Device capable of simultaneously treating different medium gas cylinders

Abstract

The utility model belongs to a device capable of simultaneously processing different medium gas cylinders. Comprising a first gas cylinder box chamber used for treating a gas cylinder with fluorine-containing gas and mixed gas as treatment media, and a second gas cylinder box chamber used for treating corrosive gas and conventional standard gas. The first gas cylinder box chamber comprises a fluorine-containing gas cylinder cavity for placing a fluorine-containing gas cylinder and a mixed gas cylinder cavity for placing a mixed gas cylinder; the second gas cylinder box chamber comprises a cavity for placing a corrosive gas cylinder, a cavity for placing a small conventional standard gas cylinder and a cavity for placing a large conventional standard gas cylinder; independent heating lifting units and valve rows are arranged in cavities of the gas cylinders; the gas balancing unit, the emptying unit and the vacuumizing unit are respectively connected with the valve row; the gas cylinder processing device has the characteristics of processing gas cylinders of different specifications, ensuring the gas cylinder processing precision and quality and realizing simple and convenient operation.

Description

Technical Field

[0001] This utility model belongs to the field of gas cylinder processing technology, specifically relating to a device that can simultaneously process gas cylinders containing different media. Background Technology

[0002] Standard gas is a highly homogeneous, stable, and accurate gas, primarily used for evaluating measurement methods, calibrating instruments and meters, transferring metrological standards, and arbitrating measurement values. Standard gas is typically a mixture of two or more media. In large petrochemical plants, dozens of pure gases and hundreds of multi-component standard gases are required during start-up, shutdown, and normal production processes to calibrate and standardize online analytical instruments and instruments used to analyze raw materials and product quality. Common mixed gases are categorized into general mixed gases and electronic industry mixed gases. General mixed gases include laser mixed gases, welding mixed gases, preservation mixed gases, electric light source mixed gases, medical and biological research mixed gases, disinfection and sterilization mixed gases, leak detection (alarm) mixed gases, high-pressure mixed gases, and zero-grade air, etc. Electronic industry mixed gases are categorized into epitaxial (growth) mixed gases, chemical vapor deposition (CVD) mixed gases, doping mixed gases, etching mixed gases, and other electronic mixed gases, etc. Impurities in other gases have varying degrees of impact on their use. For example, the purity of the component gases in the laser mixture directly affects the performance of the laser. In particular, the presence of impurities such as oxygen, moisture, and hydrocarbons in the gas will lead to the loss of laser output power on the mirror (surface) and electrodes, and will also cause instability in laser emission.

[0003] All the aforementioned gas cylinders require treatment after use to prevent impurities from affecting the purity of the gas after filling. The treatment of mixed gas cylinders, fluorine cylinders, and corrosive gas cylinders is particularly important, as improper treatment can not only cause cylinder contamination but also lead to environmental pollution. Therefore, existing cylinder treatment methods all adopt separate treatment methods: standard gas cylinders are treated separately, mixed gas cylinders are treated separately, and fluorine and corrosive gas cylinders are treated separately. This method not only results in high investment costs but also has the problem of inconvenient operation. Utility Model Content

[0004] The purpose of this invention is to overcome the defects in the prior art and provide a device that can simultaneously process gas cylinders containing different media.

[0005] The purpose of this utility model is achieved as follows:

[0006] An apparatus capable of simultaneously processing gas cylinders containing different media includes a first cylinder chamber for processing cylinders containing fluorinated gas and mixed gas, and a second cylinder chamber for processing corrosive gas and conventional standard gas. The first cylinder chamber includes a fluorinated gas cylinder cavity for placing fluorinated gas cylinders and a mixed gas cylinder cavity for placing mixed gas cylinders. The second cylinder chamber includes a cavity for placing corrosive gas cylinders, a small conventional standard gas cylinder cavity, and a large conventional standard gas cylinder cavity. Each of the cylinder cavities is equipped with an independent heating and lifting unit and a valve array. A balancing gas unit, a venting unit, and a vacuuming unit are respectively connected to the valve array.

[0007] The beneficial effects of this utility model are as follows: This utility model uses a first gas cylinder chamber and a second gas cylinder chamber to place gas cylinders containing fluorine gas, mixed gas, corrosive gas and conventional standard gas, and connects them with corresponding valve rows and a balancing gas unit, a venting unit and a vacuuming unit, thereby realizing the processing of various gas cylinders. Thus, a single processing system can be set up to process various gas cylinders, which saves investment and reduces the difficulty of operation.

[0008] Preferably, a first baffle is provided between the fluorine-containing gas cylinder cavity and the mixed gas cylinder cavity, a second baffle is provided between the corrosive gas cylinder cavity and the small conventional standard gas cylinder cavity, and a third baffle is provided between the small conventional standard gas cylinder cavity and the large conventional standard gas cylinder cavity.

