Semiconductor cleaning equipment

Abstract

The utility model relates to the technical field of semiconductors, in particular to semiconductor cleaning equipment which comprises a conveying belt mechanism, a bearing plate, a base, spray pipes and second spray pipes, the bearing plate is connected to a belt of the conveying belt mechanism and connected with the base through a rotating mechanism, a containing pipe is connected to the top of the base, and the bottom ends of the spray pipes are connected to the bearing plate. The spraying pipe is connected with a plurality of spraying heads, the middle of the storage pipe is connected with a second spraying pipe, the second spraying pipe is connected with a plurality of second spraying heads, and the spraying heads are arranged towards the second spraying heads. The spraying heads are arranged on the spraying pipe to clean the outer portion of the quartz pipe, and the second spraying heads are arranged on the second spraying pipe to clean the inner portion of the quartz pipe. And meanwhile, the rotating mechanism is arranged to move the quartz tube, so that the soaking link of the quartz tube before cleaning is reduced, and the cleaning efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a semiconductor cleaning device. Background Technology

[0002] Semiconductor cleaning equipment is a key piece of equipment in the semiconductor manufacturing process. Its main function is to remove contaminants from the wafer surface, including particles, organic matter, metal ions, and natural oxide layers, in order to ensure the yield and performance of chip manufacturing.

[0003] However, existing technologies still have shortcomings. For example, a quartz tube cleaning device with patent number CN202420494296.6 includes a cleaning tank and a quartz tube transfer device for transferring the quartz tube into and out of the cleaning tank. The cleaning tank is provided with a rotating support assembly for supporting the horizontally shaped quartz tube and driving the quartz tube to rotate. The rotating support assembly includes at least one pair of support rods arranged along the axial direction of the quartz tube, at least two support wheels respectively sleeved on each support rod for supporting the outer wall of the quartz tube, and a drive group for driving the at least one pair of support rods to rotate. When cleaning the quartz tube, this device requires soaking before cleaning, which is an extremely cumbersome process. Utility Model Content

[0004] The purpose of this invention is to provide a semiconductor cleaning device to address the issues raised in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a semiconductor cleaning device, comprising: a conveyor belt mechanism, a support plate, a base, a nozzle and a second nozzle. The support plate is connected to the belt of the conveyor belt mechanism, and the support plate is connected to the base through a rotating mechanism. A receiving tube is connected to the top of the base. The bottom ends of multiple nozzles are connected to the support plate, and multiple nozzles are connected to the nozzles. A second nozzle is connected to the middle of the receiving tube, and multiple second nozzles are connected to the second nozzle, with the nozzles facing the second nozzles.

[0006] Preferably, the rotating mechanism includes a motor and guide rods. The motor is connected to the middle of the support plate, the output end of the motor is connected to the bottom of the base, and the top ends of a plurality of guide rods are connected to the bottom of the base. The bottom ends of the guide rods are slidably connected to the top of the support plate.

[0007] Preferably, the storage tube has a guide tube in the middle, the bottom of the guide tube is connected to the top of the base, the top of the guide tube has a spline hole, the spline hole is slidably connected to the spline shaft tube on the bottom side wall of the second nozzle, the top and bottom of the second nozzle are each connected to a sealing plate, the bottom of the spline hole is connected to one end of a pressure tube, and the other end of the pressure tube extends to the outside of the side wall of the storage tube.

[0008] Preferably, the top of the receiving tube has an annular groove.

[0009] Preferably, the end of the conveyor belt mechanism is connected to a mounting base, the top of the mounting base is connected to a second motor and a second guide rod, the output end of the second motor is connected to a screw, the screw is threadedly connected to the mounting plate, and the mounting plate is slidably engaged with the second guide rod.

[0010] Preferably, a motor is connected to the end face of the mounting plate away from the guide rod 2. The output end of the motor is connected to a double screw. Two grippers are threaded onto the double screw. One end of the gripper is slidably connected to the mounting plate, and the other end of the gripper is set towards the storage tube.

[0011] Preferably, a rubber strip is provided on the opposite surface of each of the two grippers.

[0012] Preferably, the bottom of the nozzle is connected to one end of the water inlet pipe, the middle of the nozzle is connected to one end of the water inlet pipe, the other ends of the water inlet pipe and the water inlet pipe are both connected to one end of the water supply pipe, and the other end of the water supply pipe is connected to the output end of the water pump.

