Cathode rotating structure for horizontal rotating double-sided electroplating

Abstract

The utility model provides a cathode rotation structure for horizontal rotation double-sided electroplating, which comprises a rotation driving assembly with an external structure, a cathode conduction assembly and an electroplating clamp with an internal structure, the cathode conduction assembly comprises a cathode ring arranged on the insulation ring, at least one cathode rolling connection part arranged on the outer side of the rotation driving assembly and a multi-stage conduction part, and the cathode ring is connected with a power supply cathode through the cathode rolling connection part; the multi-stage conduction component comprises a plurality of conduction supporting pieces evenly distributed at the upper end of the cathode ring, a conduction disc connected to the upper ends of the conduction supporting pieces and a plurality of conduction rods connected with the conduction disc and the electroplating clamp, and the electroplating clamp comprises a sinking clamp supporting ring and a plurality of cathode contact pieces arranged on the sinking clamp supporting ring. The cathode contact pieces are connected with the conduction rods in a one-to-one correspondence mode and conduct electricity to the piece to be plated through contact of the electroplating liquid. The utility model relates to the field of TGV electroplating technology.

Description

Technical Field

[0001] This utility model relates to the field of TGV electroplating process, and in particular to a cathode rotating structure for horizontal rotating double-sided electroplating. Background Technology

[0002] In TGV (Through Glass Via) electroplating, horizontal double-sided electroplating technology is widely used to achieve uniform coatings on both sides. Traditional electroplating equipment typically employs a fixed cathode design, leading to uneven electric field distribution, differences in solution flow, and inaccurate anode region control during electroplating, thus affecting coating uniformity. This is especially problematic for large-area or high-precision electroplated parts, where a fixed cathode structure struggles to eliminate coating thickness fluctuations caused by electric field gradients, solution concentration differences, and uneven anode current distribution. Furthermore, some existing technologies attempt to achieve cathode rotation through built-in drive structures, but these drive components are susceptible to corrosion from the plating solution, posing a risk of contamination. Moreover, the conductive connections of the rotating mechanism often rely on sliding or fixed contacts, which are prone to poor contact and conductivity stability due to wear or oxidation over long-term use, making it difficult to guarantee continuous and uniform current transmission during electroplating. Simultaneously, the lack of effective insulation between the rotating drive mechanism and the cathode easily leads to leakage or short circuits, further exacerbating safety hazards.

[0003] Therefore, the inventors designed a horizontally rotating double-sided electroplating cathode rotating structure to solve the above problems. Utility Model Content

[0004] To address the shortcomings of the prior art, this utility model provides a cathode rotation structure for horizontal rotating double-sided electroplating, aiming to solve the technical problems in the prior art such as uneven electric field distribution and inconsistent plating thickness caused by cathode fixation, as well as poor conductivity stability of the rotating mechanism, easy corrosion and contamination of the driving components by the electroplating solution, and leakage and short circuit caused by insufficient insulation.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is: a horizontal rotating double-sided electroplating cathode rotation structure, comprising an externally mounted rotation drive assembly, a cathode conduction assembly, and an internally mounted electroplating fixture. The rotation drive assembly includes an insulating ring. The cathode conduction assembly includes a cathode ring disposed on the insulating ring, at least one cathode rolling connection component disposed on the outside of the rotation drive assembly, and a multi-stage conduction component. The cathode ring is connected to a power cathode through the cathode rolling connection component. The multi-stage conduction component includes several conduction support members evenly distributed on the upper end of the cathode ring, a conduction disk connected to the upper end of the conduction support members, and several conduction rods connecting the conduction disk and the electroplating fixture. The electroplating fixture includes a recessed fixture support ring and several cathode contacts disposed thereon. The cathode contacts are connected one-to-one with the conduction rods and conduct electricity to the workpiece to be plated through contact with the electroplating solution.

[0006] Based on the above, the beneficial effect of a cathode rotation structure for horizontal rotating double-sided electroplating is that it solves the technical problems of uneven electric field distribution, inconsistent plating thickness, and poor conductivity stability of the rotating mechanism caused by cathode fixation in existing horizontal double-sided electroplating devices; mainly reflected in:

[0007] 1. This utility model achieves a stable conductive connection between the rotating cathode and the power supply by using a rolling contact method through the cathode ring and the cathode rolling connection component in the cathode conduction assembly. This solves the problems of poor conductivity stability and easy wear and oxidation caused by traditional sliding contact or fixed contact, and ensures continuous and uniform current transmission during the electroplating process.

[0008] 2. This utility model uses a ring layout and multi-point uniform distribution design in the multi-stage conductive components, including conductive support, conductive disk and conductive rod, to evenly transmit the current to each cathode contact of the electroplating fixture, thus solving the problem of inconsistent coating thickness caused by uneven distribution of electric field gradient and anode current.

[0009] 3. This utility model completely isolates the rotary drive mechanism from the cathode conductive ring by using the insulating ring in the rotary drive assembly, thus avoiding safety hazards caused by leakage or short circuit during rotation. At the same time, the external placement of the rotary drive assembly prevents the electroplating solution from corroding and contaminating the drive components.