[0009] Preferably, the gas cylinder cavity includes a shell, the top of the shell is provided with a hole that matches the upper outer contour of the gas cylinder, the interior of the shell is provided with an electric heater, and the lower inner part of the shell is provided with a lifting part for adjusting the height of the gas cylinder.

[0010] Preferably, the lifting part is a movable lifting component or a fixed lifting component.

[0011] Preferably, the movable lifting component includes a lifting platform, the top of which is provided with a gas cylinder placement groove for placing gas cylinders, and the bottom of the lifting platform is provided with a hydraulic cylinder, an electric telescopic rod, or a pneumatic cylinder.

[0012] Preferably, the fixed lifting component includes a groove provided on the inner wall of the housing and a raised plate; at least two outer sides of the raised plate are provided with protrusions that are adapted to the groove.

[0013] Preferably, the balancing gas unit includes a balancing gas source, which is connected to the valve row in each gas cylinder cavity through a corresponding balancing gas shut-off valve.

[0014] Preferably, the venting unit includes a venting section for fluorine-containing gas cylinders, a venting section for corrosive gas cylinders, and a venting section for ordinary gases; the venting section for fluorine-containing gas cylinders includes a fluorine-containing tail gas treatment device, and a fluorine-containing tail gas valve row is connected to the fluorine-containing tail gas treatment device through a fluorine-containing tail gas venting valve; the venting section for corrosive gas cylinders includes a corrosive tail gas treatment device, and a corrosive gas valve row is connected to the corrosive tail gas treatment device through a corrosive tail gas venting valve; the ordinary gas venting section includes a first venting pipe connected to a mixed gas cylinder valve row, a second venting pipe connected to a small conventional standard gas cylinder valve row, and a third venting pipe connected to a large conventional standard gas cylinder valve row; a first venting valve is provided on the first venting pipe, a second venting valve is provided on the second venting pipe, and a third venting valve is provided on the third venting pipe.

[0015] Preferably, the vacuuming unit includes a first vacuuming unit for evacuating fluorine-containing gas cylinders and a second vacuuming unit for evacuating non-fluorine-containing gas cylinders; the first vacuuming unit includes a first vacuuming valve connected to a fluorine-containing tail gas valve array, and the outlet of the first vacuuming valve is connected to a fluorine-containing tail gas treatment device via a fluorine vacuum pump; the second vacuuming unit includes a first tee valve between a mixed gas cylinder valve array and a corresponding balance gas shut-off valve, and the third end of the first tee valve is connected to the vacuuming array via the second vacuuming valve, the main vacuuming channel, and the mixed gas vacuum pump. The vacuum venting section is connected to the main vacuum channel via a third vacuum valve; the valve array of the small standard gas cylinder is connected to the main vacuum channel via a fourth vacuum valve; and the valve array of the large standard gas cylinder is connected to the main vacuum channel via a fifth vacuum valve. The vacuum venting section includes a second three-way valve connected to the outlet of the mixed gas vacuum pump. The second end of the second three-way valve is connected to the vacuum venting component, and the third end of the second three-way valve is connected to the corrosive tail gas treatment device via a first vent shut-off valve. The vacuum venting component includes at least one venting pipe with a second vent shut-off valve.

[0016] A device manufactured according to the above scheme, capable of simultaneously processing gas cylinders containing different media, is constructed by setting up a first gas cylinder chamber and a second gas cylinder chamber, with different gas cylinder placement cavities within these two chambers for placing gas cylinders containing various media. This achieves the characteristic of using a single system to process media gas cylinders, thereby reducing investment costs and improving operational convenience. Furthermore, this invention uses baffles to divide the two gas cylinder chambers into independent cavities, which not only avoids interference caused by mutual crossing but also achieves energy saving and consumption reduction during the heating process. Simultaneously, this invention, by setting up a lifting unit, can adapt to gas cylinders of different specifications. The gas source for the balancing gas mentioned in this invention can be nitrogen, etc., and can be adjusted according to the media in various gas cylinders. The venting unit mentioned in this invention can be specifically set according to the media in the gas cylinders. Fluorine-containing exhaust gas has highly corrosive and environmentally polluting characteristics; therefore, a separate fluorine-containing exhaust gas treatment device and related pipelines are set up to facilitate the installation of relevant corrosion-resistant pipes, avoid environmental pollution, and achieve long-term stable operation. Similarly, the corrosive exhaust gas is treated by setting up a corrosive exhaust gas treatment device. Further, this invention includes a vacuum unit comprising a vacuuming section for fluorine-containing exhaust gas cylinders and a vacuuming section for other cylinders. The fluorine-containing exhaust gas cylinder vacuuming section is based on the aforementioned fluorine-containing exhaust gas treatment device, using a fluorine vacuum pump to achieve vacuuming and treat the vacuumed gas, avoiding corrosion of the corresponding pipelines and being environmentally friendly. The remaining vacuuming sections are based on mixed gas cylinder vacuuming, and are equipped with a main vacuuming channel, a mixed gas vacuum pump, and a vacuum venting section to achieve vacuuming. The relevant pipelines in this invention can be made of stainless steel, and are independently installed to effectively avoid the risk of cross-contamination of residual gas during cylinder processing. This invention effectively realizes cylinder replacement, heating and vacuuming, and can handle cylinders of different specifications, ensuring the accuracy and quality of cylinder processing, and achieving simplified operation. The vacuum degree of the processed cylinders can reach 0.05 Pa, and the residual gas in the cylinders can be treated to below the ppm level. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the process structure of this utility model.

