Activating agent spraying device

Abstract

The utility model relates to the technical field of semiconductor mold cleaning, and provides an activating agent spraying device which comprises an equipment body, a first linear module, a second linear module, a third linear module, an assembly part, a rotary driver and an activating agent spraying part. And the sliding block slides in the length direction of the equipment body. The first linear module, the second linear module and the third linear module are arranged and adjusted to drive the activating agent spraying piece to freely move in the X direction, the Y direction and the Z direction, so that the activating agent spraying piece can conduct activating agent spraying treatment on any part of the semiconductor mold; according to the activating agent spraying device, the activating agent spraying piece can rotate, the rotating activating agent spraying piece can conduct spraying treatment on the special-shaped convex face of the surface of the semiconductor mold, and therefore the activating agent spraying piece can conduct full-coverage spraying treatment on the complex shape of the surface of the semiconductor mold, and use is convenient.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor mold cleaning technology, and in particular to an activator spraying device. Background Technology

[0002] Semiconductor mold cleaning is a crucial step in semiconductor manufacturing, involving the cleaning and maintenance of mold surfaces to ensure product quality and production efficiency. Semiconductor manufacturing typically involves multiple steps, such as photolithography, etching, ion implantation, and chemical vapor deposition. During these processes, semiconductor molds come into contact with various chemicals and materials, easily accumulating dirt, residues, and particles.

[0003] Currently, dry ice is the most common method for cleaning semiconductor molds on the market. During dry ice cleaning, dry ice is sprayed onto the mold surface, utilizing the physical reaction of temperature difference (different substances have different contraction rates) to detach the dirt. When the -78°C dry ice particles come into contact with the dirt surface, they become brittle and explode, causing the dirt to shrink and loosen. The dry ice particles immediately vaporize and expand 800 times, generating a powerful peeling force to quickly remove the dirt, allowing it to completely fall off the mold surface. This achieves a fast, efficient, safe, and energy-saving cleaning effect. To improve the cleaning effect of dry ice, an activator can be sprayed onto the mold surface before dry ice cleaning to activate the dirt, making the mold easier to clean.

[0004] Utility model CN208321169U discloses an automatic activator spraying machine, comprising a base, a first upright plate on the left side of the upper surface of the base, and a second upright plate on the right side of the upper surface of the base. The upper surfaces of the first and second upright plates are connected to a top plate. A circular groove is machined at the center of the lower surface of the top plate. A cylinder with a downward-pointing telescopic end is located on the upper surface of the circular groove. A crossbar is located at the telescopic end of the cylinder, and several rotating shafts are mounted on the crossbar. Each rotating shaft has a robotic arm on its lower surface. However, when applied to semiconductor mold cleaning, due to the uneven surface of the semiconductor mold, activator needs to be sprayed to cover the mold to improve cleaning efficiency. The aforementioned automatic activator spraying machine is inconvenient for selectively spraying irregularly shaped semiconductor molds, resulting in the technical problem that the activator spraying cannot cover the semiconductor mold. Therefore, this solution proposes an activator spraying device to solve the above problem. Utility Model Content

[0005] In view of this, the present invention proposes an activator spraying device. By setting and adjusting the first, second, and third linear modules, the activator spraying component can move arbitrarily in the X, Y, and Z directions, allowing it to spray activator onto any part of the semiconductor mold. A rotary drive mechanism rotates the assembly, enabling the activator spraying component to rotate and spray onto irregularly shaped convex surfaces of the semiconductor mold. This allows the activator spraying component to provide full coverage spraying for complex shapes on the semiconductor mold surface, making it convenient to use.

[0006] The technical solution of this utility model is achieved as follows: This utility model provides an activator spraying device, including a device body, a first linear module, a second linear module, a third linear module, an assembly, a rotary drive motor, and an activator spraying component, wherein,

[0007] The first linear module is slidably disposed on the device body and slides along the length direction of the device body;

[0008] The second linear module is slidably disposed on the first linear module and slides in the width direction of the device body;

[0009] The third linear module is slidably disposed on the second linear module and slides in the height direction of the device body;

[0010] The assembly is rotatably mounted on the third linear module, and the activator spraying part is mounted on the assembly. The activator spraying part is used to spray activator.