[0010] Furthermore, the rotary drive assembly also includes a drive body, a carrier body, and a driven body rotatably coupled to the carrier body. The drive body drives the driven body to rotate through meshing transmission, and the insulating ring is disposed at the upper end of the driven body.

[0011] Based on the above, the beneficial effect of the driving body is that it drives the driven body to rotate through meshing transmission; the beneficial effect of the bearing body is that it allows for the rotational mating installation of the driven body; and the beneficial effect of the insulating ring is that it prevents leakage by isolating the driven body and the cathode ring.

[0012] Furthermore, the driving body includes a drive motor and a drive gear connected to its output end, and the outer wall of the driven body is provided with teeth that mesh with the drive gear.

[0013] Furthermore, the cathode rolling connection component includes a connecting mounting block, a connecting rod with one end disposed on the connecting mounting block, and a cathode connecting wheel hinged to the other end of the connecting rod. The outer wall of the cathode ring is provided with an annular connecting groove, the cathode connecting wheel makes rolling contact with the connecting groove, and the connecting rod is connected to the device power cathode electrical signal through the inside of the connecting mounting block.

[0014] Based on the above, the beneficial effects of the connecting rod are that it solves the problem of uneven contact pressure between the cathode connecting wheel and the annular connecting groove by using the hinged cathode connecting wheel; the beneficial effect of the cathode connecting wheel is that it solves the problem of poor conductivity stability caused by traditional sliding contact by using the rolling contact method; and the beneficial effect of the annular connecting groove is that it solves the problem of discontinuous current transmission during rotation by providing a continuous contact track.

[0015] Furthermore, the conduction disk has a ring structure and is coaxially arranged with the sinking clamp support ring, and the conduction support members are evenly distributed along the outer circumference of the conduction disk.

[0016] Furthermore, the conductive rods are evenly distributed along the inner circumference of the conductive disk, and the lower end of each conductive rod is vertically connected to the corresponding cathode contact.

[0017] To more clearly illustrate the above-mentioned features of this utility model and the objectives it aims to achieve, the present utility model will be further described below in conjunction with the accompanying drawings and specific embodiments. Attached Figure Description

[0018] Figure 1 : This is a perspective view of the present invention;

[0019] Figure 2 :for Figure 1 An enlarged schematic diagram of part A.

[0020] Reference numerals: 1-Rotary drive assembly, 11-Driver body, 111-Drive motor, 112-Drive gear, 12-Bearing body, 13-Driven body, 14-Insulating ring, 2-Cathode conduction assembly, 21-Cathode ring, 211-Annular connecting groove, 22-Cathode rolling connecting component, 221-Connecting mounting block, 222-Connecting rod, 223-Cathode connecting wheel, 23-Multi-stage conduction component, 231-Conduction support component, 232-Conduction disk, 233-Conduction rod, 3-Electroplating fixture, 31-Cathode contact component, 32-Sinking fixture support ring. Detailed Implementation

[0021] like Figures 1-2As shown, a horizontal rotating double-sided electroplating cathode rotation structure includes an externally mounted rotation drive assembly 1, a cathode conduction assembly 2, and an internally mounted electroplating fixture 3. The rotation drive assembly 1 includes an insulating ring 14. The cathode conduction assembly 2 includes a cathode ring 21 disposed on the insulating ring 14, at least one cathode rolling connection component 22 disposed on the outside of the rotation drive assembly 1, and a multi-stage conduction component 23. The cathode ring 21 is connected to the power cathode through the cathode rolling connection component 22. The multi-stage conduction component 23 includes a plurality of conduction support members 231 evenly distributed on the upper end of the cathode ring 21, a conduction disk 232 connected to the upper end of the conduction support member 231, and a plurality of conduction rods 233 connecting the conduction disk 232 and the electroplating fixture 3. The electroplating fixture 3 includes a recessed fixture support ring 32 and a plurality of cathode contact members 31 disposed thereon. The cathode contact members 31 are connected one-to-one with the conduction rods 233 and conduct electricity to the workpiece to be plated through contact with the electroplating solution.

[0022] The rotary drive assembly 1 further includes a drive body 11, a support body 12, and a driven body 13 rotatably fitted on the support body 12. The drive body 11 drives the driven body 13 to rotate through meshing transmission, and the insulating ring 14 is disposed at the upper end of the driven body 13.

[0023] The driving body 11 includes a driving motor 111 and a driving gear 112 connected to its output end, and the outer wall of the driven body 13 is provided with teeth that mesh with the driving gear 112.

[0024] The cathode rolling connection component 22 includes a connecting mounting block 221, a connecting rod 222 with one end disposed on the connecting mounting block 221, and a cathode connecting wheel 223 hinged to the other end of the connecting rod 222. The outer wall of the cathode ring 21 is provided with an annular connecting groove 211. The cathode connecting wheel 223 rolls in contact with the connecting groove 211. The connecting rod 222 is connected to the device power cathode electrical signal through the inside of the connecting mounting block 221.

[0025] The conduction disk 232 has a ring structure and is coaxially arranged with the sinking clamp support ring 32, and the conduction support member 231 is evenly distributed along the outer circumference of the conduction disk 232.

