Semiconductor micropore detection device

Abstract

The utility model provides a semiconductor micropore detection device. The semiconductor micropore detection device comprises a workbench, a horizontal transfer device and a visual detection device, the horizontal transfer device is provided with a transfer table, and a plurality of material placing tables are arranged on the transfer table and used for placing the semiconductor microwell plates, so that batch detection is realized, and the efficiency is remarkably improved. The horizontal transferring device accurately moves the material placing table between the feeding and discharging station and the detection station. The visual detection device comprises a supporting column, a connecting plate, a transverse transferring device and a visual detection assembly. The visual detection assembly is equipped with an industrial camera, an annular light source and an image processing module, and can measure the position and diameter of the micropore with high precision. And the image processing module comprises a hole position calculation unit, a hole diameter analysis unit, an error comparison unit and an alarm unit, so that the detection accuracy and real-time feedback are ensured. According to the device, through automatic and high-precision detection, the defective rate is effectively reduced, the product failure risk caused by the micropore quality problem is reduced, and the device is very suitable for high-end semiconductor manufacturing requirements.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor detection device, especially to a kind of semiconductor micropore detection device. BACKGROUND

[0002] In the field of semiconductor manufacturing, micro-hole structure is widely used in chip heat dissipation, micro-fluid transmission and other key links, and its quality is directly related to the performance and reliability of semiconductor products. With the development of semiconductor technology to higher integration, more precise process, the precision requirement of micro-hole on semiconductor micro-hole plate is increasingly stringent, and traditional detection means has been difficult to meet the industrial demand.

[0003] In the prior art, semiconductor micro-hole detection is mainly dependent on artificial visual inspection with simple tools (such as microscope). This method is not only inefficient, but also prone to missed detection and misjudgment due to long-time work of detection personnel. Moreover, it is limited by the resolution of human eyes and cannot accurately identify small size deviations, which cannot adapt to the rhythm of large-scale industrial production. UTILITARY MODEL CONTENT

[0004] In view of the above-mentioned shortcomings of the prior art, the purpose of the utility model is to provide a semiconductor micro-hole detection device to solve the problems of low efficiency and large error in the prior art.

[0005] To achieve the above-mentioned purposes and other related purposes, the utility model provides the following technical scheme:

[0006] The semiconductor micro-hole detection device comprises a workbench, a horizontal transfer device and a visual detection device arranged on the workbench. The horizontal transfer device is provided with a transfer table, and the transfer table is provided with a plurality of material placing tables for placing semiconductor micro-hole plates. The horizontal transfer device is used to transfer the semiconductor micro-hole plates on the material placing tables between the detection station and the feeding and discharging station. The visual detection device comprises support columns symmetrically arranged on both sides of the horizontal transfer device, a connecting plate connected to the two support columns and horizontally arranged above the horizontal transfer device, a horizontal transfer device arranged on the connecting plate, and a visual detection assembly arranged on the horizontal transfer device.

[0007] The above technical solution is realized as follows: first, the operator places the semiconductor micro-hole plate to be detected on the material placing table on the transfer table, each material placing table can independently carry one or more micro-hole plates, so that the semiconductor micro-hole plates on multiple material placing tables can be detected in batches, and the detection efficiency is significantly improved; then the horizontal transfer device moves the semiconductor micro-hole plate on the material placing table from the loading and unloading station to the detection station; when the micro-hole plate reaches the detection station, the lateral transfer device starts to operate, and the visual detection assembly carried by the lateral transfer device moves horizontally along the connecting plate, so that high-precision measurement of the micro-hole position and diameter can be realized, the production demand of high-end semiconductor products is met, the defective product rate is effectively reduced, and the product failure risk caused by the quality problem of the micro-hole is reduced.

[0008] In an embodiment of the present application, the visual detection assembly comprises a mounting plate arranged on the lateral transfer device, a mounting frame arranged on the mounting plate, an industrial camera arranged on the mounting frame, a ring-shaped light source arranged on the mounting frame and below the industrial camera, and an image processing module electrically connected to the industrial camera.

[0009] The above technical solution is realized as follows: the mounting plate is arranged on the lateral transfer device and serves as a support structure, so that the entire visual detection assembly can stably move in the horizontal direction, so as to detect the semiconductor micro-hole plates on different material placing tables; the mounting frame is fixed on the mounting plate and is used to carry the industrial camera and the ring-shaped light source; the image processing module electrically connected to the industrial camera receives image data from the camera, calculates the position coordinates and diameter size of the micro-hole, compares the measured values with preset standards, judges whether there is deviation, and generates a corresponding detection report.

