Telemetering type laser-induced breakdown spectroscopy detection system

Abstract

The utility model relates to a telemetering type laser-induced breakdown spectroscopy detection system, which is characterized in that a light outlet of a laser is aligned with the position of a light guide arm base, a laser beam expanding device is arranged in the light guide arm base, laser is expanded into parallel light through the laser beam expanding device, and the parallel light sequentially passes through a first laser reflector, a second laser reflector, a third laser reflector and a dichroscope; and the fourth aluminum film reflecting mirror and the fused quartz glass are converged on the sample to be detected and are excited to generate plasmas. According to the principle of light path reversibility, the spectrum generated by the plasma can be changed into parallel light through the fused quartz lens, and the parallel light enters the optical fiber coupling module through the fourth aluminum film reflector and the dichroscope and is transmitted to the spectrum detector through the optical fiber. According to the utility model, the high-temperature molten sample to be detected can be detected, the free adjustment of the light path in the spatial position is realized, and the problems of high temperature of the straight surface of the detection probe, difficulty in field installation and the like are solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to laser induced breakdown spectroscopy detection technical field, more particularly to a kind of on-site environment is bad, ordinary probe installation is difficult, detection device under high temperature or dust environment. BACKGROUND

[0002] In metallurgical industry, metallurgical melt needs to be detected when discharging, so as to determine whether the current product is qualified, and determine whether it is consistent with subsequent process technology, to guide the setting of related material ratio. Laser-induced breakdown spectroscopy (LIBS) is often used in composition detection. This technology forms a plasma on the surface of the sample by focusing an ultrashort pulse laser, and analyzes the emission spectrum of the plasma using a spectrometer to identify the elemental composition of the sample, and then the material can be identified, classified, qualitatively and quantitatively analyzed.

[0003] In the metallurgical industry, due to the high-temperature dust environment on site, most laser-induced breakdown spectroscopy equipment is remote. In order to reduce the influence of distance and dust, the light aperture is often set larger, resulting in a larger probe body. The probe needs to face the measured object directly, and the on-site installation is more difficult. In addition, the metallurgical site often has a large amount of smoke diffused in the detection path, which has an adverse effect on the measurement result and the service life of the lens.

[0004] Therefore, how to provide a convenient laser-induced breakdown spectroscopy detection device for high-temperature dust environment is a problem that needs to be solved by those skilled in the art. SUMMARY

[0005] Therefore, the utility model aims to provide a novel remote laser-induced breakdown spectroscopy detection system, which solves the problem of multiple installation restrictions, the influence of high-temperature dust environment on the detection equipment, and the problem of dust blocking the detection beam or causing a series of transmission and refraction, affecting the energy level of laser emission, and causing large errors in the measurement result.

[0006] The utility model provides a remote laser-induced breakdown spectroscopy detection system, comprising:

[0007] A laser is placed tightly in front of the laser, a first annular air knife with a hollow structure is installed inside the laser, and a laser beam expander is installed. The laser is expanded into parallel light by the laser beam expander.

[0008] Further, the rear end of the lens barrel base is connected to a first joint, and a first laser mirror is installed at 45 degrees inside the first joint, which reflects the parallel laser beam into the telescopic middle lens barrel.

[0009] Further, the telescopic middle lens barrel is spliced by the 45-degree second laser reflector, and the parallel laser beam is reflected to the horizontal direction again.

[0010] Further, the telescopic middle lens barrel is spliced by the 45-degree second laser reflector, and the parallel laser beam is reflected to the horizontal direction again.

[0011] Further, the parallel laser beam is reflected into the end lens barrel through the 45-degree fourth aluminum film reflector in the fourth joint inside the dichroic mirror.

[0012] Further, the parallel laser beam is reflected into the end lens barrel through the 45-degree fourth aluminum film reflector in the fourth joint inside the dichroic mirror.

[0013] Further, the parallel laser beam is reflected into the end lens barrel through the 45-degree fourth aluminum film reflector in the fourth joint inside the dichroic mirror.

[0014] Further, the parallel laser beam is reflected into the end lens barrel through the 45-degree fourth aluminum film reflector in the fourth joint inside the dichroic mirror.

[0015] Further, the parallel laser beam is reflected into the end lens barrel through the 45-degree fourth aluminum film reflector in the fourth joint inside the dichroic mirror.

[0016] According to the technical scheme, compared with the prior art, the utility model has the advantages of the following:

[0017] The telescopic middle lens barrel is adopted, the distance between the fused quartz lens and the sample to be detected can be adjusted according to the focal length of the fused quartz lens, the best detection effect is realized, and the function of focusing is realized.

[0018] The telescopic lens barrel is connected through the four rotatable joints, the detection equipment does not need to face the sample to be detected, can be installed and placed at any position, and only needs to be adjusted to the position in front of the sample to be detected.