[0011] The rotary drive is mounted on the third linear module and is used to drive the assembly to rotate.

[0012] Based on the above technical solutions, preferably, it also includes an activator storage device, which comprises a mounting box, an activator tank, and a plunger pump, wherein...

[0013] An installation box is disposed on the main body of the equipment, and the activator tank is disposed inside the installation box for storing activator. The activator tank includes a feed port extending out of the top of the installation box.

[0014] The top of the installation box has a discharge port, and the plunger pump is located inside the installation box to extract the activator from the activator tank and supply it from the discharge port.

[0015] Based on the above technical solutions, preferably, the activator spraying component includes an assembly box, a storage hopper, and a roller brush, wherein,

[0016] The assembly box is connected to the assembly parts via connectors, and the storage hopper is fixedly connected to the assembly box. The storage hopper has a storage cavity and a feed inlet. The storage cavity is connected to one side of the storage hopper and is used to store activator. The feed inlet is connected to the storage cavity and is used to connect to an external activator delivery pipeline.

[0017] A roller brush is rotatably disposed inside the storage cavity, and the roller brush protrudes from the storage cavity.

[0018] Based on the above technical solutions, preferably, the assembly box is provided with an assembly port, which is used for the external activator delivery pipeline to pass through.

[0019] Based on the above technical solutions, preferably, it also includes a drive motor, a rotating shaft, and a first transmission belt, wherein,

[0020] A drive motor is located inside the assembly box, and the rotating shaft is rotatably mounted on the storage hopper. The roller brush is fixedly connected to the rotating shaft, and the first transmission belt is drively connected to the output shaft of the drive motor and the rotating shaft.

[0021] Based on the above technical solutions, a preferred embodiment also includes an outer protective cover, wherein...

[0022] The output shaft of the drive motor extends to one side of the assembly box, the rotating shaft extends to one side of the storage hopper, the outer baffle is detachably mounted on the assembly box, and the first transmission belt is located inside the outer baffle.

[0023] Based on the above technical solutions, a preferred option also includes an inspection cover, wherein...

[0024] The inner cavity of the assembly box is connected to one side of the assembly box, and the inspection cover is detachably connected to the assembly box for covering the inner cavity of the assembly box.

[0025] Based on the above technical solutions, preferably, the assembly is an assembly pipe fitting, and the connector is sleeved on the periphery of the assembly. The connector includes two clamping parts, a clamping gap is formed between the two clamping parts, and bolt holes are provided on the clamping parts.

[0026] Based on the above technical solutions, preferably, it also includes a side mounting component and an adapter gear, wherein,

[0027] A side mounting component is disposed on the third linear module, and the adapter gear is rotatably disposed inside the side mounting component. The mounting part passes through the adapter gear and is fixedly connected to the adapter gear.

[0028] Based on the above technical solutions, a preferred embodiment further includes a second transmission belt, wherein...

[0029] The output shaft of the rotary drive passes through and extends to the inside of the side mounting member, and the second transmission belt is located inside the mounting member and is connected to the output shaft of the rotary drive and the adapter gear.

[0030] The activator spraying device of this invention has the following advantages over the prior art:

[0031] By adjusting the first, second, and third linear modules, the activator spraying component can move arbitrarily in the X, Y, and Z directions, allowing it to spray activator onto any part of the semiconductor mold. A rotary drive mechanism rotates the assembly, enabling the activator spraying component to rotate and spray onto irregularly shaped convex surfaces of the semiconductor mold. This allows for full coverage spraying of complex shapes on the semiconductor mold surface, facilitating its use. Attached Figure Description

[0032] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0033] Figure 1 This is a three-dimensional schematic diagram of the activator spraying device of this utility model;

[0034] Figure 2 The activator spraying device of this utility model Figure 1 An enlarged view of point A is shown below;

[0035] Figure 3 This is a three-dimensional schematic diagram of the structure of the activator storage part of the activator spraying device of this utility model;

[0036] Figure 4 This is a schematic diagram showing the connection between the first linear module and the second linear module of the activator spraying device of this utility model;

[0037] Figure 5 This is a three-dimensional schematic diagram of the structure of the activator spraying part of the activator spraying device of this utility model.

