RTP annealing furnace temperature control early warning system

Abstract

The utility model provides an RTP annealing furnace temperature control early warning system, and relates to the annealing furnace temperature control technology field, the RTP annealing furnace temperature control early warning system uses a plurality of temperature sensor groups, each group comprises a first sensor and a second sensor, all the first sensors are connected with a multiplexer switch, and all the second sensors are connected with the multiplexer switch. All the second sensors are connected to the other independent multiplexer switch to form two independent temperature acquisition paths, a redundant path is formed, when one path of temperature acquisition path breaks down, the path can be switched to a standby path, and in addition, due to the design of the multiplexer switch, even if one sensor breaks down, the redundant path can be switched to the standby path. Normal work of other sensors is not affected, the risk of temperature monitoring failure caused by single-point faults is reduced, meanwhile, the voltage early warning module can independently monitor and early warn output of each sensor in the temperature sensor group, and when the temperature of any sensor exceeds a set range, the system can give an alarm in time.

Description

TECHNICAL FIELD

[0001] The utility model relates to annealing furnace temperature control technical field, concretely is a kind of RTP annealing furnace temperature control early warning system. BACKGROUND

[0002] In modern semiconductor manufacturing and material processing process, RTP (rapid thermal processing) annealing furnace is the key equipment to improve material performance and optimize production process. In order to ensure the accurate control of temperature in the furnace, temperature monitoring system plays a vital role in the annealing process, and the uniformity of temperature in the furnace directly affects the properties of materials and the quality of final products, therefore, accurate monitoring and control of furnace temperature is an important link to ensure production quality.

[0003] The existing temperature monitoring technology usually relies on single or a group of temperature sensor network for measurement, although the installation mode of single sensor can meet the basic temperature monitoring requirements, but it is often difficult to fully reflect the change of overall temperature in the furnace, and although a group of temperature sensor network can detect the temperature everywhere, once individual sensor fails, the temperature monitoring capability of the system can be greatly reduced, increasing the risk of equipment failure, in the prior art, for the temperature sensor network, generally, the overall temperature is warned, for example, once the average value of overall temperature is abnormal, warning is carried out again, and individual warning cannot be carried out when the temperature measured by each sensor is abnormal.

[0004] The traditional temperature control system lacks effective fault redundancy design, so that when fault occurs, it cannot be quickly switched to backup monitoring path, and there is also deficiency in early warning mechanism, and it cannot timely issue alarm when the temperature measured by single sensor exceeds preset range. UTILITY MODEL CONTENT

[0005] The utility model aims at providing a kind of RTP annealing furnace temperature control early warning system to solve the problems raised in the above background.

[0006] To achieve the above object, the utility model provides the following technical scheme:

[0007] A kind of RTP annealing furnace temperature control early warning system, including temperature sensor group and multipath selector switch, wherein:

[0008] The temperature sensor group is provided with at least two groups, each temperature sensor group includes first sensor and second sensor inside, the multipath selector switch is provided with two groups, all first sensor and one group of multipath selector switch input end electrically connected, all second sensor and another group of multipath selector switch input end electrically connected, the temperature sensor group is used to collect the temperature data inside RTP annealing furnace, and is converted into voltage signal and sent to multipath selector switch;

[0009] The address gating end of the multiplexing switch is electrically connected with the shift controller, and is used for selecting a voltage signal from the input voltage signals under the control of the shift controller.

[0010] The analog-digital conversion module is electrically connected with the controller module, and is used for converting the voltage signal output by the multiplexing switch into a digital signal and sending the digital signal to the controller module.

[0011] Further, the first sensor and the second sensor are both K-type thermocouples.

[0012] Further, the shift controller is an AT89C51 single-chip microcomputer, and the address gating end of the multiplexing switch is electrically connected with the I / O port of the shift controller.

[0013] Further, a turn-on / off module is further connected in series in the circuit between the output end of the multiplexing switch and the analog-digital conversion module, the turn-on / off module is further electrically connected with the controller module, and the turn-on / off module is used for controlling the signal turn-on / off between the multiplexing switch and the analog-digital conversion module under the driving of the controller module.

