Polycrystalline silicon cold hydrogenation washing tower heat utilization system
By employing a two-stage multiphase flow heat exchanger system in the polycrystalline silicon cold hydrogenation process, hydrogen and silicon tetrachloride are mixed and then exchanged with high-temperature process gases, solving the problem of unutilized heat from the high-temperature process gases and achieving efficient heat recovery and reduced energy consumption.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-02
- Publication Date
- 2026-03-24
AI Technical Summary
In the polycrystalline silicon cold hydrogenation process, the heat of the high-temperature process gas at the top of the scrubbing tower is not effectively utilized, resulting in energy waste.
A two-stage multiphase flow heat exchanger system is adopted. After hydrogen and silicon tetrachloride are mixed in a static mixer, they are exchanged with high-temperature process gas in the first-stage and second-stage multiphase flow heat exchangers, respectively, and finally sent to the vaporizer for vaporization, maximizing heat recovery.
This reduces the inlet temperature of the process gas entering the air condenser, thereby reducing the energy consumption of the air cooler and the steam consumption of the vaporizer, and improving the efficiency of heat utilization.
Smart Images
Figure CN224034457U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of polysilicon, specifically relates to a polysilicon cold hydrogenation washing tower heat utilization system. BACKGROUND
[0002] Polysilicon process contains four major processes: reduction, rectification, recovery, cold hydrogenation, and the cold hydrogenation process is an indispensable link, and the cold hydrogenation process is mainly to produce hydrogenation liquid, and the hydrogenation liquid is used to react silicon powder, hydrogen and silicon tetrachloride to generate trichlorosilane, and then the trichlorosilane is refined and sent to the reduction process as raw material to produce silicon rods.
[0003] At present, in the cold hydrogenation process, the high-temperature process gas of about 147 DEG C comes out from the top of the washing tower, and the chlorosilane in the process gas needs to rely on the fan, a large amount of utility medium circulating water and freon condensation, in the process, a large amount of heat is wasted. UTILITY MODEL CONTENTS
[0004] The utility model discloses a kind of heat of high-temperature process gas of washing tower top, reduce the polysilicon cold hydrogenation washing tower heat utilization system of energy consumption of cold hydrogenation system is developed.
[0005] The utility model is realized through the following technical solutions:
[0006] A kind of polysilicon cold hydrogenation washing tower heat utilization system, comprising:
[0007] Washing tower body;
[0008] Heat exchange mechanism, which is communicated with the washing tower body;
[0009] Heat exchange pipeline, which is communicated with the heat exchange mechanism;
[0010] Among them, the heat exchange mechanism includes a first multi-phase flow heat exchanger and a second multi-phase flow heat exchanger, the top of the washing tower body, the second multi-phase flow heat exchanger and the first multi-phase flow heat exchanger are sequentially communicated, the process gas output from the top of the washing tower body passes through the second multi-phase flow heat exchanger and the first multi-phase flow heat exchanger in turn, the heat exchange pipeline is sequentially communicated with the first multi-phase flow heat exchanger and the second multi-phase flow heat exchanger, and the material transported by the heat exchange pipeline passes through the first multi-phase flow heat exchanger and the second multi-phase flow heat exchanger in turn.
[0011] Optionally, the heat exchange pipeline is communicated with a hydrogen pipeline and a silicon tetrachloride pipeline.
[0012] Optionally, a static mixer is arranged on the heat exchange pipeline, and the hydrogen pipeline and the silicon tetrachloride pipeline are communicated with the static mixer.
[0013] Optionally, the static mixer is located on the heat exchange pipeline before the primary multiphase flow heat exchanger, and the hydrogen and silicon tetrachloride enter the primary multiphase flow heat exchanger after being mixed by the static mixer.
[0014] Optionally, the heat exchange pipeline is communicated with a vaporizer, and the vaporizer is located on the heat exchange pipeline after the secondary multiphase flow heat exchanger.
[0015] Optionally, the primary multiphase flow heat exchanger is communicated with an air condenser, and the process gas output by the primary multiphase flow heat exchanger enters the air condenser.
[0016] Optionally, the top of the scrubbing tower body, the tube side of the secondary multiphase flow heat exchanger and the tube side of the primary multiphase flow heat exchanger are sequentially communicated.
