Semiconductor vacuum chamber sealing ring production device

Abstract

The utility model relates to the technical field of sealing rings, and provides a semiconductor vacuum chamber sealing ring production device which comprises a base, the top of the base is fixedly connected with a supporting frame, the inner side face of the supporting frame is fixedly connected with material extrusion equipment, and the top of the base is provided with a cooling device. The bottom of the fixing plate is fixedly connected to the top of the base, a motor is fixedly connected to the side face of the fixing plate, a threaded rod is fixedly connected to an output shaft of the motor, a threaded sleeve is in threaded connection to the circumferential face of the threaded rod, a push rod is fixedly connected to the circumferential face of the threaded sleeve, and a push plate is fixedly connected to the side face of the push rod. The top of the base is slidably connected with a forming groove block, the base is fixedly connected with a cooling box, and the top of the cooling box is fixedly connected with a temperature regulation and control panel. By means of the technical scheme, the problem that in the prior art, forming of the sealing ring is slow is solved.

Description

Technical Field

[0001] This utility model relates to the field of sealing ring technology, specifically to a semiconductor vacuum chamber sealing ring production device. Background Technology

[0002] A sealing ring is a component commonly used in mechanical, equipment, and piping connections to prevent the leakage of liquids, gases, or other substances. Its function is to fill the gaps between contact surfaces, creating a sealed space that effectively maintains pressure, temperature, or other operating conditions within the system.

[0003] A method and apparatus for repairing a semiconductor vacuum cavity sealing groove, as disclosed in the publication (Publication No.: CN119114769A), includes the following steps: S1, clamping and fixing the workpiece, on which a constricted sealing groove to be repaired is provided; S2, placing the machined surface of the repair apparatus against the opening of the sealing groove, wherein the machined surface is an arc-shaped structure; S3, adjusting the height of the repair apparatus relative to the workpiece, transmitting pressure to the opening of the groove through the machined surface, causing the opening of the groove to contract under the pressure of the machined surface. This invention provides a method for repairing a semiconductor vacuum cavity sealing groove, which can repair the sealing groove when the sealing groove size is too large to fit the sealing ring, thereby reducing the size of the sealing groove and ensuring the sealing effect.

[0004] The slots, arc-shaped structures, and other components in the above-mentioned applications work together to repair the sealing groove, reduce its size, and ensure the sealing effect. However, they cannot achieve the rapid prototyping effect in the production of sealing rings. Therefore, we propose a semiconductor vacuum chamber sealing ring production device. Utility Model Content

[0005] This invention proposes a semiconductor vacuum chamber sealing ring production device, which solves a problem in the related technology of semiconductor vacuum chamber sealing ring production devices.

[0006] The technical solution of this utility model is as follows: This utility model is a semiconductor vacuum chamber sealing ring production device including a base, a support frame fixedly connected to the top of the base, a material extrusion device fixedly connected to the inner side of the support frame, and a cooling device provided on the top of the base.

[0007] The cooling device includes a fixed plate, the bottom of which is fixedly connected to the top of a base. A motor is fixedly connected to the side of the fixed plate, and a threaded rod is fixedly connected to the output shaft of the motor. A threaded sleeve is threaded onto the circumferential surface of the threaded rod, and a push rod is fixedly connected to the circumferential surface of the threaded sleeve. A push plate is fixedly connected to the side of the push rod. A forming groove block is slidably connected to the top of the base, and a cooling box is fixedly connected to the base. A temperature control panel is fixedly connected to the top of the cooling box, and a limit rod is fixedly connected to the side of the fixed plate. The entire cooling device provides precise cooling control through the coordinated work of multiple components. The motor drives the threaded rod to rotate, and the flow of the cooling medium can be precisely controlled by adjusting the push rod and push plate. Simultaneously, the temperature control panel ensures that the cooling device can adjust the temperature as needed, and the limit rod ensures that the movement range of each component is limited, avoiding misoperation or damage. This achieves the effect of accelerating the rapid cooling and forming of the sealing ring.

[0008] The circumferential surface of the threaded sleeve is slidably connected to the circumferential surface of the limiting rod, and a rotating shaft is rotatably connected to the inner side of the cooling box. This design enhances the flexibility and functionality of the equipment, ensuring its stability and efficiency during use.

[0009] A cover plate is fixedly connected to the circumference of the rotating shaft, and the diameter of the cover plate is the same as the diameter of the cooling box. Through its docking, fixing, and sealing functions with the cooling box, the cover plate plays a crucial role in improving cooling efficiency, protecting internal components, and enhancing equipment stability.

[0010] The sides of the forming trough are located on the displacement trajectory of the pusher plate, and the top of the forming trough is located directly below the material extrusion equipment. This layout, through precise control of material flow and the forming process, not only improves production efficiency but also optimizes product quality and resource utilization efficiency.