[0018] Figure 2 This is a schematic diagram of the structure of the first gas cylinder chamber of this utility model.

[0019] Figure 3 This is a schematic diagram of the structure of the second gas cylinder chamber of this utility model.

[0020] Figure 4 This is a schematic diagram of the top structure of the lifting platform of this utility model.

[0021] Figure 5 This is a schematic diagram of the top structure of the first gas cylinder chamber of this utility model.

[0022] Figure 6 This is a front structural diagram of the first gas cylinder chamber of this utility model.

[0023] Figure 7 This is a schematic diagram of the top structure of the raised plate of this utility model.

[0024] Figure 8 This is a side view of the raised platform of this utility model. Detailed Implementation

[0025] To provide a clearer understanding of the technical features, objectives, and effects of this utility model, specific embodiments are now described with reference to the accompanying drawings. In the drawings, the same reference numerals denote the same components. For the sake of simplicity, only the parts related to the utility model are schematically shown in the drawings; they do not represent the actual structure of the product.

[0026] like Figure 1-8As shown, this utility model is a device capable of simultaneously processing gas cylinders containing different media. It includes a first cylinder chamber 1 for processing cylinders containing fluorine-containing gas and mixed gas, and a second cylinder chamber 2 for processing corrosive gas and conventional standard gas. The first cylinder chamber 1 includes a fluorine-containing gas cylinder cavity 3 for placing fluorine-containing gas cylinders and a mixed gas cylinder cavity 4 for placing mixed gas cylinders. The second cylinder chamber 2 includes a corrosive gas cylinder cavity 5, a small conventional standard gas cylinder cavity 6, and a large conventional standard gas cylinder cavity 7. Each of the above cylinder cavities is equipped with an independent heating and lifting unit and a valve array. A balancing gas unit, a venting unit, and a vacuuming unit are respectively connected to the valve array. The essence of this invention lies in integrating the processing systems of independently set-up gas cylinders for different media in traditional technology, and redesigning the entire pipeline according to the properties of different media gases in the cylinders. Based on this, the cylinder chambers are designed to achieve ease of operation, avoid cross-contamination, and be environmentally friendly. It should be particularly noted that this invention can be operated manually or automatically. Since the first cylinder chamber 1 and the second cylinder chamber 2 can hold specific gas cylinders, it facilitates automated operation. The various chambers in this invention are designed based on thorough market research and consideration of the properties of the media gases and to reduce... Designed within cost constraints, this invention addresses the relatively large quantity of conventional standard gas cylinders used. It includes two chambers: a small conventional standard gas cylinder chamber 6 and a large conventional standard gas cylinder chamber 7, divided according to the number of conventional standard gas cylinders to be processed. This achieves energy savings in heating. Fluorine-containing gas cylinders are highly corrosive and environmentally damaging, while mixed gas cylinders suffer from complex gas composition, easily leading to impurities that contaminate subsequent filling gases. Therefore, this invention places both of these in the first cylinder chamber 1, with separate chambers for each.

[0027] Furthermore, a first baffle 8 is provided between the fluorine-containing gas cylinder cavity 3 and the mixed gas cylinder cavity 4; a second baffle 9 is provided between the corrosive gas cylinder cavity 5 and the small conventional standard gas cylinder cavity 6; and a third baffle 10 is provided between the small conventional standard gas cylinder cavity 6 and the large conventional standard gas cylinder cavity 7. By setting these baffles, each cavity can be divided into an individual space, which facilitates the placement of gas cylinders and the batch processing of corresponding medium gas cylinders.

[0028] Furthermore, the gas cylinder cavity includes a housing 11. The top of the housing 11 is provided with a hole 12 that matches the upper outer contour of the gas cylinder. An electric heater 13 is provided inside the housing 11, and a lifting part for adjusting the height of the gas cylinder is provided in the lower inner part of the housing 11. The aforementioned hole 12, electric heater 13, and lifting part are all arranged relative to the cavity, which is an independent space. Through the above arrangement, it is possible to easily adjust according to the specifications of the gas cylinder, facilitate the fixing of the gas cylinder, and reduce heat loss by closing the valve.

