Sample carrying platform for failure analysis sample and preparation device of sample carrying platform
By designing the buffer solution and rotating part of the sample stage, the problem of uneven delamination during manual sample pressing was solved, achieving uniform delamination of samples and improving analysis efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-07
- Publication Date
- 2026-03-24
AI Technical Summary
In existing technologies, it is difficult to achieve uniform delamination of samples when manually pressing them, which can easily lead to over-delamination or uneven delamination. Furthermore, small-sized samples are difficult to fix, resulting in sample loss or extended analysis cycles.
The sample stage design includes a sample holder, a rotating part, and a buffer solution inside the shell. The buffer solution absorbs sudden pressure, and the rotating part drives the sample holder to rotate for uniform delamination. The uniform grinding of the sample is achieved by the predetermined volume ratio of the buffer solution and the difference in linear velocity of the rotating part.
It effectively avoids excessive delamination, ensures uniform delamination of samples, adapts to the removal requirements of different membrane layers, and improves the efficiency and success rate of sample analysis.
Smart Images
Figure CN224035355U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of chip failure analysis, in particular to a sample stage of a failure analysis sample and a preparation device thereof. BACKGROUND
[0002] In the semiconductor production process, in order to optimize the critical dimension, avoid product positioning failure and the like, the planar delamination of the online sample or the customer returned sample needs to be performed, that is, the film layer of the sample is removed layer by layer.
[0003] In the prior art, a manual pressing sample preparation method is adopted, an alumina or silicon dioxide grinding liquid is used, and a grinding machine is used to perform chemical mechanical grinding to remove the film layer.
[0004] The grinding machine can be a manual grinding machine or an automatic grinding machine driven by a gear hydraulic system. When the sample is pressed manually, the force position, force angle, pressing force and the like are required to be high. Since the operator cannot apply constant pressure under the condition of fatigue and the like, the film layer can be removed excessively when the grinding pressure is suddenly increased due to excessive force or sudden impact from the outside. If the force is too small, the film layer cannot be removed effectively. Moreover, when the film layer of the uncapped sample is removed, sometimes the size of the sample is too small, the area of the uncapped sample is less than 1mm 2 When the sample is pressed manually, the force area is small, so it is difficult to control the uniform force, which causes the grinding angle to be too large and the sample to be lost, resulting in that the failure sample cannot be positioned or the competitive product analysis period is prolonged. If multiple samples are used for grinding at the same time and are used as supporting points for grinding, the samples will be wasted.
[0005] In summary, an improved technical solution is needed to solve the above problems of the prior art. CONTENT OF THE UTILITY MODEL
[0006] The purpose of the embodiment of the present application is to provide a sample stage of a failure analysis sample and a preparation device thereof, which can realize uniform delamination of the sample.
[0007] In a first aspect, a sample stage of a failure analysis sample is provided, comprising:
[0008] A sample seat, a bottom surface of the sample seat is used to fix a sample connecting block;
[0009] A rotating part, comprising a stator and a rotor, the stator is sleeved outside the rotor, and the rotor is rotationally connected with the stator, and the rotor is fixedly connected with the sample seat;
[0010] The shell is a bottom-opened, internally hollow cylindrical structure, the interior of the shell is filled with a buffer liquid, the bottom of the shell is provided with a sealing ring for sealing the buffer liquid in the interior of the shell, and the stator is inserted into the shell from the bottom of the shell and fixedly connected with the bottom of the sealing ring.
[0011] In an implementable mode, the buffer liquid at least comprises an elastomer capsule and silicon oil.
[0012] In an implementable mode, the elastomer capsule and the silicon oil are arranged according to a predetermined volume ratio.
[0013] In an implementable mode, the rotor and the stator are rotatably connected through a ball bearing.
[0014] In an implementable mode, the top surface of the sample seat is provided with a connecting block, the bottom surface of the rotor is provided with a connecting hole, and the connecting block is detachably fixedly connected in the connecting hole, so as to fixedly connect the sample seat and the rotor.
[0015] In an implementable mode, the sealing ring comprises a plurality of layers of rubber sealing rings, the plurality of layers of rubber sealing rings are arranged along the axial direction of the shell, and the interfaces of adjacent two rubber sealing rings are staggered.
[0016] In an implementable mode, the sample seat is an aluminum alloy sample seat, and the bottom surface of the sample seat is a plane.
[0017] In an implementable mode, the sample seat is a polytetrafluoroethylene sample seat, and a sample mounting groove is arranged on the bottom surface of the sample seat.
[0018] In an implementable mode, the bottom surface of the shell is provided with an opening, and the circumferential side of the stator is provided with a limiting rim, the outer diameter of the limiting rim is greater than the diameter of the opening.