[0017] Optionally, the heat exchange pipeline, the shell side of the primary multiphase flow heat exchanger and the shell side of the secondary multiphase flow heat exchanger are sequentially communicated.
[0018] The utility model discloses a multiphase flow heat exchanger for hydrogen and silicon tetrachloride.
[0019] The utility model discloses a multiphase flow heat exchanger for hydrogen and silicon tetrachloride. BRIEF DESCRIPTION OF DRAWINGS
[0020] In order to more clearly illustrate the technical scheme in the embodiment of the present application or prior art, the following will briefly introduce the drawings needed to be used in the embodiment or prior art description, obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.
[0021] Figure 1 The utility model discloses a multiphase flow heat exchanger for hydrogen and silicon tetrachloride.
[0022] Reference signs: 1, scrubbing tower body, 2, secondary multiphase flow heat exchanger, 3, primary multiphase flow heat exchanger, 4, static mixer, 5, hydrogen pipeline, 6, silicon tetrachloride pipeline. DETAILED DESCRIPTION
[0023] In the following, only certain exemplary embodiments are simply described. As those skilled in the art can recognize, the described embodiments can be modified in various different ways without departing from the spirit or scope of the present invention. Therefore, the drawings and the description are considered to be exemplary in nature and not limiting.
[0024] In the present invention, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connecting", "fixing" and the like terms should be understood broadly, for example, can be fixed connection, can also be detachable connection, or integral; can be mechanical connection, can also be electrical connection, and can also be communication; can be direct connection, or indirect connection through intermediate medium, can be internal communication of two elements or interaction relationship of two elements. For those skilled in the art, the specific meaning of the above terms in the present invention can be understood according to the specific circumstances.
[0025] The embodiments of the present application will be described in detail below with reference to the drawings.
[0026] As Figure 1 The utility model discloses a kind of polycrystal silicon cold hydrogenation washing tower heat utilization system, including washing tower body 1 and heat exchange mechanism, high temperature process gas in washing tower body 1 top passes through heat exchange mechanism, high temperature process gas is exchanged with hydrogen and silicon tetrachloride in heat exchange mechanism, so that the heat in high temperature process gas is utilized.
[0027] Heat exchange mechanism includes primary multiphase flow heat exchanger 3 and secondary multiphase flow heat exchanger 2, washing tower body 1 top, the tube side of secondary multiphase flow heat exchanger 2, the tube side of primary multiphase flow heat exchanger 3 are sequentially communicated, and the high temperature process gas exported from washing tower body 1 top passes through the tube side of secondary multiphase flow heat exchanger 2, primary multiphase flow heat exchanger 3 in turn, and the tube side of primary multiphase flow heat exchanger 3 is also communicated with air condenser, and high temperature process gas is input into air condenser by primary multiphase flow heat exchanger 3.
[0028] The shell side pipe of primary multiphase flow heat exchanger 3 and secondary multiphase flow heat exchanger 2 is communicated, and the shell side of primary multiphase flow heat exchanger 3 is communicated with static mixer 4, and hydrogen pipe 5 and silicon tetrachloride pipe 6 are communicated on static mixer 4, and the shell side of secondary multiphase flow heat exchanger 2 is communicated with vaporizer.Hydrogen and silicon tetrachloride sequentially pass through the shell side of primary multiphase flow heat exchanger 3 and secondary multiphase flow heat exchanger 2 after mixing in static mixer 4, and heat exchange and temperature rise with high temperature process gas in the tube side of primary multiphase flow heat exchanger 3 and secondary multiphase flow heat exchanger 2 in this process.
[0029] Specifically, the hydrogen gas temperature delivered by the hydrogen gas pipeline 5 is about 72 DEG C, the silicon tetrachloride temperature delivered by the silicon tetrachloride pipeline 6 is about 42 DEG C, in the static mixer 4, after the hydrogen gas and the silicon tetrachloride are mixed, the mixed gas temperature output by the static mixer 4 is about 45 DEG C, the mixed gas is heated in the first-stage multi-phase flow heat exchanger 3 with the high-temperature process gas, and the mixed gas temperature output by the first-stage multi-phase flow heat exchanger 3 is about 108 DEG C, the mixed gas enters the second-stage multi-phase flow heat exchanger 2 again and is heated with the high-temperature process gas, and the mixed gas temperature output by the second-stage multi-phase flow heat exchanger 2 is about 136 DEG C, and the mixed gas enters the vaporizer again.
