Emptying and purifying mechanism for poisonous gas exhausted by semiconductor equipment

Abstract

The utility model relates to the technical field of poisonous gas emptying and purifying mechanisms, in particular to an emptying and purifying mechanism for poisonous gas exhausted by semiconductor equipment. According to the technical scheme, the device comprises a collecting box, a filtering layer is arranged in the collecting box, two screw rods are rotationally arranged between the inner walls of the front side and the rear side of the collecting box, and the outer ring of the middle end of each screw rod is in threaded connection with a cleaning brush. By arranging the filter layer to the first motor, collected gas can be preliminarily filtered, large-particle solid pollutants are removed, the follow-up purification process is prevented from being influenced, self-cleaning of the filter layer is facilitated, the phenomenon that the gas inlet effect and the filter effect are influenced due to blockage is prevented, and the catalytic effect is improved by arranging the catalytic box to the catalyst stirring paddle. The gas can be conveniently heated to a high temperature, harmful gas can be oxidized into harmless substances such as water and carbon dioxide under the action of a catalyst, the gas can be fully stirred through rotation of a catalyst stirring paddle, and the catalysis efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to toxic gas emptying purification mechanism technical field especially relates to semiconductor equipment discharged toxic gas emptying purification mechanism. BACKGROUND

[0002] Semiconductor equipment may discharge some toxic or harmful gases such as nitride, fluoride, volatile organic compounds during production process. If these gases are not effectively purified, they may cause harm to the environment and human health;

[0003] In order to handle the toxic gas discharged by semiconductor equipment, the generated waste gas needs to be collected first, and the waste gas will usually pass through a preliminary filtration system before entering the purification device to remove large-particle solid pollutants, preventing affecting the subsequent purification process. However, the filtration system may be clogged after long-term use, affecting the collection effect, and during the purification process, the gas needs to be heated to a high temperature and oxidized to harmless substances under the action of a catalyst. However, the gas density may cause gas accumulation, affecting the efficiency of catalysis. Therefore, a semiconductor equipment discharged toxic gas emptying purification mechanism is needed. SUMMARY

[0004] The utility model aims at the problems in the background art and proposes a semiconductor equipment discharged toxic gas emptying purification mechanism.

[0005] The technical scheme of the utility model is a semiconductor equipment discharged toxic gas emptying purification mechanism, which includes a collection box, a filter layer is arranged inside the collection box, two screw rods are rotatably arranged between the inner walls of the front and rear sides of the collection box, a cleaning brush is threadedly connected to the outer circle of the middle end of each screw rod, a gear is arranged on the outer circle of the front end of each screw rod and extends through to the front side of the collection box, an L-shaped mounting plate is arranged on the front side of the collection box, a motor one is arranged on the front side of the L-shaped mounting plate, the output end of the motor one is fixedly connected to the front end of one screw rod on the upper side, a conveying pipe is arranged on the left side of the collection box, a catalytic box is arranged on the left end of the conveying pipe, a heating layer is arranged between the inner and outer walls of the catalytic box, a motor two is arranged on the top surface of the catalytic box, the output end of the motor two extends through to the inside of the catalytic box and is provided with a stirring shaft, and a plurality of catalyst stirring paddles are arranged on the outer circle of the stirring shaft.

[0006] Preferably, an air inlet hole is formed on the top surface of the collection box, and an air inlet pipe is arranged on the top surface of the collection box corresponding to the position of the air inlet hole.

[0007] Preferably, the sides of the two cleaning brushes close to each other are respectively attached to the top surface and the bottom surface of the filter layer.

[0008] Preferably, two guide rods are arranged between the inner walls of the front and back of the collecting box, and each of the guide rods is in sliding connection with a corresponding cleaning brush.

[0009] Preferably, the two gears are in meshing arrangement.

[0010] Preferably, the right end of the conveying pipe is in communication with the interior of the collecting box, and the left end of the conveying pipe is in communication with the interior of the catalytic box.

[0011] Preferably, the bottom end of the stirring shaft is in rotational connection with the bottom surface of the catalytic box.

[0012] Preferably, the catalyst stirring paddle is made of metal or metal oxide.

[0013] Preferably, the bottom surface of the catalytic box is provided with a discharge pipe, and the top end of the discharge pipe is provided with an electronic valve.

[0014] Compared with the prior art, the utility model has the beneficial technical effects that:

[0015] The utility model discloses a filter layer to motor one is arranged, not only can the gas of collection carries out primary filtration, removes the solid contaminant of big particle, prevents the influence subsequent purification process, still convenient for to filter layer carries out self -cleaning, prevents the effect and the filtration effect of plugging influence air inlet, through setting up catalytic box to catalyst stirring paddle, convenient through heating gas to high temperature to harmful gas oxidation as harmless substance under the action of catalyst, such as water and carbon dioxide, and through the rotation of catalyst stirring paddle can the gas carries out fully stirring, improves the efficiency of catalysis. BRIEF DESCRIPTION OF DRAWINGS

[0016] Fig. 1 It is whole structure schematic view of the utility model;

[0017] Fig. 2 It is cross section structure schematic view of the utility model;

[0018] Fig. 3 It is part area structure schematic view in the utility model.

