Lifting mechanism and substrate transfer robot

Abstract

The lifting mechanism comprises a first arm body and a second arm body which rotate and ascend and descend with a first rotating shaft as the center, a horizontal base is arranged at the upper end of the second arm body, and the horizontal base is used for carrying a translation mechanism linked with a base plate to move in parallel. The lifting mechanism further comprises a supporting connecting rod structure provided with a first supporting arm, a second supporting arm and a connecting arm, the first supporting arm and the second supporting arm are parallel to the first arm body and the second arm body respectively, and the connecting arm is arranged on the first rotating shaft in a sleeving mode. The first supporting arm and the second supporting arm rotate relative to the connecting arm and synchronously ascend and descend with the first arm body and the second arm body correspondingly so as to dynamically support the first rotating shaft and the horizontal base, the stability of the first rotating shaft and the horizontal base is enhanced, and after the second arm body and the second supporting arm are connected with the horizontal base, the horizontal base is limited to be in a horizontal state. According to the substrate carrying robot, the manipulator in the substrate carrying robot can effectively adsorb the horizontally-arranged substrate, and the substrate carrying robot can conveniently and rapidly carry the substrate.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the substrate carrying technical field relates to a substrate carrying robot, and further relates to a lifting mechanism applied to the substrate carrying robot. BACKGROUND

[0002] In the prior art, a liquid crystal substrate carrying robot is disclosed in CN101318328B, which comprises a lifting mechanism, wherein the first arm body and the second arm body of the lifting mechanism rotate and move up and down around the first rotating shaft. This structure has high requirements for the balance of the first rotating shaft. After the horizontal joint structure and the hand for transferring the liquid crystal substrate are installed at the upper end of the second arm body, the first rotating shaft will be slightly tilted under stress, which results in poor stability and causes the hand to fail to effectively adsorb the horizontally arranged liquid crystal substrate. Moreover, the horizontal joint structure cannot quickly move the liquid crystal substrate on the hand.

[0003] Therefore, there is an urgent need for a lifting mechanism that can solve the above problems. UTILITY MODEL CONTENTS

[0004] The utility model aims at overcoming the deficiencies of the prior art, providing a lifting structure with high stability and a substrate carrying robot, which can effectively adsorb the horizontally arranged substrate by the mechanical hand in the substrate carrying robot and facilitate the substrate carrying robot to quickly carry the substrate.

[0005] The utility model is implemented as follows: a lifting mechanism comprises:

[0006] A first arm body and a second arm body are configured to rotate and move up and down around a first rotating shaft.

[0007] A horizontal seat is arranged at the upper end of the second arm body and used to load the translation mechanism for parallel movement of the substrate.

[0008] A support link structure comprises:

[0009] A first support arm is configured to be arranged in parallel with the first arm body and move up and down synchronously.

[0010] A second support arm is configured to be arranged in parallel with the second arm body and move up and down synchronously.

[0011] A connecting arm is sleeved on the first rotating shaft and used to connect the first support arm and the second support arm.

[0012] The first support arm and the second support arm are configured to rotate and move up and down relative to the connecting arm and are used to support the first rotating shaft and the horizontal seat respectively. After the second arm body and the second support arm are connected to the horizontal seat, the horizontal seat is limited to a horizontal state.

[0013] Further, the first support arm and the second support arm are respectively arranged in parallel with the first arm body and the second arm body;

[0014] The first support arm and the second support arm are respectively arranged in parallel with the first support arm and the second support arm;

[0015] The first arm body and the second arm body gradually converge and overlap, so that the horizontal seat moves downward; the first arm body and the second arm body gradually separate and straighten, so that the horizontal seat moves upward.

[0016] Further, the lower end of the first arm body rotates around the first base in a fixed position;

[0017] The upper end of the second arm body rotates around the second rotating shaft;

[0018] The lower end of the first support arm rotates around the second base in a fixed position;

[0019] The upper end of the second support arm rotates around the horizontal seat;

[0020] The connecting arm includes a connecting cylinder sleeved on the outer surface of the first rotating shaft, the connecting cylinder extends outwardly to have a first connecting arm and a second connecting arm, the upper end of the first support arm rotates around the first connecting arm and supports the first rotating shaft, and the lower end of the second support arm rotates around the second connecting arm and supports the horizontal seat.

[0021] Further, the first base is fixedly provided with a horizontally arranged rotating shaft, and the first arm body is gap-rotatably sleeved on the outer surface of the rotating shaft;

[0022] The horizontal seat is fixedly provided with a horizontally arranged second rotating shaft and a third rotating shaft arranged in parallel with the second rotating shaft, the upper end of the second arm body is gap-rotatably sleeved on the outer surface of the second rotating shaft, and the upper end of the second connecting arm rotates around the third rotating shaft.

