Wafer box

Abstract

The utility model discloses a wafer box. The wafer box comprises a box body and a box cover. The box body is provided with an accommodating cavity for accommodating a wafer, and the box body is provided with a wafer inlet / outlet communicated with the accommodating cavity; the box body comprises a first side wall, a second side wall and a bottom wall, wherein the first side wall and the second side wall are located on the two opposite sides of the containing cavity, and the bottom wall is connected to the bottom of the first side wall and the bottom of the second side wall. A plurality of separation teeth are arranged in the box body, each separation tooth is arranged on the first side wall, the second side wall and the bottom wall, a continuous limiting groove is formed between every two adjacent separation teeth, and each continuous limiting groove is used for limiting one wafer; the height of the top ends of the separation teeth is larger than one half of the height of the containing cavity. The box cover can cover the wafer inlet and outlet. According to the wafer box, the wafers can be better separated, and the conditions of tooth skipping and dislocation of the wafers are prevented.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor, especially relate to a wafer box. BACKGROUND

[0002] In the semiconductor industry, wafer box is often used to carry wafers, for example, wafer box is used for transportation and delivery. In the related art, the wafer box has a separation tooth arranged on the opposite side wall to form an opposite limiting groove for accommodating the wafer. However, such wafer box often has the problem of wafer tooth jumping and mispositioning during wafer placement and transportation, which can cause damage to the wafer or the chip on the wafer and affect the product quality, posing a risk. SUMMARY

[0003] The purpose of the present application is to provide a wafer box, which comprises:

[0004] The box body has a receiving cavity for accommodating wafers, and the box body has a wafer inlet and outlet communicating with the receiving cavity; the box body comprises a first side wall and a second side wall located on opposite sides of the receiving cavity, and a bottom wall connected to the bottom of the first side wall and the bottom of the second side wall; a plurality of separation teeth are arranged in the box body, each separation tooth is arranged on the first side wall, the second side wall and the bottom wall, and a continuous limiting groove is formed between two adjacent separation teeth, and one continuous limiting groove is used for limiting one wafer; wherein the height of the top end of the separation tooth is greater than one half of the height of the receiving cavity;

[0005] The box cover can be covered on the wafer inlet and outlet.

[0006] In some embodiments, the inner surface of the box cover is a smooth wall.

[0007] In some embodiments, the height of the top end of the separation tooth is greater than or equal to two-thirds of the height of the receiving cavity.

[0008] In some embodiments, the width of the separation tooth is 1cm-3.5cm.

[0009] In some embodiments, the first side wall and the second side wall are oppositely arranged in the first direction, and the box body further comprises a third side wall and a fourth side wall oppositely arranged in the second direction, and the first side wall, the third side wall, the second side wall and the fourth side wall are sequentially connected and surrounded by the bottom wall to form the receiving cavity.

[0010] The third side wall has a first side edge away from the bottom wall, and the height of the first side edge gradually increases from the end connected to the first side wall and the second side wall to the middle of the first side edge.

[0011] The fourth side wall has a second side edge facing away from the bottom wall, and the height of the second side edge gradually increases from an end of the second side edge connected to the first side wall and the second side wall to a middle direction.

[0012] In some embodiments, the box cover is rotatably arranged on the box body.

[0013] In some embodiments, the box cover comprises a first cover body part and a second cover body part; the first cover body part is rotatably arranged on the first side wall, the second cover body part is rotatably arranged on the second side wall, and when the first cover body part and the second cover body part are closed on the wafer inlet and outlet, the first cover body part and the second cover body part are fixed by abutting through a limiting assembly.

[0014] In some embodiments, the limiting assembly comprises a slot arranged on the first cover body part, and a limiting rod arranged on the second cover body part and capable of cooperating with the slot; when the limiting rod moves into the slot, the first cover body part and the second cover body part are fixed by abutting, and when the limiting rod moves out of the slot, the first cover body part and the second cover body part can be rotated respectively.

[0015] In some embodiments, the first cover body part has a first wall surface opposite to the second cover body part, and the slot is arranged on the first wall surface.

[0016] The second cover body part has a second wall surface opposite to the first cover body part, and the limiting rod is arranged in the second cover body part and has an extended state and a retracted state; when the limiting rod is in the extended state, the limiting rod can be inserted into the slot to fix the first cover body part and the second cover body part by abutting, and when the limiting rod is in the retracted state, the limiting rod moves out of the slot.

