Carrier bearing mechanism, carrier transfer device and carrier storage device

Abstract

The utility model discloses a carrier bearing mechanism, a carrier transfer device and a carrier storage device, the bearing mechanism comprises a base frame, a support part and two first guide rollers, the support part and the two first guide rollers are all installed on the base frame, the two first guide rollers are arranged at intervals along a first direction, and the support part and the two first guide rollers are arranged at intervals along a second direction. An included angle is formed between the central axis of each first guide roller and the first direction, the two first guide rollers are both used for guiding the carrier, and the supporting part is located between the two first guide rollers and used for supporting the carrier. According to the bearing mechanism, the carrier can be leveled, the bearing reliability and stability of the carrier can be improved, and then the safety can be improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor processing, specifically relates to a bearing mechanism of carrier, transfer device of carrier and storage device of carrier. BACKGROUND

[0002] In the semiconductor processing equipment such as deposition film forming equipment, the carrier in the form of graphite boat, quartz boat and the like is usually used to bear the substrate in the form of silicon wafer. In specific production, the production site usually sets up a manipulator to bear and transfer the carrier. However, due to the operation error and other factors, the carrier may be in an inclined state when the manipulator picks up the carrier, which will affect the bearing stability of the carrier by the manipulator, and in severe cases, the carrier may even fall off.

[0003] Therefore, how to provide a scheme to overcome or alleviate the above defects is still a technical problem to be solved by the person skilled in the art. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a bearing mechanism of carrier, transfer device of carrier and storage device of carrier, wherein the bearing mechanism can level the carrier, improve the bearing reliability and stability of the carrier, and further improve the safety.

[0005] To solve the above technical problems, the utility model provides a bearing mechanism of carrier, which comprises a base frame, a supporting part and two first guide rollers, the supporting part and the two first guide rollers are both mounted on the base frame, the two first guide rollers are arranged at intervals along a first direction, the central axis of the first guide roller is arranged at an angle with the first direction, and the two first guide rollers are both used for guiding the carrier, the supporting part is located between the two first guide rollers, and the supporting part is used for supporting the carrier.

[0006] In the above scheme, when the carrier is borne by the bearing mechanism, the roller surface of the first guide roller can be in contact with the carrier. At this time, under the action of the gravity of the carrier itself, the first guide roller can rotate, the first guide roller can generate a driving force on the carrier, which can drive the carrier to move along the first direction, so that the carrier in an inclined state in the first direction can be leveled, and the supporting part and the carrier can be in good contact, thereby improving the bearing reliability and stability of the carrier. In this way, the carrier can be greatly prevented from falling off from the bearing mechanism, which is beneficial to improving the safety of production.

[0007] In addition, the first guide roller and the carrier are in rolling friction, and thus the displacement of the carrier relative to the first guide roller under the action of gravity can be easier.

[0008] Optionally, the support part comprises at least one support roller, and the central axis of the support roller is also arranged at an angle with the first direction.

[0009] Optionally, the support height of the first guide roller is higher than the support height of the support roller.

[0010] Optionally, the central axis of the first guide roller is located on the upper side of the central axis of the support roller.

[0011] Optionally, the base frame is provided with a first mounting part and a second mounting part, any one of the first mounting part and the second mounting part can be a slot type or a hole type, part of the first guide roller is located in the first mounting part, and part of the second guide roller is located in the second mounting part.

[0012] Optionally, a guide plate is further included, the guide plate is also mounted to the base frame, the guide plate is located on one side of the central axis direction of the first guide roller, and the guide plate has a matching guide surface, and the matching guide surface is also used for guiding the carrier.

[0013] Optionally, a second guide roller is further included, the second guide roller is also mounted to the base frame, the central axis of the second guide roller extends along the first direction, and the second guide roller is also used for guiding the carrier.

[0014] Optionally, an adapter part is further included, the second guide roller is mounted to the adapter part, and the adapter part is mounted to the base frame.

[0015] Optionally, a position reaching sensor is further included, and the position reaching sensor is mounted to the base frame.

[0016] The utility model also provides a kind of transfer device of carrier, including the carrier bearing mechanism of above.

