Press-fit device for aligning gas uniformizing disc in same position

Abstract

The utility model relates to the technical field of semiconductor preparation, and discloses an in-situ alignment pressing device for a gas uniformizing disc. An in-situ alignment press-fit device for a gas uniformizing disc comprises a press-fit base, an upper pressing plate and an adjustable cushion block, the upper pressing plate is arranged above the press-fit base, a gap is formed between the upper pressing plate and the press-fit base, the upper pressing plate is connected with the press-fit base through a pressing structure, and the upper pressing plate is provided with a fixing plate and an alignment device; the adjustable cushion block is arranged on the pressing base and provided with a jacking structure, and the jacking structure is used for abutting against the gas uniformizing disc. According to the in-position alignment pressing device for the gas uniformizing disc, the air holes of the upper plate of the gas uniformizing disc can be accurately aligned with the air holes of the lower plate of the gas uniformizing disc, and the phenomenon that the gas uniformizing disc moves before colloid is solidified can be effectively avoided; the gas uniformizing disc upper plate and the gas uniformizing disc lower plate move relatively, so that the gas holes of the gas uniformizing disc upper plate and the gas holes of the gas uniformizing disc lower plate are aligned inaccurately.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor fabrication technology, and in particular to a device for aligning and pressing a gas equalization plate. Background Technology

[0002] With the continuous development of semiconductor manufacturing technology, the requirements for the gas environment during operation are becoming increasingly stringent. A gas equalization plate, as a device used in semiconductor processing, functions to uniformly deliver high-purity inert gas into the processing chamber to ensure the stability of the gas environment and product quality during processing. A gas equalization plate generally consists of an upper plate and a lower plate, each with multiple air holes. During the production of the gas equalization plate, the upper and lower plates need to be glued together. However, due to the lack of suitable auxiliary tools, the air holes on the upper and lower plates often cannot be aligned, which greatly affects the performance of the gas equalization plate.

[0003] Therefore, there is an urgent need for a device for aligning and pressing air distribution discs to solve the above-mentioned technical problems. Utility Model Content

[0004] The purpose of this invention is to provide a device for aligning and pressing an air distribution plate, which can solve the problem that when the upper plate and the lower plate of the air distribution plate are glued together, the air holes on the upper plate and the lower plate of the air distribution plate often cannot be aligned due to the lack of suitable auxiliary tools, which greatly affects the performance of the air distribution plate.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A device for aligning and pressing an air distribution plate, comprising:

[0007] Press-fit base;

[0008] An upper pressure plate is disposed above the pressing base, and there is a gap between the upper pressure plate and the pressing base. The upper pressure plate is connected to the pressing base through a pressing structure. The upper pressure plate is provided with a fixing plate and an alignment device.

[0009] An adjustable pad is provided on the pressing base. The adjustable pad has a tightening structure, which is used to abut against the air distribution plate.

[0010] As an optional solution, the clamping structure includes a pressing screw and an elastic element sleeved on the pressing screw. The pressing screw passes through the upper pressure plate and the pressing base, and the elastic element is located above the upper pressure plate.

[0011] As an alternative, the upper pressure plate is provided with multiple sliding grooves, and the fixing plate is fixed to the upper pressure plate by bolts and sliding grooves.

[0012] As an alternative, the upper pressure plate is provided with a first through hole, the fixing plate is at least partially accommodated in the first through hole, and the portion of the fixing plate protruding from the first through hole is provided with an adjustment mechanism.

[0013] As an alternative, the adjustment mechanism is a groove.

[0014] As an optional solution, at least one side of the adjustable pad is an arc surface, which is adapted to the air distribution plate. The tightening structure is a set screw, and the adjustable pad is provided with a second through hole, through which the set screw passes.

[0015] As an optional solution, the pressing base is provided with a first guide post, which at least partially passes through the adjustable pad. The adjustable pad can move along the first guide post under the action of external force, and the adjustable pad is fixed on the pressing base by a fixing structure.

[0016] As an optional solution, a guide structure is provided between the upper pressure plate and the pressing base, and the upper pressure plate can move along the guide structure towards the pressing base under the action of external force.