[0019] According to the second aspect of the present application, a sample preparation device for failure analysis is also provided, which comprises the sample carrier provided in the first aspect and a grinding machine, the bottom surface of the sample carrier is oppositely arranged with the upper surface of the grinding machine and is spaced apart by a predetermined distance.
[0020] Compared with the prior art, the present application has the following beneficial effects:
[0021] In the technical scheme of the present application, the buffer liquid is filled in the shell, and when the grinding pressure suddenly increases due to overexertion or sudden impact from the outside world, the buffer liquid can absorb the sudden pressure and play a buffering role, so that the over-removal of layers can be avoided. By setting the buffer liquid as an elastic body capsule and silicon oil with a predetermined volume ratio, the effective grinding pressure can be set to ensure the removal of a certain specific layer and adapt to the removal requirements of different film layers. Through the setting of the rotating part, the rotation of the sample seat is driven by the linear speed difference generated by the different distances from the shaft center during grinding, so that the grinding time and the amount of abrasive contacted at different positions of the sample are equal, thereby realizing the uniform layer removal of the sample. BRIEF DESCRIPTION OF DRAWINGS
[0022] Figure 1 is a structural schematic view of a sample stage of a failure analysis sample according to an embodiment of the present application.
[0023] Figure 2 is a structural schematic view of a rotating part in a sample stage of a failure analysis sample according to an embodiment of the present application.
[0024] Figure 3 is another structural schematic view of a sample seat in a sample stage of a failure analysis sample according to an embodiment of the present application.
[0025] Figure 4 is another structural schematic view of a sample seat in a sample stage of a failure analysis sample according to an embodiment of the present application.
[0026] Among them, the sign explanation is as follows:
[0027] 1, shell; 2, seal ring; 3, stator; 4, connecting hole; 5, rotor; 6, elastic body capsule; 7, buffer liquid; 8, sample seat; 9, connecting block; 10, wafer sample; 11, sample mounting groove. DETAILED DESCRIPTION
[0028] The specific embodiments of the present application will be further described in detail below with reference to the accompanying drawings. These embodiments are only used to illustrate the present application, and are not limiting to the present application.
[0029] In the description of the utility model, it is necessary to explain that, the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model. In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.
[0030] In the description of the utility model, it should be pointed out that, unless otherwise specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or it can be indirectly connected through an intermediate medium, it can be the communication inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific situation.
[0031] In addition, in the description of the utility model, unless otherwise stated, the meaning of "a plurality of" is two or more.
[0032] According to the first aspect of the present application, referring to Figures 1 to 4 , first, a sample stage of failure analysis sample is provided, comprising:
[0033] The bottom surface of the sample seat 8 is used for fixing the sample.
[0034] The rotating part comprises a stator 3 and a rotor 5, the stator 3 is sleeved on the outside of the rotor 5, and the rotor 5 is rotationally connected with the stator 3, and the rotor 5 is fixedly connected with the sample seat 8.
[0035] The shell 1 is a hollow cylindrical structure with an open bottom, the inside of the shell 1 is filled with buffer liquid 7, the bottom of the shell 1 is provided with a sealing ring 2, the sealing ring 2 is used for sealing the buffer liquid 7 in the inside of the shell 1, the stator 3 is inserted into the shell 1 from the bottom of the shell 1, and is fixedly connected with the bottom of the sealing ring 2.
[0036] It should be pointed out that the shell 1 in the embodiment is made of aluminum alloy material.
[0037] The application can absorb the sudden pressure of the buffer liquid 7 when the grinding pressure suddenly increases due to overexertion or sudden external impact, thereby playing a buffering role and avoiding excessive delamination. In the prior art, during manual pressing of the sample, the sample remains stationary after being pressed, the relative linear speed on the side far from the axis of the grinding pad is large, the relative linear speed on the side close to the axis of the grinding pad is small, the amount of abrasive on the sample is different, and thus the delamination is uneven. Therefore, the application is provided with a rotating part, the linear speed difference generated due to the different distances from the axis during grinding drives the rotation of the sample seat 8, the grinding time and the amount of abrasive contacted at different positions of the sample are equal, and thus the uniform delamination of the sample is realized.
[0038] In an implementable manner, the buffer liquid 7 at least includes the elastomer capsule 6 and the silicone oil. The elastomer capsule 6 and the silicone oil can play a buffering role, ensure uniform stress on the sample during delamination, and ensure the delamination quality. The buffer liquid 7 is configured as a metamaterial fluid, and the material properties of the metamaterial fluid are determined by the structure rather than the material. Considering that the PV curve of the material fluid suffers from external impact when the critical pressure P cr is close, the internal pressure of the metamaterial fluid changes little, and the influence of external impact on sample preparation can be effectively reduced.
