Electrical integrated box for process cavity

Abstract

The utility model provides an electrical integration box for a process cavity, which comprises a box main body and a sealing cover for sealing the box main body, and the internal space of the box main body is divided into a main cavity, a radio frequency cavity and a filter cavity; the radio frequency cavity is arranged at the upper part of one side of the box main body, the filter cavity is arranged at the upper part of the other side opposite to the radio frequency cavity, the radio frequency cavity is used for accommodating a radio frequency input plugging terminal, and the radio frequency input plugging terminal is arranged on the sealing cover corresponding to the radio frequency cavity; a filter is arranged in the filter chamber, a back pressure gas pipeline and a condensation plate assembly are arranged in the main chamber, the back pressure gas pipeline is arranged on a back plate of the box main body, and the condensation plate assembly is arranged below the radio frequency chamber; a first radio frequency shielding gasket is arranged on the inner side of the sealing cover. By adopting the electrical integration box for the process cavity, the reasonable separation of the space in the box main body and the reasonable deployment of components are realized, the electromagnetic interference is reduced, and the space utilization rate is improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to semiconductor manufacturing equipment technical field especially relates to a process cavity with electrical integration box. BACKGROUND

[0002] In semiconductor technology, wafer etching and other process processing are usually carried out in process cavities. The current process cavity electrical integration box structure is not reasonable, resulting in a large volume of electrical integration box, internal circuit is in disorder, and the space utilization is not high. Moreover, electromagnetic interference occurs frequently due to the large variety of internal components. Therefore, it is necessary to provide a process cavity with electrical integration box. SUMMARY

[0003] The utility model provides a process cavity with electrical integration box, optimization structure realizes the reasonable division of the space in the box body and the reasonable deployment of components, reduces electromagnetic interference, and improves the space utilization.

[0004] To achieve the above object, the utility model provides the following technical scheme:

[0005] A process cavity with electrical integration box, comprising a box body and a cover for closing the box body, the internal space of the box body is divided into a main chamber, a radio frequency chamber and a filter chamber; the radio frequency chamber is arranged on the upper part of one side of the box body, the filter chamber is arranged on the upper part of the other side opposite to the radio frequency chamber, the radio frequency chamber is used for accommodating the radio frequency input plug-in terminal, the radio frequency input plug-in terminal is mounted on the cover corresponding to the radio frequency chamber; the filter chamber is provided with a filter, the main chamber is provided with a back pressure gas pipeline and a condenser plate assembly, the back pressure gas pipeline is arranged on the back plate of the box body, and the condenser plate assembly is arranged below the radio frequency chamber; a first radio frequency shielding gasket is arranged on the inner side of the cover.

[0006] Preferably, the radio frequency chamber is separated from the main chamber by a first partition plate, a first shutter is detachably arranged on the first partition plate, holes allowing cables to pass through are arranged through the first shutter, and the first shutter is arranged on the side surface of the radio frequency chamber.

[0007] Preferably, the filter chamber is separated from the main chamber by a second partition plate, a second shutter is detachably arranged on the second partition plate, holes allowing cables to pass through are arranged through the second shutter, and the second shutter is arranged on the top of the filter chamber.

[0008] Preferably, a shielding mounting groove is arranged on the top of the box body, and a second radio frequency shielding gasket is arranged in the shielding mounting groove.

[0009] Preferably, the bottom of the box body is provided with a filter chamber side door and a main chamber side door for closing the bottom surface of the box body, the filter chamber side door closes the filter chamber, and the main chamber side door closes the main chamber.

[0010] Preferably, the filter is fixed to a filter mounting plate, and the filter mounting plate is fixed to the back plate of the box body.

[0011] Preferably, the side wall of the box body is provided with a thermocouple plug arranged above the filter chamber.

[0012] Preferably, the condensing plate assembly comprises a condensing plate body provided with a cooling water interface, a first cooling gas interface and a second cooling gas interface, the cooling water interface is arranged corresponding to the back plate of the box body, and the back side of the box body is provided with a cooling water connector connected to the cooling water interface; the first cooling gas interface is arranged corresponding to the side edge of the box body, and the outer side of the box body is provided with a first cooling gas connector connected to the first cooling gas interface; the second cooling gas interface is connected with a second cooling gas connector arranged in the main chamber.

[0013] Preferably, a micro switch is arranged in the box body, and the micro switch abuts against the cover when the cover is closed to the box body.