[0013] Preferably, the bottom end of the retaining ring is connected to the top edge of the base, one end of the drain pipe is connected to the bottom wall of the base, one end of the second drain pipe is connected to the inner wall of the receiving pipe, and the other ends of the drain pipe and the second drain pipe are both connected to one end of the outlet pipe.

[0014] Preferably, the bottom wall of the outlet pipe is connected to the top end of the connecting pipe, and a pressure rod is slidably connected inside the connecting pipe. The end of the pressure rod placed inside the outlet pipe has an inclined surface, which faces the second drain pipe. The bottom of the pressure rod is connected to the top end of the spring, and the bottom end of the spring is connected to the second sealing plate at the bottom of the connecting pipe. A connecting rod is slidably connected to the second sealing plate, and the top end of the connecting rod is connected to the bottom of the pressure rod.

[0015] The beneficial effects of this utility model are as follows:

[0016] By setting a nozzle on the spray pipe to clean the outside of the quartz tube, and setting a second nozzle on the second spray pipe to clean the inside of the quartz tube, while setting a rotating mechanism to move the quartz tube, the soaking process of the quartz tube before cleaning is reduced, and the cleaning efficiency is improved. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the main structure of this utility model;

[0018] Figure 2 This is a cross-sectional view of the main body of this utility model;

[0019] Figure 3 This is a schematic diagram showing the relative positional relationship between the base and the drainage pipe of this utility model;

[0020] Figure 4This is a cross-sectional view of the connecting pipe of this utility model.

[0021] In the diagram: 1. Conveyor belt mechanism; 2. Bearing plate; 3. Base; 4. Nozzle; 5. Nozzle II; 6. Collection pipe; 7. Motor; 8. Guide rod; 9. Guide tube; 10. Pressure tube; 11. Mounting base; 12. Motor II; 13. Guide rod II; 14. Screw; 15. Mounting plate; 16. Motor III; 17. Twin screw; 18. Gripper; 19. Water inlet pipe; 20. Water supply pipe; 21. Retaining ring; 22. Drainage pipe; 23. Drainage pipe II; 24. Water outlet pipe; 25. Connecting pipe; 26. Pressure rod; 27. Inclined surface; 28. Spring; 29. ​​Connecting rod; 30. Adjusting tube; 31. Adjusting column; 32. Waist-shaped through hole. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0023] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0024] Example 1: Reference Figures 1-4 A semiconductor cleaning device includes: a conveyor belt mechanism 1, a support plate 2, a base 3, a nozzle 4 and a second nozzle 5. The support plate 2 is connected to the belt of the conveyor belt mechanism 1. The support plate 2 is connected to the base 3 through a rotating mechanism. A receiving tube 6 is connected to the top of the base 3. The bottom ends of multiple nozzles 4 are connected to the support plate 2. Multiple nozzles are connected to the nozzles 4. A second nozzle 5 is connected to the middle of the receiving tube 6. Multiple second nozzles are connected to the second nozzle 5. The nozzles are arranged facing the second nozzles.

[0025] The principles and beneficial effects of the above scheme are as follows:

[0026] The quartz tube is moved onto the receiving tube 6. Then, the nozzles on the spray pipe 4 and the second nozzle on the second spray pipe 5 are used to clean the inside and outside of the quartz tube respectively. During the cleaning process, the rotating mechanism is activated to drive the base 3 and the receiving tube 6 to rotate, which can further increase the cleanliness of the inside and outside of the quartz tube after cleaning. After the quartz tube is cleaned, it can be moved by the belt of the conveyor belt mechanism 1 to facilitate the recycling of the cleaned quartz tube.

[0027] By setting a nozzle on the nozzle 4 to clean the outside of the quartz tube, and setting a second nozzle on the nozzle 5 to clean the inside of the quartz tube, and setting a rotating mechanism to move the quartz tube, the soaking process of the quartz tube before cleaning is reduced, and the cleaning efficiency is improved.

[0028] Example 2: Reference Figures 1-4 The rotating mechanism includes a motor 7 and guide rods 8. The motor 7 is connected to the middle of the bearing plate 2. The output end of the motor 7 is connected to the bottom of the base 3. The bottom of the base 3 is connected to the top of a plurality of guide rods 8. The bottom end of the guide rods 8 is slidably connected to the top of the bearing plate 2.

[0029] The principles and beneficial effects of the above scheme are as follows:

[0030] When the quartz tube needs to be rotated, the motor 7 is started. The output end of the motor 7 drives the support plate 2 to rotate. With the cooperation of the guide rod 8 and the top of the support plate 2 slidingly connected, the storage tube 6 rotates synchronously with the quartz tube, which greatly reduces the complexity of the device and improves the rotation efficiency of the quartz tube.