[0017] The utility model also provides a kind of storage device of carrier, including the carrier bearing mechanism of above. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 It is the structural diagram of carrier;

[0019] Figure 2 It is the structural schematic diagram of the carrier bearing mechanism provided by the utility model;

[0020] Figure 3 It isFigure 2 A sectional view of the middle base frame, the first guide roller and the support roller perpendicular to the second direction;

[0021] Figure 4 A partial enlarged view of Figure 3

[0022] Figure 5 A partial enlarged view of Figure 2 A schematic view of the position adjustment of the carrier by the carrying mechanism;

[0023] Figure 6 A partial enlarged view of Figure 2 Another schematic view of the position adjustment of the carrier by the carrying mechanism;

[0024] Figure 7 A partial enlarged view of Figure 2 A schematic view of the carrying structure of the carrier by the carrying mechanism;

[0025] Figure 8 A schematic view of another carrying mechanism of the carrier provided by the utility model;

[0026] Figure 9 A partial enlarged view of Figure 8 A schematic view of the position adjustment of the carrier by the carrying mechanism;

[0027] Figure 10 A partial enlarged view of Figure 8 Another schematic view of the position adjustment of the carrier by the carrying mechanism;

[0028] Figure 11 A partial enlarged view of Figure 8 A schematic view of the carrying structure of the carrier by the carrying mechanism.

[0029] Reference signs:

[0030] 1000-carrier; 1100-first guide surface; 1200-first support surface; 1300-second guide surface; 1400-second support surface;

[0031] 2000-carrying mechanism; 2100-base frame; 2110-base frame; 2111-first mounting portion; 2112-second mounting portion; 2120-adaptor frame; 2130-base plate; 2140-mounting table; 2200-supporting portion; 2210-supporting roller; 2300-first guide roller; 2400-guide plate; 2410-matched guide surface; 2500-second guide roller; 2600-adaptor component; 2700-in-place sensor. DETAILED DESCRIPTION

[0032] In order for those skilled in the art to better understand the technical scheme of the utility model, the utility model will be further described in detail below in combination with the drawings and specific embodiments. ​

[0033] In the description of the embodiments of the present application, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features with "first", "second" can explicitly or implicitly include one or more of the features.

[0034] In the description of the embodiments of the present application, it should be noted that, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connection" should be understood in a broad sense, for example, "connection" can be detachable connection, or can be non-detachable connection; can be direct connection, or can be indirect connection through intermediate medium.

[0035] In the description of the embodiments of the present application, the terms "including", "containing" or any other variants thereof are intended to cover non-exclusive containing, so that the process, method, article or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or includes elements inherent to such process, method, article or device. Without more limitations, the element defined by the sentence "including a…" does not exclude the presence of another identical element in the process, method, article or device including the element.

[0036] Please refer to Figure 1 , Figure 1 is a structural diagram of a carrier.

[0037] As Figure 1 shown, in deposition film forming equipment such as plasma enhanced chemical vapor deposition (PECVD) equipment, plasma enhanced atomic layer deposition (PEALD) equipment, etc., a carrier 1000 is usually needed to be used for carrying a substrate in the form of a silicon wafer, etc., and the substrate can be sent into a reactor for deposition film forming and other processing.

[0038] The carrier 1000 is transported between different stations by the mechanical arm before entering the reactor or after coming out of the reactor. However, due to operation errors and other factors, the carrier 1000 may be in an inclined state when being picked up or supported by the mechanical arm, which affects the load stability of the carrier 1000 by the mechanical arm, and in severe cases, may also cause the carrier 1000 to fall and other safety accidents. Moreover, when the carrier 1000 is in an inclined state, the mechanical arm and the carrier 1000 cannot form good contact, and the in-place sensor provided on the mechanical arm may not be able to identify the carrier 1000, which may also trigger a system alarm.

[0039] The above-mentioned situation not only occurs in the picking up and transporting process of the carrier 1000 by the mechanical arm, but also occurs in the carrying process of the carrier 1000 at different stations. For example, the carrier 1000 is parked on the carrying table before and after entering and exiting the reactor. Due to operation errors and other factors, the carrier 1000 may also be in an inclined state on the carrying table, which may cause the carrier 1000 to fall and other dangerous conditions. Moreover, the in-place sensor provided on the carrying table may also not accurately identify the carrier 1000, which may also trigger a system alarm.

[0040] To this end, the utility model embodiment provides a carrier carrying mechanism which can be applied to a transfer device such as a mechanical arm capable of transferring the carrier 1000, or can be applied to a storage device such as a carrying table capable of storing the carrier 1000, which can reduce the inclination of the carrier 1000, thereby improving the carrying reliability and stability of the carrier 1000, which is beneficial to ensure production safety and can reduce system alarms, so that the processing of the substrate such as a silicon wafer can be smoothly carried out, and the production efficiency can be improved.