[0014] Further, the voltage warning module comprises operational amplifiers U1 and U2, the same-phase input end of the operational amplifier U1 is electrically connected with the reverse input end of the operational amplifier U2, and then is electrically connected with the output end of the multiplexing switch, the reverse input end of the operational amplifier U1 and the same-direction input end of the operational amplifier U2 are respectively electrically connected with the sliding ends of potentiometers R1 and R2, one fixed end of the potentiometers R1 and R2 is electrically connected, the other fixed end of the potentiometer R1 is connected with a power supply VCC, and the other fixed end of the potentiometer R2 is grounded.

[0015] The output ends of the operational amplifiers U1 and U2 are respectively connected in series with diodes D1 and D2, and then are commonly grounded through a series resistor R1, and a light-emitting diode D3 is further connected in series between the resistor R1 and the ground end.

[0016] Compared with the prior art, the utility model has the advantages that:

[0017] The utility model uses multiple temperature sensor groups, each group contains a first sensor and a second sensor, all the first sensors are connected to a multiplexing switch, all the second sensors are connected to another independent multiplexing switch, two independent temperature acquisition paths are formed, and the redundant path is formed, when one temperature acquisition path fails, the standby path can be switched to, so that the overall temperature monitoring function is not affected.

[0018] In addition, due to the design of the multiplexing switch, even if one sensor fails, the normal work of other sensors will not be affected, reducing the risk of temperature monitoring failure caused by single point failure, and the voltage warning module can independently monitor and warn the output of each sensor in the temperature sensor group, and when the temperature of any sensor exceeds the set range, the system can timely issue an alarm. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the drawings needed in the specific embodiments or the prior art description will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0020] Fig. 1 It is a schematic diagram of the overall system structure of the present application.

[0021] Fig. 2 It is a schematic diagram of the voltage warning module in the present application.

[0022] In the figure: temperature sensor group 10, first sensor 11, second sensor 12, multiplexing switch 20, shift controller 30, voltage warning module 40, on-off module 50, analog-digital conversion module 60, controller module 70. DETAILED DESCRIPTION

[0023] The technical solutions of the present application will be described below in conjunction with the drawings. Obviously, the described embodiments are some embodiments of the present application, not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0024] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore it cannot be understood as a limitation of the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0025] In the description of the utility model, it is necessary to explain, unless there is definite provision and limitation, the term "installation", "connection", "connection" should be broad sense understanding, for example, it can be fixed connection, also can be detachable connection, or integrally connected, it can be mechanical connection, also can be electrical connection, it can be direct connection, also can pass through intermediate medium indirectly connect, also can be two element inside intercommunication, it can be wireless connection, also can be wired connection, for ordinary skilled in the art, the above-mentioned term can be understood in the utility model with the concrete meaning of specific situation.

[0026] In addition, the technical features involved in the different embodiments of the utility model described below can be combined with each other as long as there is no conflict.

[0027] Embodiment:

[0028] Please refer to Figs. 1-2 The utility model provides a technical scheme:

[0029] A RTP annealing furnace temperature control early warning system, including temperature sensor group 10 and multichannel selection switch 20, wherein:

[0030] The temperature sensor group 10 is provided with at least two groups, and each temperature sensor group 10 includes a first sensor 11 and a second sensor 12, in the embodiment, the temperature sensor group 10 is provided with four groups, and the four temperature sensor groups 10 are placed at different positions in the RTP annealing furnace, the first sensor 11 and the second sensor 12 adopt K-type thermocouple, the working principle of K-type thermocouple is based on thermoelectric effect, that is, when there is temperature difference at the connecting point of two different conductors, voltage is generated, and the voltage is proportional to the temperature difference, therefore, K-type thermocouple can calculate the temperature by measuring this voltage, and the temperature range that can be measured by K-type thermocouple is usually between-200 degrees Celsius and +1260 degrees Celsius, which is suitable for temperature monitoring in the high-temperature environment of the RTP annealing furnace, and the model of K-type thermocouple selected is RENK-191.