[0023] Further, the upward driving component includes:

[0024] A first driving wheel is located at one end of the first arm body and the second arm body, and is fixedly sleeved on the outer surface of the first rotating shaft;

[0025] A first driven wheel and a second driven wheel are respectively arranged at the other end of the first arm body and the second arm body, and are respectively gap-sleeved on the rotating shaft and the second rotating shaft, the first driving wheel and the outer sleeve of the first driven wheel are sleeved with a first belt, and the first driving wheel and the outer sleeve of the second driven wheel are sleeved with a second belt;

[0026] The first driving wheel synchronously rotates the first passive wheel and the second passive wheel towards a set direction, so that the first arm body and the second arm body are overlapped or stretched apart.

[0027] Further, the lifting driving component further comprises:

[0028] The first adjusting component and the second adjusting component each comprise a mounting member and a tensioning wheel fixed to the mounting member, the mounting member is provided with a plurality of long strip-shaped waist grooves arranged at intervals and symmetrically, a screw is arranged in each long strip-shaped waist groove and screwed with the arm body, the position of the mounting member is moved around the screw, and the tensioning degree of the belt is adjusted by the displaced tensioning wheel.

[0029] Further, the second arm body and the second support arm respectively limit the horizontal seat to a horizontal state through the second rotating shaft and the third rotating shaft for connection.

[0030] Further, the lifting mechanism further comprises:

[0031] The auxiliary support arm is arranged in parallel and symmetrically with the first arm body, the lower end of the auxiliary support arm is rotatable around the third base, and the upper end of the auxiliary support arm is rotatable around the first rotating shaft and supports the first rotating shaft.

[0032] The utility model further provides a substrate carrying robot, which comprises:

[0033] At least one mechanical hand is used for placing the substrate in a horizontal state.

[0034] At least one translation mechanism is used for driving the mechanical hand to move horizontally.

[0035] A rotating mechanism is used for driving the translation mechanism to rotate.

[0036] The lifting mechanism described above is further comprised, and the rotating mechanism is installed on the horizontal seat.

[0037] Further, the mechanical hand comprises an arm body, a plurality of interval arranged supporting plates are installed on the arm body, and a plurality of suction cups for adsorbing the substrate are arranged on at least one supporting plate.

[0038] Further, a plurality of shock-absorbing pads for preventing the substrate from deforming are arranged on each supporting plate.

[0039] Further, the mechanical hand comprises:

[0040] A first detector is configured to detect whether a substrate is placed on the substrate support plate and output a first detection signal when the first detector detects that the substrate is placed on the substrate support plate.

[0041] A second detector is configured to detect a vacuum pressure value in the vacuum chuck and output a second detection signal containing the current vacuum pressure value.

[0042] A driving controller is configured to control the vacuum negative pressure device to generate a vacuum negative pressure in the vacuum chuck to fix the substrate according to the received first control signal, and control the vacuum negative pressure device to adjust the current vacuum negative pressure value to a set threshold value according to the received second control signal.

[0043] Further, the translation mechanism comprises a first mechanical arm and a second mechanical arm, which rotate around a mechanical shaft and translate forward and backward.

[0044] Preferably, the first mechanical arm and the second mechanical arm gradually overlap to make the mechanical hand translate backward, and gradually stretch apart to make the mechanical hand translate forward.

[0045] Further, the translation mechanism comprises a horizontal driving component, which rotates in a set number of turns and direction to drive the first mechanical arm and the second mechanical arm to rotate around a mechanical shaft and translate forward and backward.

[0046] Further, the rotation mechanism comprises a rotating shaft installed on the horizontal seat and a bearing part installed on the rotating shaft to rotate the translation mechanism.

[0047] Preferably, the rotation mechanism comprises a rotating driving component, which rotates in a set number of turns and direction to make the translation mechanism rotate at a set angle.