[0017] As an optional solution, the guide structure includes a second guide post and a guide sleeve sleeved on the second guide post. The upper pressure plate and the pressing base are respectively provided with a first mounting hole and a second mounting hole. The guide post is installed on the upper pressure plate and the pressing base through the first mounting hole and the second mounting hole.

[0018] As an optional solution, the guide structure further includes a locking pad, which is disposed outside the guide sleeve and defines the guide sleeve.

[0019] This utility model has at least the following beneficial effects:

[0020] The present invention provides a device for aligning and pressing a gas equalizing plate, which not only ensures accurate alignment of the pores on the upper plate and the lower plate of the gas equalizing plate, but also effectively prevents the relative movement of the upper and lower plates of the gas equalizing plate during the movement of the gas equalizing plate before the colloid is cured, which would otherwise lead to inaccurate alignment of the pores on the upper and lower plates of the gas equalizing plate. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model, the accompanying drawings used in the description of the embodiments of this utility model will be briefly introduced below.

[0022] Figure 1 A schematic diagram of a device for aligning and pressing an air distribution plate is provided in an embodiment of this utility model.

[0023] Figure 2 An exploded view of an air distribution plate alignment and pressing device provided in an embodiment of this utility model;

[0024] Figure 3 A schematic diagram of the structure of the pressing base provided in this embodiment of the utility model;

[0025] Figure 4 A schematic diagram of the structure of the fixing plate provided in this embodiment of the utility model;

[0026] Figure 5 A schematic diagram of the upper pressure plate provided in this embodiment of the utility model;

[0027] Figure 6 A schematic diagram of the guide structure provided in an embodiment of this utility model.

[0028] Figure label:

[0029] 1. Pressing base; 11. First guide post; 2. Upper pressure plate; 21. Fixing plate; 211. Groove; 22. Alignment device; 23. Slide groove; 24. First through hole; 3. Pressing structure; 31. Lowering screw; 32. Elastic element; 4. Adjustable pad; 41. Tightening structure; 5. Guide structure; 51. Second guide post; 52. Guide sleeve; 53. Locking pad. Detailed Implementation

[0030] In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit the scope of this utility model.

[0031] In the prior art, a gas equalization plate generally includes an upper plate and a lower plate. The upper plate and the lower plate are each provided with multiple air holes. During the production of the gas equalization plate, the upper plate and the lower plate need to be glued together. Due to the lack of suitable auxiliary tools, the air holes on the upper plate and the lower plate often cannot be aligned, which will greatly affect the performance of the gas equalization plate.

[0032] Therefore, such as Figures 1 to 6 As shown, an embodiment of this utility model provides a device for aligning and pressing an air distribution plate to solve the above-mentioned technical problems.

[0033] Specifically, such as Figures 1 to 3As shown, a device for aligning and pressing an air distribution plate includes a pressing base 1, an upper pressing plate 2, and adjustable pads 4. The upper pressing plate 2 is positioned above the pressing base 1, and there is a gap between the upper pressing plate 2 and the pressing base 1. When the upper plate of the air distribution plate and the lower plate of the air distribution plate are glued together, the upper plate of the air distribution plate and the lower plate of the air distribution plate can be accommodated in the gap. The upper pressing plate 2 is connected to the pressing base 1 through a pressing structure 3. The upper pressing plate 2 is provided with a fixing plate 21 and an alignment device 22. Multiple adjustable pads 4 are arranged on the pressing base 1, and the multiple adjustable pads 4 form a receiving space. The lower plate of the air distribution plate can be accommodated in the receiving space. The adjustable pads 4 are provided with a pressing structure 41, which is used to abut against the lower plate of the air distribution plate.