[0010] In an embodiment of the present application, the image processing module comprises a hole position calculation unit configured to calculate the center coordinates of the micro-hole according to the image collected by the industrial camera; a hole diameter analysis unit comprising a circular measurement model, an elliptical measurement model and an irregular contour equivalent diameter measurement model, and being capable of automatically switching to the adaptive measurement model according to the micro-hole of different shapes; an error comparison unit configured to compare the measured hole position coordinates and hole diameter size with the preset tolerance range in real time and output a deviation vector diagram; and an alarm unit configured to trigger an audible and visual alarm when the micro-hole deviation exceeds a threshold value and generate a JSON format report containing the defect position code.

[0011] The hole site calculation unit realizes accurate measurement of the micro-hole position, ensuring the accuracy of the subsequent analysis basis. The hole diameter analysis unit is suitable for micro-hole plates of different shapes and specifications, improving the flexibility and accuracy of detection, so that even non-standard shaped holes can be accurately measured. The error comparison unit provides intuitive error feedback, which is convenient for operators to quickly understand the specific situation of defects and take corresponding measures, and also provides a quantitative basis for quality control. The alarm unit timely reminds the operator to pay attention to potential quality problems, reducing the possibility of unqualified products flowing into the next process.

[0012] In an embodiment of the present application, the horizontal transfer device includes two linear motors arranged in parallel, and the transfer platform is slidably arranged on the two linear motors.

[0013] The above technical solution is realized. Through the joint action of the two linear motors arranged in parallel, the heavy load transfer platform can be more stably carried and moved, while the stability and accuracy of the platform during high-speed movement are ensured.

[0014] In an embodiment of the present application, the horizontal transfer device includes two linear motors arranged in parallel, and the transfer platform is slidably arranged on the two linear motors.

[0015] The above technical solution is realized. Through the joint action of the two linear motors arranged in parallel, the heavy load transfer platform can be more stably carried and moved, while the stability and accuracy of the platform during high-speed movement are ensured.

[0016] As described above, the semiconductor micro-hole detection device of the present application has the following beneficial effects: by arranging multiple material placing tables on the transfer platform, multiple semiconductor micro-hole plates can be loaded at the same time, batch detection is realized, and the detection efficiency is greatly improved; high-resolution industrial cameras are used in combination with accurate image processing modules to realize high-precision measurement of the micro-hole position and diameter, ensuring the accuracy and consistency of the detection results; the error comparison unit and the alarm unit can compare the measured value with the preset standard in real time during the detection process, and trigger an alarm and generate a detailed detection report when a deviation is found, so that the operator can take timely measures. BRIEF DESCRIPTION OF DRAWINGS

[0017] Fig. 1 The structure of the present application is shown.

[0018] Fig. 2 Another structure of the present application is shown.

[0019] Fig. 3 The structure of the image processing module is shown.

[0020] ELEMENT NUMBER EXPLANATION

[0021] 1、workbench ；2、 transfer station ；3、 stocking station ；4、 support column ；5、 connecting plate ；6、 mounting plate ；7、 mounting bracket ；8、 industrial camera ；9、 ring light source ；10、 linear motor ；11、 linear motor ；12、 slide table DETAILED DESCRIPTION

[0022] The implementation of the present application will be described by specific embodiments, and those skilled in the art can easily understand other advantages and effects of the present application from the disclosure. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict.

[0023] Please refer to Figs. 1 to 3 The present application provides a kind of semiconductor microwell detection device, including workbench 1, be arranged on the horizontal transfer device and visual detection device of workbench 1, the horizontal transfer device is equipped with transfer station 2, the transfer station 2 is equipped with a plurality of for placing semiconductor microwell plate stocking station 3;The horizontal transfer device is used to transfer semiconductor microwell plate on the stocking station 3 between detection station and loading and unloading station;The visual detection device includes the support column 4 symmetrically arranged in the horizontal transfer device two sides, the connecting plate 5 that is connected two support columns 4 and straddles above the horizontal transfer device, transverse transfer device being arranged on the connecting plate 5, visual detection assembly being arranged on the transverse transfer device.

[0024] First operator places semiconductor microwell plate to be detected on the stocking station 3 on the transfer station 2, each stocking station 3 can independently carry one or more microwell plates, so that a plurality of semiconductor microwell plates on the stocking station 3 can be batch detected, which significantly improves the detection efficiency;Then the horizontal transfer device, semiconductor microwell plate on the stocking station 3 is accurately moved from the loading and unloading station to the detection station;When microwell plate reaches detection station, transverse transfer device starts to work, it carries visual detection assembly and moves accurately in transverse direction along connecting plate 5, which can realize high-precision measurement of microwell position and diameter, meet the production demand of high-end semiconductor products, effectively reduce the rate of defective products, reduce the risk of product failure caused by microwell quality problems.

