Cleaning brush cover plate module

Abstract

The utility model provides a cleaning brush cover plate module which comprises a cleaning brush base, a cleaning brush and a cleaning brush cover plate, the cleaning brush base comprises a middle groove part and an edge extension part, the middle groove part is used for containing the cleaning brush, the edge extension part is located on the periphery of the middle groove part, and an electromagnetic device is arranged on the edge extension part; the cleaning brush cover plate is used for covering the cleaning brush base and comprises an inner side face and an outer side face, the inner side face is provided with metal conductors with the same number as the electromagnetic devices, when the cleaning brush cover plate covers the cleaning brush base, the inner side face faces the cleaning brush base, and at the moment, the positions of the metal conductors are matched with the positions of the electromagnets. According to the cleaning brush cover plate module, the problem that the existing cleaning brush cover plate module is easy to cause wafer fragments is solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a cleaning brush cover plate module. BACKGROUND

[0002] The cleaning brush module comprises a base, a cleaning brush and a cover plate covering the base, the cleaning brush is arranged in the base, and the cover plate covers the base to cover the cleaning brush. Currently, the cover plate has four long screw handles, and the cover plate and the base are fixed by using the long screw handles. When the cleaning brush needs to be replaced, the four long screw handles are loosened, so that the cover plate and the base are separated, which facilitates the replacement of the cleaning brush. However, long-term tightening and loosening of the long screw handle can cause the screw to be damaged and fall off, resulting in that the cover plate cannot be tightly connected with the base, thereby causing the machine to alarm.

[0003] In addition, when the wafer is cleaned, the running beam carries the wafer through different cleaning brush modules to clean the wafer, and different acidic chemical liquids are used in the whole cleaning brush cavity according to different processes. When the wafer passes above the long screw handle (at this time, the cover plate covers the base, and the handle is exposed in the cavity), the chemical liquid on the wafer drops on the long screw handle, and the chemical liquid dropped on the long screw handle will produce crystallization chemical reaction in special environment. When the long screw handle is tightened after the cleaning brush is replaced, it is difficult to tighten in place due to the existence of crystallization on the long screw handle, causing the long screw to protrude. At this time, if the running beam carries the wafer to move above the cover plate, the wafer will be broken due to collision with the long screw handle. UTILITY MODEL CONTENTS

[0004] In view of the above-mentioned defects of the prior art, the purpose of the utility model is to provide a cleaning brush cover plate module for solving the problem that the existing cleaning brush cover plate module is easy to cause wafer fragments.

[0005] To achieve the above-mentioned purpose and other related purposes, the utility model provides a cleaning brush cover plate module, which comprises a cleaning brush base, a cleaning brush and a cleaning brush cover plate.

[0006] The cleaning brush base comprises a middle groove part and an edge extension part, the middle groove part is used for placing the cleaning brush, the edge extension part is located around the middle groove part, and an electromagnetic device is arranged on the edge extension part;

[0007] The cleaning brush cover plate is used to cover the cleaning brush base, and includes an inner side and an outer side, the inner side is provided with the same number of metal conductors as the electromagnetic device, and when the cleaning brush cover plate covers the cleaning brush base, the inner side faces the cleaning brush base, at this time, the positions of the metal conductors coincide with the positions of the electromagnetic device;

[0008] Wherein, when the cleaning brush needs to be replaced, the cleaning machine is powered off, the metal conductors are separated from the electromagnetic device, after the cleaning brush is replaced, the cleaning machine is powered on, the magnetism of the electromagnetic device appears, and is firmly fixed with the metal conductors.

[0009] Optionally, the electromagnetic device includes an electromagnet, an electromagnetic chuck or a combination of a permanent magnet and a mechanical locking mechanism.

[0010] Optionally, when the electromagnetic device is an electromagnet, the electromagnet is circular.

[0011] Optionally, the electromagnetic device is corrosion-resistant.

[0012] Optionally, the number of electromagnetic devices is at least 4.

[0013] Optionally, the number of electromagnetic devices is 4.

[0014] Optionally, the horizontal section of the middle groove part is rectangular, at this time, 4 electromagnetic devices are arranged at four corners and symmetrically.

[0015] Optionally, the electromagnetic device is fixed to the edge extension part by bolts or embedded structure.

[0016] Optionally, the metal conductor is corrosion-resistant and has high magnetic conductivity.

[0017] Optionally, the metal conductor includes stainless steel, titanium alloy or nickel-based alloy.

[0018] Optionally, the metal conductor is fixed to the inner side of the cleaning brush cover plate by embedded installation, surface mounting or integral molding.

[0019] Optionally, when the cleaning brush cover plate covers the cleaning brush base, the metal conductor and the electromagnetic device are strictly aligned, and the error is less than 0.1mm.

[0020] Optionally, the number of cleaning brushes is 2, and 2 cleaning brushes are arranged in parallel and spaced apart in the middle groove part.