[0041] For ease of description, the utility model embodiment can define a first direction X, a second direction Y and a third direction Z. Any two of the first direction X, the second direction Y and the third direction Z can be arranged at an angle, for example, the angle can be 90 degrees. Figure 1 In one specific scenario shown in the figure, the first direction X can be the width direction of the carrier 1000, the second direction Y can be the length direction of the carrier 1000, and the third direction Z can be the height direction of the carrier 1000, i.e., the up-down direction.

[0042] Please refer to Figures 2-7 , Figure 2 for a structural schematic view of the carrier carrying mechanism provided by the utility model; Figure 3 for Figure 2 a sectional view of the middle chassis, the first guide roller and the support roller perpendicular to the second direction; Figure 4 forFigure 3 a local enlarged view of Figure 5 is Figure 2 a schematic view of the position adjustment of the carrier by the carrying mechanism; Figure 6 is Figure 2 another schematic view of the position adjustment of the carrier by the carrying mechanism; Figure 7 is Figure 2 a structural view of the carrier by the carrying mechanism.

[0043] As Figures 2-4 shown in the first embodiment, the carrying mechanism 2000 comprises a base frame 2100, a supporting part 2200 and two first guide rollers 2300.

[0044] The base frame 2100 is the structural basis of the carrying mechanism 2000, and other components such as the supporting part 2200 and the first guide rollers 2300 can be mounted on the base frame 2100 for integrated assembly through the base frame 2100, so that the carrying mechanism 2000 provided by the embodiments of the present application can be conveniently carried, installed and transported, and the structural compactness of the carrying mechanism 2000 can be improved.

[0045] The base frame 2100 can comprise a bottom frame 2110 and an adapter frame 2120. The bottom frame 2110 can be generally plate-shaped, and the normal direction of the bottom frame 2110 can be the third direction Z described above. The adapter frame 2120 can also be generally plate-shaped, and can be connected to the bottom frame 2110. The connection mode can be, for example, welding, screw connection, clamping, etc., which is not limited here, as long as the reliability requirement of the connection can be met. The adapter frame 2120 and the bottom frame 2110 can be arranged at an angle, which can be, for example, 90 degrees, etc. The adapter frame 2120 can be used to connect to other components, so as to connect the carrying mechanism 2000 provided by the embodiments of the present application to other components. The other components can be, for example, a driving assembly of a robot hand, so as to integrate the carrying mechanism 2000 provided by the embodiments of the present application into the robot hand.

[0046] It should be understood that the above description of the specific structure of the base frame 2100 is only an exemplary description made by the embodiments of the present application in combination with the drawings, and cannot be regarded as a limitation on the scope of the carrying mechanism 2000 provided by the embodiments of the present application. Under the condition of meeting the function, the base frame 2100 can also be provided in other structure. For example, the bottom frame 2110 and the adapter frame 2120 can also be frame-shaped. For another example, the base frame 2100 can not comprise the adapter frame 2120 described above, but only comprise the bottom frame 2110.

[0047] The support 2200 and the two first guide rollers 2300 are both mounted on the base frame 2100. The two first guide rollers 2300 are spaced apart along the first direction X, and the central axis of the first guide rollers 2300 is set at an angle to the first direction X. Figure 2 The central axis of the first guide roller 2300 can extend approximately along the second direction Y. Both first guide rollers 2300 are used to guide the carrier 1000. In the first direction X, the support portion 2200 is located between the two first guide rollers 2300, and the support portion 2200 is used to support the carrier 1000.

[0048] Combination Figures 5-7 The carrier 1000 may include two first guide surfaces 1100 and a first support surface 1200. Both first guide surfaces 1100 may be arranged at an angle to the first direction X, and the first support surface 1200 may extend approximately along the first direction X. When the carrier 1000 is supported by the bearing mechanism 2000 provided in this embodiment, the roller surface of the first guide roller 2300 may contact the first guide surface 1100. At this time, under the action of the carrier 1000's own weight, the first guide roller 2300 may rotate. The first guide roller 2300 may generate a driving force on the carrier 1000 through the first guide surface 1100, driving the carrier 1000 to move along the first direction X. This allows the carrier 1000, which is tilted in the first direction X, to be leveled, ensuring good contact between the support part 2200 and the first support surface 1200, thereby improving the reliability and stability of the carrier 1000's support. This can largely prevent the vehicle 1000 from falling off the self-supporting mechanism 2000, which is beneficial to improving production safety.

