Vacuum induction melting furnace for producing oxygen-free copper plate

Abstract

The utility model relates to a vacuum induction melting furnace used for producing an oxygen-free copper plate, which comprises a furnace body mechanism used for heat preservation and a vacuumizing element connected in the furnace body mechanism, and a melting mechanism used for melting metal materials is arranged in the furnace body mechanism. An adjusting mechanism used for adjusting the angle of the smelting mechanism and a feeding mechanism used for feeding the smelting mechanism are arranged outside the furnace body mechanism, and the feeding mechanism is provided with a plurality of stations used for feeding; due to the fact that the feeding mechanism is provided with a plurality of discharging stations, any station is in the discharging process, and the other two stations are used for material preparation. And after one station finishes discharging, the three stations are driven to rotate at the same time, so that the station with prepared materials can continue discharging.

Description

Technical Field

[0001] This utility model relates to the field of smelting equipment technology, specifically to a vacuum induction smelting furnace for producing oxygen-free copper plates. Background Technology

[0002] High-performance microalloyed oxygen-free copper plates for sputtering target cooling backplates are core materials specifically designed for high-end coating processes in semiconductors, display panels, and other industries. Their core function is to provide efficient heat dissipation support for magnetron sputtering targets, while also possessing ultra-high thermal conductivity, low gas content, excellent high-temperature strength, and uniform microstructure. This material uses oxygen-free copper (OFC) as a matrix, and by adding trace amounts of alloying elements such as chromium, zirconium, and silver, grain boundary strengthening and recrystallization temperature are achieved. This maintains structural stability under high-temperature sputtering conditions and prevents interface delamination between the target and backplate due to differences in thermal expansion.

[0003] The vacuum induction melting furnace is the core equipment for the preparation of this material, and its key applications are reflected in three aspects: First, the vacuum environment can eliminate gaseous inclusions such as oxygen and hydrogen during the melting process, ensuring the purity and oxygen content of the material; second, the high-frequency electromagnetic field can achieve precise melting and mixing of the copper matrix and trace additives, solving the problem of easy segregation in traditional melting, and making the uniformity of alloy element distribution reach the micron level; finally, the vacuum casting process can produce ingots with low residual stress, providing high-quality billets for subsequent hot rolling, cold rolling and heat treatment processes.

[0004] The authorization announcement number CN217979774U discloses a high-precision brass sheet and strip billet melting device. According to its instruction manual and drawings, the device features a cooling water tank for rapid cooling of exhaust gas. The heat exchange coil inside the cooling water tank increases the contact time between the exhaust gas and the cooling water tank, thereby improving the cooling effect. The liquid inside the cooling water tank can be used for other purposes to utilize waste heat after absorbing heat.

[0005] However, this smelting equipment still has some inconveniences in the production process: 1. How to efficiently put the raw materials to be smelted into the furnace is one of the problems that needs to be considered; 2. How to better control the rotation angle of the crucible after smelting is also one of the problems that needs to be considered. Summary of the Invention

[0006] This invention addresses the problems existing in the production process of smelting furnaces by proposing a vacuum induction smelting furnace for producing oxygen-free copper plates. Because the feeding mechanism has multiple unloading stations, while one station is unloading, the other two stations are preparing materials. When one station finishes unloading, it drives all three stations to rotate simultaneously, allowing the stations that have already prepared materials to continue unloading.

[0007] The objective of this invention is achieved through the following technical solution: a vacuum induction melting furnace for producing oxygen-free copper plates, comprising a furnace body structure for heat preservation, a vacuum pumping element connected inside the furnace body structure, a melting mechanism for melting metal materials inside the furnace body structure, an adjustment mechanism for adjusting the angle of the melting mechanism and a feeding mechanism for feeding materials onto the melting mechanism outside the furnace body structure, the feeding mechanism having multiple feeding stations.

