Hundred-grade clean room structure system without raised floor

Abstract

The utility model discloses a hundred-grade clean room structure system without raised floors. Comprising a clean room, and the clean room is provided with a clean wall plate, an air return passageway, an upper technical interlayer, a fresh air system, a suspended ceiling, an FFU and an air return opening. A suspended ceiling is fixedly installed below a ceiling of a clean room, the FFU is installed within the range of the suspended ceiling, the suspended ceiling does not make contact with the periphery of the room, and the space between the suspended ceiling and the ceiling forms an upper technical interlayer. The fresh air system is mounted in the upper technical interlayer; vertical clean wall plates are mounted around the clean room, the top ends are connected with the suspended ceiling, and air return ports are formed in the bottoms of the vertical clean wall plates; a second-layer vertical clean wall plate is fixedly installed on the periphery of the clean room, the top end of the second-layer vertical clean wall plate is connected with the ceiling, and the bottom end of the second-layer vertical clean wall plate is connected with the floor. And the space between the second layer of vertical clean wall plate and the inner side vertical clean wall plate forms an air return passageway. Through the arrangement of the method of the system, the hundred-grade clean room can have the advantages of both the one-way flow and the one-way flow on the premise of meeting the one-way flow requirement.

Description

Technical Field

[0001] This utility model relates to the field of cleanroom technology, specifically to a Class 100 cleanroom structural system without raised floor. Background Technology

[0002] With the rapid development of science and technology in my country, industries such as biomedicine, semiconductors, and precision manufacturing are growing stronger, and their production demands are constantly upgrading. After more than a decade of development, my country's advanced technologies have made continuous breakthroughs, and manufacturers' production lines have been continuously upgraded. As technology upgrades, the requirements for the production environment are also increasing, leading to the widespread application of Class 100 cleanrooms (air cleanliness level of ISO 5).

[0003] The "Cleanroom Design Code" GB 50073-2013 stipulates that the airflow pattern of a Class 100 cleanroom should be unidirectional, with an average air velocity between 0.2 and 0.4 m / s. To meet this unidirectional flow requirement, the most common practice is to install a raised floor in the corresponding room, with openings in the floor. Air from the ceiling enters the room after being filtered by fan filter units (FFUs) at the top. Because the return air vents are located on the floor, the air can pass vertically through the room space, enter the raised floor, and then return to the ceiling via a return air duct. This achieves unidirectional flow while ensuring the normal operation of the cleanroom.

[0004] There are generally two ways to install raised floors. One is to reserve space for the raised floor during the building design phase through lowering the floor or other measures. The significant advantage of this method is that after the cleanroom is put into use, the floor of this room is on the same plane as the floors of other areas, which facilitates the passage of personnel and the transportation of materials and goods. However, this method is only suitable for newly built buildings. The other method is to raise the floor height of the room. The advantage of this method is that it is more flexible and can be implemented in both new and renovated buildings. However, the disadvantage is that there is a height difference between this room and other rooms, which affects the entry and exit of personnel and goods.

[0005] In response to the current situation where many cleanroom projects involve renovations, this patent proposes a Class 100 cleanroom structural system that eliminates the need for raised floors, based on two traditional structural forms. By using this system, the Class 100 cleanroom can combine the advantages of both while meeting the unidirectional flow requirement. Utility Model Content

[0006] Therefore, in order to overcome the above-mentioned shortcomings, this utility model provides a Class 100 cleanroom structural system without raised floor; through the method of this system, the Class 100 cleanroom can take into account the advantages of both while meeting the unidirectional flow requirement.

[0007] This utility model is implemented by constructing a Class 100 cleanroom structural system without raised floor, characterized in that it includes a cleanroom room, which has cleanroom wall panels, return air duct, upper technical mezzanine, fresh air system, suspended ceiling, FFU, and return air vent.

[0008] A suspended ceiling is fixedly installed below the ceiling of the cleanroom room, and the FFU is installed within the suspended ceiling area. The suspended ceiling does not contact the perimeter of the room, and the space between the suspended ceiling and the ceiling forms an upper technical interlayer.

[0009] The fresh air system is installed in the upper technical mezzanine;

[0010] The cleanroom is equipped with vertical cleanroom wall panels around its perimeter, with the top connected to the ceiling, and return air vents installed at the bottom of the vertical cleanroom wall panels.

[0011] A second layer of vertical cleanroom wall panels is fixedly installed around the perimeter of the cleanroom. The top of the second layer of vertical cleanroom wall panels is connected to the ceiling, and the bottom is connected to the floor. The space between the second layer of vertical cleanroom wall panels and the inner vertical cleanroom wall panels forms a return air duct.

[0012] Furthermore, the FFU filtration efficiency is better than U16@99.9995%0.12μm, accounts for more than 80% of the ceiling area, and is evenly distributed near the geometric center of the ceiling.

[0013] Furthermore, the fresh air system is provided by an additional fresh air unit, which prepares fresh air that meets the requirements of the cleanroom environment and then sends it into the upper technical interlayer.

[0014] Furthermore, the return air inlet is equipped with a primary filter, with its bottom edge 0.2m from the ground, and is evenly distributed at the bottom of all return air ducts.

[0015] Furthermore, the cleanroom is equipped with return air ducts around its perimeter. When the room span is too large, a return air duct is added in the middle using cleanroom wall panels. The newly added return air duct does not contact the vertical cleanroom wall panels.

