the planar target, the tubular target material has the advantages of high utilization rate, good coating continuity, uniform coating composition and the like, is an ideal sputtering target material, and has a huge market demand. With the change from using the planar target to using the tubular target in the coating industry, the tubular target material is becoming the standard material for the magnetron sputtering equipment.

[0004] At present, the preparation method of powder metallurgy tubular target material includes cold isostatic pressing, degassing treatment and hot isostatic pressing in turn. Before cold isostatic pressing, the raw material powder needs to be manually rammed in the forming rubber sleeve. Each time, 15% of the total volume of alloy powder is poured into the rubber sleeve, and manual ramming is performed using a special tool until the raw material powder fills the entire rubber sleeve. However, this method has the following disadvantages: (1) In the manual ramming step, because the strength of each person is different, there is no standard ramming force, which will lead to different powder density of ingots filled by different personnel, affecting the shrinkage size of the product after cold isostatic pressing, and even causing size too small and scrap; (2) When the raw material powder is single component powder, vibration and manual ramming are often combined. Because the force on the bottom layer of powder is different at each vibration and manual ramming, the product shape after cold isostatic pressing is irregular; (3) Because of different compaction densities, the amount of powder used cannot be standardized, resulting in waste of powder; (4) For some tubular target ingots with high height and small wall thickness, manual ramming cannot achieve standard compaction density. That is, the traditional powder compaction method of tubular target material has the problems of uneven powder filling density, alloy powder stratification caused by vibration compaction, small gap between tubular target wall thickness, low compaction density of manual ramming, and irregular product shape after cold isostatic pressing of the rubber sleeve.

[0005] For example, CN103071791A discloses a large-length-diameter-ratio TiAl pipe target forming method, which comprises the following steps: (1) assembling a sleeve mold; (2) filling and sealing of raw material Ti powder and Al powder; (3) vacuum heat degassing; (4) hot isostatic pressing densification forming; (5) removing the sleeve mold; and (6) product finishing. In step (2), after mixing the Ti powder and Al powder, the specific steps of filling them into the assembled sleeve mold are as follows: (1) placing the sleeve mold horizontally, then using a filling shovel to send the uniformly mixed Ti powder and Al powder to the bottom of the sleeve mold, and then vertically placing the sleeve mold and pulling out the filling shovel to complete the first powder filling; (2) then rotating the sleeve mold by 90 degrees to place it horizontally, repeating step (1) to complete the second powder filling, and sequentially completing four times of filling; (3) vertically placing the sleeve mold to compact the powder in the sleeve mold to complete the first round of powder filling; (4) repeating steps (1)-(3) to complete the second round of powder filling, and sequentially completing the filling until the sleeve mold is filled. However, the above method still uses manual compaction method, which is complicated and time-consuming.

[0006] In view of the above, it is necessary to develop a powder metallurgy tubular target powder compaction device. Content of the utility model

[0007] The powder metallurgy tubular target material powder compaction device can solve the layering problem in the powder compaction process, improve the compaction density, and facilitate standardization.

[0008] To achieve the purpose, the utility model discloses the following technical scheme:

[0009] The utility model provides a kind of powder metallurgy tubular target material powder compaction device, and the powder compaction device includes driving assembly and forming die assembly;

[0010] The driving assembly includes base platform, the edge of the base platform is equipped with stand, the upper part of the stand is movably connected with upper pressing plate, and the side of the upper pressing plate close to the base platform is equipped with hollow cylindrical punch;The upper pressing plate is controlled by driving element;

[0011] The forming die assembly includes die base, the center of the die base is provided with center stand, and the edge of the die base is provided with tubular target material mold, so that the center stand and the tubular target material mold are coaxially sleeved;The tubular target material mold is surrounded by a shaping jig on the outer side surface.

[0012] Among them, the tubular target material mold is used to fill powder, and the driving element is used to drive the hollow cylindrical punch to compact the powder.

[0013] As a preferred technical scheme of the utility model, the powder compaction device further includes a vibrating platform, which is arranged between the die base and the base platform.

[0014] As a preferred technical scheme of the utility model, a guide block is arranged at the top end of the center stand.

[0015] As a preferred technical scheme of the utility model, a lifting ring is arranged at the upper part of the center stand.

[0016] As a preferred technical scheme of the utility model, the center stand is a stainless steel center stand plated with chromium on the surface.

[0017] As a preferred technical scheme of the utility model, the die base and the center stand are threadedly connected.

[0018] As a preferred technical scheme of the utility model, the tubular target material mold includes a forming rubber sleeve.

[0019] As a preferred technical scheme of the utility model, the forming rubber sleeve includes an outer rubber sleeve and two detachable rubber plugs.

[0020] As a preferred technical scheme of the utility model, the driving element includes a servo hydraulic cylinder.

[0021] As the preferred technical scheme of the utility model, the edge of the base platform is equipped with 2-4 vertical columns.