[0031] The multiplexing switch 20 is provided with two groups, all the first sensors 11 and the input end of one group of multiplexing switch 20 are electrically connected, all the second sensors 12 and the input end of another group of multiplexing switch 20 are electrically connected, the temperature sensor group 10 is used for collecting temperature data in the RTP annealing furnace and converting into a voltage signal and sending to the multiplexing switch 20, the multiplexing switch 20 selects the type of 74HC157 digital selector, in the embodiment, the first sensor 11 and the second sensor 12 are provided with four groups, the output end of four first sensors 11 is electrically connected with the input end of one multiplexing switch 20 respectively, the output end of four second sensors 12 is electrically connected with the input end of another multiplexing switch 20 respectively, 74HC157 is a four-input-to-single-output digital selector, its main function is to select one of four inputs according to the control signal, and the logic state of the selected input is transmitted to the output end, although the four voltage signals are input, only one voltage signal is output each time.

[0032] Optionally, the K-type thermocouple outputs voltage through the positive electrode and the negative electrode, in use, the negative electrode can be connected to the analog ground, only the positive electrode outputs voltage, the small voltage signal output by the K-type thermocouple can select an operational amplifier for amplifying the voltage signal, so that it reaches the level that can be processed by the multiplexing switch 20, the adjusted voltage signal is connected to the input end of the multiplexing switch 20, and multiple thermocouple signals can be connected to the same multiplexing switch 20, and the specific input signal is selected by the multiplexing switch 20 to read the temperature.

[0033] The address enable end of the multiplexing switch 20 is electrically connected with the shift controller 30, and is used for selecting a voltage signal from the input voltage signals under the control of the shift controller 30, in the embodiment, the shift controller 30 adopts the type of AT89C51 single-chip microcomputer, and the address enable end of the multiplexing switch 20 is electrically connected with the I / O port of the shift controller 30,

[0034] The address enable end of the multiplexing switch 20 can be controlled by the AT89C51 single-chip microcomputer through programming, and the I / O port of the AT89C51 single-chip microcomputer can send a control signal to select the specific input of the multiplexing switch, the control signal output by the AT89C51 single-chip microcomputer determines the address enable end of the multiplexing switch 20, the address enable end receives a binary address signal and is used for selecting a specific input signal, according to the control signal from the AT89C51, the 74HC157 selects a corresponding input in the input end and outputs the input to the output end.

[0035] The output end of each group of multiplexing switch 20 is electrically connected with voltage early warning module 40 and analog-digital conversion module 60, the voltage early warning module 40 is used for early warning when the voltage signal output by shift controller 30 exceeds the preset range, the model of the analog-digital conversion module 60 is MCP3008, and the model of operational amplifier U1 and U2 is LM358.

[0036] In the embodiment, the voltage early warning module 40 includes operational amplifier U1 and U2, the same-phase input end of the operational amplifier U1 and the reverse input end of the operational amplifier U2 are electrically connected, and then electrically connected with the output end of the multiplexing switch 20, that is, Fig. 2 The Uin end in the formula is connected with the output end of the multiplexing switch 20, the reverse input end of the operational amplifier U1 and the same-phase input end of the operational amplifier U2 are respectively electrically connected with the sliding end of the potentiometer R1 and R2, one fixed end of the potentiometer R1 and R2 is electrically connected, the other fixed end of the potentiometer R1 is connected with the power supply VCC, and the other fixed end of the potentiometer R2 is grounded.

[0037] The output end of the operational amplifier U1 and U2 is respectively connected with diode D1 and D2 in series, and then commonly grounded through the series resistor R1, and the series resistor R1 and the ground end are further connected with light emitting diode D3.

[0038] The two fixed ends of the potentiometer R1 and R2 are respectively marked as the first fixed end and the second fixed end, the first fixed end of the potentiometer R1 is connected with the power supply VCC, the second fixed end of the potentiometer R1 and the first fixed end of the potentiometer R2 are electrically connected, the second fixed end of the potentiometer R2 is grounded, the output end of the operational amplifier U1 and U2 is respectively electrically connected with the positive pole of diode D1 and D2, the negative pole of diode D1 and D2 is connected with one end of the resistor R1 in parallel, the other end of the resistor R1 is connected with the positive pole of the light emitting diode D3, and the negative pole of the light emitting diode D3 is grounded.