[0039] Specifically, the application adopts a mixture of silicone oil and micron-level elastomer capsules 6, the silicone oil is used as the main body of the buffer liquid 7, and is used for buffering vibration and applying uniform planar pressure to the sample.
[0040] It should be noted that the outer wall material of the elastomer capsule 6 includes but is not limited to polyvinylsiloxane, polydimethylsiloxane or other elastomer materials, and the inside of the elastomer capsule 6 is air. When the top of the shell 1 is subjected to external force exceeding the critical pressure, the elastomer capsule 6 is deformed in buckling and compresses the internal air, thereby avoiding sudden stress on the sample seat 8 and achieving the effect of shock absorption.
[0041] In an implementable manner, the elastomer capsule 6 and the silicone oil are arranged in a predetermined volume ratio. The application can edit the critical pressure value P cr and the bulk modulus according to the characteristics of different film layers by using the editable material properties of the metamaterial fluid, thereby adapting to the removal requirements of different film layers.
[0042] It should be noted that the effective grinding pressure P effect is defined as the pressure value required to remove a certain specific film layer, and the effective grinding pressure P effectThe volume ratio of the elastomer capsule 6 and the silicone oil affects the bulk modulus of the buffer liquid 7, thereby affecting the effective grinding pressure P provided by the present application effect Therefore, by adjusting the volume ratio of the elastomer capsule 6 and the silicone oil, the effective grinding pressure P provided by the present application can be adjusted effect Adjustment is made.
[0043] It should be further noted that in the present embodiment, the mutation pressure to be resisted is defined as a critical pressure value P cr In the present embodiment, the critical pressure value P cr is set to be within 5%-10% of the effective grinding pressure P effect , and the critical pressure value P cr is controlled by adjusting the thickness-radius ratio of the elastomer capsule 6.
[0044] In an implementable manner, as shown in Figure 1 and Figure 2 , a ball bearing is arranged between the rotor 5 and the stator 3. By arranging the ball bearing, the stability during the delamination grinding process can be improved, and the sliding friction between the rotor 5 and the stator 3 is converted into rolling friction.
[0045] In an implementable manner, as shown in Figure 2 , Figure 3 , Figure 4 , a connecting block 9 is arranged on the top surface of the sample seat 8. A connecting hole 4 is arranged on the bottom surface of the rotor 5, and the connecting block 9 can be detachably fixedly connected in the connecting hole 4, so as to facilitate replacement of the sample seat.
[0046] It should be noted that the connection mode of the connecting block 9 includes but is not limited to the following modes: a spring buckle is arranged on the outer side of the connecting block 9, a clamping groove is arranged in the connecting hole 4, and the spring buckle is clamped in the clamping groove, so that the sample seat 8 and the rotor 5 are detachably fixedly connected.
[0047] In an implementable manner, the seal ring 2 includes a multilayer rubber seal ring 2 arranged along the axial direction of the shell 1. By arranging the rubber seal ring 2, the buffer liquid 7 can be sealed, and at the same time, the mutation pressure can be absorbed, further playing a shock-absorbing role. And the vibration generated during the grinding process can be absorbed.
[0048] In an implementable manner, the interfaces of adjacent two rubber seal rings 2 are arranged in a staggered manner, further avoiding leakage of the buffer liquid 7, and ensuring the sealing property.
[0049] In an implementable manner, as shown in Figure 3As shown, the sample seat 8 is an aluminum alloy sample seat, and the bottom surface of the sample seat 8 is a plane. When the wafer sample 10 is a large-size wafer sample, the wafer sample 10 is fixed on the bottom surface of the sample seat 8 by hot melting paraffin wax.
[0050] In an implementable manner, as shown in Figure 4 As shown, the sample seat 8 is a polytetrafluoroethylene sample seat, and a sample mounting groove 11 in a disc structure is arranged on the bottom surface of the sample seat 8. When the wafer sample 10 is a small-size open cover sample, a plurality of wafer samples 10 are fixed in the sample mounting groove 11 by resin. By arranging the sample mounting groove 11 on the bottom surface of the sample seat 8, the circumferential side of the sample mounting groove 11 is a convex edge, and the plurality of small-size open cover samples are fixed in the sample mounting groove 11. By arranging the convex edge, the function of positioning the circumferential side of the sample seat 8 is achieved, and the situation that the plurality of wafer samples 10 are different in layer removal after the sample seat 8 is inclined is avoided.
[0051] It should be noted that the polytetrafluoroethylene sample seat is disposable.