[0048] The utility model provides a kind of lifting mechanism and substrate handling robot, lifting mechanism includes first arm body, second arm body and horizontal seat, first arm body and second arm body are configured as rotating and lifting with first rotation axis as center, horizontal seat is set to the upper end of second arm body, for the translation mechanism of parallel movement of linkage substrate placement, further include the support connecting rod structure with first support arm, second support arm and connecting arm, first support arm is configured as with first arm body parallel arrangement and with first arm body synchronous lifting, first support arm is configured as with first arm body parallel arrangement, second support arm is configured as with second arm body parallel arrangement, connecting arm is set on first rotation axis, for connecting first support arm and second support arm, first support arm and second support arm are configured as rotating relative to connecting arm and respectively with first arm body and second arm body synchronous lifting, to dynamically support first rotation axis and horizontal seat, the stability of first rotation axis and horizontal seat is enhanced, after second arm body and second support arm are connected with the horizontal seat respectively, for the horizontal state of the horizontal seat is limited, can make the mechanical hand in substrate handling robot effectively adsorb horizontally arranged substrate, it is convenient for substrate handling robot to carry substrate fast. BRIEF DESCRIPTION OF DRAWINGS

[0049] In order to more clearly illustrate the technical scheme of the utility model, the following will be briefly introduced the drawings needed to be used in the embodiment, obviously, the drawings in the following description are only some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained according to these drawings without creating labor.

[0050] Figure 1 It is the structure diagram that the lifting mechanism and translation mechanism in the substrate handling robot provided by the utility model embodiment are all in elongated state.

[0051] Figure 2 It is the structure diagram that the lifting mechanism and translation mechanism in the substrate handling robot provided by the utility model embodiment are all in overlapping state.

[0052] Figure 3 It is the side view of the substrate handling robot provided by the utility model embodiment.

[0053] Figure 4 It is the structure diagram of connecting arm in the lifting mechanism provided by the utility model embodiment.

[0054] Figure 5 It is the partial structure diagram of upper driving component in the lifting mechanism provided by the utility model embodiment.

[0055] Figure 6 It is the partial structure diagram of translation driving component in the translation mechanism provided by the utility model embodiment.

[0056] Figure 7Is the schematic view of the inertia balance block fixed on the power output shaft of the motor in the substrate carrying robot.

[0057] Figure 8 Is the schematic view of the inertia balance block fixed on the power output shaft of the motor in the substrate carrying robot.

[0058] The realization, functional features and advantages of the utility model will be further explained in combination with embodiments and with reference to the drawings.

[0059] Among them, the sign explanation is as follows:

[0060] Lifting mechanism 100, first base 110, first arm body 120, rotating shaft 130, second arm body 140, first rotating shaft 150, ascending driving part 160, first driving wheel 161, first driven wheel 162, second driven wheel 163, first belt 164, second belt 164', ascending power part 165', first mounting 165, first tension wheel 166, long strip-shaped first waist groove 167, first screw 168, horizontal seat 170, second rotating shaft 180, support connecting rod structure 190, first support arm 191, third rotating shaft 192, second base 193, second support arm 194, third rotating shaft 195, connecting arm 196, connecting cylinder 196a, first connecting arm 196b, second connecting arm 196c, fifth rotating shaft 197, sixth rotating shaft 198, auxiliary support arm 199, auxiliary rotating shaft 199a, third base 199b;

[0061] Mechanical hand 200, arm body 210, supporting plate 220, suction cup 230, first detector 250, second detector 260;

[0062] Translation mechanism 300, first mechanical arm 310, second mechanical arm 320, mechanical shaft 330, first mechanical shaft 340, second mechanical shaft 350, second driving wheel 360, third driven wheel 370, fourth driven wheel 370', third belt 380, fourth belt 380', translation driving part 390;

[0063] Rotary mechanism 400, rotating shaft 410, bearing part 420, rotary driving part 430;

[0064] Cover 500. Specific implementation

[0065] In the utility model, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "horizontal", "longitudinal" and the like indicate the orientation or state relationship based on the orientation or state relationship shown in the drawings. These terms are mainly used to better describe the utility model and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0066] In addition to indicating the orientation or state relationship, the above-mentioned terms may also be used to indicate other meanings, for example, the term "upper" may also be used to indicate a certain dependent relationship or connection relationship in some cases. For those skilled in the art, the specific meaning of these terms in the utility model can be understood according to the specific situation.

[0067] In addition, the terms "mounting", "setting", "providing", "connecting", "connecting" should be broadly understood. For example, it can be fixedly connected, detachably connected, or integrally constructed; it can be mechanically connected or electrically connected; it can be directly connected, or indirectly connected through an intermediate medium, or internal communication between two devices, elements or components. For those skilled in the art, the specific meaning of the above-mentioned terms in the utility model can be understood according to the specific situation.

[0068] In addition, the terms "first", "second" and the like are mainly used to distinguish different devices, elements or components, and the specific type and structure may be the same or different, and are not used to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise stated, the meaning of "multiple" is two or more.

[0069] In order to clearly indicate the direction relationship in the drawing, a coordinate system with the vertical direction as the Z direction and the horizontal plane as the XY plane is appropriately marked.

