Solid precursor packaging container

Abstract

The utility model relates to the technical field of vapor deposition, in particular to a solid precursor packaging container which comprises a bottle body, a bottle cap body is arranged on the top face of the bottle body, a connecting pipe is installed in the bottle cap body in an inserted mode, an installation ring is arranged on the outer surface of the connecting pipe, a filter body is arranged on the lower surface of the installation ring, and a sealing ring is arranged on the filter body. An outlet valve is arranged on the top surface of the connecting pipe, and an outlet pipe is arranged on the front surface of the outlet valve; and the inlet valve is mounted on the upper surface of the bottle cap body. Through the design of the filter body, the distribution effect of gas can be improved, meanwhile, the filter effect is achieved, particulate matter can be prevented from entering a downstream pipeline of a source bottle, the overall protection effect is good, and meanwhile when the whole bottle body needs to be disassembled, the inlet valve and the outlet valve are closed firstly, then the bypass purging valve is opened, and therefore the whole bottle body needs to be disassembled. And purging can be performed in the two groups of second mounting pipes through a bypass purging valve.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of vapor deposition, specifically to a solid precursor packaging container. BACKGROUND

[0002] Solid precursor is an important raw material of thin film deposition process, is applied to vapor deposition (including physical vapor deposition, chemical vapor deposition and atomic layer deposition) to form all kinds of thin film layers in compliance with semiconductor manufacturing requirements, and solid precursor, as the key material of semiconductor chip manufacturing, its purity and vapor pressure stability directly affect the film quality, and solid precursor source bottle is a device for storing solid precursor material, which transports solid precursor vapor from the source bottle to the reaction cavity through carrier gas.

[0003] However, the existing solid precursor packaging bottle in use, some chemicals will be accumulated on the inner wall of the inlet and outlet pipeline, and these chemicals cannot be quickly cleaned up when not used subsequently, and the gas needs to be filtered when transported in the bottle body, so it is urgent to improve the above problems. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a solid precursor packaging container to solve the problem that some chemicals will be accumulated on the inner wall of the inlet and outlet pipeline of the existing solid precursor packaging bottle in use, and these chemicals cannot be quickly cleaned up when not used subsequently, and the gas needs to be filtered when transported in the bottle body.

[0005] To achieve the above purpose, the utility model provides the following technical scheme: a solid precursor packaging container, including bottle body, the top surface of bottle body is provided with bottle cap body, the inside of bottle cap body is installed and is equipped with connecting pipe, the outer surface of connecting pipe is provided with mounting ring, the lower surface of mounting ring is provided with filter body, the top surface of connecting pipe is provided with outlet valve, the front surface of outlet valve is provided with outlet pipe;

[0006] Inlet valve, the upper surface of bottle cap body is installed, the front surface of inlet valve is provided with inlet pipe, and the size of inlet valve and outlet valve is same.

[0007] Preferably, the right side surface of outlet valve is provided with first mounting pipe, and the right side surface of first mounting pipe is provided with first mounting cylinder.

[0008] Preferably, the outer surface of first mounting cylinder is provided with connecting cylinder, and the second mounting cylinder is arranged at the end of connecting cylinder away from first mounting cylinder.

[0009] Preferably, the left surface of the second mounting cylinder is provided with a second mounting pipe, and the outer surface of the second mounting pipe is provided with a first sealing ring.

[0010] Preferably, the outer surface of the first mounting pipe is provided with a second sealing ring, and the second sealing ring is identical in structure to the first sealing ring.

[0011] Preferably, the left surface of the second mounting pipe is provided with a bypass purge valve, and the second mounting pipe is provided with two groups, and the other group of the second mounting pipe is mounted on the left surface of the bypass purge valve.

[0012] Compared with the prior art, the solid-state precursor packaging container has the following beneficial effects:

[0013] 1. The solid-state precursor packaging container is provided with a bottle body, a bottle cap body, a connecting pipe, a mounting ring, a filter body, an outlet valve, an outlet pipe, an inlet valve, an inlet pipe, a first mounting pipe and a first mounting cylinder. In use, the bottle body can be sealed as a whole by the bottle cap body, air can be introduced into the bottle body through the design of the inlet pipe and the inlet valve, and the gas in the bottle body can be exhausted through the outlet valve and the outlet pipe. The connecting pipe is connected to the inside of the bottle body, the lower end of the connecting pipe is provided with the filter body, the design of the filter body can increase the distribution effect of the gas, and has the effect of filtering, so that particulate matter can be prevented from entering the downstream pipeline of the source bottle. The overall protection effect is good. When the bottle body as a whole needs to be disassembled, first, the inlet valve and the outlet valve are closed, then the bypass purge valve is opened, the bypass purge valve can blow the inside of the two groups of second mounting pipes, the chemical substances remaining in the pipelines connected with the second mounting pipes are blown clean, and then the inlet and outlet are disassembled, which is safer and embodies the practicability of the design.