[0011] A return torsion spring is fixedly connected to the circumferential surface of the rotating shaft, and one end of the return torsion spring is fixedly connected to the inner surface of the cooling box. The return torsion spring helps improve the stability, efficiency, and durability of the entire system by providing restoring force, reducing friction and vibration, ensuring accurate positioning, and mitigating impact.

[0012] The side of the cover plate is located on the displacement trajectory of the forming groove block, and the initial state of the reset torsion spring is relaxed. This design, through the cooperation between the cover plate and the trajectory of the forming groove block and the relaxed initial state of the reset torsion spring, can effectively control material flow, protect equipment, improve operational safety, and ensure the automatic reset function of the cover plate, thereby enhancing the stability and efficiency of the entire system.

[0013] A collection device is provided on the side of the base, comprising a collection box slidably connected to the side of the base. The collection box has an inlet on its side, casters at the bottom, and a handle fixedly connected to its side. This collection device design not only improves operational flexibility, efficiency, and comfort, but also effectively maintains a clean working environment, reduces material loss, and optimizes the user experience. It thus achieves automated collection of finished production materials, improving work efficiency.

[0014] The side of the feed inlet is located on the displacement trajectory of the forming groove block, and multiple casters are provided. The multiple casters are mainly used to improve the movement accuracy and guiding stability of the collection box, reduce equipment wear, and improve the efficiency and accuracy of the overall processing.

[0015] The working principle and beneficial effects of this utility model are as follows:

[0016] 1. This utility model achieves its effect through the coordinated operation of components such as a motor, threaded rod, threaded sleeve, push rod, limiting rod, and cooling box. When material is squeezed into the forming groove, the motor is started, driving the threaded rod to rotate. The rotation of the threaded rod causes the threaded sleeve to move horizontally under the constraint of the limiting rod. The horizontal movement of the threaded sleeve causes the push rod to move horizontally, which in turn causes the push plate to move horizontally. The horizontal movement of the push plate pushes the forming groove block to move horizontally, which in turn pushes the cover plate to rotate counterclockwise. The forming groove block then enters the cooling box for cooling. This achieves the effect of accelerating the rapid cooling and forming of the sealing ring.

[0017] 2. This utility model achieves automated collection of produced materials through the coordinated operation of components such as a motor, threaded rod, threaded sleeve, push rod, limiting rod, handle, and collection box. The operator pushes the handle, which moves the collection box using casters to the desired position. The motor then starts, driving the threaded rod to rotate. This rotation causes the threaded sleeve to move horizontally under the constraint of the limiting rod. The horizontal movement of the threaded sleeve drives the push rod horizontally, which in turn drives the push plate horizontally. The push plate then pushes the forming groove block horizontally, causing the cover plate to rotate counter-clockwise. The forming groove block enters the cooling box, pushing the previously entered forming groove block horizontally. This horizontal movement of the forming groove block opens the cover plate counter-clockwise, allowing the forming groove block to fall into the collection box from the inlet for collection. This achieves automated collection of produced materials, improving work efficiency. Attached Figure Description

[0018] The preferred embodiments will be described below in a clear and easy-to-understand manner, in conjunction with the accompanying drawings, to further explain the above-mentioned characteristics, technical features, advantages and implementation methods of this utility model.

[0019] Figure 1 This is a schematic diagram of the main structure of this utility model;

[0020] Figure 2 This is a side view of the structure of this utility model;

[0021] Figure 3 This is a schematic diagram of the cooling device structure of this utility model;

[0022] Figure 4 This is a schematic diagram of the structure of the knot collection device of this utility model;

[0023] Figure 5 This is a side sectional view of the present invention.

[0024] Figure 6 This utility model Figure 5 A magnified structural diagram of A in the diagram.

[0025] In the diagram: 1. Base; 2. Support frame; 3. Material extrusion equipment; 4. Cooling device; 5. Collection device; 41. Fixing plate; 42. Motor; 43. Threaded rod; 45. Threaded sleeve; 46. Push rod; 47. Push plate; 48. Forming trough; 49. Cooling box; 410. Temperature control panel; 411. Limiting rod; 412. Rotating shaft; 413. Cover plate; 414. Return torsion spring; 51. Collection box; 52. Feed inlet; 53. Casters; 54. Handle. Detailed Implementation

[0026] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the specific implementation methods of this utility model will be described below with reference to the accompanying drawings. Obviously, the drawings described below are merely some embodiments of this utility model. For those skilled in the art, other drawings and other implementation methods can be obtained based on these drawings without any creative effort.