[0019] The first annular air knife is designed to continuously and uniformly inject cooling air into the whole lens barrel structure, the air cooling and temperature reduction of the light path and the micro-positive pressure dustproof effect are realized, the thermal deformation of the lens caused by high temperature is reduced.

[0020] The second annular air knife in the utility model can blow compressed air to the surface of the object to be measured, further blow away the smoke and dust in the detection path, achieve the effect of high-precision measurement, and avoid pollution of the pollutants to the fused quartz lens.

[0021] The fourth joint in the utility model adopts an aluminum film reflector, realizes wide-band reflection from ultraviolet spectrum to infrared spectrum, and makes the device simple in structure and coaxial in detection light path and collection light path.

[0022] The utility model discloses a dichroic mirror is used in the spectroscopic collection lens barrel, makes laser light path and spectroscopic collection light path coaxial.

[0023] The installation of the dichroic mirror in the utility model is as close to the end of the device as possible, can eliminate the influence of the inconsistent refractive index of different wavelengths of plasma as much as possible, and obtain greater spectral intensity.

[0024] The utility model discloses a green laser and y type optical fiber, can focus green light on the ablation position of the object to be measured without affecting the detection light path, and indicate the specific detection position. BRIEF DESCRIPTION OF DRAWINGS

[0025] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the drawings needed to be used in the embodiment or the prior art description will be briefly introduced below, and obviously, the drawings in the following description are only the embodiments of the utility model, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative labor.

[0026] Figure 1 The drawings show a kind of structure schematic diagram of remote laser-induced breakdown spectroscopy detection system according to the utility model embodiments DETAILED DESCRIPTION

[0027] The embodiments of the utility model will be described in detail below, and the examples of the embodiments are shown in the drawings, wherein the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary, and are intended to explain the utility model, and cannot be understood as the limitation of the utility model.

[0028] In some industries, such as the metallurgical industry, due to the high-temperature dust environment on site, the probe of the detection device will be contaminated, causing the lens of the probe to be blurred, which may cause the detection beam to be blocked by dust or a series of transmission refraction to occur, affecting the energy level of the laser emission, and causing a large error in the measurement result. At the same time, the probe of the detection device needs to face the high-temperature melt directly, and the temperature inside the equipment is high, affecting the service life of the internal components, and the installation is also more complicated.

[0029] In view of this, the utility model provides a kind of telemeter formula laser-induced breakdown spectroscopy detection system, refer to attached Figure 1 , including: laser (1) front side closely placed lens barrel base, its inside installation hollow structure first annular air knife (2) is installed in turn, laser beam expanding device (3). Laser is expanded into parallel light by laser beam expanding device (3).

[0030] Advantageously, the first annular air knife (2) provides cooling air for the entire system, and the hollow structure inside does not affect the transmission of light.

[0031] It is worth mentioning that the laser beam expanding device (3) changes the laser beam into a wide parallel light as much as possible, thereby reducing its energy density and preventing the subsequent components from being damaged by high laser energy.

[0032] In one embodiment, the base (4) is connected to the first joint (5) at the rear end, and the first laser mirror (6) is installed at an angle of 45 degrees inside the first joint (5) to reflect the parallel laser beam into the telescopic middle lens barrel (7). The telescopic middle lens barrel (7) is spliced by a 45-degree second laser mirror (9) and reflects the parallel laser beam to the horizontal direction again. The telescopic middle lens barrel (7) is connected to the third joint (10) at the rear end, and the third laser mirror (11) is installed at an angle of 45 degrees inside the third joint (10) to reflect the parallel laser beam into the spectrum collection lens barrel (12)

[0033] Advantageously, the joints mentioned in the system are installed with rolling bearings at both ends, and the middle lens (7) can be telescoped long and short, thereby adjusting the position and length of the entire system.

[0034] The parallel laser beam passes through the dichroic mirror (13) in the spectrum collection lens barrel (12), is reflected into the end lens barrel (17) by the 45-degree fourth aluminum film mirror (19) inside the fourth joint (18), and is focused on the surface of the object to be measured through the hollow second annular air knife (15) after converging through the fused quartz glass (16) in the end lens barrel (17).

[0035] It is worth mentioning that the dichroic mirror (13) plays a role of transmitting laser and reflecting spectrum, and the aluminum film mirror can reflect light rays in a wide wavelength band from the ultraviolet band to the infrared band, so that the subsequent laser light path and the collection light path are coaxial.

[0036] Due to the optical path reversibility principle, part of the plasma light passes through the fused quartz glass (16), becomes parallel light again, is reflected to the spectrum collection lens (20) after reaching the dichroic mirror (13), and is focused on the fiber coupling module (21). The plasma light is coupled into the Y-shaped optical fiber (22) in the fiber coupling module (21), is transmitted to the spectrum detector (24), and the sample composition is calculated and analyzed by the computer (25). The green laser (23) is connected with the other end of the Y-shaped optical fiber (22), and due to the optical path reversibility principle, the green laser (23) is coaxial with the detection beam and is focused on the plasma, thereby playing an indicating role.