[0014] Preferably, a positioning pin is arranged on the contact surface of the box body and the cover, a positioning hole corresponding to the positioning pin is arranged on the cover, the positioning pin is inserted into the positioning hole when the cover is closed to the box body; a buckle is arranged on the circumferential side wall of the box body, and a lock buckle corresponding to the buckle is arranged on the cover, the buckle locks the lock buckle to be fixed when the cover is closed to the box body.

[0015] Compared with the prior art, the technical scheme of the utility model has beneficial effects.

[0016] For example, the process cavity uses an electrical integrated box, which comprises a box body and a cover for closing the box body, and the internal space of the box body is divided into a main chamber, a radio frequency chamber and a filter chamber; the radio frequency chamber is arranged at the upper part of one side of the box body, and the filter chamber is arranged at the upper part of the other side opposite to the radio frequency chamber, the radio frequency chamber is used for accommodating a radio frequency input plug-in terminal, and the radio frequency input plug-in terminal is mounted on the cover corresponding to the radio frequency chamber; a filter is arranged in the filter chamber, a back pressure gas pipeline is arranged on the back plate of the box body, and a condensing plate assembly is arranged below the radio frequency chamber; a first radio frequency shielding gasket is arranged on the inner side of the cover; the reasonable division of the internal space of the box body and the reasonable arrangement of components and elements are realized, the electromagnetic interference is reduced, and the space utilization rate is improved. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of the electrical integrated box for the process cavity after removing part of the cover in an embodiment of this utility model;

[0018] Figure 2 This is a schematic diagram of the box body structure with some components removed in an embodiment of this utility model;

[0019] Figure 3 This is a schematic diagram of the condenser plate assembly structure in an embodiment of this utility model;

[0020] Figure 4 This is a schematic diagram of the front structure of the cap in an embodiment of this utility model;

[0021] Figure 5 This is a schematic diagram of the back structure of the cap in an embodiment of this utility model.

[0022] Explanation of reference numerals in the attached figures:

[0023] 1-Cap; 11-First RF shielding gasket; 12-Mounting plate; 13-Fixing component;

[0024] 2-Box body; 21-Main chamber; 22-RF chamber; 221-First partition plate; 222-First gate; 23-Filter chamber; 231-Second partition plate; 232-Second gate; 24-Shielding mounting slot; 25-Second RF shielding gasket; 26-Filter chamber side door; 27-Main chamber side door; 28-Thermocouple plug; 29-Micro switch;

[0025] 3-Condenser plate assembly; 31-Condenser plate body; 32-Cooling water interface; 33-First cooling gas interface; 34-Second cooling gas interface; 35-Cooling water connector; 36-First cooling gas connector; 37-Second cooling gas connector;

[0026] 4-Filter; 41-Filter mounting plate;

[0027] 5-RF input connector;

[0028] 6-Back pressure gas pipeline;

[0029] 7-Lock; 71-Lock. Detailed Implementation

[0030] In order to make the purpose, characteristics and beneficial effects of the utility model more obvious and easy to understand, the specific implementation of the utility model is described in detail below in combination with the drawings. It can be understood that the specific implementation described below is only used to explain the utility model, and is not a limitation on the utility model. In the drawings, the same or similar elements in different embodiments can be indicated by the same, similar reference numerals, and the description of the same, similar elements in different embodiments and the description of prior art elements, characteristics, effects and the like can be omitted.

[0031] Figure 1 is a structure schematic diagram of the electrical integrated box for process cavity in the embodiment of the utility model after removing part of the cover; Figure 2 is a structure schematic diagram of the box main body removing part of the component in the embodiment of the utility model; Figure 3 is a structure schematic diagram of the condensation plate assembly in the embodiment of the utility model; Figure 4 is a structure schematic diagram of the cover front in the embodiment of the utility model; Figure 5 is a structure schematic diagram of the cover back in the embodiment of the utility model.

[0032] With reference to Figures 1-5 , the embodiment of the utility model provides an electrical integrated box for process cavity.

[0033] Specifically, the electrical integrated box for process cavity comprises a box main body 2 and a cover 1 closing the box main body 2, and the internal space of the box main body 2 is divided into a main chamber 21, a radio frequency chamber 22 and a filter chamber 23; the radio frequency chamber 22 is arranged at the upper part of one side of the box main body 2, the filter chamber 23 is arranged at the upper part of the other side opposite to the radio frequency chamber 22, the radio frequency chamber 22 is used for accommodating a radio frequency input plug-in terminal 5, and the radio frequency input plug-in terminal 5 is mounted on the cover 1 corresponding to the radio frequency chamber 22; the filter chamber 23 is provided with a filter 4, the main chamber 21 is provided with a back pressure gas pipeline 6 and a condensation plate assembly 3, the back pressure gas pipeline 6 is arranged on the back plate of the box main body 2, and the condensation plate assembly 3 is arranged below the radio frequency chamber 22; the space in the box main body 2 is reasonably divided, and the components are reasonably arranged, so that the space utilization is improved; a first radio frequency shielding gasket 11 is arranged on the inner side of the cover 1, the shielding of the side of the cover 1 is realized, and the electromagnetic interference is reduced.