[0039] The voltage early warning module 40 monitors the voltage signal through the combination of operational amplifier U1 and U2, and realizes the early warning function. Specifically, the operational amplifier U1 is used for comparing the input voltage (from the output end of the multiplexing switch 20) with the set upper limit voltage, and the operational amplifier U2 is used for comparing the input voltage with the set lower limit voltage. The potentiometer R1 and R2 are respectively used for adjusting the two threshold values, and the sliding end thereof is connected into the input end of the operational amplifier, so as to set the required alarm voltage range, when the input voltage exceeds the range, the output of the operational amplifier will generate a high level signal.

[0040] When the operational amplifier U1 or U2 detects that the situation exceeds the set threshold, the output will drive the diode D1 or D2 to turn on, forming an alarm signal, the output of the diode D1 and D2 is connected to the light emitting diode D3 through the resistor R1, and the light emitting diode D3 will light up after receiving the alarm signal, prompting the user that the voltage exceeds the set range.

[0041] The analog-digital conversion module 60 and the controller module 70 are electrically connected, for converting the voltage signal output by the multi-channel selection switch 20 into a digital signal and sending it to the controller module 70. The main function of the analog-digital conversion module 60 is to convert the analog voltage signal from the multi-channel selection switch 20 into a digital signal for subsequent processing and analysis. This module uses MCP3008 model, which samples and quantizes the input voltage signal through the built-in ADC, converts the analog signal into digital format, so that it can be processed and analyzed by the controller module 70. The model of the controller module 70 is STM32F103C8T6, and the output point of the analog-digital conversion module 60 is connected to the GPIO input end of the controller module 70.

[0042] In this embodiment, a on-off module 50 is also connected in series between the output end of the multi-channel selection switch 20 and the analog-digital conversion module 60, and the on-off module 50 is also electrically connected with the controller module 70. The on-off module 50 is used to control the signal on-off between the multi-channel selection switch 20 and the analog-digital conversion module 60 under the drive of the controller module 70.

[0043] The on-off module 50 uses a relay with model SRD-05VDC-SL-C, the contact of the on-off module 50 is connected in series between the multi-channel selection switch 20 and the analog-digital conversion module 60, and the control end is connected with the GPIO pin of the controller module 70. The working principle of the on-off module 50 is mainly controlled by the drive signal of the controller module 70. When the GPIO output port of the controller module 70 sends a high-level signal, the relay module will be attracted, connecting the signal path between the multi-channel selection switch 20 and the analog-digital conversion module 60. On the contrary, when the GPIO output low-level signal, the relay will be disconnected, thereby cutting off the signal path. The controller module 70 can control whether the output signal of the multi-channel selection switch 20 is transmitted to the analog-digital conversion module 60 by controlling the on-off module 50, realizing the management and control of the signal. The on-off module 50 is responsible for realizing the on-off control of the signal between the multi-channel selection switch 20 and the analog-digital conversion module 60. Through the GPIO pin of the controller module 70, the on-off module can select whether to transmit the analog signal from the multi-channel selection switch 20 to the analog-digital conversion module 60 according to the needs of the system. The use of the on-off module 50 makes the system can cut off the signal path when it is not needed to collect temperature data.

[0044] The embodiment forms a double collection path by designing multiple temperature sensor groups 10, each group containing a first sensor 11 and a second sensor 12, thereby realizing redundant temperature monitoring. Specifically, the first sensor 11 is connected to one multi-way selection switch 20, while the second sensor 12 is connected to another independent multi-way selection switch 20. This structure ensures that when any path fails, the system can switch to the backup path in time, maintaining the continuity and reliability of temperature monitoring, and avoiding system downtime or data loss due to single-point failure.