[0008] Preferably, the furnace body structure includes a smelting furnace body, a furnace cover, a feeding channel, a sealing cover, and a furnace support frame. The top of the smelting furnace body is rotatably connected to the furnace cover. The surface of the furnace cover is provided with a feeding channel, and the surface of the feeding channel is provided with a sealing cover that can open and close automatically. The furnace support frame is connected to the side wall of the smelting furnace body.

[0009] Preferably, the interior of the smelting furnace body and the furnace cover is provided with a cooling water channel, and the surface of the furnace cover is provided with a first drive motor, the end of the shaft of the first drive motor is provided with a drive rod connected to the sealing cover plate.

[0010] Preferably, the smelting mechanism includes a smelting crucible, a medium-frequency induction heating coil, and a crucible support plate. The medium-frequency induction heating coil is provided on the side of the smelting crucible. Each crucible support plate has several support columns on one side. Each support column is connected to the side of the smelting crucible, avoiding the medium-frequency induction heating coil. The other end of each crucible support plate is connected to an adjustment mechanism.

[0011] Preferably, the adjustment mechanism includes a support plate drive shaft, an adjustment support frame, a second drive motor, a gearbox, a transmission belt, and a transmission chain. The furnace support frame has a rotatable support plate drive shaft inside, which passes through the furnace body and connects to the crucible support plate. The adjustment support frame has a gearbox and a second drive motor inside, which are connected to the gearbox via a transmission belt. The end of the output shaft of the gearbox is connected to one end of the support plate drive shaft via a transmission chain.

[0012] Preferably, the feeding mechanism includes a hydraulic cylinder, a first adjusting support arm, a third drive motor, a support arm bushing, a second adjusting support arm, and a lifting assembly. The piston rod end of the hydraulic cylinder is connected to the first adjusting support arm, the end of the first adjusting support arm is connected to the third drive motor, the shaft end of the third drive motor is connected to the support arm bushing, a plurality of second adjusting support arms are connected to the side of the support arm bushing, and the end of the second adjusting support arm is connected to the lifting assembly.

[0013] Preferably, the lifting and lowering assembly includes a fourth drive motor, a cable reel, a lifting and lowering sleeve, a material placement bucket, and a discharge baffle. The bottom of the second adjusting support arm is also provided with a lifting and lowering sleeve, and the top of the second adjusting support arm is provided with a cable reel. The cable reel is driven by the fourth drive motor. The suspension cable inside the cable reel passes through the lifting and lowering sleeve, and the end of the suspension cable is connected to the material placement bucket. The end of the material placement bucket is rotatably connected to several discharge baffles, and the surface of each discharge baffle is connected with a binding and limiting groove.

[0014] Preferably, the vacuum pump is a vacuum pump, and a vacuum pipeline is provided on the side of the smelting furnace body. The vacuum pump is connected to the vacuum pipeline. This arrangement is to create a vacuum environment inside the smelting furnace body to reduce metal oxidation and gas pollution.

[0015] Compared with the prior art, this utility model has the following advantages: 1. Since the feeding mechanism has multiple unloading stations, during the unloading process of any one of the lifting components on the second adjusting support arm, the lifting components on the other two second adjusting support arms can prepare materials. When one lifting component finishes unloading, it drives the three second adjusting support arms to rotate simultaneously, allowing the lifting components that have already prepared materials to continue unloading, thereby increasing the feeding speed inside the melting crucible; 2. Since the temperature inside the melting furnace body is high, using a transmission chain to adjust the angle of the crucible support plate can slow down the temperature conduction speed, avoid overheating of the gearbox and the second drive motor in the adjustment mechanism, and ensure their service life. Attached Figure Description

[0016] Figure 1 This is a perspective view of the present utility model;

[0017] Figure 2 This is a cross-sectional view of the present invention;

[0018] Figure 3 This is a partial perspective view of the present invention;

[0019] Figure 4 For the present utility model in Figure 1 Enlarged view of region A in the image;

[0020] Figure 5 For the present utility model in Figure 2 Enlarged view of region B in the image;

[0021] Figure 6 This is a perspective view of the feeding mechanism of this utility model;

[0022] Figure 7 This is a partial perspective view of the feeding mechanism of this utility model.