[0038] In the diagram: 1. Equipment body; 21. First linear module; 22. Second linear module; 23. Third linear module; 24. Assembly parts; 25. Rotary drive motor; 3. Activator spraying parts; 31. Assembly box; 311. Assembly port; 32. Storage hopper; 321. Storage chamber; 322. Feed inlet; 33. Roller brush; 4. Activator storage parts; 41. Mounting box; 411. Discharge port; 42. Activator tank; 421. Feed port; 43. Plunger pump; 5. Connecting parts; 51. Clamping part; 52. Clamping gap; 53. Bolt hole; 61. Drive motor; 62. Rotating shaft; 63. First transmission belt; 64. Outer guard; 65. Inspection cover; 71. Side mounting parts; 72. Adapter gear; 73. Second transmission belt Detailed Implementation

[0039] The technical solutions of this utility model will be clearly and completely described below with reference to the embodiments of this utility model. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of this utility model.

[0040] like Figures 1-5 As shown, the activator spraying device of this utility model is characterized by comprising: a device body 1, a first linear module 21, a second linear module 22, a third linear module 23, an assembly 24, a rotary drive 25, and an activator spraying component 3. The first linear module 21 is slidably disposed on the device body 1 and slides along the length direction of the device body 1; the second linear module 22 is slidably disposed on the first linear module 21 and slides along the width direction of the device body 1; the third linear module 23 is slidably disposed on the second linear module 22 and slides along the height direction of the device body 1; the assembly 24 is rotatably disposed on the third linear module 23, and the activator spraying component 3 is disposed on the assembly 24, the activator spraying component 3 being used to spray activator; the rotary drive 25 is disposed on the third linear module 23 and is used to drive the assembly 24 to rotate.

[0041] Figure 1 In the middle, the X direction is the length direction of the device body 1, the Y direction is the width direction of the device body 1, and the Z direction is the height direction of the device body 1.

[0042] Preferably, the rotary drive 25 is a rotary drive motor.

[0043] In specific implementation, by adjusting the first linear module 21 to slide along the length of the device body 1, by adjusting the second linear module 22 to slide along the width of the device body 1, and by adjusting the third linear module 23 to slide along the height of the device body 1, the activator spraying component 3 can move arbitrarily in the X / Y / Z directions, allowing it to spray activator onto any part of the semiconductor mold. By setting a rotary drive 25 to drive the assembly 24 to rotate, the activator spraying component 3 can rotate. The rotating activator spraying component 3 can spray onto irregularly shaped convex surfaces of the semiconductor mold, thus enabling full coverage spraying of complex shapes on the semiconductor mold surface, facilitating its use.

[0044] In a preferred embodiment, the device further includes an activator storage unit 4, which includes a mounting box 41, an activator tank 42, and a plunger pump 43. The mounting box 41 is mounted on the main body 1, and the activator tank 42 is located inside the mounting box 41 for storing activator. The activator tank 42 includes a feed port 421 extending from the top of the mounting box 41. The top of the mounting box 41 has a discharge port 411, and the plunger pump 43 is located inside the mounting box 41 for drawing out the activator from the activator tank 42 and discharging it from the discharge port 411.

[0045] In practice, the activator is supplied through the feed port 421 and stored inside the activator tank 42. An external activator delivery pipeline is connected to the plunger pump 43 and the activator spraying component 3 through the discharge port 411. Specifically, when activator needs to be supplied, the plunger pump 43 is started. The plunger pump 43 draws the activator from inside the activator tank 42 and supplies it to the activator spraying component 3 through the activator delivery pipeline, thereby completing the feeding process for the activator spraying component 3.

[0046] In a preferred embodiment, the activator spraying component 3 includes an assembly box 31, a storage hopper 32, and a roller brush 33. The assembly box 31 is connected to the assembly component 24 via a connector 5, and the storage hopper 32 is fixedly connected to the assembly box 31. The storage hopper 32 has a storage cavity 321 and a feed inlet 322. The storage cavity 321 is connected to one side of the storage hopper 32 and is used to store activator. The feed inlet 322 is connected to the storage cavity 321 and is used to connect to an external activator delivery pipeline. The roller brush 33 is rotatably disposed inside the storage cavity 321 and protrudes from the storage cavity 321.