[0019] Fig. 1 is the collecting box;2, filter layer;3, screw;4, cleaning brush;5, gear;6, L type mounting plate;7, motor one;8, conveying pipe;9, catalytic box;10, heating layer;11, motor two;12, stirring shaft;13, catalyst stirring paddle;14, air inlet pipe;15, guide rod;16, discharge pipe;17, electronic valve. DETAILED DESCRIPTION

[0020] The technical scheme of the utility model is further explained below in combination with the drawings and specific embodiments. EMBODIMENT

[0021] As Figs. 1 to 3 shown, the utility model discloses a semiconductor equipment exhausts toxic gas emptying purifying mechanism, including collection box 1, the top surface of collection box 1 is equipped with inlet hole, the top surface of collection box 1 is provided with inlet pipe 14 at the position corresponding inlet hole, collection box 1 is fixedly connected with inlet pipe 14, the inside of collection box 1 is provided with filter layer 2, filter layer 2 is fixedly installed in the inside of collection box 1, two screw rods 3 are rotatably arranged between the front and rear two side inner walls of collection box 1, the outer circle of the middle end of each screw rod 3 is all threadedly connected with cleaning brush 4, two guide rods 15 are arranged between the front and rear two side inner walls of collection box 1, guide rod 15 is fixedly installed in the inside of collection box 1, and each guide rod 15 is slidably connected with the corresponding cleaning brush 4, the running track of cleaning brush 4 can be guided and limited through guide rod 15, and cleaning brush 4 moves back and forth along screw rod 3 by rotating screw rod 3, and the side of two cleaning brushes 4 close to each other is respectively attached to the top surface and bottom surface of filter layer 2, and the top surface and bottom surface of filter layer 2 are cleaned through the back and forth movement of cleaning brush 4;

[0022] The outer circle of each screw rod 3 extends to the front side of collection box 1 and is provided with gear 5, the outer circle of screw rod 3 is fixedly connected with the inner circle of gear 5, two gears 5 are meshingly arranged, the front side of collection box 1 is provided with L-shaped mounting plate 6, the front side of collection box 1 is fixedly connected with the rear side of L-shaped mounting plate 6, the front side of L-shaped mounting plate 6 is provided with motor one 7, the front side of L-shaped mounting plate 6 is fixedly connected with the rear side of motor one 7, the output end of motor one 7 is fixedly connected with the front end of one screw rod 3 on the upside, screw rod 3 can be driven to rotate through the output end of motor one 7, the rotation of screw rod 3 can drive gear 5 to rotate, the rotation of gear 5 can drive the other gear 5 to rotate simultaneously, and then two screw rods 3 can rotate simultaneously, so that cleaning brush 4 cleans filter layer 2, the left side of collection box 1 is provided with conveying pipe 8, the left side of collection box 1 is fixedly connected with the right side of conveying pipe 8, the left end of conveying pipe 8 is provided with catalytic tank 9, and the left end of conveying pipe 8 is fixedly connected with the right side of catalytic tank 9;

[0023] The right end of the conveying pipe 8 is connected with the inside of the collecting box 1, the left end of the conveying pipe 8 is connected with the inside of the catalytic box 9, the heating layer 10 is arranged between the inner wall and the outer wall of the catalytic box 9, the heating layer 10 is fixedly installed between the inner wall and the outer wall of the catalytic box 9, the catalytic efficiency can be improved through the heating of the heating layer 10, the motor two 11 is arranged on the top surface of the catalytic box 9, the top surface of the catalytic box 9 is fixedly connected with the bottom surface of the motor two 11, the output end of the motor two 11 extends to the inside of the catalytic box 9 and is provided with the stirring shaft 12, the output end of the motor two 11 is rotatably connected with the top surface of the catalytic box 9, the output end of the motor two 11 is fixedly connected with the top end of the stirring shaft 12, the bottom end of the stirring shaft 12 is rotatably connected with the bottom surface of the inside of the catalytic box 9, the rotation of the stirring shaft 12 is more stable, a plurality of catalyst stirring paddles 13 are arranged on the outer circle of the stirring shaft 12, the stirring shaft 12 is fixedly connected with the catalyst stirring paddles 13, the catalyst stirring paddles 13 are made of metal or metal oxide;

[0024] The output end of the motor two 11 can drive the stirring shaft 12 to rotate, the rotation of the stirring shaft 12 can drive the catalyst stirring paddles 13 to rotate, the rotation of the catalyst stirring paddles 13 can stir the gas, so that the gas is fully contacted with the surface of the catalyst stirring paddles 13, the catalyst is usually made of metal or metal oxide, such as platinum, palladium, rhodium, copper, cobalt and the like, which can effectively adsorb harmful molecules in the gas and activate these molecules, under the action of the catalyst, the harmful gas in the exhaust gas is oxidized and converted into harmless products, such as carbon dioxide, water and oxygen, etc., which are usually harmless to the environment, so they can be safely discharged into the atmosphere, the bottom surface of the catalytic box 9 is provided with the discharge pipe 16, the bottom surface of the catalytic box 9 is fixedly connected with the top end of the discharge pipe 16, the top end of the discharge pipe 16 is provided with the electronic valve 17, through the electronic valve 17, the gas and water in the inside of the catalytic box 9 can be discharged.