[0031] Example 3: Reference Figures 1-4 The storage tube 6 has a guide tube 9 in the middle. The bottom of the guide tube 9 is connected to the top of the base 3. The top of the guide tube 9 has a spline hole. The spline hole is slidably connected to the spline shaft tube on the bottom side wall of the nozzle 2 5. The top and bottom of the nozzle 2 5 are each connected to a sealing plate. The bottom and top of the nozzle 2 5 are each connected to a seal. The bottom of the spline hole is connected to one end of the pressure tube 10. The other end of the pressure tube 10 extends out to the outside of the side wall of the storage tube 6.

[0032] The principles and beneficial effects of the above scheme are as follows:

[0033] To improve the uniformity of cleaning inside the quartz tube, nitrogen gas can be injected into the spline hole through the pressure pipe 10 when the nozzle 2 5 is working, thereby filling the space between the bottom of the nozzle 2 5 and the bottom wall of the spline hole with nitrogen gas, and the nozzle 2 5 moves upward within the spline hole; after the nitrogen gas between the bottom of the nozzle 2 5 and the bottom wall of the spline hole is discharged through the pressure pipe 10, the nozzle 2 5 moves downward within the spline hole. While the nozzle 2 5 moves upward or downward relative to the quartz tube, the uniformity of cleaning inside the quartz tube is increased.

[0034] Example 4: Reference Figures 1-4 The top of the receiving tube 6 has an annular groove.

[0035] The principles and beneficial effects of the above scheme are as follows:

[0036] The annular groove facilitates the fixation of the quartz tube during cleaning, improving its stability.

[0037] Example 5: Reference Figures 1-4 The conveyor belt mechanism 1 is connected to a mounting base 11 at one end. A motor 12 and a guide rod 13 are connected to the top of the mounting base 11. A screw 14 is connected to the output end of the motor 12. The screw 14 is threadedly connected to the mounting plate 15. The mounting plate 15 and the guide rod 13 are slidably engaged.

[0038] A motor 16 is connected to the end face of the mounting plate 15 away from the guide rod 13. A double screw 17 is connected to the output end of the motor 16. Two grippers 18 are threaded onto the double screw 17. One end of the gripper 18 is slidably connected to the mounting plate 15, and the other end of the gripper 18 is set towards the storage tube 6.

[0039] The principles and beneficial effects of the above scheme are as follows:

[0040] The end of the conveyor belt mechanism 1 is connected to the mounting base 11. When the conveyor belt mechanism 1 drives the cleaned quartz tube to the mounting base 11, the second motor 12 is started. The output end of the second motor 12 rotates forward, the screw 14 rotates forward, and the mounting plate 15 moves downward under the sliding cooperation of the guide rod 13 and the mounting plate 15.

[0041] Then, motor 16 is started. The output end of motor 16 drives the double screw 17 to rotate forward. With the cooperation of the sliding connection between one end of the gripper 18 and the mounting plate 15, the distance between the gripper 18 threadedly connected to the double screw 17 increases. When the quartz tube moves between the two grippers 18, the output end of motor 16 drives the double screw 17 to rotate in reverse. With the cooperation of the sliding connection between one end of the gripper 18 and the mounting plate 15, the distance between the gripper 18 threadedly connected to the double screw 17 decreases until the two grippers 18 clamp the quartz tube.

[0042] Restart motor 12. The output end of motor 12 reverses, screw 14 reverses, and under the sliding cooperation of guide rod 13 and mounting plate 15, mounting plate 15 moves upward, moving the clamped quartz tube upward and removing it from storage tube 6. At this time, the tool can be used to contact the bottom of the quartz tube with the top of the tool.

[0043] Then, motor 316 is restarted. The output end of motor 316 drives the double screw 17 to rotate forward. With the cooperation of the sliding connection between one end of the gripper 18 and the mounting plate 15, the distance between the gripper 18 threadedly connected to the double screw 17 increases, so that the two grippers 18 return to their initial positions. Then, the tooling drives the quartz tube to the storage station to prepare for its next use.

[0044] The device is equipped with a twin screw 17 that drives two grippers 18 to move closer or further away synchronously, which reduces the complexity of clamping quartz tubes and improves clamping accuracy.

[0045] Example 6: Reference Figures 1-4 Each of the two grippers 18 has a rubber strip on its opposite surface.