[0049] It should be understood that there is rolling friction between the first guide roller 2300 and the first guide surface 1100. Therefore, the displacement of the carrier 1000 relative to the first guide roller 2300 under its own gravity is easier. In other words, this embodiment of the invention can more easily adjust the carrier 1000, which is more conducive to ensuring the adjustment effect.

[0050] In some alternative implementations, such as Figure 2 and Figure 3 As shown, the support portion 2200 may include at least one support roller 2210.

[0051] The middle axis of the support roller 2210 can also be arranged at an angle with the first direction X. Specifically, the middle axis of the support roller 2210 can extend substantially along the second direction Y, that is, the middle axis of the support roller 2210 can be parallel to the middle axis of the first guide roller 2300. The support roller 2210 can rotate. In this way, during the position adjustment of the carrier 1000, the rolling friction between the carrier 1000 and the support part 2200 can also be relatively small, which can further reduce the difficulty of displacement of the carrier 1000 on the bearing mechanism 2000.

[0052] In actual applications, the support height of the first guide roller 2300 can be higher than the support height of the support roller 2210. It should be understood that the support height of the roller refers to the height of the highest point of the outer wall surface of the roller in the third direction Z. For ease of illustration, it can be referred to Figure 4 The first guide roller 2300 can have a first virtual support surface S1, and the height of the first virtual support surface S1 is the support height of the first guide roller 2300. The support roller 2210 can have a second virtual support surface S2, and the height of the second virtual support surface S2 is the support height of the support roller 2210. The first virtual support surface S1 can be located below the second virtual support surface S2.

[0053] With this scheme, as shown in Figure 7 When the carrier 1000 is placed on the bearing mechanism 2000, the carrier 1000 can be partially embedded between the two first guide rollers 2300, and the two first guide rollers 2300 can also limit the carrier 1000 in the first direction X, which can further ensure the reliable bearing of the bearing mechanism 2000 on the carrier 1000.

[0054] In one scheme, as shown in Figure 4 The middle axis of the first guide roller 2300 can be located above the middle axis of the support roller 2210. At this time, the radial dimensions of the first guide roller 2300 and the support roller 2210 can be consistent, that is, the first guide roller 2300 and the support roller 2210 can be universal. In this way, when purchasing and installing the first guide roller 2300 and the support roller 2210, there is no need to specially distinguish the first guide roller 2300 and the support roller 2210, which can reduce the procurement cost and improve the convenience of installation.

[0055] It should be understood that in this scheme, the radial dimensions of the first guide roller 2300 and the support roller 2210 can also be inconsistent.

[0056] In another solution, the central axis of the first guide roller 2300 can also be flush with the central axis of the support roller 2210, or the central axis of the first guide roller 2300 can also be lower than the central axis of the support roller 2210. At this time, the radial dimension of the first guide roller 2300 can be set to be greater than the support roller 2210, so that the support height of the first guide roller 2300 can be higher than the support height of the support roller 2210.

[0057] Please continue to refer to Figure 4 The base frame 2110 can be provided with a first mounting portion 2111 and a second mounting portion 2112. Any one of the first mounting portion 2111 and the second mounting portion 2112 can be a hole type structure penetrating through the base frame 2110 along the third direction Z. Alternatively, any one of the first mounting portion 2111 and the second mounting portion 2112 can be a groove type structure not penetrating through the base frame 2110 along the third direction Z.

[0058] After installation is completed, part of the first guide roller 2300 can be located in the first mounting portion 2111, and part of the support roller 2210 can be located in the second mounting portion 2112. In this way, the overall size of the combination of the base frame 2110, the first guide roller 2300 and the support roller 2210 in the third direction Z can be relatively small, which is beneficial to improve the structural compactness of the bearing mechanism 2000 provided by the embodiment of the utility model.

[0059] It should be understood that the above description of setting the first mounting portion 2111 and the second mounting portion 2112 to install the first guide roller 2300 and the support roller 2210 is only an exemplary description of the bearing mechanism 2000 provided by the embodiment of the utility model, and cannot be regarded as a limitation on the implementation range of the bearing mechanism 2000 provided by the embodiment of the utility model. The first guide roller 2300 and the support roller 2210 can also adopt other structural forms under the condition of meeting the function. For example, the first guide roller 2300 and the support roller 2210 can also be located on the upper side of the base frame 2110 in the third direction Z.

[0060] In addition, in addition to the above implementation manner including the support roller 2210, in some other implementation manners of the embodiment of the utility model, the support portion 2200 can also include a support plate, so as to support the carrier 1000 through the support plate.