[0034] Specifically, the radio frequency input plug-in terminal 5 is fixed to the outer side of the cover 1 through a mounting plate 12, and a fixing part 13 is arranged on the inner side of the cover 1, and the fixing part 13 is used for fixing the cable of the radio frequency input plug-in terminal 5.

[0035] In some embodiments, the radio frequency chamber 22 is divided from the main chamber 21 by a first partition plate 221, a first shutter 222 is detachably arranged on the first partition plate 221, a hole allowing the cable to pass through is arranged through the first shutter 222, and the first shutter 222 is arranged on the side surface of the radio frequency chamber 22.

[0036] In some embodiments, the filter chamber 23 is separated from the main chamber 21 by a second partition plate 231, and a second shutter plate 232 is detachably arranged on the second partition plate 231, and a hole allowing the cable to pass through is arranged on the second shutter plate 232, and the second shutter plate 232 is arranged at the top of the filter chamber 23.

[0037] Specifically, the first partition plate 221 and the second partition plate 231 are integrally arranged with the box body 2, and the first shutter plate 222 and the second shutter plate 232 are detachably designed, facilitating the installation and wiring of the cables of the filter 4 and the radio frequency input plug-in terminal 5.

[0038] In some embodiments, a shielding mounting groove 24 is arranged at the top of the box body 2, and a second radio frequency shielding gasket 25 is arranged in the shielding mounting groove 24, so as to shield the top and reduce electromagnetic interference.

[0039] In some embodiments, a filter chamber side door 26 and a main chamber side door 27 are arranged at the bottom of the box body 2 to close the bottom surface of the box body 2, the filter chamber side door 26 closes the filter chamber 23, and the main chamber side door 27 closes the main chamber 21; when installing elements, connecting lines, and maintaining, the operation space is increased by removing the door, facilitating installation and maintenance.

[0040] In some embodiments, the filter 4 is fixed to a filter mounting plate 41, and the filter mounting plate 41 is fixed to the back plate of the box body 2.

[0041] In some embodiments, a thermocouple plug 28 is arranged on the side wall of the box body 2, and the thermocouple plug 28 is arranged above the filter chamber 23.

[0042] In some embodiments, the condenser plate assembly 3 comprises a condenser plate body 31, and the condenser plate body 31 is provided with a cooling water interface 32 (including a cooling water inlet and a cooling water outlet), a first cooling gas interface 33 (including a first cooling gas inlet and a first cooling gas outlet), and a second cooling gas interface 34, the cooling water interface 32 (including a second cooling gas inlet and a second cooling gas outlet) is arranged corresponding to the back plate of the box body 2, and the back side of the box body 2 is provided with a cooling water connector 35 connected to the cooling water interface 32; the first cooling gas interface 33 is arranged corresponding to the side edge of the box body 2, and the outside of the box body 2 is provided with a first cooling gas connector 36 connected to the first cooling gas interface 33; the second cooling gas interface 34 is connected with a second cooling gas connector 37, and the second cooling gas connector 37 is arranged in the main chamber 21.

[0043] In some embodiments, a micro switch 29 is arranged in the box body 2, and the micro switch 29 abuts against the cover 1 when the cover 1 is closed to the box body 2, and the micro switch 29 is used to detect whether the cover 1 is closed to the box body 2, and plays a protection role.

[0044] In some embodiments, the box body 2 is provided with a positioning pin on the contact surface of the cover 1, and the cover is provided with a positioning hole corresponding to the positioning pin, and when the cover 1 is covered to the box body 2, the positioning pin is inserted into the positioning hole; The four peripheral side walls of the box body 2 are provided with buckles 7, and the cover 1 is provided with a lock catch 71 corresponding to the buckle 7, and when the cover 1 is covered to the box body 2, the buckle 7 locks the lock catch 71.