[0017] In some embodiments, the second wall surface is provided with a first accommodating groove for accommodating the limiting rod, the second cover body part has an outer surface connected to the second wall surface, and the outer surface is provided with a second accommodating groove; the second accommodating groove is located on the side of the groove bottom of the first accommodating groove away from the second wall surface.

[0018] The groove bottom of the first accommodating groove has a through hole communicating the first accommodating groove and the second accommodating groove, the second accommodating groove is provided with a push-pull operation part, the limiting rod is arranged in the through hole and detachably connected with the push-pull operation part, and the push-pull operation part can drive the limiting rod to move.

[0019] In some embodiments, the limiting rod includes a first rod portion for engaging with the slot, and a second rod portion passing through the through hole and connected to the push-pull operation portion. The cross-sectional dimension of the first rod portion is larger than the dimension of the through hole, and an elastic recovery member is provided between the first rod portion and the bottom of the first receiving slot; and / or,

[0020] The push-pull operation part is provided with a threaded hole, and the limiting rod is provided with an external thread that mates with the threaded hole.

[0021] The main technical effects achieved by the embodiments of this application are:

[0022] In the wafer cassette provided in this application embodiment, each of the separating teeth is provided on the first sidewall, the second sidewall, and the bottom wall, and a continuous limiting groove is formed between two adjacent separating teeth. Furthermore, the height of the top of the separating tooth is greater than half the height of the receiving cavity, so that the separating teeth of the wafer cassette can better separate the wafer and prevent the occurrence of wafer skipping and misalignment.

[0023] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and are not intended to limit this specification. Attached Figure Description

[0024] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this specification and, together with the description, serve to explain the principles of this specification.

[0025] Figure 1 A three-dimensional structural schematic diagram of a wafer cassette provided as an example of this application;

[0026] Figure 2 A front view of a wafer cassette provided as an example of this application;

[0027] Figure 3 A three-dimensional structural schematic diagram of a wafer cassette provided as an example of this application;

[0028] Figure 4 A partial three-dimensional structural diagram of a wafer cassette provided for an example embodiment of this application;

[0029] Figure 5 A side perspective view of a partial structure of a wafer cassette provided as an example of this application;

[0030] Figure 6 For along Figure 5 The sectional view obtained by section line AA shown.

[0031] Figure 7 for Figure 6 An enlarged view of point B is shown below;

[0032] Figure 8 An assembly diagram of a limiting rod and a push-pull operation part according to an embodiment of the present application is shown in the figure;

[0033] Figure 9 A perspective view of a second cover part according to an embodiment of the present application is shown in the figure;

[0034] Figure 10 A perspective view of a first cover part according to an embodiment of the present application is shown in the figure;

[0035] Figure 11 A perspective view of a connecting shaft according to an embodiment of the present application is shown in the figure. DETAILED DESCRIPTION

[0036] The technical solutions in the embodiments (or, “modes of implementation”) of the present application will be described clearly and completely with reference to the accompanying drawings. When the following description refers to the accompanying drawings, the same numbers in different drawings represent the same or similar elements unless otherwise indicated.

[0037] If the embodiments of the present application involve directional indications or positional relationships (for example, up, down, left, right, front, back, inner, outer, top, bottom, center, vertical, horizontal, longitudinal, transverse, length, width, counterclockwise, clockwise, axial, radial, circumferential, etc.), such terms are only used to explain the relative positional relationships, movement conditions, etc. between components in a certain posture; if the certain posture changes, the directional indications or positional relationships also change accordingly. In addition, the terms “first”, “second”, etc. in the embodiments of the present application are only used for convenience of description, and cannot be understood as indicating or implying relative importance.

[0038] The technical solutions in the embodiments of the present application will be described clearly and completely with reference to the accompanying drawings. When the following description refers to the accompanying drawings, the same numbers in different drawings represent the same or similar elements unless otherwise indicated. Figures 1 to 11 Some embodiments of the present application will be described in detail. The following embodiments and features in the embodiments can be combined with each other without conflict.

[0039] Please refer to Figure 1 and, if necessary, in combination with Figures 2 to 11 shown, the present application provides a wafer box 100. The wafer box 100 includes a box body 10 and a box cover 20.