[0061] In some optional implementation manners, as shown in Figure 2 The bearing mechanism 2000 can also include a guide plate 2400. The guide plate 2400 is installed on the base frame 2100, specifically on the base frame 2110. The installation manner of the guide plate 2400 can be screw connection, clamping, welding, etc., which is not limited here, as long as the reliability requirement of installation can be met.

[0062] The guide plate 2400 can be located at one side of the central axis direction of the first guide roller 2300, that is, the guide plate 2400 can be located at one side of the first guide roller 2300 along the second direction Y. The guide plate 2400 can have a matching guide surface 2410. The matching guide surface 2410 can drive the carrier 1000 to displace along the second direction Y, so that the carrier 1000 can be driven in the second direction Y to realize the guide adjustment of the carrier 1000 in the second direction Y, and the adjustment performance of the bearing mechanism 2000 provided by the embodiment of the utility model can be improved to a greater extent.

[0063] The matching guide surface 2410 can be a plane. Alternatively, the matching guide surface 2410 can also be an arc surface. Alternatively, the matching guide surface 2410 can also be a curved surface formed by a plurality of planes, a curved surface formed by a combination of planes and arc surfaces, etc. In short, as long as the matching guide surface 2410 has the aforementioned guide effect.

[0064] Please refer to Figures 8-11 , Figure 8 for another structural schematic view of the bearing mechanism of the carrier provided by the utility model; Figure 9 for Figure 8 for a schematic view of the position adjustment of the bearing mechanism to the carrier; Figure 10 for Figure 8 for another schematic view of the position adjustment of the bearing mechanism to the carrier; Figure 11 for Figure 8 for a bearing structure view of the carrier of the bearing mechanism.

[0065] As Figures 8-11 indicated, the utility model further provides a second embodiment of the bearing mechanism 2000, the basic principles and functions of the embodiment and the aforementioned first embodiment are consistent, and the following utility model mainly describes the differences. It should be understood that the differences can also be combined into the aforementioned first embodiment to form a new embodiment of the bearing mechanism 2000.

[0066] In the embodiment, as Figure 8 indicated, the base frame 2100 can include two base plates 2130, the two base plates 2130 can be oppositely arranged along the second direction Y, and the first guide roller 2300 and the support part 2200 can be arranged between the two base plates 2130. At this time, the overall structure of the base frame 2100 can be relatively simple, and the overall size of the combination of the first guide roller 2300, the support roller 2210 and the base frame 2100 in the third direction Z can be relatively small, and the overall structure of the bearing mechanism 2000 is more compact.

[0067] In the embodiment, the support height of the first guide roller 2300 and the support height of the support roller 2210 can be consistent. In combination Figures 9-11 , the carrier 1000 can have a second guide surface 1300 and a second support surface 1400. In addition to cooperating with the second guide surface 1300, the roller surface of the first guide roller 2300 can also be in contact with the second support surface 1400 to cooperate with the support roller 2210 to jointly support the carrier 1000, which can effectively improve the support performance of the bearing mechanism 2000 for the carrier 1000.

[0068] After the placement is completed, the two first guide rollers 2300 can be embedded between the two second guide surfaces 1300, and the two first guide rollers 2300 and the two second guide surfaces 1300 cooperate to limit the carrier 1000 in the first direction X, thereby more reliably ensuring the reliable bearing of the bearing mechanism 2000 for the carrier 1000.

[0069] As shown in Figure 8 , the bearing mechanism 2000 can also include a second guide roller 2500. The second guide roller 2500 can also be mounted to the base frame 2100. The central axis of the second guide roller 2500 can extend along the first direction X. The second guide roller 2500 is also used to guide the carrier 1000 to adjust the posture of the carrier 1000 in the second direction Y.

[0070] The second guide roller 2500 can be directly mounted to the base frame 2100.

[0071] Alternatively, as shown in Figure 8 , the bearing mechanism 2000 can also include an adapter component 2600, and the second guide roller 2500 can be mounted to the adapter component 2600, and the adapter component 2600 can be mounted to the base frame 2100. In this way, the second guide roller 2500 can be indirectly connected to the base frame 2100 through the adapter component 2600, to facilitate adjustment of the mounting position of the second guide roller 2500. The adapter component 2600 can be an "L"-shaped corner piece as shown in Figure 8 , or the adapter component 2600 can also adopt other structural forms, as long as the adapter component 2600 can achieve the mounting of the second guide roller 2500 on the base frame 2100.