[0021] As described above, the cleaning brush cover plate module of the utility model, the module fixes the cleaning brush base and the cleaning brush cover plate through the electromagnetic device and the metal conductor, thereby avoiding the use of long screw handle, through the above-mentioned module, the phenomenon of product scrapping caused by the broken pieces due to touching the long screw handle when the running beam grabs the wafer in the transmission process above the cleaning brush cover plate is greatly reduced, the broken piece rate is reduced, thereby the safety is improved; and, through the above-mentioned module, the machine table alarm and the machine delay caused by the long screw handle separation can be avoided; moreover, the module releases when power off, without disassembling the hardware, the downtime is reduced, the machine table has better uptime performance, and the engineer burden is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 The figure shows the cleaning brush base schematic diagram of the utility model.

[0023] Figure 2 The figure shows the inside surface schematic diagram of the cleaning brush cover plate of the utility model.

[0024] Figure 3 The figure shows the outside surface schematic diagram of the cleaning brush cover plate of the utility model.

[0025] Figure 4 The figure shows the schematic diagram of the running beam driving wafer moving on the cleaning brush cover plate of the utility model. DETAILED DESCRIPTION

[0026] The embodiments of the utility model will be described below through specific concrete examples, and the person skilled in the art can easily understand other advantages and effects of the utility model from the content disclosed in the specification. The utility model can also be implemented or applied through other different specific embodiments, and each detail in the specification can be modified or changed based on different viewpoints and applications without departing from the spirit of the utility model.

[0027] Please refer to Figures 1 to 4 It should be noted that the figures provided in the embodiment only illustrate the basic concept of the utility model in a schematic manner, and although the figures only show the components related to the utility model, they are not drawn according to the number, shape and size of the components in actual implementation, and the shape, number and proportion of each component in actual implementation can be randomly changed, and the component layout form can be more complex.

[0028] As Figure 1 and Figure 2 shown, the embodiment provides a cleaning brush cover plate module, the cover plate module comprises: a cleaning brush base 1, a cleaning brush 2 and a cleaning brush cover plate 3,

[0029] The cleaning brush base 1 comprises a middle groove part 12 for placing the cleaning brush 2 and a rim extension part 11 around the middle groove part 12, and an electromagnetic device 4 is arranged on the rim extension part 11;

[0030] The cleaning brush cover plate 3 is used for covering the cleaning brush base 1 and comprises an inner side 31 and an outer side 32, the inner side 31 is provided with the same number of metal conductors 5 as the electromagnetic device 4, and when the cleaning brush cover plate 3 covers the cleaning brush base 1, the inner side 31 faces the cleaning brush base 1, at this time, the positions of the metal conductors 5 coincide with the positions of the electromagnetic device 4;

[0031] Wherein, when the cleaning brush 2 needs to be replaced, the cleaning machine is powered off, the metal conductors 5 are separated from the electromagnetic device 4, after the cleaning brush 2 is replaced, the cleaning machine is powered on, the magnetism of the electromagnetic device 4 appears, and it is firmly fixed with the metal conductors 5.

[0032] Specifically, the electromagnetic device 4 comprises an electromagnet, an electromagnetic chuck or a combination of a permanent magnet and a mechanical locking mechanism.

[0033] In this embodiment, when the combination of a permanent magnet and a mechanical locking mechanism is used, the basic adsorption force is provided by the permanent magnet, and the mechanical locking mechanism is used to enhance the fixation; when the electromagnetic chuck is used, the metal conductor 5 is adsorbed by the magnetic field generated after the cleaning machine is powered on, and is automatically released after power off.

[0034] More specifically, when the electromagnetic device 4 is an electromagnet, the electromagnet is circular.

[0035] Specifically, the electromagnetic device 4 is corrosion-resistant.

[0036] Specifically, the number of the electromagnetic device 4 is at least 4.

[0037] More specifically, the number of the electromagnetic device 4 is 4.

[0038] Specifically, the horizontal section of the middle groove part 12 is rectangular, at this time, the four electromagnetic devices 4 are arranged at the four corners and are symmetrically arranged.

[0039] Specifically, the electromagnetic device 4 is fixed on the rim extension part 11 by bolts or embedded structure.

[0040] In this embodiment, the electromagnetic device 4 is a fixed design, and is replaced as a whole only when maintenance is needed, and is adsorbed / released by power on / off control during daily operation and machine maintenance.

[0041] Specifically, the metal conductor 5 is corrosion-resistant and has high magnetic conductivity.

[0042] Specifically, the metal conductor 5 comprises stainless steel, titanium alloy or nickel-based alloy.

[0043] In this embodiment, stainless steel has strong corrosion resistance and moderate cost; titanium alloy has excellent corrosion resistance; and nickel-based alloy is suitable for strong acidic environment.

[0044] Specifically, the metal conductor 5 is fixed on the inner side 31 of the cleaning brush cover plate 3 by means of embedded installation, surface mounting or integral molding.