[0040] The box 10 has a receiving cavity 101 for accommodating a wafer, and the box 10 has a wafer inlet and outlet 1001 communicating with the receiving cavity 101. The box 10 includes a first side wall 11 and a second side wall 12 located on opposite sides of the receiving cavity 101, and a bottom wall 15 connected to the bottom of the first side wall 11 and the bottom of the second side wall 12. A plurality of partition teeth 16 are arranged in the box 10, and each partition tooth 16 is arranged on the first side wall 11, the second side wall 12 and the bottom wall 15. The same partition tooth 16 is arranged on the first side wall 11, the bottom wall 15 and the second side wall 12 in sequence. Thus, a continuous limiting groove 1010 is formed between two adjacent partition teeth 16, and the continuous limiting groove 1010 is used for limiting a wafer. As shown in Figure 6

[0041] The box cover 20 can be covered on the wafer inlet and outlet 1001 to block the wafer inlet and outlet 1001 when the receiving cavity 101 contains a wafer, so as to prevent the wafer from moving out of the wafer box. It can be understood that the box cover 20 can also be opened to enable the wafer to enter and exit the wafer box 100.

[0042] In the above wafer box 100, each partition tooth 16 is arranged on the first side wall 11, the second side wall 12 and the bottom wall 15, and a continuous limiting groove 1010 is formed between two adjacent partition teeth 16, and the height of the top end of the partition tooth 16 is greater than one half of the height of the receiving cavity 101, so that the partition teeth 16 of the wafer box can better separate the wafers and prevent the occurrence of wafer tooth skipping and mispositioning.

[0043] As shown in Figure 2 , the first side wall 11 and the second side wall 12 are oppositely arranged in the first direction y. The box 10 further includes a third side wall 13 and a fourth side wall 14 oppositely arranged in the second direction y. The first side wall 11, the third side wall 13, the second side wall 12, the fourth side wall 14 are sequentially connected and surrounded by the bottom wall 15 to form the receiving cavity 101 inside.

[0044] The wafer inlet and outlet 1001 is located at one end of the box 10 away from the bottom wall 15. The wafer inlet and outlet 1001 and the bottom wall 15 are opposite in the third direction z.

[0045] The first direction y, the second direction x and the third direction z can be perpendicular to each other, or have other angles between each other which are not zero.

[0046] It can be understood that the partition teeth 16 close to the third side wall 13 can also form a limiting groove with the third side wall 13, and the partition teeth close to the fourth side wall 14 can also form a limiting groove with the fourth side wall 14.​

[0047] The top end of the partition tooth 16 refers to the end of the partition tooth 16 away from the bottom wall 15.

[0048] It should be noted that the wafer is generally fixed by a wafer fixing ring (such as an iron ring) for transfer and transportation. A layer of wafer adhesive film is fixed on the wafer fixing ring, and the wafer is attached to the wafer adhesive film and located in the ring of the wafer fixing ring without overlapping with the wafer fixing ring in the first direction. Each limiting groove 1010 is fixed by clamping one wafer fixing ring to fix the corresponding wafer. When clamped in the limiting groove 1010 by the wafer fixing ring, the thickness direction of the wafer is basically consistent with the first direction. When clamped in the limiting groove 1010 by the wafer fixing ring, the wafer and the partition tooth 16 are not overlapped in the first direction.

[0049] In some embodiments, the third side wall 13 has a first side edge 131 away from the bottom wall 15, and the height of the first side edge 131 gradually increases from the end connected to the first side wall 11 and the second side wall 12 to the middle of the first side edge 131.

[0050] The fourth side wall 14 has a second side edge 141 away from the bottom wall 15, and the height of the second side edge 141 gradually increases from the end connected to the first side wall 11 and the second side wall 12 to the middle of the second side edge 141.

[0051] In this way, the third side wall 13 and the fourth side wall 14 can protect the wafers in the accommodating cavity 101, reduce damage to the wafers, and especially protect the two wafers close to the third side wall 13 and the fourth side wall 14.

[0052] In combination Figures 2 to 4 As shown, in some embodiments, the first side edge 131 is in the shape of an arc protruding towards the side away from the bottom wall 15. The first side edge 131 is in the shape of an arc protruding towards the side away from the bottom wall 15. The arc shape of the first side edge 131 and the second side edge 141 can be adapted to the profile of the wafer or the wafer fixing ring to better protect the wafer.