[0029] Furthermore, the lifting part can be a movable lifting component or a fixed lifting component. The lifting part described in this invention is relative to the cavity; that is, within the same cavity, either a movable or fixed lifting component can be selected, but different lifting part forms can be selected in different cavities within the same gas cylinder compartment. Conventional standard gas cylinders can be 4L-10L or 40-50L standard gas cylinders. When the lifting part is not raised, it can accommodate 40-50L standard gas cylinders; when the lifting part is raised, it can accommodate 4L-10L standard gas cylinders. Based on this, this invention includes a fixed lifting component. Additionally, there are special gas cylinders, so a movable lifting component can be provided to meet the placement and processing needs of different gas cylinders.

[0030] Furthermore, the movable lifting component includes a lifting platform 14. The top of the lifting platform 14 is provided with a gas cylinder placement groove 15 for placing gas cylinders, and the bottom of the lifting platform 14 is provided with a hydraulic cylinder, an electric telescopic rod, or a pneumatic cylinder 16. In this utility model, the movable lifting component uses a hydraulic cylinder, an electric telescopic rod, or a pneumatic cylinder 16 as power to realize the lifting of the lifting platform 14. At the same time, by providing the gas cylinder placement groove 15, it can facilitate the placement of gas cylinders and prevent the gas cylinders from tipping over during the lifting process.

[0031] Furthermore, the fixed lifting component includes a groove 17 and a raised plate 18 on the inner wall of the housing 11; at least two outer sides of the raised plate 18 are provided with protrusions 19 that are adapted to the groove 17. In actual use, when the gas cylinder is large, the raised plate 18 can be removed; when the gas cylinder is small, the protrusions 19 in the raised plate 18 can be matched with the groove 17, thereby achieving the characteristic of facilitating the placement of gas cylinders of different sizes while saving energy and reducing consumption.

[0032] Furthermore, the balancing gas unit includes a balancing gas source 20, which is connected to the valve array in each gas cylinder cavity via a corresponding balancing gas shut-off valve 21. The balancing gas source 20 in this invention can be adjusted according to actual conditions and can be nitrogen, etc.; preferably, the balancing gas source 20 can be equipped with a quick-connect plug for easy replacement.

[0033] Furthermore, the venting unit includes a venting section for fluorine-containing gas cylinders, a venting section for corrosive gas cylinders, and a venting section for ordinary gases. The venting section for fluorine-containing gas cylinders includes a fluorine-containing tail gas treatment device 22, and a fluorine-containing tail gas valve 23 is connected to the fluorine-containing tail gas treatment device 22 via a fluorine-containing tail gas venting valve 24. The venting section for corrosive gas cylinders includes a corrosive tail gas treatment device 25, and a corrosive gas valve 26 is connected to the corrosive tail gas treatment device 25 via a corrosive tail gas venting valve 27. The ordinary gas venting section includes a first venting pipe 29 connected to a mixed gas cylinder valve 28, a second venting pipe 31 connected to a small conventional standard gas cylinder valve 30, and a third venting pipe 33 connected to a large conventional standard gas cylinder valve 32. A first venting valve 34 is provided on the first venting pipe 29, a second venting valve 35 is provided on the second venting pipe 31, and a third venting valve 36 is provided on the third venting pipe 33. This utility model sets up the above-mentioned venting unit according to the characteristics of fluorine-containing gas and corrosive gas. The above-mentioned settings are all independently laid out and do not affect each other. Under the premise of convenient operation, it is conducive to realizing automated operation. By setting up the fluorine-containing tail gas treatment device 22 and the corrosive tail gas treatment device 25, the purpose of treating the corresponding gases can be achieved while avoiding environmental pollution.