[0045] In this embodiment, when fixed by means of embedded installation, grooves are pre-processed on the inner side 31 of the cleaning brush cover plate 3, and then the metal conductor 5 is fixed in the grooves by means of gluing or welding; when fixed by means of surface mounting, the metal conductor 5 is fixed on the inner side 31 of the cleaning brush cover plate 3 by riveting or bolting, so as to ensure accurate alignment with the electromagnetic device 4; when fixed by integral molding, the cleaning brush cover plate 3 is made of metal-composite co-casting process, and the metal conductor 5 is directly formed on the inner side 31 of the cleaning brush cover plate 3.

[0046] Specifically, when the cleaning brush cover plate 3 covers the cleaning brush base 1, the metal conductor 5 is strictly aligned with the electromagnetic device 4, and the error is less than 0.1 mm.

[0047] Specifically, the number of the cleaning brush 2 is 2, and the two cleaning brushes 2 are arranged in parallel and spaced apart in the middle groove part 12.

[0048] In summary, the cleaning brush cover plate module of the utility model fixes the cleaning brush base 1 and the cleaning brush cover plate 3 by means of the electromagnetic device 4 and the metal conductor 5, so as to avoid using long screw handles, greatly reduces the phenomenon that the wafer 6 is broken due to touching the long screw handle when the running beam 7 grabs the wafer 6 in the transmission process above the cleaning brush cover plate 3, reduces the fragment rate, and improves the safety; and the above-mentioned module can avoid machine alarm and machine delay caused by the disengagement of the long screw handle; moreover, the module is released after power off, does not need to disassemble the hardware, reduces downtime, has better uptime performance, and reduces the burden of engineers. Therefore, the utility model effectively overcomes the shortcomings in the prior art and has high industrial utilization value.

[0049] The above embodiments only exemplarily illustrate the principles and effects of the present application, and are not used to limit the present application. Any person skilled in the art can modify or change the above embodiments without departing from the spirit and scope of the present application. Therefore, all equivalent modifications or changes completed by those skilled in the art without departing from the spirit and technical thought disclosed by the present application should be covered by the claims of the present application.

Claims

1. A cleaning brush cover plate module, characterized in that, The cover module comprises a cleaning brush base, a cleaning brush and a cleaning brush cover, The cleaning brush base comprises a middle groove part for placing the cleaning brush and an edge extension part around the middle groove part, and an electromagnetic device is arranged on the edge extension part; The cleaning brush cover is used for covering the cleaning brush base and comprises an inner side and an outer side, the inner side is provided with the same number of metal conductors as the electromagnetic device, and when the cleaning brush cover covers the cleaning brush base, the inner side faces the cleaning brush base, at this time, the positions of the metal conductors coincide with the positions of the electromagnetic device; Wherein, when the cleaning brush needs to be replaced, the cleaning machine is powered off, the metal conductors are separated from the electromagnetic device, after the cleaning brush is replaced, the cleaning machine is powered on, the magnetism of the electromagnetic device appears, and it is firmly fixed between the metal conductors.

2. The cleaning brush cover plate module of claim 1, wherein, The electromagnetic device comprises an electromagnet, an electromagnetic chuck or a combination of a permanent magnet and a mechanical locking mechanism.

3. The cleaning brush cover plate module of claim 2, wherein, When the electromagnetic device is an electromagnet, the electromagnet is circular.

4. The cleaning brush cover plate module of claim 1, wherein, The electromagnetic device is corrosion-resistant.

5. The cleaning brush cover plate module of claim 1, wherein, The number of the electromagnetic devices is at least 4.

6. The cleaning brush cover plate module of claim 5, wherein, The number of the electromagnetic devices is 4.

7. The cleaning brush cover plate module of claim 6, wherein, The horizontal section of the middle groove part is rectangular, at this time, 4 electromagnetic devices are arranged at the four corners and symmetrically.

8. The cleaning brush cover plate module of claim 1, wherein, The electromagnetic devices are fixed on the edge extension part by bolts or embedded structure.

9. The cleaning brush cover plate module of claim 1, wherein, The metal conductors are corrosion-resistant and have high magnetic conductivity.

10. The cleaning brush cover plate module of claim 1, wherein, The metal conductors comprise stainless steel, titanium alloy or nickel-based alloy.

11. The cleaning brush cover plate module of claim 1, wherein, The metal conductors are fixed on the inner side of the cleaning brush cover by embedded installation, surface mounting or one-piece forming.

12. The cleaning brush cover plate module of claim 1, wherein, When the cleaning brush cover covers the cleaning brush base, the metal conductors and the electromagnetic devices are strictly aligned, and the error is less than 0.1mm.

13. The cleaning brush cover plate module of claim 1, wherein, The number of the cleaning brushes is 2, and 2 cleaning brushes are arranged in parallel and spaced apart in the middle groove part.

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