[0023] The diagram shows: 1. Furnace body mechanism; 11. Furnace body; 12. Furnace top cover; 13. Sealing cover plate; 14. Furnace support frame; 121. Feeding channel; 15. Cooling water channel; 16. First drive motor; 17. Drive rod; 111. Vacuum pumping pipeline; 2. Vacuum pumping element; 3. Smelting mechanism; 31. Smelting crucible; 32. Medium frequency induction heating coil; 33. Crucible support plate; 34. Support column; 4. Adjustment mechanism; 41. Support plate drive shaft; 42. Adjustment... 43. Section support frame; 44. Gearbox; 45. Second drive motor; 46. Transmission belt; 47. Transmission chain; 58. Feeding mechanism; 59. Hydraulic cylinder; 50. First adjusting support arm; 51. Third drive motor; 52. Support arm bushing; 53. Second adjusting support arm; 54. Lifting and lowering assembly; 55. Lifting and lowering sleeve; 56. Winding reel; 57. Lifting line; 58. Material placement bucket; 59. Fourth drive motor; 50. Discharge baffle; 51. Binding and limiting groove. Detailed Implementation

[0024] The present invention will be further described below with reference to the embodiments shown in the accompanying drawings:

[0025] like Figures 1 to 3 As shown, a vacuum induction melting furnace for producing oxygen-free copper plates includes a furnace body mechanism 1 for heat preservation, a vacuum pump 2 connected inside the furnace body mechanism 1, and a vacuum pipeline 111 on the side of the furnace body 11, with the vacuum pump connected to the vacuum pipeline 111. A melting mechanism 3 for melting metal materials is provided inside the furnace body mechanism 1.

[0026] The furnace body mechanism 1 includes a furnace body 11, a furnace cover 12, a feeding channel 121, a sealing cover 13, and a furnace support frame 14. The furnace cover 12 is rotatably connected to the top of the furnace body 11. The surface of the furnace cover 12 is provided with the feeding channel 121, and the surface of the feeding channel 121 is provided with a sealing cover 13 that can open and close automatically. The furnace support frame 14 is connected to the side wall of the furnace body 11. The interior of the furnace body 11 and the furnace cover is provided with a cooling water channel 15 for cooling. The surface of the furnace cover is provided with a first drive motor 16, and the end of the shaft of the first drive motor 16 is provided with a drive rod 17 connected to the sealing cover 13.

[0027] The furnace cover 12 can rotate relative to the top of the furnace body 11 to facilitate subsequent maintenance operations. The melting mechanism 3 can melt copper raw materials, and the furnace body 11 plays a role in heat preservation during the melting process. To prevent the outer surface temperature of the entire furnace body 11 and the furnace cover 12 from becoming too high, cooling is provided through the cooling water channel 15, so that the surface temperature of the furnace body mechanism 1 is usually controlled between 50°C and 80°C. This range is to ensure operational safety (avoiding burns) and equipment stability.

[0028] To facilitate efficient feeding, the shaft of the first drive motor 16 can drive the sealing cover plate 13 to rotate via the drive rod 17, avoiding manual operation and improving the automation level of the production process.

[0029] In this embodiment, please continue to refer to Figure 5 The melting mechanism 3 includes a melting crucible 31, a medium-frequency induction heating coil 32, and a crucible support plate 33. The medium-frequency induction heating coil 32 is provided on the side of the melting crucible 31. Each crucible support plate 33 has several support columns 34 on one side. Each support column 34 is connected to the side of the melting crucible 31, avoiding the medium-frequency induction heating coil 32. The other end of each crucible support plate 33 is connected to the adjustment mechanism 4.