[0046] The principles and beneficial effects of the above scheme are as follows:

[0047] A rubber strip is provided on the opposite surface of each of the two grippers 18, so that when clamping the quartz tube, the pressure applied by the grippers 18 to the side wall of the quartz tube can be reduced, and damage can be avoided when the tube is moved.

[0048] Example 7: Reference Figures 1-4 The bottom of the nozzle 4 is connected to one end of the water inlet pipe 19, the middle of the nozzle 5 is connected to one end of the water inlet pipe 2, and the other ends of the water inlet pipe 19 and the water inlet pipe 2 are both connected to one end of the water supply pipe 20. The other end of the water supply pipe 20 is connected to the output end of the water pump.

[0049] The principles and beneficial effects of the above scheme are as follows:

[0050] When the device starts cleaning, the water pump is started. The water pump supplies water through the water supply pipe 20 to the water inlet pipe 19 and the second water inlet pipe. Then the water enters the nozzle through the spray pipe 4 and the second spray pipe 5. Subsequently, the outside of the quartz tube is cleaned through the nozzle, and the inside of the quartz tube is cleaned through the second spray pipe. The water supply pipe 20 works in conjunction with the water pump to supply water to the spray pipe 4 and the second spray pipe 5, which greatly reduces the complexity of the device and improves the working efficiency of the device during cleaning.

[0051] Example 8: Reference Figures 1-4 The bottom end of the retaining ring 21 is connected to the top edge of the base 3, one end of the drain pipe 22 is connected to the bottom wall of the base 3, one end of the drain pipe 23 is connected to the inner wall of the receiving pipe 6, and the other ends of the drain pipe 22 and the drain pipe 23 are both connected to one end of the water outlet pipe 24.

[0052] The principles and beneficial effects of the above scheme are as follows:

[0053] The retaining ring 21 on the base 3 is used to collect water outside the quartz tube. The collected water flows out through the drain pipe 22. The second drain pipe 23 is used to collect water inside the quartz tube. The water collected by the drain pipe 22 and the second drain pipe 23 is finally discharged through the outlet pipe 24 to avoid water accumulation on the device and prevent leakage and slippage at the work site.

[0054] Example 9: Reference Figures 1-4 The bottom wall of the outlet pipe 24 is connected to the top end of the connecting pipe 25. A pressure rod 26 is slidably connected inside the connecting pipe 25. The end of the pressure rod 26 inside the outlet pipe 24 is provided with an inclined surface 27, which faces the drain pipe 23. The bottom of the pressure rod 26 is connected to the top end of the spring 28. The bottom end of the spring 28 is connected to the sealing plate 2 at the bottom of the connecting pipe 25. A connecting rod 29 is slidably connected to the sealing plate 2. The top end of the connecting rod 29 is connected to the bottom of the pressure rod 26.

[0055] The principles and beneficial effects of the above scheme are as follows:

[0056] Because there are impurities on the quartz tube, there are also impurities in the water discharged from the outlet pipe 24. When the impurity content in the discharged water increases, the pressure on the inclined surface 27 increases, which causes the pressure rod 26 to move downward in the connecting pipe 25 and the spring 28 to be compressed. At this time, the inclined surface 27 can rub against the impurities in the water, thereby reducing the strength of the agglomerates in the impurities, breaking down the agglomerates of impurities, preventing the outlet pipe 24 from becoming blocked, and reducing the number of times the device needs to be cleaned during use.

[0057] When the impurity content in the water decreases, the pressure on the inclined plane 27 decreases, and under the elastic force of the spring 28 returning to its original position, the pressure rod 26 moves upward in the connecting pipe 25.

[0058] Example 10: Reference Figures 1-4 The water supply pipe 20 is connected to an adjusting pipe 30. An adjusting column 31 is slidably sealed inside the adjusting pipe 30. A connecting rod 29 is slidably connected to a sealing disc at the top of the adjusting pipe 30. The bottom of the connecting rod 29 is connected to the top of the adjusting column 31. A longitudinal waist-shaped through hole 32 is opened through the side of the adjusting column 31. The top wall of the waist-shaped through hole 32 is set above the water supply pipe 20.

[0059] The principles and beneficial effects of the above scheme are as follows:

[0060] When the pressure rod 26 moves downward, the regulating column 31 moves downward within the regulating pipe 30, increasing the conduction area between the waist-shaped through hole 32 and the water supply pipe 20, further increasing the water output of the outlet pipe 24, and preventing impurities from accumulating and forming blockages between the outlet pipe 24 and the pressure rod 26; when the pressure rod 26 moves upward, the regulating column 31 moves upward within the regulating pipe 30, decreasing the conduction area between the waist-shaped through hole 32 and the water supply pipe 20, and the water supply pipe 20 returns to its initial water supply, avoiding water waste.