[0022] Compared with the prior art, the utility model has the beneficial effects that:

[0023] The utility model adopts the mode that the driving assembly cooperates with the forming die assembly, prevents the problem of delamination, the pressing force and distance of the driving part are controlled by the program setting machine, powder compaction can be accurately implemented, the density error of each ingot is ensured to be within 1%, and the shape is regular, especially for the ingot with high height and small wall thickness, the problem that artificial ramming cannot meet the density requirement is solved. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 It is a structure schematic view of the powder metallurgy tubular target material powder compaction device in the specific embodiment of the utility model;

[0025] Figure 2 It is Figure 1 A structure schematic view of the forming die assembly;

[0026] Among them, 1-driving assembly;11-base platform;12-vertical column;13-pressing plate;14-hollow cylindrical ram;15-driving part;2-forming die assembly;21-die base;22-center vertical column;23-tubular target material die;24-shaping jig;25-guiding block;26-suspension ring;3-powder;4-vibration platform. DETAILED DESCRIPTION

[0027] In order to make the technical scheme, purpose and advantage of the utility model more clear, the utility model is further described in detail below through specific embodiment and in conjunction with the drawings. It should be understood that the specific embodiment described herein is only used for illustrating and explaining the utility model, and is not used for limiting the utility model.

[0028] In the description of the utility model, it should be explained that the orientation or position relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and is not used for indicating or implying that the indicated device or element must have a particular orientation, a particular orientation and operation, therefore it cannot be understood as the limitation of the utility model. In addition, the terms "first", "second", "third" are only used for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0029] In the description of the utility model, it is necessary to explain, unless there is definite stipulation and limitation, the term "installation", "link", "connection" should do broad sense understanding, for example, can be fixed connection, also can be detachable connection, or integrally connected;Can be mechanical connection, also can be electrical connection;It can be direct connection, also can be indirectly connected through intermediate medium, it can be the communication of two elements inside.For the electric and communication field, it can be wired connection, also can be wireless connection.For ordinary skilled in the art, the specific meaning of the above-mentioned terms in the utility model can be understood according to specific circumstances.

[0030] The utility model provides a kind of specific implementation, as Figure 1 And Figure 2 As shown in a kind of powder metallurgy tubular target material powder compaction device, the powder compaction device includes driving assembly 1 and forming die assembly 2;

[0031] The driving assembly 1 includes base platform 11, the edge of base platform 11 is equipped with stand 12, the upper part of stand 12 is movably connected with upper pressing plate 13, and hollow cylindrical punch 14 is arranged on the side of upper pressing plate 13 close to base platform 11;Upper pressing plate 13 is controlled by driving part 15;

[0032] The forming die assembly 2 includes die base 21, center stand 22 is arranged at the center of die base 21, tubular target material die 23 is arranged at the edge of die base 21, so that center stand 22 and tubular target material die 23 are coaxially sleeved;Shaping jig 24 is surrounded on the outer side of tubular target material die 23;

[0033] Among them, the tubular target material die 23 is used to fill powder 3, and the driving part 15 is used to drive the hollow cylindrical punch 14 to compact the powder 3.The powder 3 used for preparing powder metallurgy tubular target material can be alloy powder or single-element powder.

[0034] Further preferably, the powder compaction device further includes vibration platform 4, which is arranged between die base 21 and base platform 11, and can realize single-element powder compaction and vibration simultaneously, thereby improving the vibration density.

[0035] Further preferably, a guide block 25 is arranged at the top end of center stand 22, and the outer shape of guide block 25 is in the shape of a circular truncated cone, so that the hollow cylindrical punch 14 can be guided downward by the side surface of guide block 25 when it is pressed down, for positioning the hollow cylindrical punch 14 and ensuring the accuracy of the pressing position of the hollow cylindrical punch 14.The hollow cylindrical punch 14 is set according to the inner diameter, outer diameter and length of the tubular target material.

[0036] Further preferably, a lifting ring 26 is arranged at the upper part of the central column 22.

[0037] Further preferably, the central column 22 is a stainless steel central column plated with chromium on the surface.

[0038] Further preferably, the mold base 21 is threadedly connected with the central column 22.

[0039] Further preferably, the tubular target material mold 23 comprises a shaped rubber sleeve, and the shaped rubber sleeve comprises an outer rubber sleeve and rubber plugs detachable at both ends.

[0040] Further preferably, the driving member 15 comprises a servo hydraulic cylinder, which is a combined component of a servo motor and a hydraulic cylinder.

[0041] Further preferably, four columns 12 are arranged at the edges of the base platform 11.

[0042] The powder metallurgy tubular target material powder compaction device has the following characteristics:

[0043] (1) The constant pressure pressing mode is adopted to solve the delamination problem caused by vibration.

[0044] (2) The pressing force and distance of the driving member can be set according to the product molding requirements, and it is easy to standardize.