[0030] Before melting, the vacuum element 2 extracts air from the melting furnace body 11, creating a vacuum environment to reduce metal oxidation and gas contamination. A vacuum gauge inside the furnace cover 12 monitors the vacuum level in real time, ensuring it reaches and remains within the set range. When the inductor is powered on, the induced magnetic field generated by the medium-frequency induction heating coil 32 induces eddy currents within the metal. The power is adjusted according to the type of metal and melting requirements. This ensures that the copper material inside the melting crucible 31 is heated uniformly and melted into a liquid. During the melting process, the copper material gradually melts as the temperature rises. A temperature sensor monitors the melting temperature inside the crucible 31 to ensure it remains within the set range. The eddy currents generated by the induced magnetic field of the medium-frequency induction heating coil 32 create a stirring effect inside the metal, promoting uniform melting and composition homogenization. Melting in this vacuum environment allows gases (such as hydrogen and oxygen) to escape from the metal, increasing its purity and achieving the required performance. Of course, alloying elements also need to be added to the molten metal to adjust the composition until the structure can be maintained under high-temperature sputtering conditions.

[0031] In this embodiment, please refer to Figure 1 , Figure 2 and Figure 4 The furnace body mechanism 1 is provided with an adjustment mechanism 4 for adjusting the angle of the melting mechanism 3.

[0032] The adjustment mechanism 4 includes a support plate drive shaft 41, an adjustment support frame 42, a second drive motor 44, a gearbox 43, a transmission belt 45, and a transmission chain 46. The furnace body support frame 14 has a rotatable support plate drive shaft 41 inside. The support plate drive shaft 41 passes through the smelting furnace body 11 and is connected to the crucible support plate 33. The adjustment support frame 42 has a gearbox 43 and a second drive motor 44 inside. The second drive motor 44 and the gearbox 43 are connected by a transmission belt 45. The end of the output shaft of the gearbox 43 is connected to one end of the support plate drive shaft 41 by a transmission chain 46.

[0033] During rotation, the shaft of the second drive motor 44 drives the gearbox 43 via the transmission belt 45. The output shaft of the gearbox 43 drives the support plate drive shaft 41 to rotate via the transmission chain 46. Simultaneously, the support plate drive shaft 41 rotates, causing the crucible support plate 33 to move. Because the temperature inside the melting furnace body 11 is high, adjusting the angle of the crucible support plate 33 in this way slows down the rate of heat conduction, preventing overheating of the gearbox 43 and the second drive motor 44 in the adjustment mechanism 4, thus ensuring their service life.

[0034] In this embodiment, please refer to Figure 6 and Figure 7 The furnace body mechanism 1 is provided with a feeding mechanism 5 for feeding the smelting mechanism 3. The feeding mechanism 5 has multiple feeding stations.

[0035] The feeding mechanism 5 includes a hydraulic cylinder 51, a first adjusting support arm 52, a third drive motor 53, a support arm bushing 54, a second adjusting support arm 55, and a lifting assembly 56. The piston rod end of the hydraulic cylinder 51 is connected to the first adjusting support arm 52, the end of the first adjusting support arm 52 is connected to the third drive motor 53, the shaft end of the third drive motor 53 is connected to the support arm bushing 54, three second adjusting support arms 55 are connected to the side of the support arm bushing 54, and the end of the second adjusting support arm 55 is connected to the lifting assembly 56.

[0036] The height change of the piston rod of the hydraulic cylinder 51 can alter the height of the first adjusting support arm 52, facilitating height adjustment during the material feeding process and ensuring that the feeding section of the subsequent lifting assembly 56 is aligned with the inside of the feeding channel 121. While one lifting assembly 56 on the second adjusting support arm 55 is feeding, the other two lifting assemblies 56 on the other two second adjusting support arms 55 can prepare material. After one lifting assembly 56 finishes feeding, the shaft of the third drive motor 53 drives all three second adjusting support arms 55 to rotate simultaneously via the support arm bushing 54, allowing the prepared lifting assemblies 56 to continue feeding, thereby increasing the feeding speed into the melting crucible 31.