[0053] Correspondingly, the inner surface of the box cover 20 can be an arc-shaped wall surface adapted to the first side edge 131 and the second side edge 141. That is, the surface of the box cover 20 on the side facing the accommodating cavity 101 when the box cover 20 is covered on the box body 10 can be an arc-shaped wall surface adapted to the first side edge 131 and the second side edge 141.

[0054] In some embodiments, the width of the same partition tooth in the direction from the top end of the first side wall 11 to the top end of the second side wall 12 is the same in different regions, such as Figure 6The width of the same separation tooth in the direction from the top end of the first side wall 11 to the top end of the second side wall 12 can be different in different regions in some other embodiments.

[0055] The shape of the separation tooth can be set according to specific conditions.

[0056] In some embodiments, the width d of the separation tooth 16 is 1cm-3.5cm. For example, 1cm, 1.5cm, 2.0cm, 2.5cm, 3.0cm, 3.2cm, 3.5cm, etc. In this way, the separation tooth 16 is set to be wider to better separate and fix the wafer.

[0057] The width of the separation tooth 16 in the present application can match the radial dimension of the wafer fixing ring. When the wafer fixing ring is clamped in the limiting groove 1010, the orthographic projection of the wafer fixing ring in the first direction can completely fall into the orthographic projection of the separation tooth 16 in the first direction, so as to ensure that the wafer does not appear to be out of step. Correspondingly, the corresponding wafer can be matched with the separation tooth 16.

[0058] In some embodiments, the height H2 of the top end of the separation tooth 16 is greater than or equal to two-thirds of the height of the accommodating cavity, so as to better separate the wafer.

[0059] It should be noted that in some other embodiments, the height of the top end of the separation tooth can also be between one-half and two-thirds of the height of the accommodating cavity.

[0060] In some embodiments, the top end of the separation tooth 16 can be consistent with the top end of the corresponding side wall.

[0061] It can be understood that the height of the box body 10 is greater than one-half of the height of the entire wafer box 100. For example, the height of the box body 10 is greater than or equal to two-thirds of the height of the entire wafer box 100. For the first side edge 131 and the second side edge 141 protruding in the middle, the height of the first side edge 131 and the second side edge 141 can reach close to the height of the entire wafer box.

[0062] In some embodiments, the inner surface of the box cover 20 is a smooth wall. That is, the inner surface of the box cover 20 is not provided with a separation tooth. Compared with the way of providing a separation tooth on the box cover, the inner surface of the box cover 20 is a smooth wall, which can quickly close the box cover 20 to fix the wafer fixing ring, without considering the alignment of the separation tooth on the box cover with the corresponding wafer, preventing the separation tooth on the wafer carrier from being out of position or out of step, and facilitating the manufacture of the box cover 20.

[0063] It can be seen that the wafer box 100 provided by the application can be quickly closed while ensuring the stable separation of wafers, because the height h of the top end of the separation tooth 16 is greater than half of the height H of the accommodating cavity 101, and the inner surface of the box cover 20 is provided as a smooth wall surface.

[0064] In some embodiments, the box cover 20 is rotatably arranged on the box body 10.

[0065] In some embodiments, the box cover 20 comprises a first cover body part 21 and a second cover body part 22. The first cover body part 21 is rotatably arranged on the first side wall 11. The second cover body part 22 is rotatably arranged on the second side wall 12, and when the first cover body part 21 and the second cover body part 22 are closed on the wafer inlet and outlet 1001, the first cover body part 21 and the second cover body part 22 are fixed by the limiting assembly to make the box cover 20 capable of being integrally closed on the wafer inlet and outlet 1001.

[0066] In combination Figure 2 As shown, the first cover body part 21 is rotatably arranged on the top of the first side wall 11 through a rotating shaft 40. The second cover body part 22 is rotatably arranged on the top of the second side wall 12 through the rotating shaft 40.

[0067] In some embodiments, the inner surface 212 of the first cover body part 21 and the inner surface 223 of the second cover body part are both smooth wall surfaces.

[0068] It should be noted that in other embodiments, the box cover can also be an integral rotatable part arranged on one side wall and fixed by a corresponding limiting assembly.

[0069] The limiting assembly comprises a limiting structure arranged on the first cover body part 21 and a cooperating limiting structure arranged on the second cover body part 22. In some embodiments, the limiting structure of the first cover body part 21 and the cooperating limiting structure of the second cover body part 22 are both a groove structure, and the other is a cooperating rod structure. In other embodiments, the limiting structure of the first cover body part and the cooperating limiting structure of the second cover body part can also adopt a buckle cooperation structure or other cooperating limiting structure.