[0070] The technical solutions in the embodiments of the utility model will be described clearly and completely in combination with the drawings in the embodiments of the utility model.

[0071] As shown in the utility model embodiment provides a kind of lifting mechanism 100, comprising: Figures 1-3 As shown in the utility model embodiment provides a kind of lifting mechanism 100, comprising:

[0072] The first base 110 is configured to be fixedly arranged.

[0073] The first arm body 120 is rotatably connected to the first base 110 at the lower end through the rotating shaft 130, and the first arm body 120 rotates around the rotating shaft 130 as the center. The rotating shaft 130 is configured to be fixedly connected with the first base 110.

[0074] The upper end of the second arm body 140 and the lower end of the first arm body 120 are both rotated around the first rotating shaft 150. In this embodiment, the first arm body 120 and the second arm body 140 are both sleeved on the outer circumferential surface of the first rotating shaft 150 and are arranged in a gap rotating fit. This fit can increase the connection area between the first arm body 120, the second arm body 140 and the first rotating shaft 150, and has good stability.

[0075] The ascending driving component 160 is used to drive the first arm body 120 and the second arm body 140 to rotate around the first rotating shaft 150 and to ascend and descend.

[0076] The horizontal seat 170 is connected with the upper end of the second arm body 140 through the second rotating shaft 180. The upper end of the second arm body 140 is rotated around the second rotating shaft 180. The second rotating shaft 180 is fixedly connected with the horizontal seat 170.

[0077] The support connecting rod structure 190 comprises:

[0078] The first support arm 191 is arranged in parallel with the first arm body 120 and is synchronously ascended and descended. The lower end of the first support arm 191 is rotated around the second base 193 in a fixed position.

[0079] The second support arm 194 is arranged in parallel with the second arm body 140 and is synchronously ascended and descended. The upper end of the second support arm 194 is connected with the horizontal seat 170 through the third rotating shaft 195. The upper end of the second support arm 194 is rotated around the third rotating shaft 195. After the second arm body 140 and the second support arm 194 are respectively connected with the horizontal seat 170, the horizontal seat 170 is limited to be in a horizontal state.

[0080] As Figure 1 and Figure 4As shown, the support connecting rod structure 190 further comprises a connecting arm 196 for connecting the first support arm 191 and the second support arm 194, the connecting arm 196 comprises a connecting cylinder 196a sleeved on the outer circumferential surface of the first rotating shaft 150, the connecting cylinder 196a is configured in clearance fit with the first rotating shaft 150, and the connecting arm 196 does not rotate with the first rotating shaft 150, the connecting cylinder 196a extends outwardly with a first connecting arm 196b and a second connecting arm 196c, the upper end of the first support arm 191 rotates around the first connecting arm 196b, in the embodiment, the first arm body 120 and the connecting arm 196 are respectively located on both sides of the second arm body 140, so as to respectively support the two ends of the first rotating shaft 150, and the phenomenon that the first rotating shaft 150 is inclined along the axial direction thereof is avoided; the connecting line between the first arm body 120, the first connecting arm 196b, the first support arm 191 and the third rotating shaft 192 forms a parallelogram, so that the first support arm 191 rises or falls synchronously with the first arm body 120, so as to synchronously support the first rotating shaft 150, and the stability is strong; in the embodiment, preferably, the extension lines of the first connecting arm 196b and the second connecting arm 196c are arranged perpendicularly, the connecting cylinder 196a is sleeved on the outer circumferential surface of the first rotating shaft 150, and the upper end of the first support arm 191 and / or the first connecting arm 196b rotates around the fifth rotating shaft 197;

[0081] The lower end of the second support arm 194 rotates around the second connecting arm 196c, and the clearance fit is preferred between the two, a parallelogram is formed between the second arm body 140, the second connecting arm 196c, the second support arm 194 and the horizontal seat 170, so that the second support arm 194 rises or falls synchronously with the second arm body 140, so as to synchronously support the horizontal seat 170, and the stability is strong, at the same time, the second arm body 140 and the second support arm 194 limit the horizontal seat 170 to be in a horizontal state, so that the mechanical hand 200 installed on the horizontal seat 170 can effectively adsorb the horizontally arranged substrate, and the substrate handling robot can quickly handle the substrate.

[0082] In the embodiment, the first arm body 120 and the second arm body 140 gradually approach and overlap, so that the horizontal seat 170 moves downwardly; the first arm body 120 and the second arm body 140 gradually separate and stretch out, so that the horizontal seat 170 moves upwardly.