[0037] The lifting and lowering assembly 56 includes a fourth drive motor 565, a winding reel 562, a lifting and lowering sleeve 561, a material placement bin 564, and a discharge baffle 566. The bottom of the second adjusting support arm 55 is also provided with a lifting and lowering sleeve 561, and the top of the second adjusting support arm 55 is provided with a winding reel 562. The winding reel 562 is driven by the fourth drive motor 565. The suspension wire 563 inside the winding reel 562 passes through the lifting and lowering sleeve 561, and the end of the suspension wire 563 is connected to the material placement bin 564. The end of the material placement bin 564 is rotatably connected to several discharge baffles 566, and the surface of each discharge baffle 566 is connected with a binding and limiting groove 567.

[0038] During the material preparation process, copper raw materials can be placed inside the material placement bucket 564, and then metal wires are used to bind them inside the binding limit groove 567. These binding wires are made of the same material as the raw materials inside the material placement bucket 564. Then, the winding device 562 is started to allow the lifting wire 563 to carry the entire material placement bucket 564 up into the material placement bucket 564.

[0039] When feeding material into the melting crucible 31, the winding reel 562 is activated, causing the lifting wire 563 to carry the entire material placement bucket 564 down through the top of the melting crucible 31. The bound metal wire will be heated and break, and each discharge baffle 566 will no longer be able to limit the material inside the material placement bucket 564, and the material will fall into the melting crucible 31.

[0040] Working principle and usage of this utility model:

[0041] First, the shaft of the first drive motor 16 can drive the sealing cover plate 13 to rotate through the drive rod 17. The winding reel 562 is started, allowing the hanging line 563 to carry the entire material placement bucket 564 through and down to the top of the melting crucible 31 until the metal wire tied on the discharge baffle 566 is heated and breaks. Then each discharge baffle 566 can no longer limit the raw materials inside the material placement bucket 564, and these raw materials will fall into the interior of the melting crucible 31.

[0042] When the power supply to the inductor is turned on, the induced magnetic field generated by the medium-frequency induction heating coil 32 induces eddy currents inside the metal. The power supply is adjusted according to the type of metal and the melting requirements. This ensures that the copper material inside the melting crucible 31 is heated evenly and melted into a liquid.

[0043] The rotating shaft of the second drive motor 44 drives the gearbox 43 via the transmission belt 45 during rotation. The output shaft of the gearbox 43 drives the support plate drive shaft 41 to rotate via the transmission chain 46. During the rotation of the support plate drive shaft 41, the crucible support plate 33 is also moved, so that the molten metal inside the melting crucible 31 is poured into the corresponding mold, which can produce a high-performance microalloyed oxygen-free copper plate.

[0044] The specific embodiments described herein are merely illustrative examples illustrating the spirit of this utility model. Those skilled in the art to which this utility model pertains may make various modifications or additions to the described specific embodiments or use similar methods to replace them, without departing from the spirit of this utility model or exceeding the scope defined by the appended claims.

Claims

1. A vacuum induction melting furnace for producing oxygen-free copper plate, comprising a furnace body mechanism (1) for heat preservation, a vacuum extraction element (2) connected to the inside of the furnace body mechanism (1), characterized in that, The inside of the furnace body mechanism (1) is provided with a smelting mechanism (3) for smelting metal materials, the outside of the furnace body mechanism (1) is provided with an adjusting mechanism (4) for adjusting the angle of the smelting mechanism (3) and an upper feeding mechanism (5) for feeding the smelting mechanism (3), and the upper feeding mechanism (5) has a plurality of workstations for feeding.