[0061] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this invention, and no reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A semiconductor cleaning device, characterized in that, Include: The conveyor mechanism (1), the bearing plate (2), the base (3), the spray pipe (4) and the spray pipe two (5), the belt of the conveyor mechanism (1) is connected with the bearing plate (2), the bearing plate (2) is connected with the base (3) through the rotating mechanism, the top of the base (3) is connected with the receiving tube (6), the bottom end of the bearing plate (2) is connected with multiple spray pipes (4), multiple spray heads are connected on the spray pipe (4), the middle part of the receiving tube (6) is connected with the spray pipe two (5), multiple spray heads two are connected on the spray pipe two (5), the spray head is arranged towards the spray head two.

2. The semiconductor cleaning apparatus according to claim 1, wherein The rotating mechanism includes: motor (7) and guide rod (8), the middle part of the bearing plate (2) is connected with the motor (7), the output end of the motor (7) is connected with the bottom of the base (3), the bottom of the base (3) is connected with the top end of multiple guide rods (8), the bottom end of the guide rod (8) is slidably connected with the top of the bearing plate (2).

3. The semiconductor cleaning apparatus according to claim 2, wherein The middle part of the receiving tube (6) is provided with a guide tube (9), the bottom of the guide tube (9) is connected with the top of the base (3), the top of the guide tube (9) is provided with a spline hole, the spline hole is slidably connected with the spline shaft tube on the sidewall of the bottom of the spray pipe two (5), the top and the bottom of the spray pipe two (5) are each connected with a sealing disc, the bottom of the spline hole is connected with one end of the pressure tube (10), the other end of the pressure tube (10) penetrates out to the sidewall of the receiving tube (6).

4. The semiconductor cleaning apparatus according to claim 3, wherein The top of the receiving tube (6) is provided with an annular groove.

5. The semiconductor cleaning apparatus according to claim 1, wherein The end of the conveyor mechanism (1) is connected with the mounting seat (11), the top of the mounting seat (11) is connected with the motor two (12) and the guide rod two (13), the output end of the motor two (12) is connected with the screw rod (14), the screw rod (14) is threadedly connected with the mounting plate (15), the mounting plate (15) is slidably connected with the guide rod two (13).

6. The semiconductor cleaning apparatus according to claim 5, wherein The end face of the mounting plate (15) away from the guide rod two (13) is connected with the motor three (16), the output end of the motor three (16) is connected with the double screw rod (17), the double screw rod (17) is threadedly connected with two clamping jaws (18), one end of the clamping jaw (18) is slidably connected with the mounting plate (15), the other end of the clamping jaw (18) is arranged towards the receiving tube (6).

7. The semiconductor cleaning apparatus according to claim 6, wherein The opposite faces of the two clamping jaws (18) are respectively provided with a rubber strip.

8. The semiconductor cleaning apparatus according to claim 3, wherein The bottom of the spray pipe (4) is connected with one end of the water inlet pipe (19), the middle part of the spray pipe two (5) is connected with one end of the water inlet pipe two, the other ends of the water inlet pipe (19) and the water inlet pipe two are both connected with one end of the water supply pipe (20), the other end of the water supply pipe (20) is connected with the output end of the water pump.

9. The semiconductor cleaning apparatus of claim 6, wherein The top edge of the base (3) is connected with the bottom end of the retaining ring (21), one end of the drain pipe (22) is connected on the bottom wall of the base (3), one end of the drain pipe two (23) is connected on the inner wall of the receiving tube (6), the other ends of the drain pipe (22) and the drain pipe two (23) are both connected with one end of the water outlet pipe (24).

10. The semiconductor cleaning apparatus according to claim 9, wherein The bottom wall of the water outlet pipe (24) is connected with the top end of a connecting pipe (25), the connecting pipe (25) is slidably connected with a pressure rod (26), the end of the pressure rod (26) placed in the water outlet pipe (24) is provided with an inclined surface (27) facing the drain pipe two (23), the bottom of the pressure rod (26) is connected with the top end of a spring (28), the bottom end of the spring (28) is connected with a sealing disc two at the bottom of the connecting pipe (25), a connecting rod (29) is slidably connected on the sealing disc two, and the top end of the connecting rod (29) is connected with the bottom of the pressure rod (26).

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