[0034] In the process of bonding the upper and lower plates of the gas equalization disk together with adhesive, firstly, adhesive is applied to the lower plate of the gas equalization disk, and the glued lower plate is placed in the receiving space formed by multiple adjustable pads 4. The lower plate of the gas equalization disk is fixed with the tightening structure 41. Then, the upper plate of the gas equalization disk is fixed to the fixing plate 21 with adhesive, and the fixing plate 21 is fixedly installed on the upper pressure plate 2. Next, the alignment device 22 is observed, and the position of the fixing plate 21 relative to the upper pressure plate 2 is adjusted. Align the air holes on the upper plate and the lower plate of the gas equalization plate. Finally, use the force of the clamping structure 3 to hold the upper plate and the lower plate of the gas equalization plate between the fixed plate 21 and the pressing base 1. This not only ensures accurate alignment of the air holes on the upper plate and the lower plate of the gas equalization plate, but also effectively prevents the upper plate and the lower plate of the gas equalization plate from moving relative to each other during the process of moving the gas equalization plate before the colloid is cured, which would cause inaccurate alignment of the air holes on the upper plate and the lower plate of the gas equalization plate.

[0035] In some embodiments, the alignment device 22 is a quartz column with a first alignment mark on it. The upper pressure plate 2 has a mounting hole, and the quartz column is installed in the mounting hole. The fixing plate 21 has a second alignment mark. During the process of adjusting the position of the fixing plate 21 relative to the upper pressure plate 2, the relative position of the first alignment mark and the second alignment mark is observed, so that the air holes of the upper plate and the lower plate of the air distribution plate are accurately aligned.

[0036] In some embodiments, such as Figure 1 As shown, in order to reduce the manufacturing cost of the air distribution plate alignment and pressing device of this application, the pressing structure 3 includes a pressing screw 31 and an elastic element 32 sleeved on the pressing screw 31. The pressing screw 31 passes through the upper pressure plate 2 and the pressing base 1, and the elastic element 32 is disposed above the upper pressure plate 2. The elastic element 32 is preferably a spring.

[0037] In some embodiments, such as Figure 1 and Figure 3As shown, in order to facilitate the adjustment of the position between the fixing plate 21 and the upper pressure plate 2, and to facilitate the fixing plate 21 to be fixed on the upper pressure plate 2, the upper pressure plate 2 is provided with multiple sliding grooves 23, and the fixing plate 21 is fixed on the upper pressure plate 2 by bolts and sliding grooves 23.

[0038] In some embodiments, in order to facilitate the adjustment of the position between the fixing plate 21 and the upper pressure plate 2, the upper pressure plate 2 is provided with a first through hole 24, the fixing plate 21 is at least partially accommodated in the first through hole 24, and the portion of the fixing plate 21 that protrudes from the first through hole 24 is provided with an adjustment mechanism. The adjustment mechanism is used to apply force to the upper pressure plate 2, so that the fixing plate 21 can rotate in the first through hole 24.

[0039] In some embodiments, such as Figure 3 As shown, the adjustment mechanism is a groove 211, which facilitates the placement of the gas equalization disc alignment and pressing device of this application in other equipment (such as a colloid curing device) for subsequent processing.

[0040] In some embodiments, such as Figure 2 and Figure 3 As shown, in order to limit the position of the air distribution plate by the adjustable pad 4, at least one side of the adjustable pad 4 is an arc surface, which is adapted to the air distribution plate. The tightening structure 41 is a set screw. The adjustable pad 4 is provided with a second through hole, and the set screw passes through the second through hole.

[0041] In some embodiments, such as Figure 3 As shown, in order to facilitate the adjustment of the position of the adjustable pad 4 relative to the pressing base 1 so that air distribution plates of different thicknesses can be aligned and pressed using the air distribution plate alignment and pressing device of this application, the pressing base 1 is provided with a first guide post 11. The first guide post 11 is at least partially inserted through the adjustable pad 4. The adjustable pad 4 can move along the first guide post 11 under the action of external force. The adjustable pad 4 is fixed to the pressing base 1 by a fixing structure, which can be a bolt. The adjustable pad 4 and the pressing base 1 are provided with corresponding threaded holes. The adjustable pad 4 is fixed to the pressing base 1 by bolts and threaded holes.