[0014] 2. The solid-state precursor packaging container is provided with a first mounting pipe, a first mounting cylinder, a connecting cylinder, a second mounting cylinder, a second mounting pipe, a first sealing ring, a second sealing ring and a bypass purge valve. In use, the design of the first sealing ring can seal between the second mounting pipe and the bypass purge valve, and the design of the second sealing ring can seal between the first mounting pipe and the outlet valve, so that the connection is good in overall sealing performance. Then, the first mounting cylinder and the second mounting cylinder are connected to each other through the connecting cylinder, the overall installation is convenient, and the functionality of the design is embodied. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is a three-dimensional schematic view of the structure of the utility model;

[0016] Figure 2 It is a three-dimensional schematic view of the structure of the outlet valve and the filter body of the utility model;

[0017] Figure 3 It is the three-dimensional schematic view of the structure of the import valve and bypass purge valve of the utility model;

[0018] Figure 4 It is the split schematic view of the structure of the first mounting pipe and the first sealing ring of the utility model.

[0019] In the figure: 1, bottle body; 2, bottle cap body; 3, connecting pipe; 4, mounting ring; 5, filter body; 6, outlet valve; 7, outlet pipe; 8, import valve; 9, import pipe; 10, first mounting pipe; 11, first mounting cylinder; 12, connecting cylinder; 13, second mounting cylinder; 14, second mounting pipe; 15, first sealing ring; 16, second sealing ring; 18, bypass purge valve. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0021] Please refer to Figures 1-4 The utility model provides an embodiment:

[0022] The solid-state precursor packaging container, the filter body 5, the outlet valve 6, the inlet valve 8 and the bypass purge valve 18 used in the application are all products that can be directly purchased on the market, and their principles and connection methods are all prior art known to those skilled in the art, so they will not be described here. The bottle body 1 is provided with a bottle cap body 2 on the top surface, a connecting pipe 3 is installed in the inside of the bottle cap body 2, an installation ring 4 is provided on the outer surface of the connecting pipe 3, a filter body 5 is provided on the lower surface of the installation ring 4, an outlet valve 6 is provided on the top surface of the connecting pipe 3, an outlet pipe 7 is provided on the front surface of the outlet valve 6, a first installation pipe 10 is provided on the right side surface of the outlet valve 6, a first installation cylinder 11 is provided on the right side surface of the first installation pipe 10, a connecting cylinder 12 is provided on the outer surface of the first installation cylinder 11, a second installation cylinder 13 is provided on the end of the connecting cylinder 12 away from the first installation cylinder 11, a second installation pipe 14 is provided on the left side surface of the second installation cylinder 13, a first sealing ring 15 is provided on the outer surface of the second installation pipe 14, a second sealing ring 16 is provided on the outer surface of the first installation pipe 10, the second sealing ring 16 is the same structure as the first sealing ring 15, a bypass purge valve 18 is provided on the left side surface of the second installation pipe 14, and the second installation pipe 14 is provided with two groups. Another group of second installation pipes 14 is installed on the left side surface of the bypass purge valve 18. The first sealing ring 15 can seal the second installation pipe 14 and the bypass purge valve 18. Similarly, the second sealing ring 16 can seal the first installation pipe 10 and the outlet valve 6. Therefore, the connection is sealed as a whole, and the installation is convenient.

[0023] The inlet valve 8 is installed on the upper surface of the bottle cap body 2, the front surface of the inlet valve 8 is provided with an inlet pipe 9, the size of the inlet valve 8 is the same as that of the outlet valve 6, and the top surfaces of the outlet valve 6 and the inlet valve 8 are provided with interfaces. The bottle body 1 can be sealed as a whole through the bottle cap body 2. Then, through the design of the inlet pipe 9 and the inlet valve 8, air can be introduced into the inside of the bottle body 1. Then, through the outlet valve 6 and the outlet pipe 7, the gas in the inside of the bottle body 1 can be exhausted. By connecting the connecting pipe 3 to the inside of the bottle body 1, the lower end of the connecting pipe 3 is provided with the filter body 5. The design of the filter body 5 can increase the distribution effect of the gas and has a filtering effect, which can prevent particulate matter from entering the downstream pipeline of the source bottle. The overall protection effect is good. When the bottle body 1 needs to be disassembled as a whole, first, the inlet valve 8 and the outlet valve 6 are closed, then the bypass purge valve 18 is opened, and the bypass purge valve 18 can purge the inside of the two groups of second installation pipes 14. The remaining chemicals in the pipeline connected by the second installation pipe 14 are purged clean, and then the inlet and outlet are disassembled, which is safer.