[0072] The bearing mechanism 2000 can also include a position detection sensor 2700. The position detection sensor 2700 can be mounted to the base frame 2100 to detect whether the carrier 1000 is mounted in place. The position detection sensor 2700 can be a proximity sensor, a touch sensor, a photoelectric sensor, an ultrasonic sensor, a laser sensor, etc., which is not limited here.

[0073] The in-position sensor 2700 can be directly mounted on the aforementioned substrate 2130. Figure 8 As shown, the carrying mechanism 2000 can also include a mounting table 2140, which can be located between the two substrates 2130 and can be connected to the two substrates 2130. The in-position sensor 2700 can be mounted on the mounting table 2140.

[0074] In the embodiments of the present application, the support part 2200 and the carrier 1000 can be in good contact. Therefore, the in-position sensor 2700 can also detect the carrier 1000 well, which can greatly avoid system alarms caused by the in-position sensor 2700 failing to detect the carrier 1000, and is more conducive to ensuring the efficiency of production.

[0075] The embodiments of the present application also provide a transfer device of a carrier, which can be a mechanical hand or the like, for example, for carrying and transferring the carrier 1000.

[0076] The transfer device can include a driving assembly and a carrying mechanism, and the carrying mechanism can be mounted on the driving assembly to be displaced under the driving of the driving assembly. The specific structure of the driving assembly is not limited here. The carrying mechanism can be the carrying mechanism 2000 involved in the above-mentioned various implementation manners, for example, can be the carrying mechanism 2000 involved in the above-mentioned various implementation manners. Figures 2-7

[0077] The embodiments of the present application also provide a storage device of a carrier, which can be a carrying table or the like, for example, for carrying the carrier 1000.

[0078] The storage device can include a base table and a carrying mechanism, and the carrying mechanism can be mounted on the base table. The specific structure of the base table is not limited here. The carrying mechanism can be the carrying mechanism 2000 involved in the above-mentioned various implementation manners. For example, can be the carrying mechanism 2000 involved in the above-mentioned various implementation manners. Figures 8-11

[0079] The above is only the preferred embodiments of the present application, and it should be pointed out that for ordinary skilled in the art, without departing from the principles of the present application, a number of improvements and refinements can be made, and these improvements and refinements should also be considered as the protection scope of the present application.​​

Claims

1. A load-bearing mechanism for a vehicle, characterized in that, The device includes a base frame, a support portion, and two first guide rollers. The support portion and the two first guide rollers are both mounted on the base frame. The two first guide rollers are spaced apart along a first direction. The central axis of the first guide rollers is set at an angle to the first direction. The two first guide rollers are used to guide the vehicle. The support portion is located between the two first guide rollers and is used to support the vehicle.

2. The carrying mechanism of the vehicle according to claim 1, characterized in that, The support portion includes at least one support roller, and the central axis of the support roller is also set at an angle to the first direction.

3. The carrying mechanism of the vehicle according to claim 2, characterized in that, The support height of the first guide roller is higher than the support height of the support roller.

4. The carrying mechanism of the vehicle according to claim 3, characterized in that, The central axis of the first guide roller is located above the central axis of the support roller.

5. The carrying mechanism of the vehicle according to claim 2, characterized in that, The base frame is provided with a first mounting part and a second mounting part, either of which is groove-shaped or hole-shaped. A portion of the first guide roller is located in the first mounting part, and a portion of the support roller is located in the second mounting part.

6. The carrying mechanism of the vehicle according to any one of claims 1-5, characterized in that, It also includes a guide plate, which is also mounted on the base frame. The guide plate is located on one side of the central axis of the first guide roller. The guide plate has a mating guide surface, which is also used to guide the carrier.

7. The carrying mechanism of the vehicle according to any one of claims 1-5, characterized in that, It also includes a second guide roller, which is also mounted on the base frame. The central axis of the second guide roller extends along the first direction, and the second guide roller is also used to guide the vehicle.

8. The carrying mechanism of the vehicle according to claim 7, characterized in that, It also includes an adapter component, on which the second guide roller is mounted, and on which the adapter component is mounted to the base frame.

9. The carrying mechanism of the vehicle according to any one of claims 1-5, characterized in that, It also includes a positioning sensor, which is mounted on the base frame.

10. A transfer device for a vehicle, characterized in that, Includes the carrying mechanism of the vehicle as described in any one of claims 1-9.

11. A storage device for a vehicle, characterized in that, Includes the carrying mechanism of the vehicle as described in any one of claims 1-9.

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