[0034] Furthermore, the vacuuming unit includes a first vacuuming unit for evacuating fluorine-containing gas cylinders and a second vacuuming unit for evacuating non-fluorine gas cylinders; the first vacuuming unit includes a first vacuuming valve 37 connected to the fluorine-containing tail gas valve row 23, and the outlet of the first vacuuming valve 37 is connected to the fluorine-containing tail gas treatment device 22 through the fluorine vacuum pump 38; the second vacuuming unit includes a first three-way valve 39 between the mixed gas cylinder valve row 28 and the corresponding balance gas shut-off valve 21, and the third end of the first three-way valve 39 is connected to the vacuuming and venting section through the second vacuuming valve 40, the main vacuuming channel 41 and the mixed gas vacuum pump 42; The corrosive gas cylinder valve row 26 is connected to the main vacuum channel 41 via the third vacuum valve 43, the small standard gas cylinder valve row 30 is connected to the main vacuum channel 41 via the fourth vacuum valve 44, and the large standard gas cylinder valve row 32 is connected to the main vacuum channel 41 via the fifth vacuum valve 45. The vacuum venting section includes a second three-way valve 16 connected to the outlet of the mixed gas vacuum pump 42. The second end of the second three-way valve 46 is connected to the vacuum venting component, and the third end of the second three-way valve 46 is connected to the corrosive exhaust gas treatment device 25 via the first venting shut-off valve 47. The vacuum venting component includes at least one venting pipe 49 with a second venting shut-off valve 48. The vacuum unit described in this invention includes a first vacuum unit for evacuating fluorine-containing gas cylinders and a second vacuum unit for evacuating non-fluorine-containing gas cylinders. The first vacuum unit is based on the fluorine-containing tail gas treatment device 22 and is equipped with a fluorine vacuum pump 38 to prevent corrosion of related pipelines and avoid environmental pollution. The second vacuum unit is based on the vacuuming of mixed gas cylinders and is equipped with a main vacuum channel, a mixed gas vacuum pump, and a vacuum venting section to achieve vacuuming. Preferably, there are three venting pipes 49 with a second venting shut-off valve 48. The three venting pipes 49 correspond to the mixed gas cylinder valve row 28, the small conventional standard gas cylinder valve row 30, and the large conventional standard gas cylinder valve row 32, respectively, and are vented separately. In addition, vacuum gauges are also provided on the related pipelines in this invention to determine the vacuum level. Since this is prior art, it will not be described in detail.

[0035] This utility model also provides a method for simultaneously processing gas cylinders containing different media. The method includes a method for processing fluorine-containing gas cylinders, a method for processing mixed gas cylinders, a method for processing corrosive gas cylinders, a method for processing small batches of conventional standard gas cylinders, and a method for processing large batches of conventional standard gas cylinders.

[0036] The treatment method for fluorine-containing gas cylinders includes the following steps:

[0037] Step 10: Place the fluorine-containing gas cylinders in the fluorine-containing gas cylinder cavity 3. All fluorine-containing gas cylinders are connected to the fluorine-containing tail gas valve 23, and ensure airtightness.

[0038] Step 11: Vent the fluorine-containing gas cylinder by opening the fluorine-containing tail gas vent valve 24 to allow the residual gas in the fluorine-containing gas cylinder to enter the fluorine-containing tail gas treatment device 22 for treatment; after venting the residual gas in the fluorine-containing gas cylinder, close the fluorine-containing tail gas vent valve 24.

[0039] Step 12: Fill the fluorine-containing gas cylinders with balance gas; open the balance gas shut-off valve 21 corresponding to the fluorine-containing tail gas valve 23, and the balance gas in the balance gas source 20 enters each fluorine-containing gas cylinder through the balance gas shut-off valve 21 and the fluorine-containing tail gas valve 23.

[0040] Step 13: Heat the fluorine-containing gas cylinder; turn on the corresponding electric heater 13 in the cavity 3 of the fluorine-containing gas cylinder and heat the fluorine-containing gas cylinder to 60-80°C for 40-50 minutes.

[0041] Step 14: Vacuum the fluorine-containing gas cylinder; open the first vacuum valve 37 and the fluorine vacuum pump 38 to perform vacuuming on the fluorine-containing gas cylinder for 40-50 minutes, with a target vacuum level of 0.05 Pa.

[0042] Step 15: Repeat steps 13 and 14 five times;

[0043] Step 16: Perform vacuuming on the fluorine-containing gas cylinder again following step 14 above;

[0044] Step 17: After vacuuming the fluorine-containing gas cylinders again, the batch of cylinders is processed into clean cylinders, which can be used to refill fluorine-containing gas.

[0045] The treatment method for corrosive gas cylinders includes the following steps:

[0046] Step 20: Place the corrosive gas cylinders in the corrosive gas cylinder cavity 5, and connect all the corrosive gas cylinders to the corrosive gas valve row 26, ensuring airtightness;

[0047] Step 21: Vent the corrosive gas cylinder by opening the corrosive tail gas vent valve 27 to allow the residual gas in the corrosive gas cylinder to enter the corrosive tail gas treatment device 25 for treatment; after venting the residual gas in the corrosive gas cylinder, close the corrosive tail gas vent valve 27.

[0048] Step 22: Fill the corrosive gas cylinder with balancing gas; open the balancing gas shut-off valve 21 corresponding to the corrosive gas valve outlet 26, and the balancing gas in the balancing gas source 20 enters each corrosive gas cylinder through the balancing gas shut-off valve 21 and the corrosive gas valve outlet 26.

[0049] Step 23: Heat the corrosive gas cylinder; turn on the corresponding electric heater 13 in the corrosive gas cylinder cavity 5 and heat the corrosive gas cylinder to 60-80℃ for 40-50 minutes.