[0045] To enhance the robustness of the system, the design of the multi-way selection switch 20 ensures that even if a single sensor fails, other sensors can still work normally. The 74HC157 digital selector can select the valid input signal for output according to the control signal from the shift controller 30, thereby ensuring that the signals of multiple sensors can be effectively managed. This design reduces the risk of overall monitoring failure due to a sensor failure, and enables the system to remain stable under various operating environments.

[0046] The introduction of the voltage warning module 40 further enhances the monitoring capability of the system, which can independently monitor the output voltage of each sensor. Through the comparison function of the operational amplifier, the system can set upper and lower threshold values. When the output of any sensor exceeds these ranges, an alarm will be triggered to notify the operator to check and maintain in time. This real-time warning mechanism ensures the safe operation of the equipment in high-temperature environments and prevents potential damage caused by temperature abnormalities, thereby effectively protecting the safety and stability of the RTP annealing furnace and its surrounding equipment.

[0047] Although the embodiments of the present application are described in conjunction with the drawings, various modifications and changes can be made by those skilled in the art without departing from the spirit and scope of the present application, and such modifications and changes fall within the scope defined by the appended claims.

Claims

1. A temperature control and early warning system for an RTP annealing furnace, comprising a temperature sensor group (10) and a multiplexer (20), characterized in that: The temperature sensor group (10) is provided with at least two groups, each temperature sensor group (10) includes a first sensor (11) and a second sensor (12). The multiplexer (20) is provided with two groups. All first sensors (11) are electrically connected to the input terminal of one of the multiplexers (20), and all second sensors (12) are electrically connected to the input terminal of the other multiplexer (20). The temperature sensor group (10) is used to collect temperature data inside the RTP annealing furnace and convert it into a voltage signal to be sent to the multiplexer (20). The address selection terminal of the multiplexer (20) is electrically connected to the shift controller (30) and is used to select a voltage signal from the input voltage signals under the control of the shift controller (30). The output terminal of each set of multiplexers (20) is electrically connected to a voltage warning module (40) and an analog-to-digital converter (60). The voltage warning module (40) is used to issue an alarm when the voltage signal output by the shift controller (30) exceeds the preset range. The analog-to-digital converter module (60) and the controller module (70) are electrically connected and are used to convert the voltage signal output by the multiplexer switch (20) into a digital quantity and send it to the controller module (70).

2. The RTP annealing furnace temperature control and early warning system according to claim 1, characterized in that: Both the first sensor (11) and the second sensor (12) are K-type thermocouples.

3. The RTP annealing furnace temperature control and early warning system according to claim 1, characterized in that: The shift controller (30) uses an AT89C51 microcontroller, and the address selection terminal of the multiplexer (20) is electrically connected to the I / O port of the shift controller (30).

4. The RTP annealing furnace temperature control and early warning system according to claim 1, characterized in that: A switching module (50) is connected in series between the output terminal of the multiplexer (20) and the analog-to-digital converter (60). The switching module (50) is also electrically connected to the controller module (70). The switching module (50) is used to control the signal switching between the multiplexer (20) and the analog-to-digital converter (60) under the drive of the controller module (70).

5. The RTP annealing furnace temperature control and early warning system according to claim 1, characterized in that: The voltage warning module (40) includes operational amplifiers U1 and U2. The non-inverting input terminal of operational amplifier U1 and the inverting input terminal of operational amplifier U2 are electrically connected and then electrically connected to the output terminal of the multiplexer (20). The inverting input terminal of operational amplifier U1 and the non-inverting input terminal of operational amplifier U2 are electrically connected to the sliding terminals of potentiometers R1 and R2, respectively. One fixed terminal of potentiometers R1 and R2 is electrically connected, the other fixed terminal of potentiometer R1 is connected to the power supply VCC, and the other fixed terminal of potentiometer R2 is grounded. The output terminals of operational amplifiers U1 and U2 are connected in series with diodes D1 and D2 respectively, and then grounded through a series resistor R1. A light-emitting diode D3 is also connected in series between the resistor R1 and the ground terminal.

Images