[0083] As shown, Figure 5 Further, the upward driving component 160 comprises:

[0084] A first driving wheel 161 is located inside one end of the first arm body 120 and the second arm body 140, the first driving wheel 161 is fixedly sleeved on the outer circumferential surface of the first rotating shaft 150, so as to drive the first rotating shaft 150 to rotate synchronously;

[0085] The first passive wheel 162 and the second passive wheel 163 are arranged inside the other end of the first arm body 120 and the second arm body 140 respectively, and are arranged in gaps on the rotating shaft 130 and the second rotating shaft 180 respectively. The outer periphery of the first driving wheel 161 and the first passive wheel 162 is sleeved with the first belt 164, and the outer periphery of the first driving wheel 161 and the second passive wheel 163 is sleeved with the second belt 164'. The first belt 164 and the second belt 164' are arranged to rotate in opposite directions, so as to realize that one first driving wheel 161 drives the first passive wheel 162 and the second passive wheel, which can drive the first arm body 120 and the second arm body 140 to gradually overlap and separate to be straight, so as to realize that the horizontal seat is lifted along the Z direction, and the number of the first driving wheel 161 is saved, and the production cost is reduced.

[0086] In the embodiment, the ascending driving component 160 further comprises an ascending power component 165' (see Figure 3 ) for driving the first driving wheel 161 to rotate in a set direction. The ascending power component 165' is preferably a motor, which is installed on the first arm body 120. Through forward rotation or reverse rotation of the ascending power component 165', the first arm body 120 and the second arm body 140 are gradually overlapped and separated to be straight.

[0087] In the embodiment, the position of the rotating shaft 130 is unchanged during the ascending or descending process of the first arm body 120 and the second arm body 140, the positions of the first rotating shaft 150 and the second rotating shaft 180 are changed, the lengths of the first arm body 120 and the second arm body 140 are equal, the number of teeth of the first passive wheel 162 and the second passive wheel 163 is the same and the tooth ratio of the first driving wheel 161 is 2:1, so that the first rotating shaft 150 is lifted up and down along the vertical straight line between the first rotating shaft 150 and the rotating shaft 130 (see Figure 5 the Z direction in the figure).

[0088] As shown in Figure 5 , further, the ascending driving component 160 further comprises:

[0089] The first adjusting assembly comprises a mounting member 165 and a tension pulley 166 fixedly arranged on the mounting member 165. The mounting member 165 is provided with a plurality of long strip-shaped waist grooves 167 which are arranged at intervals and symmetrically. A screw 168 is arranged in each long strip-shaped waist groove 167 and is screwed with the first arm body 120. The position of the mounting member 165 is moved around the screw 168, and then the tension of the belt 164 is adjusted by the displaced tension pulley 166, so as to ensure the speed stability of the belt 164, and then the precision of the horizontal seat 170 driven by the belt 167 is ensured.

[0090] Further, the ascending driving component 160 further comprises:

[0091] A second adjusting assembly is configured to adjust the tension of the second belt 164', and the structure, function and effect of the second adjusting assembly are the same as those of the first adjusting assembly, which will not be repeated here.

[0092] As shown in Figure 1 Further, the second arm body 140 and the second support arm 194 are configured to limit the horizontal seat 170 to the horizontal state through the second rotating shaft 180 and the third rotating shaft 195 respectively, and the stability is good.

[0093] As shown in Figure 1 Further, the lifting mechanism 100 further comprises:

[0094] The auxiliary support arm 199 is configured to be arranged in parallel and symmetrically with the first arm body 120, and the lower end of the auxiliary support arm 199 is rotatable relative to the third base 199b in a fixed position, preferably, the lower end of the auxiliary support arm 199 is rotatably connected to the third base 199b through the auxiliary rotating shaft 199a and rotates around the auxiliary rotating shaft 199a, and the upper end of the auxiliary support arm 199 rotates around the first rotating shaft 150, in the embodiment, the upper end of the auxiliary support arm 199 is sleeved on the outer circumferential surface of the first rotating shaft 150, and the two are configured to rotate in clearance fit, and the connecting line between the first support arm 191, the first connecting arm 196b, the auxiliary support arm 199 and the third rotating shaft 192 forms a parallelogram, so that the auxiliary support arm 199 rises or falls synchronously with the first support arm 191 to synchronously support the first rotating shaft 150, and the stability is strong.

[0095] In the embodiment, the first base 110, the second base 193 and the third base 199b are detachably mounted on the fixed plate 199, and the detachable structure design can adjust the mounting positions of the first arm body 120, the first support arm 191 and the auxiliary support arm 199, so that the first support arm 191 and the auxiliary support arm 199 are parallel to and synchronously lifted with the first arm body 120.