[0027] To keep the drawings concise, only the parts relevant to the utility model are shown schematically in each drawing; these do not represent the actual structure of the product. Furthermore, for ease of understanding, in some drawings, only one of the components with the same structure or function is schematically shown, or only one is labeled. In this document, "a" not only means "only one," but can also mean "more than one," and "several" includes "two" and "more than two."

[0028] In this document, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0029] Furthermore, in the description of this application, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0030] Example 1

[0031] Reference Figures 1-6 The first embodiment of this utility model proposes a base 1, a support frame 2 fixedly connected to the top of the base 1, a material extrusion device 3 fixedly connected to the inner side of the support frame 2, and a cooling device 4 provided on the top of the base 1.

[0032] The cooling device 4 includes a fixed plate 41, the bottom of which is fixedly connected to the top of the base 1. A motor 42 is fixedly connected to the side of the fixed plate 41. A threaded rod 43 is fixedly connected to the output shaft of the motor 42. A threaded sleeve 45 is threadedly connected to the circumferential surface of the threaded rod 43. A push rod 46 is fixedly connected to the circumferential surface of the threaded sleeve 45. A push plate 47 is fixedly connected to the side of the push rod 46. A forming groove block 48 is slidably connected to the top of the base 1. A cooling box 49 is fixedly connected to the base 1. A temperature control panel 410 is fixedly connected to the top of the cooling box 49. A limit rod 411 is fixedly connected to the side of the fixed plate 41. The entire cooling device 4 provides precise cooling control through the coordinated work of multiple components. The motor 42 drives the threaded rod 43 to rotate. By adjusting the push rod 46 and the push plate 47, the flow of the cooling medium can be precisely controlled. At the same time, the temperature control panel 410 ensures that the cooling device 4 can adjust the temperature as needed, and the limit rod 411 ensures that the movement range of each component is limited, avoiding misoperation or damage. This achieves the effect of accelerating the rapid cooling and forming of the sealing ring.

[0033] The circumferential surface of the threaded sleeve 45 is slidably connected to the circumferential surface of the limiting rod 411, and the inner side of the cooling box 49 is rotatably connected to the rotating shaft 412. This design can improve the flexibility and functionality of the equipment, and ensure its stability and efficiency during use.

[0034] A cover plate 413 is fixedly connected to the circumferential surface of the rotating shaft 412. The diameter of the cover plate 413 is the same as the diameter of the cooling box 49. The cover plate 413 plays a key role in improving cooling efficiency, protecting internal components, and enhancing equipment stability through its docking, fixing, and sealing functions with the cooling box 49.

[0035] The sides of the forming trough 48 are located on the displacement trajectory of the push plate 47, and the top of the forming trough 48 is located directly below the material extrusion device 3. This layout, through precise control of material flow and the forming process, not only improves production efficiency but also optimizes product quality and resource utilization efficiency.

[0036] A return torsion spring 414 is fixedly connected to the circumferential surface of the rotating shaft 412, and one end of the return torsion spring 414 is fixedly connected to the inner surface of the cooling box 49. The return torsion spring 414 helps improve the stability, efficiency and durability of the entire system by providing restoring force, reducing friction and vibration, ensuring accurate positioning and mitigating impact.

[0037] The side of the cover plate 413 is located on the displacement trajectory of the forming groove block 48, and the initial state of the reset torsion spring 414 is relaxed. This design, through the cooperation between the cover plate 413 and the trajectory of the forming groove block 48 and the relaxed initial state of the reset torsion spring 414, can effectively control material flow, protect equipment, improve operational safety, and ensure the automatic reset function of the cover plate 413, thereby enhancing the stability and efficiency of the entire system.

[0038] In this embodiment, the motor 42 is started, and the motor 42 drives the threaded rod 43 to rotate. The rotation of the threaded rod 43 causes the threaded sleeve 45 to move horizontally under the restriction of the limiting rod 411. The horizontal movement of the threaded sleeve 45 causes the push rod 46 to move horizontally. The horizontal movement of the push rod 46 causes the push plate 47 to move horizontally. The horizontal movement of the push plate 47 pushes the forming groove block 48 to move horizontally. The horizontal movement of the forming groove block 48 pushes the cover plate 413 to rotate counterclockwise. The forming groove block 48 enters the cooling box 49 for cooling. When the cover plate 413 loses its pushing force, the reset torsion spring 414 drives the rotating shaft 412 to rotate clockwise to reset through its own torque. The reset of the rotating shaft 412 drives the cover plate 413 to rotate and reset.