[0050] Step 24: Vacuum the corrosive gas cylinder; open the third vacuum valve 43 and the mixed gas vacuum pump 42 to perform vacuuming on the corrosive gas cylinder for 40-50 minutes, with a target vacuum level of 0.05 Pa; the vacuumed gas enters the corrosive tail gas treatment device 25 through the third end of the second three-way valve 46 and the first vent shut-off valve 47.

[0051] Step 25: Repeat steps 23 and 24 five times;

[0052] Step 26: Perform vacuuming on the corrosive gas cylinder again following step 24 above;

[0053] Step 27: After vacuuming the corrosive gas cylinders again, the batch of cylinders is processed into clean cylinders, which can be used to refill corrosive gases.

[0054] The method for handling mixed gas cylinders includes the following steps:

[0055] Step 30: Place the mixed gas cylinders in the mixed gas cylinder cavity 4, and connect all the mixed gas cylinders to the mixed gas cylinder valve row 28, ensuring airtightness;

[0056] Step 31: Vent the mixed gas cylinder by opening the first vent valve 34 to allow the residual gas in the mixed gas cylinder to enter the first vent pipe 29 through the first vent valve 34 for venting. After the residual gas in the mixed gas cylinder is vented, close the first vent valve 34.

[0057] Step 32: Fill the mixed gas cylinder with balance gas; open the balance gas shut-off valve 21 corresponding to the mixed gas cylinder valve row 28, and the balance gas in the balance gas source 20 enters each mixed gas cylinder through the balance gas shut-off valve 21 and the mixed gas cylinder valve row 28.

[0058] Step 33: Heat the mixed gas cylinder; turn on the corresponding electric heater 13 in the mixed gas cylinder cavity 4 and heat the mixed gas cylinder to 60-80°C for 40-50 minutes.

[0059] Step 34: Vacuum the mixed gas cylinder; open the second vacuum valve 40 and the mixed gas vacuum pump 42 to perform vacuuming on the mixed gas cylinder for 40-50 minutes, with a target vacuum level of 0.05 Pa; the vacuumed gas is discharged through the vent pipe 49 with the second vent shut-off valve 48.

[0060] Step 35: Repeat steps 33 and 34 above five times;

[0061] Step 36: Perform vacuuming on the mixed gas cylinder again following step 34 above;

[0062] Step 37: After vacuuming the mixed gas cylinders again, the batch of cylinders is processed into clean cylinders, which can be used to refill the mixed gas.

[0063] The processing method for small batches of standard gas cylinders includes the following steps:

[0064] Step 40: Place a small number of standard gas cylinders in the small standard gas cylinder cavity 6. All standard gas cylinders are connected to the small standard gas cylinder valve row 30, and ensure airtightness. The small number of standard gas cylinders refers to no more than 10 standard gas cylinders.

[0065] Step 41: Vent the conventional standard gas cylinder by opening the second vent valve 35 to allow the residual gas in the conventional standard gas cylinder to enter the second vent pipe 31 through the second vent valve 35 for venting. After the residual gas in the mixed gas cylinder is vented, close the second vent valve 35.

[0066] Step 42: Fill the standard gas cylinder with balance gas; open the balance gas shut-off valve 21 corresponding to the small standard gas cylinder valve row 30, and the balance gas in the balance gas source 20 enters each standard gas cylinder through the balance gas shut-off valve 21 and the small standard gas cylinder valve row 30.

[0067] Step 43: Heat the standard gas cylinder; turn on the corresponding electric heater 13 in the valve row 30 of the small standard gas cylinder and heat the standard gas cylinder to 60-80°C for 40-50 minutes.

[0068] Step 44: Vacuum the standard gas cylinder; open the fourth vacuum valve 44 and the mixed gas vacuum pump (42) to vacuum the standard gas cylinder for 40-50 minutes, with a target vacuum level of 0.05 Pa; the vacuumed gas is discharged through the vent pipe 49 with the second vent shut-off valve 48.

[0069] Step 45: Repeat steps 43 and 44 five times;

[0070] Step 46: Perform vacuuming on the standard gas cylinder again following step 44 above;

[0071] Step 47: After vacuuming the standard gas cylinders again, the batch of cylinders is processed into clean cylinders, which can be used to refill standard gas.

[0072] The processing method for handling large quantities of conventional standard gas cylinders includes the following steps:

[0073] Step 50: Place a large number of standard gas cylinders in the large standard gas cylinder cavity 7. All standard gas cylinders are connected to the large standard gas cylinder valve row 32 and airtightness is ensured. The large number of standard gas cylinders refers to no more than 20 standard gas cylinders.

[0074] Step 51: Vent the conventional standard gas cylinder by opening the third vent valve 36 to allow the residual gas in the conventional standard gas cylinder to enter the third vent pipe 33 through the third vent valve 36 for venting. After the residual gas in the mixed gas cylinder is vented, close the third vent valve 36.