[0030] The high-temperature process gas output from the top of the scrubbing tower body 1 has a temperature of about 147 DEG C, the high-temperature process gas is first heated in the second-stage multi-phase flow heat exchanger 2 with the mixed gas, and the high-temperature process gas temperature output by the second-stage multi-phase flow heat exchanger 2 is about 132 DEG C, the high-temperature process gas enters the first-stage multi-phase flow heat exchanger 3 and is heated with the mixed gas, and the high-temperature process gas temperature output by the first-stage multi-phase flow heat exchanger 3 is about 93 DEG C, and finally, the high-temperature process gas enters the air condenser.
[0031] The utility model discloses adopt two-stage multi-phase flow heat exchanger to carry out heat exchange, utilize the latent heat of phase change far greater than the sensible heat principle of no phase change, the silicon tetrachloride of self tank area mixes with hydrogen gas in static mixer 4 first, adopt the mode of mixing first and then heating to be more favorable to control the temperature fluctuation of mixed gas, then preheat through first-stage multi-phase flow heat exchanger 3 and second-stage multi-phase flow heat exchanger 2, finally send to the vaporizer and carry out vaporization, maximize the heat recovery of cold hydrogenation scrubbing tower export high-temperature process gas, reduce the inlet temperature of process gas entering the air condenser, improve the temperature of hydrogen gas and silicon tetrachloride mixed fluid entering the vaporizer shell program import, thereby reduce the air cooler electric energy and vaporizer steam consumption.
[0032] The above embodiments are only preferred embodiments of the utility model, and do not limit the technical solutions of the utility model, and as long as the technical solutions can be realized on the basis of the above embodiments without creative labor, they should be considered to fall within the protection scope of the utility model patent.
Claims
1. A polysilicon cold hydrogenation wash column heat utilization system, characterized in that, The utility model relates to a kind of hydrogenation reaction system, including: Washing tower body; Heat exchange mechanism, with washing tower body communication; Heat exchange pipeline, with heat exchange mechanism communication; Wherein, the heat exchange mechanism includes primary multiphase flow heat exchanger and secondary multiphase flow heat exchanger, the washing tower body top, secondary multiphase flow heat exchanger, primary multiphase flow heat exchanger sequentially communicate, process gas exported by the washing tower body top passes through secondary multiphase flow heat exchanger and primary multiphase flow heat exchanger in turn, the heat exchange pipeline and primary multiphase flow heat exchanger and secondary multiphase flow heat exchanger sequentially communicate, material transported by the heat exchange pipeline passes through primary multiphase flow heat exchanger and secondary multiphase flow heat exchanger in turn.
2. The polysilicon cold hydrogenation wash column heat utilization system of claim 1, wherein, The heat exchange pipeline is communicated with hydrogen pipeline and silicon tetrachloride pipeline.
3. The polysilicon cold hydrogenation wash column heat utilization system of claim 2, wherein, Static mixer is provided on the heat exchange pipeline, and the hydrogen pipeline and the silicon tetrachloride pipeline communicate with the static mixer.
4. The polysilicon cold hydrogenation wash column heat utilization system of claim 3, wherein, The static mixer is located on the heat exchange pipeline before the primary multiphase flow heat exchanger, and the hydrogen and the silicon tetrachloride are mixed into the primary multiphase flow heat exchanger after passing through the static mixer.
5. The polysilicon cold hydrogenation wash column heat utilization system of claim 1, wherein, The heat exchange pipeline is communicated with vaporizer, and the vaporizer is located on the heat exchange pipeline after the secondary multiphase flow heat exchanger.
6. The polysilicon cold hydrogenation wash column heat utilization system of claim 1, wherein, The primary multiphase flow heat exchanger communicates with air condenser, and process gas output by the primary multiphase flow heat exchanger enters the air condenser.
7. The polysilicon cold hydrogenation washing column heat utilization system according to any one of claims 1-6, characterized in that, The washing tower body top, the tube side of secondary multiphase flow heat exchanger and the tube side of primary multiphase flow heat exchanger sequentially communicate.
8. The polysilicon cold hydrogenation washing column heat utilization system according to any one of claims 1-6, characterized in that, The heat exchange pipeline, the shell side of primary multiphase flow heat exchanger and the shell side of secondary multiphase flow heat exchanger sequentially communicate.