[0039] Example 2

[0040] Reference Figures 1-6This is the second embodiment of the present invention. This embodiment differs from the first embodiment in that: a collecting device 5 is provided on the side of the base 1. The collecting device 5 includes a collecting box 51, which is slidably connected to the side of the base 1. An inlet 52 is provided on the side of the collecting box 51, casters 53 are provided at the bottom of the collecting box 51, and a handle 54 is fixedly connected to the side of the collecting box 51. This collecting device 5 design not only improves operational flexibility, efficiency, and comfort, but also effectively maintains a clean working environment, reduces material loss, and optimizes the user experience of the equipment. Thus, it achieves the automated collection of finished production materials, improving work efficiency.

[0041] The side of the feed inlet 52 is located on the displacement trajectory of the forming groove block 48, and multiple casters 53 are provided. The multiple casters 53 are mainly used to improve the movement accuracy and guiding stability of the collection box 51, reduce equipment wear, and improve the efficiency and accuracy of the overall processing.

[0042] Compared to Embodiment 1, further, the operator pushes the handle 54, which moves the collection box 51 under the action of the casters 53 to the desired position. The motor 42 is then started, driving the threaded rod 43 to rotate. The rotation of the threaded rod 43 causes the threaded sleeve 45 to move horizontally under the constraint of the limiting rod 411. The horizontal movement of the threaded sleeve 45 causes the push rod 46 to move horizontally, which in turn causes the push plate 47 to move horizontally. The horizontal movement of the push plate 47 pushes the forming groove block 48. The forming groove block 48 moves horizontally, pushing the cover plate 413 to rotate counterclockwise. The forming groove block 48 enters the cooling box 49, pushing the previously entered forming groove block 48 in the cooling box 49 to move horizontally. The horizontal movement of the forming groove block 48 pushes the cover plate 413 to rotate counterclockwise to open. The forming groove block 48 moves horizontally to the collection box 51 and falls into the collection box 51 from the inlet 52 for collection. After the forming groove block 48 falls into the collection box 51, the cover plate 413 rotates and resets by its own gravity.

[0043] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A semiconductor vacuum chamber sealing ring production apparatus, characterized in that, Includes a base (1), a support frame (2) is fixedly connected to the top of the base (1), a material extrusion device (3) is fixedly connected to the inner side of the support frame (2), and a cooling device (4) is provided on the top of the base (1); The cooling device (4) includes a fixed plate (41), the bottom of which is fixedly connected to the top of the base (1). A motor (42) is fixedly connected to the side of the fixed plate (41). A threaded rod (43) is fixedly connected to the output shaft of the motor (42). A threaded sleeve (45) is threadedly connected to the circumferential surface of the threaded rod (43). A push rod (46) is fixedly connected to the circumferential surface of the threaded sleeve (45). A push plate (47) is fixedly connected to the side of the push rod (46). A forming groove block (48) is slidably connected to the top of the base (1). A cooling box (49) is fixedly connected to the base (1). A temperature control panel (410) is fixedly connected to the top of the cooling box (49). A limit rod (411) is fixedly connected to the side of the fixed plate (41).

2. The semiconductor vacuum chamber sealing ring production apparatus according to claim 1, characterized in that, The circumferential surface of the threaded sleeve (45) is slidably connected to the circumferential surface of the limiting rod (411), and the inner side of the cooling box (49) is rotatably connected to the rotating shaft (412).

3. The semiconductor vacuum chamber sealing ring production apparatus according to claim 2, characterized in that, A cover plate (413) is fixedly connected to the circumferential surface of the rotating shaft (412), and the diameter of the cover plate (413) is the same as the diameter of the cooling box (49).

4. The semiconductor vacuum chamber sealing ring production apparatus according to claim 3, characterized in that, The side of the forming trough (48) is located on the displacement trajectory of the push plate (47), and the top of the forming trough (48) is located directly below the material extrusion device (3).

5. The semiconductor vacuum chamber sealing ring production apparatus according to claim 4, characterized in that, A reset torsion spring (414) is fixedly connected to the circumferential surface of the rotating shaft (412), and one end of the reset torsion spring (414) is fixedly connected to the inner side of the cooling box (49).

6. The semiconductor vacuum chamber sealing ring production apparatus according to claim 5, characterized in that, The side of the cover plate (413) is located on the displacement trajectory of the forming groove block (48), and the initial state of the reset torsion spring (414) is relaxed.

7. The semiconductor vacuum chamber sealing ring production apparatus according to claim 6, characterized in that, A collection device (5) is provided on the side of the base (1). The collection device (5) includes a collection box (51). The side of the collection box (51) is slidably connected to the side of the base (1). An inlet (52) is provided on the side of the collection box (51). A caster wheel (53) is provided at the bottom of the collection box (51). A handle (54) is fixedly connected to the side of the collection box (51).

8. The semiconductor vacuum chamber sealing ring production apparatus according to claim 7, characterized in that, The side of the feed inlet (52) is located on the displacement trajectory of the forming groove block (48), and multiple casters (53) are provided.

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