[0075] Step 52: Fill the standard gas cylinders with balance gas; open the balance gas shut-off valve 21 corresponding to the large standard gas cylinder valve row 32, and the balance gas in the balance gas source 20 enters each standard gas cylinder through the balance gas shut-off valve 21 and the large standard gas cylinder valve row 32.

[0076] Step 53: Heat the conventional standard gas cylinder; turn on the corresponding electric heater 13 in the valve row 32 of the conventional standard gas cylinder to heat the conventional standard gas cylinder to 60-80°C for 40-50 minutes.

[0077] Step 54: Vacuum the standard gas cylinder; open the fifth vacuum valve 45 and the mixed gas vacuum pump 42 to perform vacuuming on the standard gas cylinder for 40-50 minutes, with a target vacuum level of 0.05 Pa; the vacuumed gas is discharged through the vent pipe 49 with the second vent shut-off valve 48.

[0078] Step 55: Repeat steps 53 and 54 five times;

[0079] Step 56: Perform vacuuming on the standard gas cylinder again following step 54 above;

[0080] Step 57: After vacuuming the standard gas cylinders again, the batch of cylinders is processed into clean cylinders, which can be used to refill standard gas.

[0081] The essence of this invention is to enable the processing of gas cylinders containing different media within the same system, thereby saving investment and facilitating operation. Based on this, this invention categorizes commonly used gas cylinders containing different media, placing cylinders containing the same media in separate chambers, thus achieving ease of operation and energy saving. To achieve the above objectives, this invention designs the layout of the cylinder storage chamber and the related balance gas filling, venting, and vacuuming pipelines according to the characteristics of different media. Taking the cylinder storage chamber as an example, by setting up independent chambers and coordinating with... The electric heater 13 and the lifting unit can improve the applicability of the gas cylinders and achieve the purpose of processing the gas cylinders while saving energy and reducing consumption. Furthermore, in the chamber design of this utility model, the more difficult-to-process fluorine-containing gas and mixed gas cylinders are placed in the first gas cylinder chamber 1, while the relatively simpler corrosive gas cylinders and conventional standard gas cylinders are placed in the second gas cylinder chamber 2, thereby facilitating subsequent pipeline layout. Furthermore, this utility model also provides a small conventional standard gas cylinder chamber 6 and a large conventional standard gas cylinder chamber 7. This arrangement enables processing according to conventional standards... The number of standard gas cylinders is determined by selecting different cylinder cavities to achieve energy saving and consumption reduction. In this invention, the number of cylinders placed in the small standard gas cylinder cavity 6 is less than the number placed in the large standard gas cylinder cavity 7. Taking the related pipeline layout as an example, this invention uses a balance gas source connected to its respective valve row to facilitate the filling of balance gas. In the venting unit, fluorine-containing gas is connected to the fluorine-containing tail gas treatment device 22, and corrosive gas is connected to the corrosive tail gas treatment device 25. The above settings facilitate the installation of anti-corrosion pipelines and avoid interference with other pipelines. The present invention addresses the drawbacks of gas mixing and environmental pollution. In the vacuum unit, based on the characteristics of fluorine-containing gas, a fluorine vacuum pump 38 is connected to a fluorine-containing tail gas treatment device 22 to avoid the impact of fluorine-containing gas on related pipelines and to avoid environmental pollution. Furthermore, the pipeline between the mixed gas cylinder valve 28 and the corresponding balance gas shut-off valve 21 is used in conjunction with the main vacuum channel 41 to perform vacuum treatment on the remaining chamber gas cylinders. That is, the purpose of vacuuming multiple gas cylinders can be achieved by using the fluorine vacuum pump 38 and the mixed gas vacuum pump 42, thereby reducing investment costs.

[0082] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "connection," "linking," etc., should be interpreted broadly. For example, they can refer to a fixed connection, an integral connection, or a detachable connection; they can also refer to the internal connection of two components; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances. The examples above are merely specific illustrations of feasible embodiments of this utility model and are not intended to limit the scope of protection of this utility model. All equivalent embodiments, modifications, and alterations made without departing from the spirit of this utility model should be included within the scope of protection of this utility model.

Claims

1. A device for simultaneously handling different media cylinders, characterized in that: The device comprises a first cylinder chamber (1) for processing medium, which is a fluorine-containing gas cylinder and a mixed gas cylinder, and a second cylinder chamber (2) for processing corrosive gas and conventional standard gas; The first cylinder chamber (1) comprises a fluorine-containing gas cylinder cavity (3) for placing a fluorine-containing gas cylinder and a mixed gas cylinder cavity (4) for placing a mixed gas cylinder; The second cylinder chamber (2) comprises a corrosive gas cylinder cavity (5), a small conventional standard gas cylinder cavity (6) and a large conventional standard gas cylinder cavity (7); Each of the above-mentioned cylinder cavities is provided with an independent heating lifting unit and a valve row; A balance gas unit, a venting unit and a vacuum pumping unit are connected with the valve row respectively.