[0096] As shown in Figure 1 The utility model further provides a substrate carrying robot, which comprises:

[0097] At least one mechanical hand 200 is configured to carry the substrate in the horizontal state, in the embodiment, the mechanical hand 200 is preferably two and is located at different heights, the lower mechanical hand 200 is configured to take the substrate at the taking position and transfer the substrate to the processing position, and the upper mechanical hand 200 is configured to take the substrate at the processing position, so as to save the time of the lower mechanical hand 200 in taking the substrate at the processing position, and meanwhile, the two mechanical hands 200 can increase the number of the transferred substrates and improve the transfer efficiency; the substrate includes but is not limited to a glass substrate, a silicon substrate and a liquid crystal substrate.

[0098] At least one translation mechanism 300 is used to link the horizontal movement of the robotic arm 200. In this embodiment, two translation mechanisms 300 are preferred, which link the two robotic arms 200 to translate back and forth along the X direction respectively.

[0099] The rotating mechanism 400 is used to drive the translation mechanism 300 to rotate. In this embodiment, the rotating mechanism 400 drives the translation mechanism 300 to rotate from the X direction to both ends of the Y direction to pick up and place the substrate.

[0100] The substrate handling robot also includes the lifting mechanism 100 mentioned above. The rotating mechanism 400 is mounted on the horizontal seat 170 of the lifting mechanism 100 and moves up and down along the Z direction.

[0101] like Figure 1 As shown, the robotic arm 200 further includes an arm body 210, on which a plurality of spaced-apart trays 220 are mounted. At least one tray 220 is provided with a plurality of suction cups 230 for adsorbing substrates. By using suction cups to adsorb substrates, deformation of ultra-thin substrates can be prevented.

[0102] Furthermore, each pallet 220 is provided with a plurality of shock-absorbing pads 240 arranged in sequence at intervals to prevent deformation of the substrate. The height of the shock-absorbing pads 240 is the same as that of the suction cup 230 to ensure that the substrate being transported is in a horizontal state. In this embodiment, the shock-absorbing pads 240 are made of elastic materials, including but not limited to rubber, silicone or EVA.

[0103] like Figure 1 As shown, the robotic arm 200 further includes:

[0104] The first detector 250 is used to detect whether a substrate is placed on the tray 220. When the first detector 250 detects that a substrate is placed on the tray 220, it outputs a first detection signal.

[0105] The second detector 260 is used to detect the vacuum pressure value inside the suction cup 230 and output a second detection signal containing the current vacuum pressure value.

[0106] The drive controller (not shown) controls the vacuum negative pressure device to work according to the received first control signal, so that a vacuum negative pressure is generated in the suction cup 230 to adsorb and fix the substrate, and controls the vacuum negative pressure device (not shown) to adjust the current vacuum negative pressure value to within the set threshold according to the received second control signal.

[0107] Furthermore, the translation mechanism 300 includes a first robotic arm 310 and a second robotic arm 320, which rotate around a vertically arranged mechanical axis 330 and translate back and forth along the X direction.

[0108] Further, the second mechanical arm 320 is fixedly connected with the lower end of the first mechanical shaft 340, the upper end of the first mechanical shaft 340 is used to support the arm body 210 and drive the arm body 210 to translate along the X direction, the first mechanical arm 310 is connected with the bearing part 420 of the translation mechanism 300 through the second mechanical shaft 350, and the first mechanical arm 310 rotates around the vertically arranged second mechanical shaft 350 as the center;

[0109] As shown in Figure 6 Further, the translation mechanism 300 further comprises:

[0110] The second driving wheel 360 is located in one end of the first mechanical arm 310 and extends into one end of the second mechanical arm 320, the second driving wheel 360 is fixedly sleeved on the outer periphery of the mechanical shaft 330, so as to drive the mechanical shaft 330 to rotate;

[0111] The third driven wheel 370 is located in the other end of the first mechanical arm 310 and is gap-rotatably sleeved on the outer periphery of the second mechanical shaft 350, the second driving wheel 360 and the third driven wheel 370 are sleeved with the third belt 380;

[0112] The third reverse driven wheel (not shown) is reversely driven by the third driven wheel 370 through the first reverse mechanism, so that the mechanical hand 200 translates along the X direction without rotating.