[0045] (3) The device can compact the pipe with high ingot height, small wall thickness and cannot be compacted by artificial ramming.

[0046] (4) The vibration module is arranged below the mold base, which can realize powder compaction and vibration at the same time, and improve the packing density.

[0047] (5) The central column is made of stainless steel plated with chromium, and the upper part has a guide structure to ensure the accuracy of the pressing position.

[0048] The utility model also provides the operation steps of the powder metallurgy tubular target material powder compaction device, which are as follows:

[0049] Step one: according to the requirements, assemble the shaped mold assembly 2, for example, first fix the central column 22 on the mold base 21, then assemble the tubular target material mold 23, so that the central column 22 and the tubular target material mold 23 are coaxially sleeved, and then surround the tubular target material mold 23 with the shaping jig 24 on the outer side surface.

[0050] Step two: pour the single-element powder 3 accounting for 15% of the internal cavity volume into the inside of the tubular target material mold 23.

[0051] Step three: the assembly of the forming die filled with powder 2 is placed directly below the hollow cylindrical pressure head 14, according to the program settings, the hollow cylindrical pressure head 14 is pressed down by the servo hydraulic cylinder until the compaction is completed, for single-element powder, vibration of the vibration platform 4 is accompanied by the pressing down; the first pressing force is 10 tons; the single-element powder oscillation force is 10KN, and the vibration frequency is 50Hz;

[0052] Step four: steps two and three are repeated until the powder 3 fills the target position of the tubular target material die 23; wherein, the pressing pressure of the hollow cylindrical pressure head 14 is reduced by 10%-15% each time, and the pressing distance is not set;

[0053] Step five: the tubular target material die 23 is sealed, the setting tool 24 and the die base 21 are removed, and subsequent operations such as cold isostatic pressing are performed.

[0054] In the embodiment, the same amount of powder 3 is filled each time to ensure that the overall density of the compacted powder 3 is uniform.

[0055] The utility model provides a kind of powder metallurgy tubular target material powder compaction device, including driving assembly and forming die assembly, tubular target material die in forming die assembly is used to fill powder, and driving part in driving assembly is used to drive hollow cylindrical pressure head to compact powder.The powder metallurgy tubular target material powder compaction device of the utility model can solve the problem of stratification in the process of powder compaction, improve compaction density, and facilitate standardization.

[0056] The above is only the specific implementation manner of the utility model, but the protection scope of the utility model is not limited to this, and the skilled person in the art should understand that any change or replacement that can be easily thought of by any person belonging to the technical field within the technical range disclosed by the utility model falls within the protection scope and the disclosure range of the utility model.

Claims

1. A powder metallurgical tubular target material powder compacting device, characterized in that, The powder compaction device comprises a driving assembly (1) and a forming die assembly (2); The driving assembly (1) comprises a base platform (11), a vertical column (12) is arranged at the edge of the base platform (11), an upper pressing plate (13) is movably connected to the upper part of the vertical column (12), a hollow cylindrical pressing head (14) is arranged on the side of the upper pressing plate (13) close to the base platform (11), and the upper pressing plate (13) is controlled by a driving member (15); The forming die assembly (2) comprises a die base (21), a center vertical column (22) is arranged at the center of the die base (21), a tubular target material die (23) is arranged at the edge of the die base (21), so that the center vertical column (22) and the tubular target material die (23) are coaxially sleeved, and a shaping jig (24) is arranged around the outer side of the tubular target material die (23); The tubular target material die (23) is used for loading powder (3), and the driving member (15) is used for driving the hollow cylindrical pressing head (14) to compact the powder (3).

2. The powder metallurgy tubular target powder compacting device of claim 1, wherein, The powder compaction device further comprises a vibrating platform (4) arranged between the die base (21) and the base platform (11).

3. The powder metallurgy tubular target powder compacting device of claim 1, wherein, A guide block (25) is arranged at the top end of the center vertical column (22).

4. The powder metallurgy tubular target powder compacting device of claim 1, wherein, A lifting ring (26) is arranged at the upper part of the center vertical column (22).

5. The powder metallurgy tubular target powder compacting device of claim 1, wherein, The center vertical column (22) is a stainless steel center vertical column with a chromium-plated surface layer.

6. The powder metallurgy tubular target powder compacting device of claim 1, wherein, The die base (21) and the center vertical column (22) are screw-connected.

7. The powder metallurgy tubular target powder compacting device of claim 1, wherein, The tubular target material die (23) comprises a forming rubber sleeve.

8. The powder metallurgy tubular target powder compacting device of claim 7, wherein, The forming rubber sleeve comprises an outer rubber sleeve and detachable rubber plugs at both ends.

9. The powder metallurgy tubular target powder compacting device of claim 1, wherein, The driving member (15) comprises a servo hydraulic cylinder.

10. The powder metallurgy tubular target powder compacting device of claim 1, wherein, 2-4 vertical columns (12) are arranged at the edge of the base platform (11).

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