[0042] In some embodiments, such as Figure 1 As shown, in order to prevent the upper pressure plate 2 from rotating relative to the pressing base 1 during the process of moving towards the pressing base 1, a guide structure 5 is provided between the upper pressure plate 2 and the pressing base 1. The upper pressure plate 2 can move towards the pressing base 1 along the guide structure 5 under the action of external force.

[0043] In some embodiments, such as Figure 1 and Figure 6As shown, in order to reduce the manufacturing cost of the gas equalization disc alignment and pressing device of this application, the guide structure 5 includes a second guide post 51 and a guide sleeve 52 sleeved on the second guide post 51. The upper pressure plate 2 and the pressing base 1 are respectively provided with a first mounting hole and a second mounting hole. The guide post is installed on the upper pressure plate 2 and the pressing base 1 through the first mounting hole and the second mounting hole.

[0044] In some embodiments, the guide structure 5 further includes a locking pad 53, which is disposed outside the guide sleeve 52 and defines the guide sleeve 52.

[0045] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A device for aligning and pressing a gas distribution disc, characterized in that, The utility model relates to a press-fit base (1); Upper pressing plate (2) is arranged above the press-fit base (1), and the upper pressing plate (2) has a gap with the press-fit base (1), the upper pressing plate (2) is connected with the press-fit base (1) by pressing structure (3), the upper pressing plate (2) is equipped with fixed plate (21) and alignment device (22); Adjustable pad (4) is arranged on the press-fit base (1), and the adjustable pad (4) is equipped with top tight structure (41), and the top tight structure (41) is used to abut against the gas distribution disc. The pressing structure (3) includes lower pressing screw (31) and elastic member (32) sleeved on the lower pressing screw (31), the lower pressing screw (31) is arranged on the upper pressing plate (2) and the press-fit base (1), and the elastic member (32) is arranged above the upper pressing plate (2).

2. A device for aligning and pressing a gas distribution plate according to claim 1, wherein The upper pressing plate (2) is provided with a plurality of sliding grooves (23), and the fixed plate (21) is fixed on the upper pressing plate (2) by bolts and sliding grooves (23).

3. A device for aligning and pressing a gas distribution plate according to claim 1, wherein The upper pressing plate (2) is provided with a first through hole (24), and the fixed plate (21) is at least partially accommodated in the first through hole (24), and the part of the fixed plate (21) protruding out of the first through hole (24) is provided with an adjusting mechanism.

4. A device for aligning and pressing a gas distribution plate according to claim 3, wherein The adjusting mechanism is a groove (211).

5. A device for aligning and pressing a gas distribution plate according to claim 4, wherein At least one face of the adjustable pad (4) is an arc face, the arc face is matched with the gas distribution disc, the top tight structure (41) is a jackscrew, the adjustable pad (4) is provided with a second through hole, and the jackscrew is arranged in the second through hole.

6. A device for aligning and pressing a gas distribution plate according to claim 1, wherein The press-fit base (1) is provided with a first guide column (11), the first guide column (11) is at least partially arranged in the adjustable pad (4), the adjustable pad (4) can move along the first guide column (11) under the action of external force, and the adjustable pad (4) is fixed on the press-fit base (1) through a fixing structure.

7. A device for aligning and pressing a gas distribution plate according to claim 1, wherein The upper pressing plate (2) and the press-fit base (1) are provided with a guide structure (5), and the upper pressing plate (2) can move along the guide structure (5) to the press-fit base (1) under the action of external force.

8. A device for aligning and pressing a gas distribution plate according to any one of claims 1 to 7, characterized in that, The guide structure (5) includes a second guide column (51) and a guide sleeve (52) sleeved on the second guide column (51), the upper pressing plate (2) and the press-fit base (1) are respectively provided with a first mounting hole and a second mounting hole, and the guide column is installed on the upper pressing plate (2) and the press-fit base (1) through the first mounting hole and the second mounting hole.

9. A device for aligning and pressing a gas distribution plate according to claim 8, wherein The guide structure (5) further includes a locking pad (53), the locking pad (53) is arranged outside the guide sleeve (52), and the locking pad (53) limits the guide sleeve (52).

10. A device for aligning and pressing a gas distribution plate according to claim 9, wherein ​

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