[0016] This utility model has the following advantages:

[0017] 1. Saves cleanroom floor height space, reducing civil engineering renovation costs;

[0018] 2. Achieve an unobstructed surface to allow passage for automated equipment such as AGVs;

[0019] 3. Shorter renovation cycle, suitable for renovation of existing buildings;

[0020] 4. Reduce cleanroom space, lower cleanroom energy consumption, and improve maintenance convenience. Attached Figure Description

[0021] Figure 1 It is a system structure plan view;

[0022] Figure 2 It is a cross-sectional view along the width direction;

[0023] Figure 3 It is a cross-sectional view along the length direction.

[0024] Wherein: 100-Cleanroom; 101-Cleanroom wall panel; 102-Return air duct; 103-Upper technical mezzanine; 104-Fresh air system; 105-Ceiling; 106-FFU; 107-Return air outlet. Detailed Implementation

[0025] The following will be combined with the appendix Figures 1-3 This utility model will be described in detail, and the technical solutions in the embodiments of this utility model will be clearly and completely described. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of this utility model.

[0026] This utility model provides a novel Class 100 cleanroom system that breaks through the traditional structure, achieving Class 100 cleanroom functionality without a raised floor through the following technological innovations. For example... Figures 1-3 As shown, a Class 100 cleanroom structural system without a raised floor includes a cleanroom room 100, which has cleanroom wall panels 101, return air ducts 102, an upper technical mezzanine 103, a fresh air system 104, a suspended ceiling 105, air filters (FFUs) 106, and return air vents 107. The suspended ceiling 105 is fixedly installed below the ceiling of the cleanroom room 100. The FFUs 106 are installed within the suspended ceiling 105. The suspended ceiling 105 does not contact the perimeter of the room, and the space between the suspended ceiling 105 and the ceiling forms the upper technical mezzanine 103. The fresh air system 104 is installed within the upper technical mezzanine 103. Vertical cleanroom wall panels 101 are installed around the perimeter of the cleanroom room, with their tops connected to the suspended ceiling 105. Return air vents 107 are installed at the bottom of the vertical cleanroom wall panels 101. A second layer of vertical cleanroom wall panels is fixedly installed around the perimeter of the cleanroom room 100, with its top connected to the ceiling and its bottom connected to the floor. The space between the second layer of vertical clean wall panel and the inner vertical clean wall panel 101 forms a return air duct 102.

[0027] In practice, the FFU106 has a filtration efficiency superior to U16@99.9995%0.12μm, occupies more than 80% of the ceiling area, and is evenly distributed near the geometric center of the ceiling.

[0028] In practice, the fresh air system 104 is provided by an additional fresh air unit, which prepares fresh air that meets the requirements of the cleanroom environment and then sends it into the upper technical interlayer 103.

[0029] In implementation of this application, the return air vent 107 is in the form of a primary filter screen, with its bottom edge 0.2m from the ground, and is evenly distributed at the bottom of all return air ducts 102.

[0030] In implementation of this application, return air ducts 102 are provided around the cleanroom room 100. When the room span is too large, a return air duct 102 is added in the middle using a cleanroom wall panel 101. The newly added return air duct does not contact the vertical cleanroom wall panel.

[0031] This utility model has the following advantages:

[0032] 1. Saves cleanroom floor height space, reducing civil engineering renovation costs;

[0033] 2. Achieve an unobstructed surface to allow passage for automated equipment such as AGVs;

[0034] 3. Shorter renovation cycle, suitable for renovation of existing buildings;

[0035] 4. Reduce cleanroom space, lower cleanroom energy consumption, and improve maintenance convenience.

[0036] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A raised floorless clean room structure system, characterized by; The clean room (100) comprises clean wallboards (101), return air aisles (102), upper technical aisles (103), fresh air systems (104), suspended ceilings (105), FFUs (106) and return air inlets (107). The suspended ceiling (105) is fixedly installed below the ceiling of the clean room (100), the FFU (106) is installed in the range of the suspended ceiling (105), the suspended ceiling (105) is not in contact with the periphery of the room, and the space between the suspended ceiling (105) and the ceiling forms the upper technical aisle (103). The fresh air system (104) is installed in the upper technical aisle (103). The clean room is provided with vertical clean wallboards (101) around the periphery, the top end of the vertical clean wallboard (101) is connected with the suspended ceiling (105), and the bottom end of the vertical clean wallboard (101) is provided with a return air inlet (107). The clean room (100) is provided with a second layer of vertical clean wallboards fixedly installed around the periphery, the top end of the second layer of vertical clean wallboards is connected with the ceiling, and the bottom end of the second layer of vertical clean wallboards is connected with the floor; the space between the second layer of vertical clean wallboards and the inner vertical clean wallboards (101) forms the return air aisle (102).

2. The structure system of a clean room without raised floor according to claim 1, wherein; The FFU (106) has a filtering efficiency of U16@99.9995% 0.12 microns, the proportion of the FFU (106) in the area of the suspended ceiling (105) is more than 80%, and the FFU (106) is uniformly arranged near the geometric center of the suspended ceiling.

3. The raised floorless cleanroom structure system of claim 1, wherein; The fresh air system (104) is provided by an additional fresh air unit, and the prepared fresh air meeting the requirements of the clean room environment is sent into the upper technical aisle (103).

4. The raised floorless cleanroom structure system of claim 1, wherein; The return air inlet (107) is in the form of an initial filter screen, the bottom edge is 0.2m away from the floor, and the return air inlet (107) is uniformly arranged at the bottom of all return air aisles (102).

5. The raised floorless cleanroom structure system of claim 1, wherein; The clean room (100) is provided with return air aisles (102) around the periphery, when the span of the room is too large, clean wallboards (101) are added in the middle to increase the return air aisles (102); the newly added return air aisles are not in contact with the vertical clean wallboards.

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