[0052] In an implementable manner, the stator 3 is inserted into the bottom of the shell 1, and the top surface of the stator 3 is fixedly connected with the seal ring 2. As shown in Figure 1 and Figure 2 As shown, the bottom surface of the shell 1 is provided with an opening, and a limiting edge is arranged on the circumferential side of the stator. The outer diameter of the limiting edge is greater than the diameter of the opening of the shell. The stator 3 is inserted into the opening, and after being subjected to axial pressure, the stator 3 extrudes the seal ring upward and realizes shock absorption through the buffer liquid 7. By arranging the limiting edge, the stator 3 is prevented from sliding out of the shell 1.
[0053] It should be noted that the outer diameter of the limiting edge is the same as the inner diameter of the shell, and a sealing ring is arranged on the circumferential side of the limiting edge, so that when the stator 3 moves upward during layer removal, the buffer liquid is further ensured to be sealed in the shell.
[0054] According to the second aspect of the present application, a preparation device for a failure analysis sample is also provided, which comprises the sample stage provided in the first aspect and a grinding machine, the bottom surface of the sample stage is arranged opposite to the upper surface of the grinding machine, and is spaced apart by a predetermined distance.
[0055] In summary, the application provides a sample stage of failure analysis sample and a preparation device thereof, which can effectively solve the problems existing in manual pressing sample. By filling the buffer liquid 7 in the shell 1, when the grinding pressure suddenly increases due to overuse or sudden impact from the outside world, the buffer liquid 7 can absorb the sudden pressure and play a buffering role, avoiding the occurrence of excessive delamination. By setting the buffer liquid 7 as an elastic body capsule 6 and silicon oil with a predetermined volume ratio, the effective grinding pressure can be set to ensure the removal of a certain specific layer and adapt to the removal requirements of different film layers. When the grinding sample, the hardness and material of the grinding pad change, the volume ratio of the buffer liquid 7 can be adjusted to meet different requirements. By setting the rotating part, the linear speed difference generated by the different distances from the axis center during grinding drives the rotation of the sample seat 8, so that the grinding time and the number of abrasive materials contacted at different positions of the sample are equal, thereby realizing the uniform delamination of the sample.
[0056] The above only describes the preferred embodiments of the present application, and it should be pointed out that for ordinary skilled persons in the technical field, some improvements and replacements can be made without departing from the technical principles of the present application, and these improvements and replacements should also be considered as the protection scope of the present application.
Claims
1. A sample stage for a failure analysis sample, the sample stage comprising: The utility model relates to a sample stage and a grinder, and the bottom surface of the sample stage is oppositely arranged with the upper surface of the grinder and is spaced apart by a predetermined distance. The utility model relates to a sample stage and a grinder, and the bottom surface of the sample stage is oppositely arranged with the upper surface of the grinder and is spaced apart by a predetermined distance. The utility model relates to a sample stage and a grinder, and the bottom surface of the sample stage is oppositely arranged with the upper surface of the grinder and is spaced apart by a predetermined distance. The utility model relates to a sample stage and a grinder, and the bottom surface of the sample stage is oppositely arranged with the upper surface of the grinder and is spaced apart by a predetermined distance.
2. The sample stage for failure analysis samples according to claim 1, characterized in that The utility model relates to a sample stage and a grinder, and the bottom surface of the sample stage is oppositely arranged with the upper surface of the grinder and is spaced apart by a predetermined distance.
3. The sample stage for failure analysis samples of claim 2, wherein, The utility model relates to a sample stage and a grinder, and the bottom surface of the sample stage is oppositely arranged with the upper surface of the grinder and is spaced apart by a predetermined distance.
4. The sample stage for failure analysis samples of claim 1, wherein, The utility model relates to a sample stage and a grinder, and the bottom surface of the sample stage is oppositely arranged with the upper surface of the grinder and is spaced apart by a predetermined distance.
5. The sample stage for failure analysis samples of claim 1, wherein, The utility model relates to a sample stage and a grinder, and the bottom surface of the sample stage is oppositely arranged with the upper surface of the grinder and is spaced apart by a predetermined distance.
6. The sample stage for failure analysis samples of claim 1, wherein, The utility model relates to a sample stage and a grinder, and the bottom surface of the sample stage is oppositely arranged with the upper surface of the grinder and is spaced apart by a predetermined distance.
7. The sample stage for failure analysis samples of claim 1, wherein, The utility model relates to a sample stage and a grinder, and the bottom surface of the sample stage is oppositely arranged with the upper surface of the grinder and is spaced apart by a predetermined distance.
8. A device for preparing a failure analysis sample, characterized by