[0025] The visual detection assembly comprises a mounting plate 6 arranged on the horizontal transfer device, a mounting rack 7 arranged on the mounting plate 6, an industrial camera 8 arranged on the mounting rack 7, a ring light source 9 arranged on the mounting rack 7 and below the industrial camera 8, and an image processing module electrically connected to the industrial camera 8.

[0026] The mounting plate 6 is arranged on the horizontal transfer device as a support structure to ensure that the entire visual detection assembly can move stably in the horizontal direction to detect the semiconductor micro-well plates on different loading tables 3. The mounting rack 7 is fixed on the mounting plate 6 to carry the industrial camera 8 and the ring light source 9. The image processing module electrically connected to the industrial camera 8 receives image data from the camera, calculates the position coordinates and diameter size of the micro-well, compares the measured values with the preset standard, judges whether there is deviation, and generates a corresponding detection report.

[0027] The image processing module comprises a well position calculation unit for calculating the center coordinates of the micro-well according to the image collected by the industrial camera 8, a well diameter analysis unit comprising a circular measurement model, an elliptical measurement model and an irregular contour equivalent diameter measurement model, and capable of automatically switching to the appropriate measurement model according to the different shapes of the micro-well, an error comparison unit for real-time comparison of the measured well position coordinates and well diameter size with the preset tolerance range and outputting a deviation vector diagram, and an alarm unit for triggering sound and light alarm when the micro-well deviation exceeds the threshold value and generating a JSON format report containing the defect position code.

[0028] The well position calculation unit realizes accurate measurement of the position of the micro-well, ensuring the accuracy of the subsequent analysis. The well diameter analysis unit adapts to micro-well plates of different shapes and specifications, improving the flexibility and accuracy of detection, so that even non-standard shaped wells can be accurately measured. The error comparison unit provides intuitive error feedback, which is convenient for operators to quickly understand the specific situation of defects and take corresponding measures, and also provides a quantitative basis for quality control. The alarm unit timely reminds the operator to pay attention to potential quality problems, reducing the possibility of unqualified products flowing into the next process.

[0029] The horizontal transfer device comprises two linear motors 10 arranged in parallel, and the transfer table 2 is slidingly arranged on the two linear motors 10. Through the joint action of the two linear motors 10 arranged in parallel, the transfer table 2 with heavy load can be more stably carried and moved, while the stability and accuracy of the platform during high-speed movement are ensured.

[0030] The transverse transfer device comprises a linear motor 11 and a sliding table 12 slidingly arranged on the linear motor 11, and the mounting plate 6 is arranged on the sliding table 12.

[0031] The above embodiment only illustrates the principle and effect of the present application, and is not used to limit the present application. All equivalent modifications or changes completed by those skilled in the art without departing from the spirit and technical concept disclosed by the present application should be covered by the claims of the present application.

Claims

1. A semiconductor micro-hole detection device, comprising a workbench, a horizontal transfer device arranged on the workbench, and a visual detection device, characterized in that: The horizontal transfer device is provided with a transfer table, and a plurality of material placing tables for placing semiconductor micro-hole plates are arranged on the transfer table; the horizontal transfer device is used for transferring the semiconductor micro-hole plates on the material placing tables between a detection station and a feeding and discharging station; The visual detection device comprises support columns symmetrically arranged on both sides of the horizontal transfer device, a connecting plate connected to the two support columns and horizontally arranged above the horizontal transfer device, a horizontal transfer device arranged on the connecting plate, and a visual detection assembly arranged on the horizontal transfer device.

2. The semiconductor microcavity detection device of claim 1, wherein: The visual detection assembly comprises a mounting plate arranged on the horizontal transfer device, a mounting frame arranged on the mounting plate, an industrial camera arranged on the mounting frame, a ring-shaped light source arranged on the mounting frame and below the industrial camera, and an image processing module electrically connected to the industrial camera.

3. The semiconductor microcavity detection device of claim 2, wherein: The image processing module comprises, a hole position calculation unit configured to calculate micro-hole center coordinates according to images collected by the industrial camera; a hole diameter analysis unit comprising a circular measurement model, an elliptical measurement model, and an irregular contour equivalent diameter measurement model, and being capable of automatically switching to an appropriate measurement model according to different shapes of micro-holes; an error comparison unit configured to compare measured hole position coordinates and hole diameter sizes with a preset tolerance range in real time, and output a deviation vector diagram; an alarm unit configured to trigger sound and light alarms when micro-hole deviation exceeds a threshold value, and generate a JSON format report containing defect position codes.

4. The semiconductor microcavity detection device of claim 2, wherein: The horizontal transfer device comprises two linear motors arranged in parallel, and the transfer table is slidingly arranged on the two linear motors.

5. The semiconductor microcavity detection device of claim 2, wherein: The horizontal transfer device comprises a linear motor, and a sliding table slidingly arranged on the linear motor, and the mounting plate is arranged on the sliding table.

Images