[0024] Working principle: when the staff uses the device, first, the device is connected with power supply, thereby providing power support for the device, the bottle body 1 is sealed as a whole through the bottle cap body 2, then the gas is imported into the bottle body 1 through the design of the inlet pipe 9 and the inlet valve 8, then the gas in the bottle body 1 is exported through the outlet valve 6 and the outlet pipe 7, the connecting pipe 3 is connected to the inside of the bottle body 1, the lower end of the connecting pipe 3 is provided with the filter body 5, the design of the filter body 5 can increase the distribution effect of the gas, and has the filtering effect, so that the particulate matter can be prevented from entering the downstream pipeline of the source bottle, the overall protection effect is good, when the bottle body 1 needs to be disassembled as a whole, first, the inlet valve 8 and the outlet valve 6 are closed, then the bypass purge valve 18 is opened, the bypass purge valve 18 can purge the inside of the two groups of second installation pipes 14, the residual chemicals in the pipeline connected with the second installation pipe 14 are purged clean, the design of the first sealing ring 15 can seal between the second installation pipe 14 and the bypass purge valve 18, the design of the second sealing ring 16 can seal between the first installation pipe 10 and the outlet valve 6, so that the sealing property of the connection is good, then the first installation cylinder 11 and the second installation cylinder 13 are communicated with each other through the connecting cylinder 12, the above is all the working principle of the utility model.

[0025] The above is only the preferred embodiment of the utility model, and does not limit the utility model in any form; the ordinary technical personnel in the industry can implement the utility model according to the drawings and the above description; however, the equivalent changes, such as some changes, modifications and evolution, made by the technical personnel familiar with the professional in the technical scheme range of the utility model, using the disclosed technical content, are equivalent embodiments of the utility model; meanwhile, any equivalent change, modification and evolution of the above embodiment according to the essential technology of the utility model are still within the protection range of the technical scheme of the utility model.

Claims

1. A solid-state precursor packaging container comprising a bottle body (1), the top surface of which is provided with a bottle cap body (2), characterized in that: The inside of the bottle cap body (2) is provided with a connecting pipe (3), the outer surface of the connecting pipe (3) is provided with a mounting ring (4), the lower surface of the mounting ring (4) is provided with a filter body (5), the top surface of the connecting pipe (3) is provided with an outlet valve (6), the front surface of the outlet valve (6) is provided with an outlet pipe (7); An inlet valve (8) is mounted on the upper surface of the bottle cap body (2), the front surface of the inlet valve (8) is provided with an inlet pipe (9), and the size of the inlet valve (8) is the same as that of the outlet valve (6).

2. The solid-state precursor packaging container of claim 1, wherein: The right surface of the outlet valve (6) is provided with a first mounting pipe (10), and the right surface of the first mounting pipe (10) is provided with a first mounting cylinder (11).

3. The solid-state precursor packaging container of claim 2, wherein: The outer surface of the first mounting cylinder (11) is provided with a connecting cylinder (12), and the end of the connecting cylinder (12) away from the first mounting cylinder (11) is provided with a second mounting cylinder (13).

4. The solid-state precursor packaging container of claim 3, wherein: The left surface of the second mounting cylinder (13) is provided with a second mounting pipe (14), and the outer surface of the second mounting pipe (14) is provided with a first sealing ring (15).

5. The solid-state precursor packaging container of claim 2, wherein: The outer surface of the first mounting pipe (10) is provided with a second sealing ring (16), and the structure of the second sealing ring (16) is the same as that of the first sealing ring (15).

6. The solid-state precursor packaging container of claim 4, wherein: The left surface of the second mounting pipe (14) is provided with a bypass purge valve (18), and the second mounting pipe (14) is provided with two groups, and the other group of the second mounting pipe (14) is mounted on the left surface of the bypass purge valve (18).

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