[0070] In combination Figure 6In some embodiments, the limiting assembly includes a slot 201 provided on the first cover part 21 and a limiting rod 31 provided on the second cover part 22 and capable of cooperating with the slot 201. When the limiting rod 31 moves into the slot 201, the first cover part 21 and the second cover part 22 are fixed in abutment, and when the limiting rod 31 moves out of the slot 201, the first cover part 21 and the second cover part 22 are not fixed in abutment and can rotate respectively to open the box cover 20, so that the wafer can be taken in and out of the accommodating cavity 101 through the wafer inlet and outlet 1001.

[0071] In some embodiments, the first cover part 21 has a first wall surface 211 opposite to the second cover part 22, and the slot 201 is provided on the first wall surface 211.

[0072] The second cover part 22 has a second wall surface 221 opposite to the first cover part 21. The limiting rod 31 is provided on the second cover part 22 and has an extended state and a retracted state. When the limiting rod 31 is in the extended state, the limiting rod 31 can be inserted into the slot 201 to fix the first cover part 21 and the second cover part 22 in abutment, and when the limiting rod 31 is in the retracted state, the limiting rod 31 moves out of the slot 201.

[0073] In some embodiments, the second wall surface 221 is provided with a first accommodating groove 202 for accommodating the limiting rod 31, and the second cover part 22 has an outer surface 222 connected with the second wall surface 221, the outer surface 222 is provided with a second accommodating groove 203, and the second accommodating groove 203 is located on the side of the groove bottom of the first accommodating groove 202 away from the second wall surface 221.

[0074] The groove bottom of the first accommodating groove 202 has a through hole 204 communicating the first accommodating groove 202 and the second accommodating groove 203, the second accommodating groove 203 is provided with a push-pull operation part 32, the limiting rod 31 is provided in the through hole 204 and detachably connected with the push-pull operation part, and the push-pull operation part 32 can drive the limiting rod 31 to move.

[0075] The push-pull operation part 32 is a push-pull slider capable of moving in the second accommodating groove 203. The operator can control the movement of the limiting rod 31 by pushing and pulling the push-pull operation part 32.

[0076] The size of the push-pull operation part 32 is greater than the size of the through hole 204, so that the first accommodating groove 202 can limit the push-pull operation part 32, and the push-pull operation part 32 cannot move to one side of the first accommodating groove 202 through the through hole 204.

[0077] In some embodiments, the limiting rod 31 comprises a first rod portion 312 for cooperating with the insertion slot 201, and a second rod portion 311 for being connected with the push-pull operation portion 32 by penetrating the through hole 204. The cross-sectional dimension of the first rod portion 312 is greater than that of the second rod portion 311. The cross-sectional dimension of the first rod portion 312 is smaller than the dimension of the through hole 204, so as to be penetrated in the through hole 204. The cross-sectional dimension of the first rod portion 312 is greater than the dimension of the through hole 204, so as to enable the bottom of the first accommodating slot 202 to limit the movement of the limiting rod 31 towards the side of the second accommodating slot 203.

[0078] In some embodiments, an elastic restoring member 33 is arranged between the first rod portion 312 and the bottom of the first accommodating slot 202. The elastic restoring member 33 can provide an elastic restoring force to the first rod portion 312 away from the side of the bottom of the first accommodating slot 202, so as to enable the limiting rod 31 to be naturally in the extended state, so as to enable the first cover portion 21 and the second cover portion 22 to be abutted and fixed without artificial external force.

[0079] The elastic restoring member 33 can be a compression spring.

[0080] In some embodiments, the push-pull operation portion 32 is provided with a threaded hole 321, and the limiting rod 31 is provided with an external thread for cooperating with the threaded hole 321. The threaded hole 321 is provided with an internal thread, and the external thread of the limiting rod 31 can be adapted to the internal thread.

[0081] Of course, in other embodiments, the push-pull operation portion and the limiting rod can also be detachably connected by other connection manners. In addition, the outer surface of the second cover portion can also not be provided with the second accommodating slot, and the push-pull operation portion can be directly arranged on the outer surface of the second cover portion. The insertion slot and the limiting rod can also be correspondingly arranged by other arrangement manners.