[0047] In practice, the activator supplied from the activator delivery pipeline is stored inside the storage hopper 32. At this time, one side of the roller brush 33 is immersed in the activator stored in the storage hopper 32. Specifically, when the activator is sprayed, the roller brush 33 is started, and the roller brush immersed in the activator rotates out from the top of the storage hopper 32. The adhering activator is brushed onto the surface of the semiconductor mold by the roller brush 33, thereby completing the surface activator spraying treatment of the semiconductor mold.

[0048] In a preferred embodiment, the assembly box 31 is provided with an assembly port 311, which is used for the external activator delivery pipeline to pass through.

[0049] In practice, the activator delivery pipeline passes through the assembly port 311 and connects to the feed port 322.

[0050] In a preferred embodiment, the device further includes a drive motor 61, a rotating shaft 62, and a first transmission belt 63. The drive motor 61 is disposed inside the assembly box 31, the rotating shaft 62 is rotatably disposed on the storage hopper 32, and the roller brush 33 is fixedly connected to the rotating shaft 62. The first transmission belt 63 is connected to the output shaft of the drive motor 61 and the rotating shaft 62.

[0051] Specifically, when adjusting the rotation of the roller brush 33, the drive motor 61 is started. The drive motor 61 drives the rotating shaft 62 to rotate through the first transmission belt 63. The rotating shaft 62 drives the roller brush 33 to rotate, thereby completing the rotation adjustment process of the roller brush 33.

[0052] In a preferred embodiment, an outer shield 64 is also included, wherein the output shaft of the drive motor 61 extends to one side of the assembly box 31, the rotating shaft 62 extends to one side of the storage hopper 32, the outer shield 64 is detachably mounted on the assembly box 31, and the first transmission belt 63 is located inside the outer shield 64.

[0053] In this design, the outer guard 64 is used to protect the first transmission belt 63, thereby increasing the transmission stability of the first transmission belt 63.

[0054] In a preferred embodiment, an inspection cover 65 is also included, wherein the inner cavity of the assembly box 31 is connected to one side of the assembly box 31, and the inspection cover 65 is detachably connected to the assembly box 31 for covering the inner cavity of the assembly box 31.

[0055] In practice, the inspection cover 65 is connected to the assembly box 31 by bolts. By removing the bolts connecting the inspection cover 65, the inspection cover 65 can be removed to facilitate maintenance of the drive motor 61 inside the assembly box 31.

[0056] In a preferred embodiment, the assembly 24 is an assembly pipe fitting, and the connector 5 is sleeved on the periphery of the assembly 24. The connector 5 includes two clamping parts 51, and a clamping gap 52 is formed between the two clamping parts 51. Bolt holes 53 are provided on the clamping parts 51.

[0057] In practice, the connector 5 is sleeved onto the assembly 24, and the bolt holes 53 on the clamping part 51 are connected by bolt threads. By shortening the clamping gap 52, the connection between the connector 5 and the assembly 24 is completed. By setting a clamping gap 52 between the two clamping parts 51, the connector 5 can be adapted to clamp and connect assemblies 24 of different sizes.

[0058] In a preferred embodiment, the device further includes a side mounting member 71 and a transition gear 72, wherein the side mounting member 71 is disposed on the third linear module 23, and the transition gear 72 is rotatably disposed on the inner side of the side mounting member 71, and the mounting part 24 passes through the transition gear 72 and is fixedly connected to the transition gear 72.

[0059] It also includes a second drive belt 73, wherein the output shaft of the rotary drive 25 passes through and extends to the inside of the side mounting member 71, the second drive belt 73 is located inside the mounting member 71, and is connected to the output shaft of the rotary drive 25 and the adapter gear 72 for transmission.

[0060] Specifically, when it is necessary to drive the activator spraying part 3 to rotate, the rotary drive 25 is started. At this time, the rotary drive 25 drives the adapter gear 72 to rotate through the second transmission belt 73, thereby completing the rotation adjustment process of the activator spraying part 3.