2. The apparatus for simultaneously handling different media gas cylinders of claim 1, wherein: A first baffle (8) is arranged between the fluorine-containing gas cylinder cavity (3) and the mixed gas cylinder cavity (4), a second baffle (9) is arranged between the corrosive gas cylinder cavity (5) and the small conventional standard gas cylinder cavity (6), and a third baffle (10) is arranged between the small conventional standard gas cylinder cavity (6) and the large conventional standard gas cylinder cavity (7).

3. A device for simultaneously handling different media gas cylinders according to claim 1 or 2, characterized in that: The cylinder cavity comprises a shell (11), the top of the shell (11) is provided with a hole (12) matched with the upper contour of the cylinder, the inside of the shell (11) is provided with an electric heater (13), and the lower inside of the shell (11) is provided with a lifting part for adjusting the height of the cylinder.

4. The apparatus for simultaneously handling different media gas cylinders of claim 3, wherein: The lifting part is a movable lifting part or a fixed lifting part.

5. The apparatus for simultaneously handling different media gas cylinders of claim 4, wherein: The movable lifting part comprises a lifting platform (14), the top of the lifting platform (14) is provided with a cylinder placing groove (15) for placing the cylinder, and the bottom of the lifting platform (14) is provided with a hydraulic cylinder, an electric telescopic rod or a pneumatic cylinder (16).

6. The apparatus for simultaneously handling different media gas cylinders of claim 4, wherein: The fixed lifting part comprises a groove (17) arranged on the inner wall of the shell (11) and a heightening plate (18), and at least two outer sides of the heightening plate (18) are provided with convex strips (19) matched with the groove (17).

7. The apparatus for simultaneously handling different media gas cylinders of claim 1, wherein: The balance gas unit comprises a balance gas source (20), which is connected with the valve row in each cylinder cavity through a corresponding balance gas shut-off valve (21) respectively.

8. The apparatus for simultaneously handling different media gas cylinders of claim 1, wherein: The venting unit comprises a fluorine-containing gas cylinder venting part, a corrosive gas cylinder venting part and a common gas venting part; The fluorine-containing gas cylinder venting part comprises a fluorine-containing tail gas treatment device (22), and a fluorine-containing tail gas valve row (23) is connected with the fluorine-containing tail gas treatment device (22) through a fluorine-containing tail gas venting valve (24); The corrosive gas cylinder venting part comprises a corrosive tail gas treatment device (25), and a corrosive gas valve row (26) is connected with the corrosive tail gas treatment device (25) through a corrosive tail gas venting valve (27); The common gas venting part comprises a first venting pipeline (29) connected with the mixed gas cylinder valve row (28), a second venting pipeline (31) connected with the small conventional standard gas cylinder valve row (30) and a third venting pipeline (33) connected with the large conventional standard gas cylinder valve row (32); the first venting pipeline (29) is provided with a first venting valve (34), the second venting pipeline (31) is provided with a second venting valve (35), and the third venting pipeline (33) is provided with a third venting valve (36).

9. The apparatus for simultaneously handling different media gas cylinders of claim 7, wherein: The vacuum unit comprises a first vacuum unit for vacuumizing fluorine-containing gas cylinders and a second vacuum unit for vacuumizing non-fluorine gas cylinders; The first vacuum unit comprises a first vacuum valve (37) connected with the fluorine-containing tail gas valve row (23), and the outlet of the first vacuum valve (37) is connected with the fluorine-containing tail gas treatment device (22) through a fluorine gas vacuum pump (38); The second vacuum unit comprises a first tee (39) between the mixed gas cylinder valve row (28) and the corresponding balance gas shut-off valve (21), and the third end of the first tee (39) is connected with the vacuum exhaust part through a second vacuum valve (40), a vacuum main channel (41) and a mixed gas vacuum pump (42); The corrosive gas cylinder valve row (26) is connected with the vacuum main channel (41) through a third vacuum valve (43), the small conventional standard gas cylinder valve row (30) is connected with the vacuum main channel (41) through a fourth vacuum valve (44), and the large conventional standard gas cylinder valve row (32) is connected with the vacuum main channel (41) through a fifth vacuum valve (45); The vacuum exhaust part comprises a second tee (46) connected with the outlet of the mixed gas vacuum pump (42), the second end of the second tee (46) is connected with a vacuum exhaust part, and the third end of the second tee (46) is connected with the corrosive tail gas treatment device (25) through a first exhaust shut-off valve (47); The vacuum exhaust part comprises at least one exhaust pipeline (49) provided with a second exhaust shut-off valve (48).

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