[0037] Advantageously, the laser-induced breakdown spectroscopy commonly uses a laser with a wavelength of 1064 nanometers, which belongs to invisible light to the naked eye, and the design of coaxial green laser and detection light path can clearly see the position of laser ablation without triggering the laser. Good indicating effect.

[0038] It should be explained that in the description of the utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements indicated must have a specific orientation, a specific orientation and operation, and therefore cannot be understood as limiting the utility model.

[0039] It should be noted that the terms "first", "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first", "second" can explicitly or implicitly include one or more of the features.

[0040] In the utility model, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated ; for ordinary skilled persons in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0041] The remote laser-induced breakdown spectroscopy detection system provided by the utility model can detect samples in a high-temperature dust environment, and can also be used in a general environment.

[0042] Advantageously, the utility model can be applied to laser detection probe, also can be applied to other various atomic excitation type detection device.

[0043] In the description of the present specification, the description of the terms "one embodiment", "some embodiments", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In the present specification, the illustrative description of the above terms is not necessarily for the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in the present specification.

[0044] Although the embodiments of the utility model have been shown and described above, it can be understood that the above-mentioned embodiments are exemplary and cannot be understood as limiting the utility model, and those skilled in the art can change, modify, replace and modify the above-mentioned embodiments within the scope of the utility model.

Claims

1. A remote laser-induced breakdown spectroscopy detection system, comprising: The main structure comprises: The laser (1), the base (4), the middle lens barrel (7), the spectrum collection lens barrel (12), the terminal lens barrel (17), and the spectrum analysis system; the base (4), the middle lens barrel (7), the spectrum collection lens barrel (12), and the terminal lens barrel (17) are connected in series through the first joint (5), the second joint (8), the third joint (10), and the fourth joint (18).

2. The remote laser-induced breakdown spectroscopy detection system of claim 1, wherein, Both ends of the first joint (5), the second joint (8), the third joint (10), and the fourth joint (18) are provided with rolling bearings installed perpendicularly to the optical axis direction.

3. The remote laser-induced breakdown spectroscopy detection system of claim 1, wherein, The middle lens barrel (7) can be extended and retracted in the axial direction.

4. The remote laser-induced breakdown spectroscopy detection system of claim 1, wherein, The front end of the base (4) and the rear end of the terminal lens barrel (17) are provided with the first annular air knife (2) and the second annular air knife (15).

5. The remote laser-induced breakdown spectroscopy detection system of claim 4, wherein, The first annular air knife (2) and the second annular air knife (15) are hollow structures.

6. The remote laser-induced breakdown spectroscopy detection system of claim 1, wherein, The base (4), the middle lens barrel (7), the spectrum collection lens barrel (12), the terminal lens barrel (17), the first joint (5), the second joint (8), the third joint (10), and the fourth joint (18) are connected in a sealed manner.

7. The remote laser-induced breakdown spectroscopy detection system of claim 2, wherein, The first laser reflector (6), the second laser reflector (9), the third laser reflector (11), and the fourth aluminum film reflector (19) are installed in the first joint (5), the second joint (8), the third joint (10), and the fourth joint (18) at an angle of 45 degrees.

8. The remote laser-induced breakdown spectroscopy detection system of claim 1, wherein, The dichroic mirror (13), the spectrum collection lens (20), and the fiber coupling module (21) are installed in the spectrum collection lens barrel (12); the dichroic mirror (13) is installed at an angle of 45 degrees and transmits parallel laser light, and reflects the plasma (14) light into the spectrum collection lens (20) for collection.

9. The remote laser-induced breakdown spectroscopy detection system of claim 8, wherein, The dichroic mirror (13) is installed as close as possible to the fused quartz glass (16) in space; the fused quartz glass (16) focuses the expanded laser light on the surface of the object to be measured for ablation, and collects the generated plasma light and converts it into parallel light into the spectrum collection lens barrel (12).

10. The remote laser-induced breakdown spectroscopy detection system of claim 9, wherein, The spectrum analysis system comprises a Y-shaped optical fiber (22) and a computer (25); one end of the Y-shaped optical fiber (22) is connected to a green laser (23), and the other end is connected to a spectrum detector (24); the fiber coupling module (21) is connected to the spectrum detector (24) through the Y-shaped optical fiber (22); the spectrum detector (24) is connected to the computer (25) and transmits the spectrum data of the material to be detected to the computer (25); the computer (25) analyzes and processes the received spectrum data to obtain the composition information of the material to be detected.

Images