[0061] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An activator spray device characterized by: The device comprises a device body (1), a first linear module (21), a second linear module (22), a third linear module (23), an assembly (24), a rotary drive (25) and an activator spraying part (3), wherein, The first linear module (21) is slidably arranged on the device body (1) and slides in the length direction of the device body (1); The second linear module (22) is slidably arranged on the first linear module (21) and slides in the width direction of the device body (1); The third linear module (23) is slidably arranged on the second linear module (22) and slides in the height direction of the device body (1); The assembly (24) is rotatably arranged on the third linear module (23), and the activator spraying part (3) is arranged on the assembly (24), and the activator spraying part (3) is used for spraying an activator; The rotary drive (25) is arranged on the third linear module (23) and is used for driving the assembly (24) to rotate.

2. The activator spray device of claim 1, wherein: Further comprising an activator storage part (4), the activator storage part (4) comprises a mounting box (41), an activator tank (42) and a plunger pump (43), wherein, The mounting box (41) is arranged on the device body (1), and the activator tank (42) is arranged inside the mounting box (41) and is used for storing an activator, and the activator tank (42) comprises a feeding port (421) extending out of the top of the mounting box (41); A discharging port (411) is formed in the top of the mounting box (41), and the plunger pump (43) is arranged inside the mounting box (41) and is used for pumping out the activator in the activator tank (42) and discharging it from the discharging port (411).

3. The activator spray device of claim 2, wherein: The activator spraying part (3) comprises an assembly box (31), a storage hopper (32) and a rolling brush (33), wherein, The assembly box (31) is connected with the assembly (24) through a connecting piece (5), and the storage hopper (32) is fixedly connected with the assembly box (31), and a storage cavity (321) and a feeding port (322) are formed in the storage hopper (32), the storage cavity (321) is communicated to one side of the storage hopper (32) and is used for storing an activator, and the feeding port (322) is communicated with the storage cavity (321) and is used for connecting an external activator conveying pipeline; The rolling brush (33) is rotatably arranged inside the storage cavity (321) and protrudes from the storage cavity (321).

4. The activator spray device of claim 3, wherein: An assembly port (311) is formed in the assembly box (31) and is used for allowing an external activator conveying pipeline to pass through.

5. The activator spray device of claim 4, wherein: Further comprising a drive motor (61), a rotating shaft (62) and a first transmission belt (63), wherein, The drive motor (61) is arranged inside the assembly box (31), the rotating shaft (62) is rotatably arranged on the storage hopper (32), the rolling brush (33) is fixedly connected with the rotating shaft (62), and the first transmission belt (63) is in transmission connection with the output shaft of the drive motor (61) and the rotating shaft (62).

6. The activator spray device of claim 5, wherein: Further comprising an outer protective cover (64), wherein, The output shaft of the driving motor (61) extends to one side of the assembly box (31), the rotating shaft (62) extends to one side of the storage hopper (32), the outer protective cover (64) is detachably arranged on the assembly box (31), and the first transmission belt (63) is located inside the outer protective cover (64).

7. The activator spray device of claim 5, wherein: Further comprising an inspection cover (65), wherein, The inner cavity of the assembly box (31) is communicated to one side of the assembly box (31), and the inspection cover (65) is detachably connected to the assembly box (31) for covering the inner cavity of the assembly box (31).

8. The activator spray device of claim 3, wherein: The assembly part (24) is an assembly pipe, and the connecting part (5) is sleeved on the peripheral side of the assembly part (24), the connecting part (5) comprises two clamping parts (51), a clamping gap (52) is formed between the two clamping parts (51), and bolt holes (53) are formed in the clamping parts (51).

9. The activator spray device of claim 1, wherein: Further comprising a side mounting part (71) and a transfer gear (72), wherein, The side mounting part (71) is arranged on the third linear module (23), and the transfer gear (72) is rotatably arranged inside the side mounting part (71), the assembly part (24) passes through the transfer gear (72) and is fixedly connected with the transfer gear (72).

10. The activator spray device of claim 9, wherein: Further comprising a second transmission belt (73), wherein, The output shaft of the rotating driving machine (25) penetrates and extends to the inside of the side mounting part (71), the second transmission belt (73) is located inside the mounting part (71) and is in transmission connection with the output shaft of the rotating driving machine (25) and the transfer gear (72).

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