[0113] The fourth driven wheel 370' is located in the other end of the second mechanical arm 320 and is gap-rotatably sleeved on the outer periphery of the first mechanical shaft 340, the second driving wheel 360 and the fourth driven wheel 370' are sleeved with the fourth belt 380';

[0114] The third driven wheel 370, the third reverse driven wheel and the fourth driven wheel 370' have the same number of teeth and the number of teeth of the second driving wheel 360 is in a ratio of 2:1, so that the mechanical hand 200 moves linearly along the X direction.

[0115] The fourth reverse driven wheel (not shown) is reversely driven by the fourth driven wheel 370' through the second reverse mechanism, which avoids the phenomenon that the bearing part 420 shakes due to the rotating force of the first mechanical arm 310, and improves the stability of the bearing part 420.

[0116] As shown in Figure 1 The translation driving part 390 drives the second driving wheel 360 to rotate along the first direction, the second driving wheel 360 drives the third driven wheel 370 and the fourth driven wheel 370' to rotate through the third belt 380 and the fourth belt 380' respectively, wherein the third belt 380 and the fourth belt 380' are configured to rotate in opposite directions, so that the first mechanical arm 310 and the second mechanical arm 320 gradually approach and overlap, thereby driving the mechanical hand 200 to move backward;

[0117] The translation driving part 390 drives the second driving wheel 360 to rotate in the second direction, and the second driving wheel 360 drives the third driven wheel 370 and the fourth driven wheel 370' to rotate through the third belt 380 and the fourth belt 380', respectively, wherein the third belt 380 and the fourth belt 380' are configured to rotate in opposite directions, so that the first mechanical arm 310 and the second mechanical arm 320 are gradually separated from the overlapping state to straighten, thereby driving the horizontal seat 170 to move forward. In the embodiment, the first direction and the second direction are opposite directions, and the translation driving part is preferably a motor.

[0118] In the embodiment, the positions of the second mechanical shaft 350 remain unchanged during the translation of the first mechanical arm 310 and the second mechanical arm 320 in the X direction left and right, and the positions of the mechanical shaft 330 and the first mechanical shaft 340 change. The lengths of the first mechanical shaft 340 and the second mechanical shaft 350 are consistent, so that the first mechanical shaft 340 moves along the horizontal straight line between the first mechanical shaft 340 and the second mechanical shaft 350.

[0119] As shown in Figure 1 Further, the rotating mechanism 400 includes a rotating shaft 410 vertically mounted on the horizontal seat 170 and a bearing part 420 for mounting the translation mechanism 300 relative to the rotating shaft 410.

[0120] Preferably, the rotating mechanism 400 includes a rotation driving part 430 that rotates in a set number of turns and direction, so that the translation mechanism 300 rotates at a set angle.

[0121] In the embodiment, the first arm body 120, the second arm body 140, the first mechanical arm 310, and the second mechanical arm 320 are all hollow structures to internally house the driving wheels, the driven wheels, and the belts, which are reasonably arranged to save the space of the carrying robot and avoid mutual interference between the components.

[0122] In the embodiment, the middle parts of the first arm body 120, the second arm body 140, the first mechanical arm 310, and the second mechanical arm 320 are each provided with an opening, and each opening is provided with a cover 500 that can open or close the opening, so as to facilitate the adjustment of the tension of the first belt 164, the second belt 164', the third belt 380, and the fourth belt 380' through the opening.

[0123] As shown in Figure 7 and Figure 8As shown, the ascending power component 165', the translation driving component 390 and the rotation driving component 430 are preferably motors, and an inertia balance block 10 is fixedly sleeved on the power output shaft of the motor, the inertia balance block 10 balances the rotor in the motor by adjusting the mass distribution of the motor, when the motor operates, the inertia balance block 10 will generate a certain centrifugal force to a certain extent with the movement of the motor, thereby forming a balance state, reducing the vibration and noise generated by the motor.

[0124] In the embodiment, preferably, the inertia balance block 10 is fixedly sleeved on the middle or end of the power output shaft.

[0125] The above is the preferred embodiment of the present application, it should be pointed out that, for those skilled in the technical field, without departing from the principles of the present application, can make a number of improvements and refinements, these improvements and refinements are also considered to be within the scope of the present application.