[0026] The conductive rods 233 are evenly distributed along the inner circumference of the conductive disk 232, and the lower end of each conductive rod 233 is vertically connected to the corresponding cathode contact 31.

[0027] In summary, the specific embodiments of this utility model are as follows:

[0028] During electroplating, the externally mounted rotary drive assembly 1 drives the driven body 13 and the insulating ring 14 to rotate synchronously through the meshing of the drive gear 112 of the drive body 11 and the teeth of the driven body 13. Since the rotary drive assembly 1 is set outside the electroplating chamber, the mechanical parts such as the drive body 11 and the carrier 12 are physically isolated from the electroplating solution environment, avoiding the corrosion and contamination of the drive mechanism by the electroplating solution. The insulating ring 14 electrically isolates the rotary drive assembly 1 from the cathode ring 21 of the cathode conduction assembly 2 to prevent the risk of leakage or short circuit.

[0029] In the cathode conduction assembly 2, the cathode rolling connection component 22 rolls and contacts the cathode connecting wheel 223 hinged on the connecting rod 222 in the annular connecting groove 211 of the cathode ring 21, transmitting the cathode current to the cathode ring 21. The current is evenly distributed to each cathode contact 31 of the electroplating fixture 3 through the conduction support 231, conduction disk 232 and conduction rod 233 of the multi-stage conduction component 23. After the sinking fixture support ring 32 drives the workpiece to be plated into the electroplating solution, the cathode contact 31 forms a conductive path with the workpiece through the electroplating solution, and together with the anode end, double-sided electroplating is achieved.

[0030] It should be noted that in this embodiment, the connecting rod 222 is made of aluminum conductive rod to balance lightweight and conductivity, and the cathode connecting wheel 223 is made of copper conductive wheel to ensure wear resistance and low resistance contact; the carrier 12 and the driven body 13 can be made of annular guide rail slide or directly integrated slewing bearing, both of which can achieve smooth rotational transmission, and the specific selection does not affect the functional realization of this utility model.

[0031] The above description is only the optimal solution embodiment of this utility model and is not intended to limit this utility model. Various modifications or substitutions made by those skilled in the art to this utility model without departing from the essence and protection scope of this utility model should also be within the protection scope of this utility model.

Claims

1. A cathode rotating structure for horizontal rotating double-sided electroplating, characterized in that: The device includes an externally mounted rotary drive assembly (1), a cathode conduction assembly (2), and an internally mounted electroplating fixture (3). The rotary drive assembly (1) includes an insulating ring (14). The cathode conduction assembly (2) includes a cathode ring (21) disposed on the insulating ring (14), at least one cathode rolling connection component (22) disposed outside the rotary drive assembly (1), and a multi-stage conduction component (23). The cathode ring (21) is connected to the power cathode through the cathode rolling connection component (22). The conductive component (23) includes a plurality of conductive support members (231) evenly distributed on the upper end of the cathode ring (21), a conductive disk (232) connected to the upper end of the conductive support member (231), and a plurality of conductive rods (233) connecting the conductive disk (232) and the electroplating fixture (3). The electroplating fixture (3) includes a recessed fixture support ring (32) and a plurality of cathode contacts (31) disposed thereon. The cathode contacts (31) are connected to the conductive rods (233) one by one, and conduct electricity to the workpiece to be plated through contact with the electroplating liquid.

2. The cathode rotating structure for horizontal rotating double-sided electroplating according to claim 1, characterized in that: The rotary drive assembly (1) further includes a drive body (11), a support body (12), and a driven body (13) rotatably fitted on the support body (12). The drive body (11) drives the driven body (13) to rotate through meshing transmission. The insulating ring (14) is disposed at the upper end of the driven body (13).

3. The cathode rotating structure for horizontal rotating double-sided electroplating according to claim 2, characterized in that: The driving body (11) includes a driving motor (111) and a driving gear (112) connected to its output end. The outer wall of the driven body (13) is provided with teeth that mesh with the driving gear (112).

4. The cathode rotating structure for horizontal rotating double-sided electroplating according to claim 1, characterized in that: The cathode rolling connection component (22) includes a connecting mounting block (221), a connecting rod (222) with one end disposed on the connecting mounting block (221), and a cathode connecting wheel (223) hinged to the other end of the connecting rod (222). The outer wall of the cathode ring (21) is provided with an annular connecting groove (211). The cathode connecting wheel (223) rolls in contact with the connecting groove (211). The connecting rod (222) is connected to the device power cathode electrical signal through the inside of the connecting mounting block (221).

5. The cathode rotating structure for horizontal rotating double-sided electroplating according to claim 1, characterized in that: The conduction disk (232) has a ring structure and is coaxially arranged with the sinking clamp support ring (32), and the conduction support (231) is evenly distributed along the outer circumference of the conduction disk (232).

6. The cathode rotating structure for horizontal rotating double-sided electroplating according to claim 1, characterized in that: The conductive rods (233) are evenly distributed along the inner circumference of the conductive disk (232), and the lower end of each conductive rod (233) is vertically connected to the corresponding cathode contact (31).

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