[0025] In this embodiment, when the device is used, first, the toxic gas discharged by the semiconductor is collected into the inside of the collecting box 1 through the gas inlet pipe 14, and part of the solid waste particles is intercepted by the filter layer 2, when the filter layer 2 needs to be cleaned, the motor 1 7 needs to be operated, the rotation of the screw rod 3 can drive the gear 5 to rotate, the rotation of the gear 5 can drive the other gear 5 to rotate at the same time, the rotation of the gear 5 can drive the two screw rods 3 to rotate at the same time, and then the two cleaning brushes 4 move along the screw rod 3, so as to clean the filter layer 2, the gas filtered by the filter layer 2 is conveyed to the inside of the catalytic tank 9 through the conveying pipe 8, the heating of the heating layer 10 improves the catalytic efficiency, and the rotation of the stirring shaft 12 driven by the motor 2 11 drives the catalyst stirring paddle 13 to rotate, so that the gas in the catalytic tank 9 can be fully stirred, the gas fully contacts with the catalyst stirring paddle 13, the efficiency of the catalysis is improved, the harmful gas is converted into harmless substances, and is discharged through the discharge pipe 16.

[0026] The above specific embodiments are only preferred embodiments of the present application, and based on the technical scheme of the present application and the related inspiration of the above embodiments, those skilled in the art can make various alternative improvements and combinations on the above specific embodiments.

Claims

1. A mechanism for evacuating and purifying toxic gases emitted from a semiconductor device, comprising a collection tank (1), characterized in that: The inside of the collecting box (1) is provided with a filter layer (2), the front and back two sides of the collecting box (1) are rotatably provided with two screw rods (3), the outer circle of the middle end of each screw rod (3) is threadedly connected with a cleaning brush (4), the outer circle of the front end of each screw rod (3) extends to the front side of the collecting box (1) and is provided with a gear (5), the front side of the collecting box (1) is provided with an L-shaped mounting plate (6), the front side of the L-shaped mounting plate (6) is provided with a motor one (7), the output end of the motor one (7) is fixedly connected with the front end of one screw rod (3) on the upper side, the left side of the collecting box (1) is provided with a conveying pipe (8), the left end of the conveying pipe (8) is provided with a catalytic box (9), the inside and outside walls of the catalytic box (9) are provided with a heating layer (10), the top surface of the catalytic box (9) is provided with a motor two (11), the output end of the motor two (11) extends to the inside of the catalytic box (9) and is provided with a stirring shaft (12), the outer circle of the stirring shaft (12) is provided with a plurality of catalyst stirring paddles (13).

2. The semiconductor device toxic gas exhaust purging mechanism according to claim 1, wherein The top surface of the collecting box (1) is provided with an air inlet hole, and the top surface of the collecting box (1) is provided with an air inlet pipe (14) corresponding to the position of the air inlet hole.

3. The semiconductor device toxic gas exhaust purging mechanism according to claim 1, wherein The side of each of the two cleaning brushes (4) close to each other is respectively attached to the top surface and the bottom surface of the filter layer (2).

4. The semiconductor device toxic gas exhaust purging mechanism according to Claim 1, wherein The front and back two sides of the collecting box (1) are provided with two guide rods (15), and each guide rod (15) is slidably connected with a corresponding cleaning brush (4).

5. The semiconductor device toxic gas exhaust purging mechanism according to Claim 1, wherein The two gears (5) are meshingly arranged.

6. The semiconductor device toxic gas exhaust purging mechanism according to claim 1, wherein The right end of the conveying pipe (8) is connected with the inside of the collecting box (1), and the left end of the conveying pipe (8) is connected with the inside of the catalytic box (9).

7. The semiconductor device toxic gas exhaust purging mechanism according to claim 1, wherein The bottom end of the stirring shaft (12) is rotatably connected with the inside bottom surface of the catalytic box (9).

8. The semiconductor device toxic gas exhaust purging mechanism according to claim 1, wherein The catalyst stirring paddles (13) are made of metal or metal oxide.

9. The semiconductor device toxic gas exhaust purging mechanism according to Claim 1, wherein The bottom surface of the catalytic box (9) is provided with a discharge pipe (16), and the top end of the discharge pipe (16) is provided with an electronic valve (17).

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