Claims

1. A lifting mechanism, characterized in that The utility model relates to a horizontal seat, set up in the upper end of second arm body, be used for the horizontal seat of parallel movement of the translation mechanism of linkage base plate is placed, Support link structure includes: First support arm, be configured to be arranged in parallel with first arm body, Second support arm, be configured to be arranged in parallel with second arm body, Connecting arm, be set on first rotating shaft, be used for connecting first support arm and second support arm, First support arm and second support arm are configured to rotate relative to connecting arm and respectively with first arm body and second arm body synchronous lifting, to dynamically support first rotating shaft and horizontal seat, second arm body and second support arm are connected with horizontal seat respectively, be used for limiting horizontal seat to horizontal state. First support arm and second support arm are arranged in parallel with first arm body and second arm body respectively, The rotation center of first support arm and second support arm is arranged in parallel with connecting arm respectively, 2. The lifting mechanism of claim 1, wherein, First arm body and second arm body gradually close overlap, so that the horizontal seat moves down, First arm body and second arm body gradually separate straight, so that the horizontal seat moves up. The lower end of first arm body rotates with the first base of fixed position as the center, The lower end of first support arm rotates with the second base of fixed position as the center, 3. The lifting mechanism of claim 2, wherein, The upper end of second support arm rotates with the horizontal seat as the center, Connecting arm includes connecting cylinder that is set on the outer circumferential surface of first rotating shaft, first connecting arm and second connecting arm outwardly extend from the connecting cylinder, the upper end of first support arm rotates with first connecting arm as the center and is used for supporting first rotating shaft, the lower end of second support arm rotates with second connecting arm as the center and is used for supporting horizontal seat. The first base is fixed with horizontally arranged rotating shaft, and first arm body is gap rotationally set on the outer circumferential surface of the rotating shaft; The horizontal seat is fixed with horizontally arranged second rotating shaft and third rotating shaft arranged at intervals with the second rotating shaft, the upper end of the second arm body is gap rotationally set on the outer circumferential surface of the second rotating shaft, and the upper end of the second connecting arm rotates with the third rotating shaft as the center.

4. The lifting mechanism of claim 3, wherein, It also includes a lifting drive component for driving first arm body and second arm body to rotate and move up and down with first rotating shaft as the center, the lifting drive component includes: First driving wheel is located in the one end of first arm body and second arm body connection, and is fixedly set on the outer circumferential surface of first rotating shaft, to link first rotating shaft synchronous rotation; 5. The lift mechanism of claim 1, wherein, First driven wheel and second driven wheel are respectively arranged in the other end of first arm body and second arm body, and are respectively gap set on rotating shaft and second rotating shaft, the outer circumferential sleeve of first driving wheel and first driven wheel is provided with first belt located in first arm body, and the outer circumferential sleeve of first driving wheel and second driven wheel is provided with second belt located in second arm body; First driving wheel links first driven wheel and second driven wheel synchronous rotation towards the direction set, so that first arm body and second arm body close overlap or separate straight. ​ ​ 6. The lifting mechanism of claim 5, wherein, The ascending driving component further comprises: The first adjusting assembly and the second adjusting assembly each comprise a mounting and a tension pulley fixed on the mounting, the mounting is provided with a plurality of long strip-shaped waist grooves arranged at intervals and symmetrically, a screw is arranged in each long strip-shaped waist groove and screwed with the arm body, the position of the mounting is moved around the screw, and then the tension of the belt is adjusted by the tension pulley.

7. The lifting mechanism of claim 5, wherein, The second arm body and the second support arm are connected with the second rotating shaft and the third rotating shaft respectively, and are used for limiting the horizontal seat to be in a horizontal state.

8. The lift mechanism of claim 1, wherein, The horizontal seat comprises: The auxiliary support arm is arranged in parallel with the first arm body, the lower end of the auxiliary support arm is rotated around the third base with a fixed position, and the upper end of the auxiliary support arm is rotated around the first rotating shaft and is used for supporting the first rotating shaft.

9. A substrate handling robot characterized by, The horizontal seat comprises: At least one mechanical hand is used for placing the substrate in a horizontal state. At least one translation mechanism is used for driving the mechanical hand to move horizontally. A rotating mechanism is used for driving the translation mechanism to rotate. The horizontal seat further comprises the lifting mechanism of any one of claims 1 to 8, and the rotating mechanism is mounted on the horizontal seat.

10. The substrate handling robot according to claim 9, wherein, The mechanical hand comprises: An arm body, a plurality of supporting plates are arranged on the arm body at intervals; A first detector is used for detecting whether the substrate is placed on the supporting plate, and a first detection signal is outputted when the first detector detects that the substrate is placed on the supporting plate; A second detector is used for detecting the vacuum pressure value in the suction cup and outputting a second detection signal containing the current vacuum pressure value; and a driving controller is used for controlling the vacuum negative pressure device to work according to the received first control signal, so that the vacuum negative pressure in the suction cup is generated to fix the substrate, and the vacuum negative pressure device is used for adjusting the current vacuum negative pressure value to be within the set threshold according to the received second control signal.

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