[0045] In summary, the utility model discloses a process cavity with electrical integrated box, including box body 2 and the cover 1 of closed box body 2, the inside space of box body 2 is divided into main chamber 21, radio frequency chamber 22 and filter chamber 23, radio frequency chamber 22 sets up at the upper portion of one side of box body 2, and filter chamber 23 sets up at the upper portion of the other side opposite radio frequency chamber 22, and radio frequency chamber 22 is used to accommodate radio frequency input plug-in terminal 5, and radio frequency input plug-in terminal 5 is installed on cover 1 corresponding to radio frequency chamber 22, filter 4 is arranged in filter chamber 23, back pressure gas pipeline 6 and condenser plate assembly 3 are arranged in main chamber 21, back pressure gas pipeline 6 is arranged on the back plate of box body 2, and condenser plate assembly 3 is arranged below radio frequency chamber 22, realize the reasonable division of the inside space of box body 2 and the reasonable deployment of component, improve space utilization, the inside of cover 1 is provided with first radio frequency shielding gasket 11, realize the shielding of cover 1 side, reduce electromagnetic interference.

[0046] Although specific embodiments have been described above, these embodiments are not intended to limit the scope of the present disclosure, even if a single embodiment is described with respect to a particular feature. The features provided in the present disclosure are intended to be illustrative, not limiting, unless otherwise stated. In a specific implementation, one or more technical features of a dependent claim can be combined with technical features of an independent claim, and can be combined by any appropriate means, not just the specific combinations listed in the claims, as long as it is technically feasible.

[0047] Although the utility model discloses as above, the utility model discloses is not limited to this. Any person skilled in the art, without departing from the spirit and scope of the utility model, can make various changes and modifications, therefore the protection scope of the utility model should be limited by the range defined in the claims.

Claims

1. An electrical integrated box for a process cavity, characterized in that, The device includes a housing body and a cover that encloses the housing body. The internal space of the housing body is divided into a main chamber, a radio frequency (RF) chamber, and a filter chamber. The RF chamber is located on the upper part of one side of the housing body, and the filter chamber is located on the upper part of the opposite side of the RF chamber. The RF chamber is used to accommodate the RF input connector, and the RF input connector is mounted on the cover corresponding to the RF chamber. A filter is provided in the filter chamber. A back pressure gas pipeline and a condenser plate assembly are provided in the main chamber. The back pressure gas pipeline is located on the back plate of the housing body, and the condenser plate assembly is located below the RF chamber. A first RF shielding gasket is provided on the inner side of the cover.

2. The electrical integrated box for a process cavity according to claim 1, characterized in that, The radio frequency chamber is separated from the main chamber by a first partition plate. A first gate plate is detachably provided on the first partition plate. The first gate plate has a through hole that allows cables to pass through. The first gate plate is located on the side of the radio frequency chamber.

3. The electrical integrated box for a process cavity according to claim 1, characterized in that, The filter chamber is separated from the main chamber by a second partition plate. A second gate plate is detachably provided on the second partition plate. The second gate plate has a through hole that allows cables to pass through. The second gate plate is located at the top of the filter chamber.

4. The electrical integrated box for a process cavity according to claim 1, characterized in that, The top of the box body is provided with a shielding mounting groove, and a second radio frequency shielding gasket is provided in the shielding mounting groove.

5. The electrical integrated box for a process cavity according to claim 1, characterized in that, The bottom of the box body is provided with a filter chamber side door and a main chamber side door that close the bottom surface of the box body. The filter chamber side door closes the filter chamber, and the main chamber side door closes the main chamber.

6. The electrical integrated box for a process cavity according to claim 1, characterized in that, The filter is fixed to the filter mounting plate, and the filter mounting plate is fixed to the back plate of the box body.

7. The electrical integrated box for a process cavity according to claim 1, characterized in that, A thermocouple plug is provided on the side wall of the main body of the box, and the thermocouple plug is located above the filter chamber.

8. The electrical integrated box for a process cavity according to claim 1, characterized in that, The condenser plate assembly includes a condenser plate body, which is provided with a cooling water interface, a first cooling gas interface, and a second cooling gas interface. The cooling water interface is located on the back plate of the box body, and a cooling water connector connected to the cooling water interface is provided on the back side of the box body. The first cooling gas interface is located on the side of the box body, and a first cooling gas connector connected to the first cooling gas interface is provided on the outer side of the box body. The second cooling gas interface is connected to a second cooling gas connector, which is located in the main chamber.

9. The electrical integrated box for a process cavity according to claim 1, characterized in that, A micro switch is provided in the box body, and the micro switch abuts against the cover when the cover is closed on the box body.

10. The electrical integrated box for a process cavity according to claim 1, characterized in that, A positioning pin is provided on the contact surface between the box body and the cover. A positioning hole is provided on the cover corresponding to the positioning pin. When the cover is closed to the box body, the positioning pin is inserted into the positioning hole. All four sides of the box body are provided with latches. The cover is provided with a latch corresponding to the latch. When the cover is closed to the box body, the latch locks the latch.

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