[0082] In some embodiments, the bottom wall 15 of the box body 10 is further provided with a supporting foot pad 17.

[0083] It should be noted that the technical solutions or technical features described in the above embodiments can be combined or supplemented with each other without conflict, and the scope of protection of the present application is not limited to the precise structures described in the above embodiments and shown in the accompanying drawings; any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application shall be included in the scope of protection of the present application.

Claims

1. A wafer cassette, characterized in that, The wafer cassette includes: The housing has a receiving cavity for accommodating a wafer, and a wafer inlet / outlet communicating with the receiving cavity. The housing includes a first sidewall, a second sidewall located on opposite sides of the receiving cavity, and a bottom wall connected to the bottom of the first sidewall and the bottom of the second sidewall. The housing contains a plurality of separating teeth, each of which is located on the first sidewall, the second sidewall, and the bottom wall. A continuous limiting groove is formed between two adjacent separating teeth, and this continuous limiting groove is used to limit the position of a wafer. The height of the tip of each separating tooth is greater than half the height of the receiving cavity. The lid is capable of covering the wafer inlet and outlet.

2. The wafer cassette as described in claim 1, characterized in that, The inner surface of the lid is a smooth wall.

3. The wafer cassette as described in claim 1, characterized in that, The height of the tip of the dividing tooth is greater than or equal to two-thirds of the height of the receiving cavity.

4. The wafer cassette as described in claim 1, characterized in that, The width of the dividing teeth is 1cm to 3.5cm.

5. The wafer cassette as described in claim 1, characterized in that, The first sidewall and the second sidewall are arranged opposite to each other in a first direction. The box body also includes a third sidewall and a fourth sidewall arranged opposite to each other in a second direction. The first sidewall, the third sidewall, the second sidewall and the fourth sidewall are connected in sequence and enclose the bottom wall to form the receiving cavity. The third sidewall has a first side that is away from the bottom wall, and the height of the first side gradually increases from the end of the first sidewall that connects to the first sidewall and the second sidewall toward the middle. The fourth sidewall has a second side facing away from the bottom wall, and the height of the second sidewall gradually increases from the end of the second sidewall that connects to the first sidewall and the second sidewall toward the middle.

6. The wafer cassette as claimed in claim 1, characterized in that, The lid is rotatably mounted on the box body.

7. The wafer cassette as described in claim 1, characterized in that, The cover includes a first cover portion and a second cover portion; the first cover portion is rotatably disposed on the first side wall, and the second cover portion is rotatably disposed on the second side wall. When the first cover portion and the second cover portion are closed on the wafer inlet and outlet, the first cover portion and the second cover portion are fixedly connected by a limiting component.

8. The wafer cassette as described in claim 7, characterized in that, The limiting component includes a slot disposed in the first cover portion and a limiting rod disposed in the second cover portion and capable of engaging with the slot; the first cover portion has a first wall surface opposite to the second cover portion, and the slot is disposed in the first wall surface; The second cover portion has a second wall surface opposite to the first cover portion. The limiting rod passes through the second cover portion and has an extended state and a retracted state. When the limiting rod is in the extended state, the limiting rod can be inserted into the slot so that the first cover portion and the second cover portion are docked and fixed. When the limiting rod is in the retracted state, the limiting rod moves out of the slot, and the first cover portion and the second cover portion can rotate respectively.

9. The wafer cassette as described in claim 8, characterized in that, The second wall surface is provided with a first receiving groove for accommodating the limiting rod, and the second cover part has an outer surface connected to the second wall surface. The outer surface is provided with a second receiving groove, and the second receiving groove is located on the side of the bottom of the first receiving groove away from the second wall surface. The bottom of the first receiving groove has a through hole connecting the first receiving groove and the second receiving groove. The second receiving groove is provided with a push-pull operation part. The limiting rod passes through the through hole and is detachably connected to the push-pull operation part. The push-pull operation part can drive the limiting rod to move.

10. The wafer cassette as claimed in claim 9, characterized in that, The limiting rod includes a first rod portion for engaging with the slot, and a second rod portion passing through the through hole and connected to the push-pull operation part. The cross-sectional dimension of the first rod portion is larger than the dimension of the through hole, and an elastic recovery member is provided between the first rod portion and the bottom of the first receiving slot; and / or, The push-pull operation part is provided with a threaded hole, and the limiting rod is provided with an external thread that mates with the threaded hole.

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