2. The vacuum induction melting furnace for producing oxygen-free copper plate according to claim 1, characterized by, The furnace body mechanism (1) comprises a smelting furnace body (11), a smelting furnace upper cover (12), a feeding channel (121), a sealing cover plate (13) and a furnace body support frame (14), the top of the smelting furnace body (11) is rotatably connected with the smelting furnace upper cover (12), the surface of the smelting furnace upper cover (12) is provided with the feeding channel (121), the surface of the feeding channel (121) is provided with the sealing cover plate (13) which can be automatically opened and closed, and the sidewall of the smelting furnace body (11) is connected with the furnace body support frame (14).

3. The vacuum induction melting furnace for producing oxygen-free copper plate according to claim 2, characterized by, The inside of the smelting furnace body (11) and the smelting furnace upper cover is provided with a cooling waterway (15) for cooling, the surface of the smelting furnace upper cover is provided with a first driving motor (16), and the rotating shaft end of the first driving motor (16) is provided with a driving rod (17) connected with the sealing cover plate (13).

4. The vacuum induction melting furnace for producing oxygen-free copper plate according to claim 3, characterized by, The smelting mechanism (3) comprises a smelting crucible (31), a medium-frequency induction heating coil (32) and a crucible support plate (33), the side of the smelting crucible (31) is provided with the medium-frequency induction heating coil (32), one side of each of the crucible support plates (33) is provided with a plurality of support columns (34), each of the support columns (34) is connected to the side of the smelting crucible (31) away from the medium-frequency induction heating coil (32), and the other end of each of the crucible support plates (33) is connected to the adjusting mechanism (4).

5. The vacuum induction melting furnace for producing oxygen-free copper plate according to claim 4, characterized by, The adjusting mechanism (4) comprises a support plate driving shaft (41), an adjusting support frame (42), a second driving motor (44), a gearbox (43), a transmission belt (45) and a transmission chain (46), the inside of the furnace body support frame (14) is provided with the rotatable support plate driving shaft (41), the support plate driving shaft (41) passes through the smelting furnace body (11) and is connected to the crucible support plate (33), the inside of the adjusting support frame (42) is provided with the gearbox (43) and the second driving motor (44), the second driving motor (44) and the gearbox (43) are transmissionally connected through the transmission belt (45), and the end of the output shaft of the gearbox (43) and one end of the support plate driving shaft (41) are connected through the transmission chain (46).

6. The vacuum induction melting furnace for producing oxygen-free copper plate according to claim 5, wherein The feeding mechanism (5) comprises a hydraulic oil cylinder (51), a first adjusting support arm (52), a third driving motor (53), a support arm shaft sleeve (54), a second adjusting support arm (55) and a lifting and lowering assembly (56), the piston rod end of the hydraulic oil cylinder (51) is connected with the first adjusting support arm (52), the end of the first adjusting support arm (52) is connected with the third driving motor (53), the rotating shaft end of the third driving motor (53) is connected with the support arm shaft sleeve (54), the side of the support arm shaft sleeve (54) is connected with a plurality of second adjusting support arms (55), and the end of the second adjusting support arm (55) is connected with the lifting and lowering assembly (56).

7. The vacuum induction melting furnace for producing oxygen-free copper plate according to claim 6, wherein The lifting and lowering assembly (56) comprises a fourth driving motor (565), a wire winder (562), a lifting sleeve (561), a material placing barrel (564) and a discharging baffle (566), the bottom of the second adjusting support arm (55) is additionally provided with the lifting sleeve (561), the top of the second adjusting support arm (55) is provided with the wire winder (562), the wire winder (562) is driven by the fourth driving motor (565), the lifting line (563) in the wire winder (562) passes through the lifting sleeve (561), and the end of the lifting line (563) is connected with the material placing barrel (564); the end of the material placing barrel (564) is rotatably connected with a plurality of discharging baffles (566), and the surface of each discharging baffle (566) is connected with a binding limiting groove (567).

8. The vacuum induction melting furnace for producing oxygen-free copper plate according to claim 2, wherein The vacuum pump is arranged on the side of the smelting furnace body (11).

Images